File:SPIMM purpose.png
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SPIMM_purpose.png (472 × 349 pixels, file size: 10 KB, MIME type: image/png)
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Summary
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| Description |
English: This picture describes the purpose of using SPIMM. Ref.: F. T. Chen et al., "Sidewall Profile Inclination Modulation Mask (SPIMM): Modification of an Attenuated Phase Shift Mask for Single-Exposure Double and Multiple Patterning", Proc. SPIE vol. 8683, 868311 (2013). |
| Date |
1/10/2014 |
| Source | power point drawing |
| Author | Guiding light |
Licensing
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Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
|
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license.
Attribution: Guiding light at en.wikipedia
- You are free:
- to share – to copy, distribute and transmit the work
- to remix – to adapt the work
- Under the following conditions:
- attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
- share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
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Original upload log
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The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2015-05-23 14:23 | 472×349× (10503 bytes) | Guiding light | Updated drawing from reference F. T. Chen et al., "Sidewall Profile Inclination Modulation Mask (SPIMM): Modification of an Attenuated Phase Shift Mask for Single-Exposure Double and Multiple Patterning", Proc. 8683, 868311 (2013). |
| 2014-01-10 05:42 | 633×492× (17542 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 06:16, 13 March 2016 | | 472 × 349 (10 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 06:16, 13 March 2016 |  | 633 × 492 (17 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-01-10 05:42:45 by Guiding light | |
| 10:15, 28 February 2016 |  | 472 × 349 (10 KB) | FastilyClone (talk | contribs) | Transferred from enwp |
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