"LSTM-Based Model Predictive Control of Piezoelectric Motion Stages for ..."

Jingyang Yan et al. (2023)

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DOI: 10.1109/TIE.2022.3192667

access: closed

type: Journal Article

metadata version: 2023-02-10

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Jingyang Yan, Peter DiMeo, Lu Sun, Xian Du:
LSTM-Based Model Predictive Control of Piezoelectric Motion Stages for High-Speed Autofocus. IEEE Trans. Ind. Electron. 70(6): 6209-6218 (2023)

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