"Pulsed laser annealing: A scalable and practical technology for monolithic ..."

Bipin Rajendran et al. (2013)

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DOI: 10.1109/3DIC.2013.6702386

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-29

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Bipin Rajendran, Albert K. Henning, Brian Cronquist, Zvi Or-Bach:
Pulsed laser annealing: A scalable and practical technology for monolithic 3D IC. 3DIC 2013: 1-5

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