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Extraction of material parameters of a bi-layer structure using Terahertz time-domain spectroscopy

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Abstract

For a bi-layer structure consisting of a film deposited on a substrate, a new extraction method is proposed using which we can extract both the material parameters of the film and the thickness of the substrate from the measured Terahertz transmission through it, so long as the complex refractive index of the substrate is known beforehand. This method is applicable to a range of refractive indices of the film less than the refractive index of the substrate and a very wide range of layer thicknesses from 20 μm to at least 200 μm. It is very useful in some cases where the thickness of the substrate cannot be determined using conventional methods such as a Vernier caliper or micrometer screw.

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Authors and Affiliations

  1. Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, 210093, China

    BiaoBing Jin, CaiHong Zhang, JinLong Ma, Jian Chen & PeiHeng Wu

  2. Purple Mountain Observatory, Chinese Academy of Sciences, Nanjing, 210008, China

    XiaoFang Shen & ShengCai Shi

  3. Graduate School of Chinese Academy of Sciences, Chinese Academy of Sciences, Beijing, 100086, China

    XiaoFang Shen

Authors
  1. BiaoBing Jin
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  2. CaiHong Zhang
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  3. XiaoFang Shen
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  4. JinLong Ma
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  5. Jian Chen
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  6. ShengCai Shi
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  7. PeiHeng Wu
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Correspondence to BiaoBing Jin.

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Jin, B., Zhang, C., Shen, X. et al. Extraction of material parameters of a bi-layer structure using Terahertz time-domain spectroscopy. Sci. China Inf. Sci. 57, 1–10 (2014). https://doi.org/10.1007/s11432-014-5136-2

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  • DOI: https://doi.org/10.1007/s11432-014-5136-2

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