Electrical and mechanical properties of Electromagnetic (EM) micro-actuator with silicon membrane... more Electrical and mechanical properties of Electromagnetic (EM) micro-actuator with silicon membrane has been characterized. The study is aimed to see the effect of the geometry and the structure of the actuator system on the actuating performance of the silicon-based membrane for fluid injection purposes. The actuator system consists of two main parts, namely, the electromagnetic part that generates an electromagnetic field and the magneto-mechanical part that enable the membrane deformation depending on the magnetic force on the silicon membrane. A standard MEMS process was implemented to fabricate the actuator system with an additional bonding between the actuator part and microfluidic part to complete the system for fluid injection purpose. The simulation using COMSOL Multiphysics was done to see the generation of the magnetic force and to see its effect on the membrane deformation. It was found that the height of the generated magnetic force increases significantly with the applie...
In this study, we present a comprehensive review of polymer-based microelectromechanical systems ... more In this study, we present a comprehensive review of polymer-based microelectromechanical systems (MEMS) electromagnetic (EM) actuators and their implementation in the biomedical engineering field. The purpose of this review is to provide a comprehensive summary on the latest development of electromagnetically driven microactuators for biomedical application that is focused on the movable structure development made of polymers. The discussion does not only focus on the polymeric material part itself, but also covers the basic mechanism of the mechanical actuation, the state of the art of the membrane development and its application. In this review, a clear description about the scheme used to drive the micro-actuators, the concept of mechanical deformation of the movable magnetic membrane and its interaction with actuator system are described in detail. Some comparisons are made to scrutinize the advantages and disadvantages of electromagnetic MEMS actuator performance. The previous ...
Perovskite solar cells (PSC) are currently exhibiting reproducible high efficiency, low-cost manu... more Perovskite solar cells (PSC) are currently exhibiting reproducible high efficiency, low-cost manufacturing, and scalable electron transport layers (ETL), which are becoming increasingly important. The application of photonic crystals (PC) on solar cells has been proven to enhance light harvesting and lead solar cells to adjust the propagation and distribution of photons. In this paper, the optimization of a two-dimensional nanodisk PC introduced in ETL with an organic-inorganic lead-iodide perovskite (methylammonium lead-iodide, MAPbI3) as the absorber layer was studied. A finite-difference time-domain (FDTD) simulation was used to evaluate the optical performance of PSC with various lattice constants and a radius of nanodisk photonic crystals. According to the simulation, the optimum lattice constant and PC radius applied to ETL are 500 nm and 225 nm, respectively. This optimum design enhances PSC absorption performance by more than 94% of incident light.
IOP Conference Series: Materials Science and Engineering, 2017
In this work, optical sensing performance of multimode polymer optical fiber coated with ZnO towa... more In this work, optical sensing performance of multimode polymer optical fiber coated with ZnO towards methanol vapour with different concentrations is studied. The etching process of the POF was carried out using chemical etching method. ZnO was synthesized with sol-gel method to obtain the sensitive material coating. The etched optical fiber was then dip-coated with ZnO and dried at 70oC to enhance the binding of the materials and to remove organic residue. Scanning Electron Microscope (SEM), and X-Ray poer Difraction (XRD) analyses were performed to characterize the ZnO layer. The measurements of optical performance were taken using a spectrophotometer in the optical wavelength in the range of 500-8000nm. The absorbance response of the ZnO coated etched fiber reduced proportionally, upon exposure to methanol vapour with concentration in the range of 5%-50%.
In this paper, the optimization of a new design of active microfluidic mixer incorporating microp... more In this paper, the optimization of a new design of active microfluidic mixer incorporating micropillar for accelerating the mixing of fluids was performed. The studied microfluidic mixer consists of the microfluidic, mechanical, and electromagnetic parts. The finite element analysis is used to study the effect of input channel angle, micropillar's radius and spacing, and shape of membrane on the performance of mixer. In particular, the mixing flow rate, membrane deflection and micropillar swivel or bending were evaluated. The results show that the flow rate in the range of 3.78-3.88 ll/s which is almost two times of the input flow rate was obtained. The results also show that the deflection height ranging from 40 to 170 lm, micropillar swivel from 7° to 20° were obtained. Furthermore, from the comparison among the membrane shapes, it revealed that the membrane in circular shape generates higher deflection and swivel than the other membranes in square and rectangle shapes due to the uniform tensile stress distribution.
Acid rain event is very dangerous for human activity especially in five cities of
Indonesia. Here... more Acid rain event is very dangerous for human activity especially in five cities of Indonesia. Here, acid rain has consistently attacked over five cities in Indonesia such as Jakarta, Manado, Pontianak, Bogor, and Surabaya with average pH level 4.22 to 6.34 in July 2010. Thus, in this study aim to develop Fiber Optic Chemical Sensor (FOCS) for monitoring acid rain level over five cities in Indonesia. The development of FOCS is used evanescent wave type and photodiode FDS10X10 to monitor acid rain quality. In this study, the Optical Power Meter (OPM) is used as a validator equipment to capture FOCS capability. The result shows absorption loss was successfully detected using OPM and photodiode FDS10X10 in FOCS evanescent wave type. Here, the maximum value ammonia mass over acid rain level has successfully detected with value range 7.12 dBm to 8.34 dBm and 7.51 dBm to 7.71 dBm using photodiode FDS10X10 and OPM, respectively. The good result over validation process shows FOCS has successful working with strong correlation 0.78 to monitor acid rain level.
In this study, aimed to develop low-cost sensor based on fiber optic to assess ammonia index for ... more In this study, aimed to develop low-cost sensor based on fiber optic to assess ammonia index for fishpond application. Here, the simple design was proposed by using Evanescent wave type to assess ammonia index during acid rain event. The experiment result showed maximum absorption loss with variation ammonia mass 1~5% with wavelength 1310 nm from Optical Light Source (OLS) is 27.56 dBm while Optical Spectrum Analyzer (OSA) reached 25.86 dBm. We had calculated RMSE, MAE, and Percent Error (PE) value both of the device (Low-cost fiber optic chemical sensor and OSA) are 1.692%, 0.916%, and 98.833% respectively. A good result from low cost fiber optic chemical sensor has successful developed with lowest production less than 1,455 USD per-year.
Electrical and mechanical properties of Electromagnetic (EM) micro-actuator with silicon membrane... more Electrical and mechanical properties of Electromagnetic (EM) micro-actuator with silicon membrane has been characterized. The study is aimed to see the effect of the geometry and the structure of the actuator system on the actuating performance of the silicon-based membrane for fluid injection purposes. The actuator system consists of two main parts, namely, the electromagnetic part that generates an electromagnetic field and the magneto-mechanical part that enable the membrane deformation depending on the magnetic force on the silicon membrane. A standard MEMS process was implemented to fabricate the actuator system with an additional bonding between the actuator part and microfluidic part to complete the system for fluid injection purpose. The simulation using COMSOL Multiphysics was done to see the generation of the magnetic force and to see its effect on the membrane deformation. It was found that the height of the generated magnetic force increases significantly with the applied power. The measurement of the membrane deformation done at a 20-µm silicon membrane showed a maximum deflection of 4.6 µm. The measurement results of the electrical characteristic of the device were compared with the simulation to validate the analysis. This study is very important to get the general insight of the silicon-based actuator membrane capability for the fluidic injection system in lab-on-chip.
This study aims to determine (1) the value of light wavelengths yielding significant power losses... more This study aims to determine (1) the value of light wavelengths yielding significant power losses which cause potential fiber optic to be used as a sensor, (2) the optimal value of the cladding refractive index for fiber optic based sensor application (3) loss power of fiber optic based sensor as a function of ammonia concentration. The method used is a simulation method using software Lumerical MODE Solutions. The parameters used in the simulation include the values of source wavelength, diameter and length of cladding and the values of ammonia solution concentration from 0 to 30 %. The results of simulation are (1) the source light wavelength of 1550 nm causes significant power losses that can yield the potential fiber optic to be used as a sensor, (2) the optimal value of the cladding refractive index for sensor applications is when the price approaches the value of core refractive index and (3) the increase in ammonia concentration cause slightly increase in power loss. It can be concluded that the wavelength of 1550 nm has more significant power losses than that of 1310 nm therefore it more sensitive to the change of ammonia concentration.
In this work, optical sensing performance of multimode polymer optical fiber coated with ZnO towa... more In this work, optical sensing performance of multimode polymer optical fiber coated with ZnO towards methanol vapour with different concentrations is studied. The etching process of the POF was carried out using chemical etching method. ZnO was synthesized with sol-gel method to obtain the sensitive material coating. The etched optical fiber was then dip-coated with ZnO and dried at 70oC to enhance the binding of the materials and to remove organic residue. Scanning Electron Microscope (SEM), and X-Ray poer Difraction (XRD) analyses were performed to characterize the ZnO layer. The measurements of optical performance were taken using a spectrophotometer in the optical wavelength in the range of 500-8000nm. The absorbance response of the ZnO coated etched fiber reduced proportionally, upon exposure to methanol vapour with concentration in the range of 5%-50%.
The acid rain is an environmental disaster that it will be intimidates human life. The
developmen... more The acid rain is an environmental disaster that it will be intimidates human life. The development micro-ring resonator sensor created from SOI (Silicon on insulator) and it used to detect acid rain index. In this study, the LUMERICAL software was used to simulate SOI material micro-ring resonator. The result shows the optimum values of fixed parameters from ring resonator have dependent variable in gap width. The layers under ring resonator with silicone (Si) and wafer layer of silicone material (Si) were added to seen three conditions of capability model. Model – 3 is an additional of bottom layer that gives the significant effect on the factor of quality. The optimum value is a peak value that given by the FSR calculation. FSR = 0, it means that is not shows the light propagation in the ring resonator and none of the light coming out on the bus – line.
This paper discusses the application of Box-Behnken Design (BBD) to get a mathematical model for ... more This paper discusses the application of Box-Behnken Design (BBD) to get a mathematical model for chemical vapor liquid detection with the objective of optimizing the optical fiber optic sensor probe. The parameters of input process were considered as variables to create the output parameters (response) using Response Surface Methodology (RSM). Input parameters such as length of probe, diameter of probe, photo-initiator liquid, vacuum pressure of chamber and purity of liquid detector were processed with Box-Behnken design approach for making POF (plastic optical fiber) probe of chemical sensor. Design Expert software was used to design the experiments with randomized runs. The main aim is to create an equation model as a platform for the probe design of POF chemical vapors detection similar to acetone, ethanol and methanol liquid. The experimental data were processed by considering the input parameters. The contribution of this research is the mathematic equation model that applies the polynomial equation. The final result of the wavelength application was between five to be three wavelengths, 434.05 nm, 486.13 nm and 656.03 nm. These wavelengths are the significant result of optimization measured using three chemical vapors. The optimization process uses the analysis of variables (ANOVA) to produce the quadratic model equation.
Fabrication of fiber optic as fiber intrinsic sensor are investigated using Polymer optical fiber... more Fabrication of fiber optic as fiber intrinsic sensor are investigated using Polymer optical fiber (POF) with two variety of etching technique, namely chemical etching and mechanical etching. Chemical etching is prepared by using acetone as etchant solvent, and mechanical etching technique is prepared mechanically by using sand paper and aluminum oxide polishing film. The propagation loss occurred during the chemical etching process and mechanical measured using power meter and photo diode and resulting the acquisition data that is plotted in graph as finally, the etched fiber is used as intrinsic within chemical sensor based on evanescent field absorption. The etching experiment is prepared as initial step to determine the good performance of fabricated sensor in term of producing the good performance of intrinsic fiber sensor.
The purpose of this study was to design a model for microring resonators (MRRs) for biochemical d... more The purpose of this study was to design a model for microring resonators (MRRs) for biochemical detection. As a model, two types of MRRs were proposed. The Lumerical application software was used to optimize and analyze the design of MRRs device. Several parameters influencing the detection process were investigated, including the gap separation, the ring radius, the waveguide width and the etching depth dimension of MRRs. The results showed that these parameters highly influenced the condition of MRRs. The optimum parameters yielding optimum detection of biochemical are 4.5 um, 90 nm, 470 nm and 220 nm, corresponding to ring radius, separation gap, waveguide width and etching depth, respectively. The both models of MRRs proposed in this paper yield large values of FSR (free spectral range) and Q-factor therefore are suitable for biochemical detection.
In this paper we report an optimization of metal
quality of planar MEMS electromagnetic coil thro... more In this paper we report an optimization of metal quality of planar MEMS electromagnetic coil through thermal annealing process. The study aims to see the effects of annealing process on the quality of metal layer deposited on localized p-type silicon regions. Two annealing process parameters namely isothermal (annealing under time variations in constant temperature) and isochronal (annealing under temperature variations at constant time) were performed on metal contact on highly doped Si substrate and characterized using transfer length method method by measuring the specific contact resistance ρC of the metal traces. The measurement results showed that the annealing process have significant influence on physical and electrical characteristics of the metal layer. Analysis showed that the quality of metal layer was significantly improved through the annealing process after treatment at temperature variations between 425–550 °C. An optimum annealing at 525 °C for 15 min was observed and the contact resistance can be reduced significantly up to 400 %. The results also showed that the surface roughness improves while metal contact resistance decreases 40 times when the metal is annealed for more than 10 min. The planar coil structure was designed to reduce the device density of a compact magnetic micro-sensor system.
This paper reports a compact design of electromagnetically driven MEMS micro-actuator utilizing p... more This paper reports a compact design of electromagnetically driven MEMS micro-actuator utilizing planar electromagnetic coil on PCB (Printed Circuit Board). The micro-actuator device consists of an NdFeB permanent magnet, thin silicon membrane and planar micro-coil which fabricated using simple standard MEMS techniques with additional bonding step. Two planar coils designs including planar parallel and spiral coil structure with various coil geometry are chosen for the study. Analysis of the device involves the investigation of electromagnetic and mechanical properties using finite element analysis (FEA), the measurement of the membrane deflection and functionality test. The measurement results show that the thin silicon membrane is able to deform as much as 12.87 µm using planar spiral micro-coil. Reasonable match between simulation and measurement of about 82.5% has been revealed. The dynamic response test on actuator driven by parallel planar coil shows that silicon membrane effectively deformed in 40 s for an input electrical power of only 150 mW. It is also concluded that planar parallel coil is considered for the simple structure and easy fabrication of the actuator system. This study will provide important parameters for the development of compact and simple electromagnetic micro-actuator system for fluidic injection system in lab-on-chip.
A PDMS based flexible membrane made of polymer composite with embedded NdFeB magnetic particle ha... more A PDMS based flexible membrane made of polymer composite with embedded NdFeB magnetic particle has been developed using simple MEMS process. The magnetic polymer composite membrane was designed to simplify the physical design of electromagnetically driven actuator by combining the permanent magnet and the actuator membrane into an embedded system leading to a more compact and simple system. The magnetic polymer composite with NdFeB particles density up to 30vol% has been synthesized. Two actuator membrane designs including flat and embossed type have been fabricated and characterized to obtain the optimum actuator performance. The deformation capability of the membrane has also been tested and measured using laser displacement meter. The results show that the membrane with flat polymer composite design revealed the highest deflection of 9.16 m at 6vol% particle density while the embossed composite membrane design achieved the highest deflection of 8.14 m at 25vol% particle density for an applied magnetic field density of only 0.98 mT. The polymer composite flexible membrane actuator is designed as part of a compact micropump development for the fluidic injection system in a Lab-on-Chip.
This paper describes the design and fabrication of planar micro-coil on printed-circuit board (PC... more This paper describes the design and fabrication of planar micro-coil on printed-circuit board (PCB)for magnetic MEMS actuator. A simple and cost effective technique for the fabrication of planar micro-coil is presented. The design and analysis process have been carried out by using COMSOL Multiphysics 4.2. Three different coil dimensions such as width/space= 150μm/100μm; 100μm/100μm and 50μm/100μm, have been analyzed in order to find the optimum coil geometry. The results showed that the coil with dimension of width/space of 50μm/100μm produced the highest magnetic flux density of max 0.0068 T. The optimized design of the planar micro-coil can be used as a reference for the future fabrication of magnetic MEMS actuator.
Electrical and mechanical properties of Electromagnetic (EM) micro-actuator with silicon membrane... more Electrical and mechanical properties of Electromagnetic (EM) micro-actuator with silicon membrane has been characterized. The study is aimed to see the effect of the geometry and the structure of the actuator system on the actuating performance of the silicon-based membrane for fluid injection purposes. The actuator system consists of two main parts, namely, the electromagnetic part that generates an electromagnetic field and the magneto-mechanical part that enable the membrane deformation depending on the magnetic force on the silicon membrane. A standard MEMS process was implemented to fabricate the actuator system with an additional bonding between the actuator part and microfluidic part to complete the system for fluid injection purpose. The simulation using COMSOL Multiphysics was done to see the generation of the magnetic force and to see its effect on the membrane deformation. It was found that the height of the generated magnetic force increases significantly with the applie...
In this study, we present a comprehensive review of polymer-based microelectromechanical systems ... more In this study, we present a comprehensive review of polymer-based microelectromechanical systems (MEMS) electromagnetic (EM) actuators and their implementation in the biomedical engineering field. The purpose of this review is to provide a comprehensive summary on the latest development of electromagnetically driven microactuators for biomedical application that is focused on the movable structure development made of polymers. The discussion does not only focus on the polymeric material part itself, but also covers the basic mechanism of the mechanical actuation, the state of the art of the membrane development and its application. In this review, a clear description about the scheme used to drive the micro-actuators, the concept of mechanical deformation of the movable magnetic membrane and its interaction with actuator system are described in detail. Some comparisons are made to scrutinize the advantages and disadvantages of electromagnetic MEMS actuator performance. The previous ...
Perovskite solar cells (PSC) are currently exhibiting reproducible high efficiency, low-cost manu... more Perovskite solar cells (PSC) are currently exhibiting reproducible high efficiency, low-cost manufacturing, and scalable electron transport layers (ETL), which are becoming increasingly important. The application of photonic crystals (PC) on solar cells has been proven to enhance light harvesting and lead solar cells to adjust the propagation and distribution of photons. In this paper, the optimization of a two-dimensional nanodisk PC introduced in ETL with an organic-inorganic lead-iodide perovskite (methylammonium lead-iodide, MAPbI3) as the absorber layer was studied. A finite-difference time-domain (FDTD) simulation was used to evaluate the optical performance of PSC with various lattice constants and a radius of nanodisk photonic crystals. According to the simulation, the optimum lattice constant and PC radius applied to ETL are 500 nm and 225 nm, respectively. This optimum design enhances PSC absorption performance by more than 94% of incident light.
IOP Conference Series: Materials Science and Engineering, 2017
In this work, optical sensing performance of multimode polymer optical fiber coated with ZnO towa... more In this work, optical sensing performance of multimode polymer optical fiber coated with ZnO towards methanol vapour with different concentrations is studied. The etching process of the POF was carried out using chemical etching method. ZnO was synthesized with sol-gel method to obtain the sensitive material coating. The etched optical fiber was then dip-coated with ZnO and dried at 70oC to enhance the binding of the materials and to remove organic residue. Scanning Electron Microscope (SEM), and X-Ray poer Difraction (XRD) analyses were performed to characterize the ZnO layer. The measurements of optical performance were taken using a spectrophotometer in the optical wavelength in the range of 500-8000nm. The absorbance response of the ZnO coated etched fiber reduced proportionally, upon exposure to methanol vapour with concentration in the range of 5%-50%.
In this paper, the optimization of a new design of active microfluidic mixer incorporating microp... more In this paper, the optimization of a new design of active microfluidic mixer incorporating micropillar for accelerating the mixing of fluids was performed. The studied microfluidic mixer consists of the microfluidic, mechanical, and electromagnetic parts. The finite element analysis is used to study the effect of input channel angle, micropillar's radius and spacing, and shape of membrane on the performance of mixer. In particular, the mixing flow rate, membrane deflection and micropillar swivel or bending were evaluated. The results show that the flow rate in the range of 3.78-3.88 ll/s which is almost two times of the input flow rate was obtained. The results also show that the deflection height ranging from 40 to 170 lm, micropillar swivel from 7° to 20° were obtained. Furthermore, from the comparison among the membrane shapes, it revealed that the membrane in circular shape generates higher deflection and swivel than the other membranes in square and rectangle shapes due to the uniform tensile stress distribution.
Acid rain event is very dangerous for human activity especially in five cities of
Indonesia. Here... more Acid rain event is very dangerous for human activity especially in five cities of Indonesia. Here, acid rain has consistently attacked over five cities in Indonesia such as Jakarta, Manado, Pontianak, Bogor, and Surabaya with average pH level 4.22 to 6.34 in July 2010. Thus, in this study aim to develop Fiber Optic Chemical Sensor (FOCS) for monitoring acid rain level over five cities in Indonesia. The development of FOCS is used evanescent wave type and photodiode FDS10X10 to monitor acid rain quality. In this study, the Optical Power Meter (OPM) is used as a validator equipment to capture FOCS capability. The result shows absorption loss was successfully detected using OPM and photodiode FDS10X10 in FOCS evanescent wave type. Here, the maximum value ammonia mass over acid rain level has successfully detected with value range 7.12 dBm to 8.34 dBm and 7.51 dBm to 7.71 dBm using photodiode FDS10X10 and OPM, respectively. The good result over validation process shows FOCS has successful working with strong correlation 0.78 to monitor acid rain level.
In this study, aimed to develop low-cost sensor based on fiber optic to assess ammonia index for ... more In this study, aimed to develop low-cost sensor based on fiber optic to assess ammonia index for fishpond application. Here, the simple design was proposed by using Evanescent wave type to assess ammonia index during acid rain event. The experiment result showed maximum absorption loss with variation ammonia mass 1~5% with wavelength 1310 nm from Optical Light Source (OLS) is 27.56 dBm while Optical Spectrum Analyzer (OSA) reached 25.86 dBm. We had calculated RMSE, MAE, and Percent Error (PE) value both of the device (Low-cost fiber optic chemical sensor and OSA) are 1.692%, 0.916%, and 98.833% respectively. A good result from low cost fiber optic chemical sensor has successful developed with lowest production less than 1,455 USD per-year.
Electrical and mechanical properties of Electromagnetic (EM) micro-actuator with silicon membrane... more Electrical and mechanical properties of Electromagnetic (EM) micro-actuator with silicon membrane has been characterized. The study is aimed to see the effect of the geometry and the structure of the actuator system on the actuating performance of the silicon-based membrane for fluid injection purposes. The actuator system consists of two main parts, namely, the electromagnetic part that generates an electromagnetic field and the magneto-mechanical part that enable the membrane deformation depending on the magnetic force on the silicon membrane. A standard MEMS process was implemented to fabricate the actuator system with an additional bonding between the actuator part and microfluidic part to complete the system for fluid injection purpose. The simulation using COMSOL Multiphysics was done to see the generation of the magnetic force and to see its effect on the membrane deformation. It was found that the height of the generated magnetic force increases significantly with the applied power. The measurement of the membrane deformation done at a 20-µm silicon membrane showed a maximum deflection of 4.6 µm. The measurement results of the electrical characteristic of the device were compared with the simulation to validate the analysis. This study is very important to get the general insight of the silicon-based actuator membrane capability for the fluidic injection system in lab-on-chip.
This study aims to determine (1) the value of light wavelengths yielding significant power losses... more This study aims to determine (1) the value of light wavelengths yielding significant power losses which cause potential fiber optic to be used as a sensor, (2) the optimal value of the cladding refractive index for fiber optic based sensor application (3) loss power of fiber optic based sensor as a function of ammonia concentration. The method used is a simulation method using software Lumerical MODE Solutions. The parameters used in the simulation include the values of source wavelength, diameter and length of cladding and the values of ammonia solution concentration from 0 to 30 %. The results of simulation are (1) the source light wavelength of 1550 nm causes significant power losses that can yield the potential fiber optic to be used as a sensor, (2) the optimal value of the cladding refractive index for sensor applications is when the price approaches the value of core refractive index and (3) the increase in ammonia concentration cause slightly increase in power loss. It can be concluded that the wavelength of 1550 nm has more significant power losses than that of 1310 nm therefore it more sensitive to the change of ammonia concentration.
In this work, optical sensing performance of multimode polymer optical fiber coated with ZnO towa... more In this work, optical sensing performance of multimode polymer optical fiber coated with ZnO towards methanol vapour with different concentrations is studied. The etching process of the POF was carried out using chemical etching method. ZnO was synthesized with sol-gel method to obtain the sensitive material coating. The etched optical fiber was then dip-coated with ZnO and dried at 70oC to enhance the binding of the materials and to remove organic residue. Scanning Electron Microscope (SEM), and X-Ray poer Difraction (XRD) analyses were performed to characterize the ZnO layer. The measurements of optical performance were taken using a spectrophotometer in the optical wavelength in the range of 500-8000nm. The absorbance response of the ZnO coated etched fiber reduced proportionally, upon exposure to methanol vapour with concentration in the range of 5%-50%.
The acid rain is an environmental disaster that it will be intimidates human life. The
developmen... more The acid rain is an environmental disaster that it will be intimidates human life. The development micro-ring resonator sensor created from SOI (Silicon on insulator) and it used to detect acid rain index. In this study, the LUMERICAL software was used to simulate SOI material micro-ring resonator. The result shows the optimum values of fixed parameters from ring resonator have dependent variable in gap width. The layers under ring resonator with silicone (Si) and wafer layer of silicone material (Si) were added to seen three conditions of capability model. Model – 3 is an additional of bottom layer that gives the significant effect on the factor of quality. The optimum value is a peak value that given by the FSR calculation. FSR = 0, it means that is not shows the light propagation in the ring resonator and none of the light coming out on the bus – line.
This paper discusses the application of Box-Behnken Design (BBD) to get a mathematical model for ... more This paper discusses the application of Box-Behnken Design (BBD) to get a mathematical model for chemical vapor liquid detection with the objective of optimizing the optical fiber optic sensor probe. The parameters of input process were considered as variables to create the output parameters (response) using Response Surface Methodology (RSM). Input parameters such as length of probe, diameter of probe, photo-initiator liquid, vacuum pressure of chamber and purity of liquid detector were processed with Box-Behnken design approach for making POF (plastic optical fiber) probe of chemical sensor. Design Expert software was used to design the experiments with randomized runs. The main aim is to create an equation model as a platform for the probe design of POF chemical vapors detection similar to acetone, ethanol and methanol liquid. The experimental data were processed by considering the input parameters. The contribution of this research is the mathematic equation model that applies the polynomial equation. The final result of the wavelength application was between five to be three wavelengths, 434.05 nm, 486.13 nm and 656.03 nm. These wavelengths are the significant result of optimization measured using three chemical vapors. The optimization process uses the analysis of variables (ANOVA) to produce the quadratic model equation.
Fabrication of fiber optic as fiber intrinsic sensor are investigated using Polymer optical fiber... more Fabrication of fiber optic as fiber intrinsic sensor are investigated using Polymer optical fiber (POF) with two variety of etching technique, namely chemical etching and mechanical etching. Chemical etching is prepared by using acetone as etchant solvent, and mechanical etching technique is prepared mechanically by using sand paper and aluminum oxide polishing film. The propagation loss occurred during the chemical etching process and mechanical measured using power meter and photo diode and resulting the acquisition data that is plotted in graph as finally, the etched fiber is used as intrinsic within chemical sensor based on evanescent field absorption. The etching experiment is prepared as initial step to determine the good performance of fabricated sensor in term of producing the good performance of intrinsic fiber sensor.
The purpose of this study was to design a model for microring resonators (MRRs) for biochemical d... more The purpose of this study was to design a model for microring resonators (MRRs) for biochemical detection. As a model, two types of MRRs were proposed. The Lumerical application software was used to optimize and analyze the design of MRRs device. Several parameters influencing the detection process were investigated, including the gap separation, the ring radius, the waveguide width and the etching depth dimension of MRRs. The results showed that these parameters highly influenced the condition of MRRs. The optimum parameters yielding optimum detection of biochemical are 4.5 um, 90 nm, 470 nm and 220 nm, corresponding to ring radius, separation gap, waveguide width and etching depth, respectively. The both models of MRRs proposed in this paper yield large values of FSR (free spectral range) and Q-factor therefore are suitable for biochemical detection.
In this paper we report an optimization of metal
quality of planar MEMS electromagnetic coil thro... more In this paper we report an optimization of metal quality of planar MEMS electromagnetic coil through thermal annealing process. The study aims to see the effects of annealing process on the quality of metal layer deposited on localized p-type silicon regions. Two annealing process parameters namely isothermal (annealing under time variations in constant temperature) and isochronal (annealing under temperature variations at constant time) were performed on metal contact on highly doped Si substrate and characterized using transfer length method method by measuring the specific contact resistance ρC of the metal traces. The measurement results showed that the annealing process have significant influence on physical and electrical characteristics of the metal layer. Analysis showed that the quality of metal layer was significantly improved through the annealing process after treatment at temperature variations between 425–550 °C. An optimum annealing at 525 °C for 15 min was observed and the contact resistance can be reduced significantly up to 400 %. The results also showed that the surface roughness improves while metal contact resistance decreases 40 times when the metal is annealed for more than 10 min. The planar coil structure was designed to reduce the device density of a compact magnetic micro-sensor system.
This paper reports a compact design of electromagnetically driven MEMS micro-actuator utilizing p... more This paper reports a compact design of electromagnetically driven MEMS micro-actuator utilizing planar electromagnetic coil on PCB (Printed Circuit Board). The micro-actuator device consists of an NdFeB permanent magnet, thin silicon membrane and planar micro-coil which fabricated using simple standard MEMS techniques with additional bonding step. Two planar coils designs including planar parallel and spiral coil structure with various coil geometry are chosen for the study. Analysis of the device involves the investigation of electromagnetic and mechanical properties using finite element analysis (FEA), the measurement of the membrane deflection and functionality test. The measurement results show that the thin silicon membrane is able to deform as much as 12.87 µm using planar spiral micro-coil. Reasonable match between simulation and measurement of about 82.5% has been revealed. The dynamic response test on actuator driven by parallel planar coil shows that silicon membrane effectively deformed in 40 s for an input electrical power of only 150 mW. It is also concluded that planar parallel coil is considered for the simple structure and easy fabrication of the actuator system. This study will provide important parameters for the development of compact and simple electromagnetic micro-actuator system for fluidic injection system in lab-on-chip.
A PDMS based flexible membrane made of polymer composite with embedded NdFeB magnetic particle ha... more A PDMS based flexible membrane made of polymer composite with embedded NdFeB magnetic particle has been developed using simple MEMS process. The magnetic polymer composite membrane was designed to simplify the physical design of electromagnetically driven actuator by combining the permanent magnet and the actuator membrane into an embedded system leading to a more compact and simple system. The magnetic polymer composite with NdFeB particles density up to 30vol% has been synthesized. Two actuator membrane designs including flat and embossed type have been fabricated and characterized to obtain the optimum actuator performance. The deformation capability of the membrane has also been tested and measured using laser displacement meter. The results show that the membrane with flat polymer composite design revealed the highest deflection of 9.16 m at 6vol% particle density while the embossed composite membrane design achieved the highest deflection of 8.14 m at 25vol% particle density for an applied magnetic field density of only 0.98 mT. The polymer composite flexible membrane actuator is designed as part of a compact micropump development for the fluidic injection system in a Lab-on-Chip.
This paper describes the design and fabrication of planar micro-coil on printed-circuit board (PC... more This paper describes the design and fabrication of planar micro-coil on printed-circuit board (PCB)for magnetic MEMS actuator. A simple and cost effective technique for the fabrication of planar micro-coil is presented. The design and analysis process have been carried out by using COMSOL Multiphysics 4.2. Three different coil dimensions such as width/space= 150μm/100μm; 100μm/100μm and 50μm/100μm, have been analyzed in order to find the optimum coil geometry. The results showed that the coil with dimension of width/space of 50μm/100μm produced the highest magnetic flux density of max 0.0068 T. The optimized design of the planar micro-coil can be used as a reference for the future fabrication of magnetic MEMS actuator.
In this work, a theoretical analysis on the magnetic force
generation of micro-actuator driven by... more In this work, a theoretical analysis on the magnetic force generation of micro-actuator driven by planar microcoil is reported. The actuator design is optimized to increase the magnetic force and flux density that is useful for mechanical membrane deformation of an actuator. Therefore, this work is focused on the design and simulation of actuator material and structure using a finite element analysis method. As the results, the obtained magnetic force of maximum 11.4 mN has been observed for the actuator design having coil geometry of width w = 100 μm, space s =100 μm, turn N = 20 and thickness t =20 μm with NdFeB as magnet material. Hence, the optimized design geometry of the coil can be used as reference for the fabrication of electromagnetic actuator for micropump application.
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Indonesia. Here, acid rain has consistently attacked over five cities in Indonesia such as Jakarta,
Manado, Pontianak, Bogor, and Surabaya with average pH level 4.22 to 6.34 in July 2010. Thus,
in this study aim to develop Fiber Optic Chemical Sensor (FOCS) for monitoring acid rain level
over five cities in Indonesia. The development of FOCS is used evanescent wave type and
photodiode FDS10X10 to monitor acid rain quality. In this study, the Optical Power Meter
(OPM) is used as a validator equipment to capture FOCS capability. The result shows absorption
loss was successfully detected using OPM and photodiode FDS10X10 in FOCS evanescent wave
type. Here, the maximum value ammonia mass over acid rain level has successfully detected
with value range 7.12 dBm to 8.34 dBm and 7.51 dBm to 7.71 dBm using photodiode FDS10X10
and OPM, respectively. The good result over validation process shows FOCS has successful
working with strong correlation 0.78 to monitor acid rain level.
development micro-ring resonator sensor created from SOI (Silicon on insulator) and it used to
detect acid rain index. In this study, the LUMERICAL software was used to simulate SOI
material micro-ring resonator. The result shows the optimum values of fixed parameters from
ring resonator have dependent variable in gap width. The layers under ring resonator with
silicone (Si) and wafer layer of silicone material (Si) were added to seen three conditions of
capability model. Model – 3 is an additional of bottom layer that gives the significant effect on
the factor of quality. The optimum value is a peak value that given by the FSR calculation.
FSR = 0, it means that is not shows the light propagation in the ring resonator and none of the
light coming out on the bus – line.
quality of planar MEMS electromagnetic coil through thermal
annealing process. The study aims to see the effects of
annealing process on the quality of metal layer deposited
on localized p-type silicon regions. Two annealing process
parameters namely isothermal (annealing under time
variations in constant temperature) and isochronal (annealing
under temperature variations at constant time) were
performed on metal contact on highly doped Si substrate
and characterized using transfer length method method by
measuring the specific contact resistance ρC of the metal
traces. The measurement results showed that the annealing
process have significant influence on physical and electrical
characteristics of the metal layer. Analysis showed that the
quality of metal layer was significantly improved through
the annealing process after treatment at temperature variations
between 425–550 °C. An optimum annealing at
525 °C for 15 min was observed and the contact resistance
can be reduced significantly up to 400 %. The results also
showed that the surface roughness improves while metal
contact resistance decreases 40 times when the metal is
annealed for more than 10 min. The planar coil structure
was designed to reduce the device density of a compact
magnetic micro-sensor system.
Indonesia. Here, acid rain has consistently attacked over five cities in Indonesia such as Jakarta,
Manado, Pontianak, Bogor, and Surabaya with average pH level 4.22 to 6.34 in July 2010. Thus,
in this study aim to develop Fiber Optic Chemical Sensor (FOCS) for monitoring acid rain level
over five cities in Indonesia. The development of FOCS is used evanescent wave type and
photodiode FDS10X10 to monitor acid rain quality. In this study, the Optical Power Meter
(OPM) is used as a validator equipment to capture FOCS capability. The result shows absorption
loss was successfully detected using OPM and photodiode FDS10X10 in FOCS evanescent wave
type. Here, the maximum value ammonia mass over acid rain level has successfully detected
with value range 7.12 dBm to 8.34 dBm and 7.51 dBm to 7.71 dBm using photodiode FDS10X10
and OPM, respectively. The good result over validation process shows FOCS has successful
working with strong correlation 0.78 to monitor acid rain level.
development micro-ring resonator sensor created from SOI (Silicon on insulator) and it used to
detect acid rain index. In this study, the LUMERICAL software was used to simulate SOI
material micro-ring resonator. The result shows the optimum values of fixed parameters from
ring resonator have dependent variable in gap width. The layers under ring resonator with
silicone (Si) and wafer layer of silicone material (Si) were added to seen three conditions of
capability model. Model – 3 is an additional of bottom layer that gives the significant effect on
the factor of quality. The optimum value is a peak value that given by the FSR calculation.
FSR = 0, it means that is not shows the light propagation in the ring resonator and none of the
light coming out on the bus – line.
quality of planar MEMS electromagnetic coil through thermal
annealing process. The study aims to see the effects of
annealing process on the quality of metal layer deposited
on localized p-type silicon regions. Two annealing process
parameters namely isothermal (annealing under time
variations in constant temperature) and isochronal (annealing
under temperature variations at constant time) were
performed on metal contact on highly doped Si substrate
and characterized using transfer length method method by
measuring the specific contact resistance ρC of the metal
traces. The measurement results showed that the annealing
process have significant influence on physical and electrical
characteristics of the metal layer. Analysis showed that the
quality of metal layer was significantly improved through
the annealing process after treatment at temperature variations
between 425–550 °C. An optimum annealing at
525 °C for 15 min was observed and the contact resistance
can be reduced significantly up to 400 %. The results also
showed that the surface roughness improves while metal
contact resistance decreases 40 times when the metal is
annealed for more than 10 min. The planar coil structure
was designed to reduce the device density of a compact
magnetic micro-sensor system.
generation of micro-actuator driven by planar microcoil is
reported. The actuator design is optimized to increase the
magnetic force and flux density that is useful for mechanical
membrane deformation of an actuator. Therefore, this work is
focused on the design and simulation of actuator material and
structure using a finite element analysis method. As the results,
the obtained magnetic force of maximum 11.4 mN has been
observed for the actuator design having coil geometry of width w
= 100 μm, space s =100 μm, turn N = 20 and thickness t =20 μm
with NdFeB as magnet material. Hence, the optimized design
geometry of the coil can be used as reference for the fabrication
of electromagnetic actuator for micropump application.