Proceedings of 8th Mediterranean Electrotechnical Conference on Industrial Applications in Power Systems, Computer Science and Telecommunications (MELECON 96)
An array of silicon interferometric temperature micro-sensors is presented based on the thermo-op... more An array of silicon interferometric temperature micro-sensors is presented based on the thermo-optic effect. These sensors, consisting of planar Fabry-Perot cavities of various length, realised on the same chip, have been fabricated adopting standard microelectronic technologies. This permits the full integration of the sensors with other active silicon opto- and electronic devices. Moreover, the possibility of realising on the same
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Characterization of single- and polycrystalline silicon deposition in an epitaxial reactor aimed ... more Characterization of single- and polycrystalline silicon deposition in an epitaxial reactor aimed at MEMS applications is presented. HCl addition to the H2-SiH2Cl2 gas system is used to control selectivity and growth rate ratios between different crystallographic faces on a (100) silicon substrate, which is locally covered with a masking dielectric layer and/or a thin LPCVD poly-Si nucleation layer. This allows
1996 IEEE International Solid-State Circuits Conference. Digest of TEchnical Papers, ISSCC
Abstract The output current delivered by photo-diodes with enhanced ultraviolet (UV) responsivity... more Abstract The output current delivered by photo-diodes with enhanced ultraviolet (UV) responsivity is in most cases small, thus requiring an interface circuit with high current gain. Generally, this is achieved using discrete components. This integrated system includes a ...
Ammonia gas (NH3) detection is widely used, from air conditioning to searching for life on Mars, ... more Ammonia gas (NH3) detection is widely used, from air conditioning to searching for life on Mars, and in many situations there is an increasing demand for cheap and reliable NH3 sensors. When used as the dielectric in a capacitive sensing arrangement, porous SiC has been found to be extremely sensitive to the presence of NH3 gas. The exact sensing method
Integrated liquid core AntiResonant Reflecting Optical Waveguide (ARROW) are used as basic compon... more Integrated liquid core AntiResonant Reflecting Optical Waveguide (ARROW) are used as basic component for the realization of complex optofluidic devices. Liquid core ARROW waveguides permit to confine the light in a low refractive index liquid core, by means of two high refractive index cladding layers designed to form a high reflectivity Fabry-Perot antiresonant cavity. This arrangement allows to realize liquid core waveguides that can be very useful in optofluidic applications. We report the fabrication and the characterization different optofluidic devices based on hollow core ARROW waveguide like tuneable couplers and Mach-Zehnder interferometers. The proposed devices have been realized by silicon technology. The channels have been realized by etching the silicon wafer, while the two claddings have been deposited on both wafers by LPCVD or ALD depositions.
This paper is about integrated silicon thermopiles and their applications in silicon sensors. Aft... more This paper is about integrated silicon thermopiles and their applications in silicon sensors. After a short description of the thermoelectric effect and its use in silicon thermopiles, same attention is devoted to the design of micromachined structures for implementing thermal sensors. The various sensing principles based on thermal effects are discussed next. Finally, an impression is given of same of the recently developed silicon-thermopile sensors which implement these sensing principles.
Abstract An integrated silicon colour sensor using selective epitaxial growth (SEG) of silicon is... more Abstract An integrated silicon colour sensor using selective epitaxial growth (SEG) of silicon is presented. The sensor concept is based on the strong wavelength dependence of the photon absorption coefficient in silicon in the visible spectral range. Photocurrents of three vertically stacked photodiodes, with the desired position and thickness of the depletion regions, represent full tricolorimetric information. The upper two photodiodes are integrated in the 1.2 μ thick SEG silicon, which is grown on the conventional epilayer where the lower photodiode is placed. High-quality SEG silicon with pattern-insensitive growth has been achieved. Diodes formed in SEG silicon show an ideality factor close to 1, provided the edges are oriented in the [100] directions. The first prototypes of the colour sensor have been fabricated, and measured spectral responses give reasonable agreement with simulation. Using the SEG process together with low-temperature deposited masking oxide (TEOS), maintains compatibility with standard bipolar processing and enables the integration of read-out circuitry to realize a truly smart sensor.
This paper investigates the suitability of porous polysilicon and porous SiC as materials for sen... more This paper investigates the suitability of porous polysilicon and porous SiC as materials for sensing humidity. The investigation is a continuation of earlier work on porous single-crystalline silicon, where it was shown that this material was appropriate for humidity sensing, and could be easily integrated with standard Si processing. It was also shown that membrane structures enable the integration of a heating device to`reset' the system. The best microstructure for humidity sensing was obtained for low-doped p-type silicon. The advantage of using polysilicon is that it is possible to tune its response (by doping) so that it has only a very small temperature coef®cient of resistance. The idea is that a humidity sensor with a very small temperature dependence could be realised. The advantage of using SiC is that it offers the possibility of a humidity sensor that could withstand very harsh chemical environments.
... A 61 (1997) 267-271 An integrated silicon interferometric temperature sensor G. Cocorullo lI.... more ... A 61 (1997) 267-271 An integrated silicon interferometric temperature sensor G. Cocorullo lI.l, FG Della Corte lI.*, M. Iodice ".2, 1 ... temperature variation from the longer sensor, appropriately chosen to satisfy the required resolution, and the sign from the shorter one, appropriately ...
Silicon accelerometers are increasingly used in the automotive industry, but also applications fo... more Silicon accelerometers are increasingly used in the automotive industry, but also applications for 3D mice or socalled gesture controlled remote controls are feasible. For such applications, small, low-cost sensors are needed which do not only meet certain requirements for sensitivity, working range or response time but can also work in a large temperature range as occurs in a car. In this paper, an accelerometer will be described, which is based on a thermal principle. This accelerometer works at frequencies up to 300 Hz, has an output signal of about 20 mV/g and shows very low temperature dependence and drift for a thermal device.
A novel liquid crystal (LC) wavefront corrector with smooth modal influence functions is proposed... more A novel liquid crystal (LC) wavefront corrector with smooth modal influence functions is proposed and realized. The device consists of a thin layer of planar aligned nematic LC sandwiched between a glass plate with a conductive electrode and a plate made of ceramic material with a very high dielectric constant. Control electrodes are positioned on the back side of the ceramic plate, opposite to the LC. The modal character of the response is determined by spreading of the electric field in the ceramic plate. The device implemented is operating in a reflective (mirror) mode; however, similar principles can be used to build a transmissive device. Low cost and simplicity of control make it a good alternative to continuous face-sheet deformable mirrors.
A combined thermal and optical simulation study is performed on an all-silicon waveguide integrat... more A combined thermal and optical simulation study is performed on an all-silicon waveguide integrated thermo-optic Fabry-Perot modulator to assess the impact of the driving signal shape on the device speed performances. The results clearly indicate that the cooling phase after the ...
In this paper we present two new ideas for drift detectors with two dimensional position resoluti... more In this paper we present two new ideas for drift detectors with two dimensional position resolution. The first idea is based on the regular drift detector, but has a slightly different design in order to deal with diffusion problems. The second idea embodies a completely new type of drift detector that uses drift time measurements for both dimensions. The design consists of concentric quadrilateral closed strips with a small collecting anode in the centre. At first electrons travel perpendicular to the strips until they reach a diagonal. Then they proceed along this diagonal until they are collected at the centre. Position resolution in two dimensions can be obtained when both the time the electrons need to reach the diagonal and the time they need to reach the centre are measured. The latter is obtained from the collecting anode, the former from a diagonal strip present at the back side of the detector. Compared to common 2D drift detectors this detector offers the advantage of a small amount of read out electronics. It also has the advantage of having just one small collecting anode with a very low capacitance, resulting in low noise and therefore in a good energy resolution.
... FG Della Corte and I. Rendina are with Istituto di Ricerche per l'Elettromagnetismo ed i... more ... FG Della Corte and I. Rendina are with Istituto di Ricerche per l'Elettromagnetismo ed i Componenti Elettronici (IRECE), Consiglio Nazionale delle ... fringes shown by the longer sensor, while the information on its sign is derived by monitoring the output of the shorter one, chosen ...
This paper presents a novel silicon micromachining method, which combines tetra methyl ammonium h... more This paper presents a novel silicon micromachining method, which combines tetra methyl ammonium hydroxide (TMAH) etching and deep-reactive ion etching (DRIE) along with bottom-up copper electroplating, to fabricate high-density and high-aspect ratio through-wafer electrical interconnects (TWEIs) for three-dimensional multichip packaging. The silicon wafer was locally etched with TMAH from the backside until the desired membrane thickness was reached, and then DRIE was performed on the membrane until the holes were etched through. TMAH etching preserved large areas of the wafers at the original thickness, thus, ensuring relatively strong mechanical strength and manipulability. DRIE made it possible to realize high-aspect ratio holes with minimized wafer area consumption. A new bottom-up copper electroplating technique was developed to fill the high-aspect ratio through-wafer holes. This method can avoid seams and voids while achieving attractive electrical features. Through-wafer holes, as small as 5 m in diameter, have been realized by using the combination of TMAH and DRIE, and have been completely and uniformly filled by using bottom-up copper electroplating.
A silicon Fabry-Perot waveguide modulator, operating at the fiber optic communication wavelengths... more A silicon Fabry-Perot waveguide modulator, operating at the fiber optic communication wavelengths of 1.3 and 1.55 pm, has been entirely fabricated using microelectronic techniques. The planar optical cavity has been defined by plasma etching and has a length of 100 pm. The device, based on the thermooptic effect, is electrically driven and exhibits a maximum modulation depths of 60%. The measured-3 dB bandwidth is 700 kHz, which is by far the best result ever reported, to our knowledge, for thermooptic effect based modulators.
IEEE Journal of Selected Topics in Quantum Electronics, 1998
In this paper, we describe two different kinds of silicon optical modulators both integrated into... more In this paper, we describe two different kinds of silicon optical modulators both integrated into a silicon on silicon optical channel waveguide which can be realized using a standard bipolar process. The possibility of using standard, well-known technology presents several advantages with respect to III-V optoelectronics. The first device presented is based on a three-terminal active device and exploits the plasma dispersion effect to achieve the desired modulation. The active device used is a bipolar mode field effect transistor; we show how the introduction of the third control terminal introduces some definite advantages with respect to commonly p-i-n driven modulators. The second is an electrically controlled Bragg reflector. In this case, although controlled by a p-i-n diode, fast switching speed is achieved. because lower injection levels are required. Numerical simulations and preliminary experimental results are presented on both devices
This paper presents the fabrication, characterization, and application of a novel silicon-polymer... more This paper presents the fabrication, characterization, and application of a novel silicon-polymer laterally stacked electrothermal microactuator. The actuator consists of a deep silicon skeleton structure with a thin-film aluminum heater on top and filled polymer in the trenches among the vertical silicon parts. The fabrication is based on deep reactive ion etching, aluminum sputtering, SU8 filling, and KOH etching. The actuator is 360 µm long, 125 µm wide, and 30 µm thick. It generates a large in-plane forward motion up to 9 µm at a driving voltage of 2.5 V using low power consumption and low operating temperature. A novel 2-D microgripper based on four such forward actuators is introduced. The microgripper jaws can be moved along both the xand y-axes up to 17 and 11 µm, respectively. The microgripper can grasp a microobject with a diameter from 6 to 40 µm. In addition, the proposed design is suitable for rotation of the clamped object both clockwise and counterclockwise. [2007-0192] Index Terms-Electrothermal microactuator, polymeric microactuator, SU8, 2-D microgripper. I. INTRODUCTION P OLYMERIC electrothermal actuators are of great interest in microelectromechanical systems technology as they are capable of producing large displacements at a low driving voltage and operating temperature [1]-[3]. Furthermore, the polymeric electrothermal actuators are capable of operating in liquid and can be biocompatible. However, most of the developed
In this paper, we present a microelectromechanical systems-based two-degrees-of-freedom positioni... more In this paper, we present a microelectromechanical systems-based two-degrees-of-freedom positioning device combined with a clamping structure for positioning and constraining an optical fiber. The fiber position can be controlled in the two directions perpendicular to the fiber axis using two specifically designed wedges that can be accurately moved in-plane. These wedges are positioned using in-plane thermal actuators. Actuation of a fiber tip greater than 25 µm in-plane and 40 µm out-of-plane is achieved with a displacement resolution better than 0.1 µm. After aligning the fiber the final position can be maintained by switching off the mechanical clamp, which also uses thermal actuators. The position of the fiber can be kept within 0.1 µm after switching off the mechanical clamp and the positioning actuator. Fiber-to-fiber alignment experiments have been performed and the technique can be extended to fiber-to-laser alignment.
Proceedings of 8th Mediterranean Electrotechnical Conference on Industrial Applications in Power Systems, Computer Science and Telecommunications (MELECON 96)
An array of silicon interferometric temperature micro-sensors is presented based on the thermo-op... more An array of silicon interferometric temperature micro-sensors is presented based on the thermo-optic effect. These sensors, consisting of planar Fabry-Perot cavities of various length, realised on the same chip, have been fabricated adopting standard microelectronic technologies. This permits the full integration of the sensors with other active silicon opto- and electronic devices. Moreover, the possibility of realising on the same
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Characterization of single- and polycrystalline silicon deposition in an epitaxial reactor aimed ... more Characterization of single- and polycrystalline silicon deposition in an epitaxial reactor aimed at MEMS applications is presented. HCl addition to the H2-SiH2Cl2 gas system is used to control selectivity and growth rate ratios between different crystallographic faces on a (100) silicon substrate, which is locally covered with a masking dielectric layer and/or a thin LPCVD poly-Si nucleation layer. This allows
1996 IEEE International Solid-State Circuits Conference. Digest of TEchnical Papers, ISSCC
Abstract The output current delivered by photo-diodes with enhanced ultraviolet (UV) responsivity... more Abstract The output current delivered by photo-diodes with enhanced ultraviolet (UV) responsivity is in most cases small, thus requiring an interface circuit with high current gain. Generally, this is achieved using discrete components. This integrated system includes a ...
Ammonia gas (NH3) detection is widely used, from air conditioning to searching for life on Mars, ... more Ammonia gas (NH3) detection is widely used, from air conditioning to searching for life on Mars, and in many situations there is an increasing demand for cheap and reliable NH3 sensors. When used as the dielectric in a capacitive sensing arrangement, porous SiC has been found to be extremely sensitive to the presence of NH3 gas. The exact sensing method
Integrated liquid core AntiResonant Reflecting Optical Waveguide (ARROW) are used as basic compon... more Integrated liquid core AntiResonant Reflecting Optical Waveguide (ARROW) are used as basic component for the realization of complex optofluidic devices. Liquid core ARROW waveguides permit to confine the light in a low refractive index liquid core, by means of two high refractive index cladding layers designed to form a high reflectivity Fabry-Perot antiresonant cavity. This arrangement allows to realize liquid core waveguides that can be very useful in optofluidic applications. We report the fabrication and the characterization different optofluidic devices based on hollow core ARROW waveguide like tuneable couplers and Mach-Zehnder interferometers. The proposed devices have been realized by silicon technology. The channels have been realized by etching the silicon wafer, while the two claddings have been deposited on both wafers by LPCVD or ALD depositions.
This paper is about integrated silicon thermopiles and their applications in silicon sensors. Aft... more This paper is about integrated silicon thermopiles and their applications in silicon sensors. After a short description of the thermoelectric effect and its use in silicon thermopiles, same attention is devoted to the design of micromachined structures for implementing thermal sensors. The various sensing principles based on thermal effects are discussed next. Finally, an impression is given of same of the recently developed silicon-thermopile sensors which implement these sensing principles.
Abstract An integrated silicon colour sensor using selective epitaxial growth (SEG) of silicon is... more Abstract An integrated silicon colour sensor using selective epitaxial growth (SEG) of silicon is presented. The sensor concept is based on the strong wavelength dependence of the photon absorption coefficient in silicon in the visible spectral range. Photocurrents of three vertically stacked photodiodes, with the desired position and thickness of the depletion regions, represent full tricolorimetric information. The upper two photodiodes are integrated in the 1.2 μ thick SEG silicon, which is grown on the conventional epilayer where the lower photodiode is placed. High-quality SEG silicon with pattern-insensitive growth has been achieved. Diodes formed in SEG silicon show an ideality factor close to 1, provided the edges are oriented in the [100] directions. The first prototypes of the colour sensor have been fabricated, and measured spectral responses give reasonable agreement with simulation. Using the SEG process together with low-temperature deposited masking oxide (TEOS), maintains compatibility with standard bipolar processing and enables the integration of read-out circuitry to realize a truly smart sensor.
This paper investigates the suitability of porous polysilicon and porous SiC as materials for sen... more This paper investigates the suitability of porous polysilicon and porous SiC as materials for sensing humidity. The investigation is a continuation of earlier work on porous single-crystalline silicon, where it was shown that this material was appropriate for humidity sensing, and could be easily integrated with standard Si processing. It was also shown that membrane structures enable the integration of a heating device to`reset' the system. The best microstructure for humidity sensing was obtained for low-doped p-type silicon. The advantage of using polysilicon is that it is possible to tune its response (by doping) so that it has only a very small temperature coef®cient of resistance. The idea is that a humidity sensor with a very small temperature dependence could be realised. The advantage of using SiC is that it offers the possibility of a humidity sensor that could withstand very harsh chemical environments.
... A 61 (1997) 267-271 An integrated silicon interferometric temperature sensor G. Cocorullo lI.... more ... A 61 (1997) 267-271 An integrated silicon interferometric temperature sensor G. Cocorullo lI.l, FG Della Corte lI.*, M. Iodice ".2, 1 ... temperature variation from the longer sensor, appropriately chosen to satisfy the required resolution, and the sign from the shorter one, appropriately ...
Silicon accelerometers are increasingly used in the automotive industry, but also applications fo... more Silicon accelerometers are increasingly used in the automotive industry, but also applications for 3D mice or socalled gesture controlled remote controls are feasible. For such applications, small, low-cost sensors are needed which do not only meet certain requirements for sensitivity, working range or response time but can also work in a large temperature range as occurs in a car. In this paper, an accelerometer will be described, which is based on a thermal principle. This accelerometer works at frequencies up to 300 Hz, has an output signal of about 20 mV/g and shows very low temperature dependence and drift for a thermal device.
A novel liquid crystal (LC) wavefront corrector with smooth modal influence functions is proposed... more A novel liquid crystal (LC) wavefront corrector with smooth modal influence functions is proposed and realized. The device consists of a thin layer of planar aligned nematic LC sandwiched between a glass plate with a conductive electrode and a plate made of ceramic material with a very high dielectric constant. Control electrodes are positioned on the back side of the ceramic plate, opposite to the LC. The modal character of the response is determined by spreading of the electric field in the ceramic plate. The device implemented is operating in a reflective (mirror) mode; however, similar principles can be used to build a transmissive device. Low cost and simplicity of control make it a good alternative to continuous face-sheet deformable mirrors.
A combined thermal and optical simulation study is performed on an all-silicon waveguide integrat... more A combined thermal and optical simulation study is performed on an all-silicon waveguide integrated thermo-optic Fabry-Perot modulator to assess the impact of the driving signal shape on the device speed performances. The results clearly indicate that the cooling phase after the ...
In this paper we present two new ideas for drift detectors with two dimensional position resoluti... more In this paper we present two new ideas for drift detectors with two dimensional position resolution. The first idea is based on the regular drift detector, but has a slightly different design in order to deal with diffusion problems. The second idea embodies a completely new type of drift detector that uses drift time measurements for both dimensions. The design consists of concentric quadrilateral closed strips with a small collecting anode in the centre. At first electrons travel perpendicular to the strips until they reach a diagonal. Then they proceed along this diagonal until they are collected at the centre. Position resolution in two dimensions can be obtained when both the time the electrons need to reach the diagonal and the time they need to reach the centre are measured. The latter is obtained from the collecting anode, the former from a diagonal strip present at the back side of the detector. Compared to common 2D drift detectors this detector offers the advantage of a small amount of read out electronics. It also has the advantage of having just one small collecting anode with a very low capacitance, resulting in low noise and therefore in a good energy resolution.
... FG Della Corte and I. Rendina are with Istituto di Ricerche per l'Elettromagnetismo ed i... more ... FG Della Corte and I. Rendina are with Istituto di Ricerche per l'Elettromagnetismo ed i Componenti Elettronici (IRECE), Consiglio Nazionale delle ... fringes shown by the longer sensor, while the information on its sign is derived by monitoring the output of the shorter one, chosen ...
This paper presents a novel silicon micromachining method, which combines tetra methyl ammonium h... more This paper presents a novel silicon micromachining method, which combines tetra methyl ammonium hydroxide (TMAH) etching and deep-reactive ion etching (DRIE) along with bottom-up copper electroplating, to fabricate high-density and high-aspect ratio through-wafer electrical interconnects (TWEIs) for three-dimensional multichip packaging. The silicon wafer was locally etched with TMAH from the backside until the desired membrane thickness was reached, and then DRIE was performed on the membrane until the holes were etched through. TMAH etching preserved large areas of the wafers at the original thickness, thus, ensuring relatively strong mechanical strength and manipulability. DRIE made it possible to realize high-aspect ratio holes with minimized wafer area consumption. A new bottom-up copper electroplating technique was developed to fill the high-aspect ratio through-wafer holes. This method can avoid seams and voids while achieving attractive electrical features. Through-wafer holes, as small as 5 m in diameter, have been realized by using the combination of TMAH and DRIE, and have been completely and uniformly filled by using bottom-up copper electroplating.
A silicon Fabry-Perot waveguide modulator, operating at the fiber optic communication wavelengths... more A silicon Fabry-Perot waveguide modulator, operating at the fiber optic communication wavelengths of 1.3 and 1.55 pm, has been entirely fabricated using microelectronic techniques. The planar optical cavity has been defined by plasma etching and has a length of 100 pm. The device, based on the thermooptic effect, is electrically driven and exhibits a maximum modulation depths of 60%. The measured-3 dB bandwidth is 700 kHz, which is by far the best result ever reported, to our knowledge, for thermooptic effect based modulators.
IEEE Journal of Selected Topics in Quantum Electronics, 1998
In this paper, we describe two different kinds of silicon optical modulators both integrated into... more In this paper, we describe two different kinds of silicon optical modulators both integrated into a silicon on silicon optical channel waveguide which can be realized using a standard bipolar process. The possibility of using standard, well-known technology presents several advantages with respect to III-V optoelectronics. The first device presented is based on a three-terminal active device and exploits the plasma dispersion effect to achieve the desired modulation. The active device used is a bipolar mode field effect transistor; we show how the introduction of the third control terminal introduces some definite advantages with respect to commonly p-i-n driven modulators. The second is an electrically controlled Bragg reflector. In this case, although controlled by a p-i-n diode, fast switching speed is achieved. because lower injection levels are required. Numerical simulations and preliminary experimental results are presented on both devices
This paper presents the fabrication, characterization, and application of a novel silicon-polymer... more This paper presents the fabrication, characterization, and application of a novel silicon-polymer laterally stacked electrothermal microactuator. The actuator consists of a deep silicon skeleton structure with a thin-film aluminum heater on top and filled polymer in the trenches among the vertical silicon parts. The fabrication is based on deep reactive ion etching, aluminum sputtering, SU8 filling, and KOH etching. The actuator is 360 µm long, 125 µm wide, and 30 µm thick. It generates a large in-plane forward motion up to 9 µm at a driving voltage of 2.5 V using low power consumption and low operating temperature. A novel 2-D microgripper based on four such forward actuators is introduced. The microgripper jaws can be moved along both the xand y-axes up to 17 and 11 µm, respectively. The microgripper can grasp a microobject with a diameter from 6 to 40 µm. In addition, the proposed design is suitable for rotation of the clamped object both clockwise and counterclockwise. [2007-0192] Index Terms-Electrothermal microactuator, polymeric microactuator, SU8, 2-D microgripper. I. INTRODUCTION P OLYMERIC electrothermal actuators are of great interest in microelectromechanical systems technology as they are capable of producing large displacements at a low driving voltage and operating temperature [1]-[3]. Furthermore, the polymeric electrothermal actuators are capable of operating in liquid and can be biocompatible. However, most of the developed
In this paper, we present a microelectromechanical systems-based two-degrees-of-freedom positioni... more In this paper, we present a microelectromechanical systems-based two-degrees-of-freedom positioning device combined with a clamping structure for positioning and constraining an optical fiber. The fiber position can be controlled in the two directions perpendicular to the fiber axis using two specifically designed wedges that can be accurately moved in-plane. These wedges are positioned using in-plane thermal actuators. Actuation of a fiber tip greater than 25 µm in-plane and 40 µm out-of-plane is achieved with a displacement resolution better than 0.1 µm. After aligning the fiber the final position can be maintained by switching off the mechanical clamp, which also uses thermal actuators. The position of the fiber can be kept within 0.1 µm after switching off the mechanical clamp and the positioning actuator. Fiber-to-fiber alignment experiments have been performed and the technique can be extended to fiber-to-laser alignment.
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Papers by P. Sarro