File:Rieoperation.svg

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Original file(SVG file, nominally 520 × 452 pixels, file size: 36 KB)

Summary

A diagram of a common RIE setup. An RIE consists of two electrodes (1 and 4) that create an electric field (3) meant to accelerate ions (2) toward the surface of the samples (5).

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File history

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Date/TimeThumbnailDimensionsUserComment
current12:36, 17 January 2017Thumbnail for version as of 12:36, 17 January 2017520 × 452 (36 KB)127.0.0.1 (talk)A diagram of a common RIE setup. An RIE consists of two electrodes (1 and 4) that create an electric field (3) meant to accelerate ions (2) toward the surface of the samples (5).
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