NCKU Research Centre and Energy Development

CMNST Facilities and Price for Class/ Operation/ OEM Service
NoteYou have to take/pass the Safety Training Course before operating the facilities.
Update day2014/1/22
Nanolithography
Equipment
E-Beam Lithography system
Lithography
Self Operation
(NTD/hr)
Academic
Industry
1800
2000
3000
UV Imprinter
1800
600
1575
2625
UV-Curing Nanoimprinter
1100
550
2250
3750
UV-Curing Roller Nanoimprinter
1100
350
1725
2875
Single Side Mask Aligner
1700
700
1725
2875
Double Side Mask Aligner
1700
850
1950
3250
CO2 Laser Micro-Machining System
1100
450
1425
2375
550
free
1125
1875
Reactive Ion Etcher
1600
1100
2400
4000
Inductive Coupled Plasma Etching System
3500
1300
2000
3000
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Wet Bench (Cleaning)

Wet Bench (Organic Processing)
200/per day
Wet Bench (Acid Processing)

Wet Bench (Alkaline Processing)
Back End
OEM Price (NTD/hr)
13000
Spin Coater
Ething
Class Price
Wafer Cutting Machine
1900
350
1275
2125
Hot Embosser
2000
650
1725
2875
950
350
1275
2125
CO2 Supercritical Dry Release Machine
Nanomechanics
Equipment
Deposition/
Furnance
SPM/
Electronic Property
Class Price
Operation
(NTD/hr)
OEM Price (NTD/hr)

Academic
Industry
E-Beam Evaporator
2000
900
2100
3500
DC Magnetron Sputter Deposition system
2000
900
2100
3500
Co-Sputtering System
3400
650
1725
2875
Molecular Beam Epitaxy system
---
1300
2250
3750
Parylene Vapor Deposition System
950
350
1275
2125
Rapid Thermal Annealing Furnace
950
350
1275
2125
New Alpha-Step Profilometer
700
450
1425
2375
Near-field Scanning Optical Microscope,NSON
2100
Please contact us
No class
Please contact us
Atomic Force Microscope

Nano-Indentation System & Nano-Mechanical
Microscope (MTS XP)
Nano-Indentation System (MTS G200)
450
1425
2375
MTS G200)
450
1425
2375
3500
1250
2000
4200
900
200
1050
1750
2600
(MTS XP&
Indentation
In-Situ TEM, 2010
Micro/Nano Tensile Tester
Nanomaterial Analysis
Equipment
Operation
Class Price
Transmission Electron Microscope (TEM 2010)

TEM2010+ In-Situ TEM
(NTD/hr)
Academic
Industry
5500
650
1000
3500
---
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6000/3hr
6000/3hr
680
1800
3600
680
1800
3600
680
2000
4500
TEM2100F
TEM
HR-TEM 2100F
TEM2100F/EDS
5500
TEM2100F/EELS
TEM2100F/DB-FIB
---
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6000
11000
TEM Sample Preparation Room
---
free
---
---
---
800
2000
3500
SEM 7001/EDS
6200
900
2100
3800
SEM 7001/EBSD
6500
900
2200
4000
---
650
1800
3000
5700
900
2100
3500
---
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2000
3500
900
2100
3500
---
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5000
5000
FE-SEM 6700
3700
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Variable Pressure SEM (SEM, Zeiss EVO 50)
2500
600
1650
2750
Tabletop Microscope (TM-1000)
1900
400
1350
2250
---
1500
2400
4000
TEM sample
---
1500
2500
5000
12000
1600
2500
4500
omni probe
---
2000
3000
5500
EDS/omni probe
---
2100
3100
6500
550
250
1125
1875
SEM 7001
FE-SEM 7001F
SEM 7000
SEM 7000/EDS
FE-SEM 7000F
SEM
SEM 7000/CL
SEM 7000/EBW
Micro/Nano Tensile Tester+ SEM 7000F
Sample
OEM Price (NTD/hr)
Dual-Beam Focused Ion Beam System
Preparation
Precision Ion Polishing System
Griding/Polishing Tool
Set
EDS
(SEM+EDS+EBW)
9800
8500
---
Please contact us
Nondestructive Analysis
Equipment
Optical
Microscopy
Property Analysis/
Defection
Microanalysis
Operation
OEM Price (NTD/hr)
(NTD/hr)
Academic
950
350
1275
2125
Fourier Transform Infrared Spectrometer
2300
550
1575
2625
Micro-Raman & Micro-PL Spectrometer
2300
550
1575
2625
Hypothermia Microscopes Raman Spectrometer
2750
800
1950
3250
Microscopes Raman Spectrometer
2300
550
1575
2625
Ellipsometer
1800
450
1425
2375
550
250
1125
1875
UV-Visible-NIR Spectrophotometer
1000
200
1050
1750
XRD, X-Ray Diffractometer
1500
200
640
960
850
250
1125
1875
3D Confocal Microscope
Contact Angle Meter
Lattice
Class Price
Dynamic Light Scatter
Industry

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CMNST Facilities and Price for Class/ Operation/ OEM Service

UV-Curing Roller Nanoimprinter

Single Side Mask Aligner

Double Side Mask Aligner

CO2 Laser Micro-Machining System

Reactive Ion Etcher

Inductive Coupled Plasma Etching System

Wet Bench (Cleaning)

Wet Bench (Acid Processing)

OEM Price (NTD/hr)

Wafer Cutting Machine

CO2 Supercritical Dry Release Machine

OEM Price (NTD/hr)

DC Magnetron Sputter Deposition system

Molecular Beam Epitaxy system

Parylene Vapor Deposition System

Rapid Thermal Annealing Furnace

New Alpha-Step Profilometer

Near-field Scanning Optical Microscope,NSON

Atomic Force Microscope

Transmission Electron Microscope (TEM 2010)

TEM Sample Preparation Room

Variable Pressure SEM (SEM, Zeiss EVO 50)

Tabletop Microscope (TM-1000)

Micro/Nano Tensile Tester+ SEM 7000F

OEM Price (NTD/hr)

Dual-Beam Focused Ion Beam System

OEM Price (NTD/hr)

Fourier Transform Infrared Spectrometer

Micro-Raman & Micro-PL Spectrometer

Hypothermia Microscopes Raman Spectrometer

Microscopes Raman Spectrometer

XRD, X-Ray Diffractometer

Contact Angle Meter

Dynamic Light Scatter

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