Kobelco PVD Coating System
Kobelco PVD Coating System
Kobelco PVD Coating System
■ Office : Am Handwerkerzentrum 6, 52156 Monschau, Germany ■ Office : 1007 Commerce Ct.Buffalo Grove, IL 60089
■ Phone : +49-2472-97032-0 ■ Phone : +1-847-520-6000
■ Fax : +49-2472-97032-29 ■ Fax : +1-847-520-6222
■ email : info@KCS-Europe.com ■ email : contact@kobac-us.com
■ URL : http://www.kcs-europe.com/ ■ URL : http://www.kobac-us.com/index.html
01 02
Why KOBELCO? High-Temp Pre-Heating & Substrate Temperature Control
Easy-Handling KOBELCO machine can pre-heat substrates to high temperatures in order to improve adhesion and film properties.
Also, KOBELCO machines can control substrate temperatures in 3 zones: upper/middle/lower zone.
Our machine has a highly advanced automatic operation system and control system monitors, which enable the
following:
• User-friendly operation Upper
• Highly reliable and reproducible operation
Temperature
• Whole operation is done by just pressing “START” button.
• Parameters can be easily and flexibly modified. Middle
• Operation and measured process parameters are automatically saved.
Lower
Display showing coating
INTERNET
Easy-Maintenance HUB
Convenient KOBELCO design with wide-opening twin doors granting easy access for substrate loading, target
changing, and overall ease of maintenance.
Easy access to the cathodes and other parts mounted on the machine.
PVD
Machine
Reliability
Since 1986, more than 200 industry leading companies have operated KOBELCO coating systems in-house to
enhance their product lines. Contact a representative for more information, today!
03 04
Arc Ion Plating Machine Lineup
Substrate Table Multi Spindles planetary 6-Spindles planetary rotary table 12-Spindles planetary rotary table
WC-Co WC-Co
20
60
PVD coater with a new type cathode
15
40
Commercial Coated Insert
/ Typical Coating: CrN based coatings
10 Insert Coated by KOBELCO
20
05
00
00
Commercial TiAIN KSL TiAIN
00 20 40
Cutting Length (m)
60 80 100 Latest Design
Material: Carbide, Work Piece: AISI 316, Material: Carbide, Workpiece: AISI A48-94a,
Cutting Speed: 270 [m/min], Coolant: Wet Cutting speed: 220 [m/min], Coolant: Dry,
05 06
BELCOAT® – by AIP Lineup of BELCOAT® by AIP
BELCOAT ® series has a variety of films, enabling customers to find optimal films for their purposes.
KOBELCO’s BELCOAT ® series by AIP has been providing efficient and high performance films to customers all over
Name Color Film Hardness Oxidation Coef. Thickness Typical Application
the world. Si and Y, which are known to be effective in oxidation resistance, are added to our TiAlCrN based films. Fric
(Hv) (GPa) ( c) (µm)
These films have proven extremely suitable for high speed dry machining because of its high oxidation resistance and
BELCOAT TiN 2,200 22 600 0.5 1-4 General wear resistance, wet machining
hardness. G
Workpiece BELCOAT TiCN 2,800 27 400 0.4 2-4 General wear resistance, drilling
hardness R1
(with topcoat)
BELCOAT BELCOAT TiAIN 2,800 27 800 0.5 1-4 General dry machining, inserts
VS
BELCOAT
High AI added V
SDG
BELCOAT AITiN 3,000 29 900 0.5 1-4 High speed dry machining
BELCOAT VS
V
BELCOAT
BELCOAT AITiN 3,000 29 950 0.5 1-4 High speed dry machining
SD
AI cotanig VB
BELCOAT CrN 1,800 18 700 0.4 1-5 Mold and Dies, Cu machining, tribological
components
SG
TiN based BELCOAT CrN multilayer 2,600 25 1,000 0.4 1-5 Cu machining
BELCOAT BELCOAT
R G SM
BELCOAT Si added TiCrAIN 3,500 34 1,100 0.5 5-10 Cold stamping mold
bilayer
SS/S
Ferrous Non-coat Si added TiCrAIN
material BELCOAT 3,500 34 1,100 0.5 15-20 Hot forging mold
bilayer
Cutting speed SS/HF
CrN/ TiCrAIN bilayer
BELCOAT 3,500 34 1,000 0.4 2-4 Wet to semi-dry machining (mainly hobs)
SS/B
TiCrAIN
BELCOAT 3,500 34 1,000 0.4 1-4 General machine substitute to TiAIN
SD
Milling Test Hob Test BELCOAT TICrAISiN
3,600 35 1,100 0.5 1-4 Semi-dry to dry machining(mainly end mills)
SDG
1000 0.25 Si added TiCrAIN
BELCOAT 3,600 35 1,100 0.5 1-4 Semi-dry to dry machining(mainly hobs)
bilayer
MAX.Flank Wear (µm)
SDG/S
800 0.2
Flank Wear (µm)
Si added TiCrAIN
BELCOAT 3,600 35 1,100 0.5 1-4 Semi-dry to dry machining(mainly end mills)
bilayer
SDG/H
600 0.15 BELCOAT Rare earth added
3,600 35 1,200 0.5 1-4 High speed dry machining of hardened die
TiAICrN
TiCrAIN multilayer steel, Ti (dry), inconel,Waspaloy
TiAICrSiYN SDG/MR
400 0.1 BELCOAT Rare earth added 3,600 35 1,200 0.5 1-4 Dry machining (mainly hobs)
TiCrAIN bilayer
NS/R
200 0.05 BELCOAT
Rare earth added
3,000 29 1,000 0.4 1-4 Drilling of carbon steel
TiCrAIN multilayer
NS/MR
00 00 BELCOAT Modified AITiN
2,800 27 600 0.4 1-4 Ti machining (wet to dry)
multilayer
00 20 40 60 80 Commercial Commercial Si & Y added TI1
TiAIN Oxide TiAICrN
Machining Length [m] BELCOAT Modified CrN multilayer
2,500 25 600 0.4 1-4 Ti machining (wet to dry)
Tool: Ball-nose endmill (C-2SB), Workpiece: D2, Tool: HSS hob, Workpiece: AISI 4150, TI2
Axial depth: 4.5 mm, Feed: 0.04 mm/flute Machining speed: 250 m/min,
TiCrAIN multilayer
Machining speed: 150m/min, Radial: 0.2 mm Feed: 2.4 mm/tooth, Lubrication: DRY BELCOAT 3,000 29 1,000 0.5 1-4 Turning of carbon steel (small tool)
07 08
Coating Guide for Cutting Tools New Technology
Recently we have launched the SFC (Super Fine Cathode), a newly developed cathode which has advantages due to
tuning the magnetic field around the cathode.
Drill End Mill Hob Insert
Material Coolant Carbide Carbide HSS Turning Milling ● Residual stress is adjustable by substrate bias while
5
Carbon Steel, Dry VS/MR,SDG/V SD NS/R VS,VB VS,VB covering all range of existing AIPTM cathodes.
Alloyed Steel Wet VS/MR,SDG/V SD SS/B,SDG/S,-/H SMH VS,VB ● Thick coatings (up to 20 µm) with low internal stress is
Film Stress(-GPa)
possible
Hardened die Dry SDG/S,NS/R SDG/S,NS/R VS,VB VS,VB
● Boltless structure enables to change targets with
steel (>HRC52) Wet SD SD VS,VB VS,VB
one-touch operation
Hardened die Dry SDG/MR SDG/MR VS,VB VS,VB ● Productivity is increased by improvement of yield rate of
Super Fine Cathode
steel (>HRC52) Wet SD SD VS,VB VS,VB target (20 % up)
Fine Cathode
Wet VS,VB VS,VB VS,VB VS,VB Comparison of AIP-Cathodes - Plasma range extended by SFC
Nickel alloy Wet SDG/MR SDG/MR SDG/MR SDG/MR
Titanium alloy Ti1,TI2 TI1,TI2 TI1,TI2 TI1,TI2 Fine Cathode Super Fine Cathode
Target Consumption
Drilling Test Milling Test “Ti50%Al50% Target. Processed under high N2 pressure”
3500 600 @4500A*Hr @6000A*Hr
3000 500
Flank Wear [μm]
Number of Hits
Competitor
2500
400
BELCOAT SDG/S
2000
300 Coating Thickness Distribution
1500
200
1000
500 100
00 00
Commercial Competitor’s BELCOAT 00 100 200 300
Tool film SDG/MR
Machining Length [m]
Effective Coating Zone
Tool: Camtec carbide, Tool: Ball-nose endmill (C-2SB),
Workpiece: Hardened steel (HRC 30-35), Workpiece: H13, Cutting speed: 500m/min,
Machining speed: 2800 RPM, Feed: 0.25 mm/rev, Axial depth: 5 mm, Feed: 0.06 mm/flute,
Depth of Cut: 38.6 mm Radial: 0.6 mm, Lubrication :DRY
09 10
UnBalanced Magnetron Sputtering Features of DLC by UBMS
DLC (Diamond-like carbon) has widespread applications such as car parts, mechanical components, dies, molds etc.
Features of UBMSTM because of its high mechanical hardness, chemical inertness, and low friction behavior.
1. Plasma density is increased near target by imbalanced magnetic field. KOBELCO can offer optimized DLC for each customer’s target by tuning coating parameters.
2. Maximization of ion-assist effect.
3. Control of Film Property; Composition, Adhesion, Crystallization, Surface Morphology Applications of DLC Advanced DLC by UBMS
Argon ion is activated in plasma Activated argon ion sputters out Film deposition is made with □Automobile parts □High Adhesion DLC
and hits target. metal atom from target. sputtered metal ion.
(engine parts/ fuel pump parts ) −Ion assist effect by UBM
□Mechanical parts −Optimized Interlayer
(Ball bearing, ball screw, hydraulic pump parts ) □Hardness control and Multi-layer DLC
Balanced Magnetron UnBalanced Magnetron □Cutting tools for aluminum −Ion assist effect by UBM
□Spinning tools for aluminum can □Metal-doped DLC
□Trimming dies for SUS/Copper tube −Co-sputter with metal target and carbon
□Punches for SUS/aluminum sheet □Hydrogen content controlled DLC
and more −Solid carbon source
□Hybrid coating with AIP
and more
No Interlayer
Hard DLC Each layer:10nm~
Soft DLC
Φ450×H400mm or Φ700×H700mm or
Recommended Loading Space Φ220×H120mm 10nm
Φ130×H400mm×6-Spindles Φ130×H700mm×12-Spindles Substrate
Arc Evaporation Source 1 to 3 6 to 12 8 to 16 Wear Resistance Low
Simple Multilayer Friction Toughness
Substrate Table Multi Spindles planetary 6-Spindles planetary rotary table 12-Spindles planetary rotary table
11 12
Effect of KOBELCO DLC High-end with High-performance system
KOBELCO’s Hybrid System has both AIPTM cathodes and UBMSTM cathodes in one chamber and can operate these two
Punching of SUS Sheets Drilling of Al Alloy types of cathodes alternately or together. Depositing more complex and high-end coatings is now possible. The HYBRID
35 500
Number of punches (×10^4)
system can expand possibilities of R&D and/or Production for more sophisticated films in various industrial fields.
30
400
Number of Holes
25
300 AIP UBMS
20 AIP Film
15 200 UBMS Film
10 AIP Film
100
5 UBMS Film
0 0
AIP Film
HSS Non-coat DLC Coat HSS DLC Coat
Substrate
UBMS AIP
13 14