KLA-Tencor: Am Foup Model: AF100
KLA-Tencor: Am Foup Model: AF100
KLA-Tencor: Am Foup Model: AF100
AM FOUP
Model: AF100
This test report bears the accreditation symbol indicating that the
testing performed herein meets the test and reporting requirements
of ISO/IEC 17025 under the applicable scope of EMC testing for
CKC Laboratories, Inc.
This report contains a total of 48 pages and may be reproduced in full only. Partial reproduction may only be done with the
written consent of CKC Laboratories, Inc.
TABLE OF CONTENTS
Page 2 of 48
Report No.: 98979-9A
ADMINISTRATIVE INFORMATION
Test Report Information
Revision History
Original: Testing of the AM FOUP, Model: AF112 to FCC Part 15 Subpart C Sections 15.207 & 15.209.
Addendum A: To change Model number from AF112 to AF100 per manufacturer request.
Report Authorization
The test data contained in this report documents the observed testing parameters pertaining to and are relevant
for only the sample equipment tested in the agreed upon operational mode(s) and configuration(s) as identified
herein. Compliance assessment remains the client’s responsibility. This report may not be used to claim product
endorsement by A2LA or any government agencies. This test report has been authorized for release under quality
control from CKC Laboratories, Inc.
Steve Behm
Director of Quality Assurance & Engineering Services
CKC Laboratories, Inc.
Page 3 of 48
Report No.: 98979-9A
Test Facility Information
TEST LOCATION(S):
CKC Laboratories, Inc.
5046 Sierra Pines Drive
Mariposa, CA 95338
Software Versions
CKC Laboratories Proprietary Software Version
EMITest Emissions 5.03.02
Page 4 of 48
Report No.: 98979-9A
SUMMARY OF RESULTS
Standard / Specification: FCC Part 15 Subpart C - 15.207 &15.209
Page 5 of 48
Report No.: 98979-9A
EQUIPMENT UNDER TEST (EUT)
During testing numerous configurations may have been utilized. The configurations listed below support
compliance to the standard(s) listed in the Summary of Results section.
Configuration 1
Equipment Tested:
Device Manufacturer Model # S/N
FOUP Controller KLA-Tencor 0596649-003 NA
SA Wafer Module -A300 KLA-Tencor 0626494-000 NA
SA Wafer Module -Spectra KLA-Tencor 0636365-000 NA
AM FOUP KLA-Tencor AF100 NA
Support Equipment:
Device Manufacturer Model # S/N
Semiconductor Wafers Wafer-Net 300mm P+ Substrate NA
External Power Supply ECO-EURO EC-12-3.3 NA
Semiconductor Wafer KLA-Tencor 3540D-12-8000 HT95380
Semiconductor Wafer KLA-Tencor 3440D-12-8301 D45511
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Report No.: 98979-9A
General Product Information:
* The device does not have special firmware/software for operation or test mode.
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Report No.: 98979-9A
FCC Part 15 Subpart C
Mode A:
FOUP charging Wafer (Using a SA Utilities) (Continuous Wafer Charge Power)
Custom SA Software for FOUP
Modules tunes RF power immediately (upon wafer insertion)
Modules then applies Continuous Charge power
FOUP remains in this mode until the SW is replaced (or until the wafer is removed)
Page 8 of 48
Report No.: 98979-9A
Environmental Conditions
Temperature (ºC) 28 Relative Humidity (%): 38
Test Equipment
Asset # Description Manufacturer Model Cal Date Cal Due
02672 Spectrum Analyzer Agilent E4446A 9/30/2015 9/30/2017
00226 Loop Antenna EMCO 6502 4/4/2016 4/4/2018
P06230 Cable Andrew CXTA04A-50 3/3/2016 3/3/2018
Times Microwave
P06847 Cable LMR195-FR-6 7/9/2015 7/9/2017
Systems
P06884 Cable TMS LMR195-FR-4 10/27/2015 10/27/2017
Cable - Site A
P04249 Andrew 3/3/2016 3/3/2018
Underground
Page 9 of 48
Report No.: 98979-9A
Plot(s)
Mode A
Mode B
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Test Setup Photo(s)
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15.209 Field Strength of Fundamental
Test Setup/Conditions
Test Location: Mariposa Lab A Test Engineer: E. Wong
Test Method: ANSI C63.10 (2013) Test Date(s): 8/25/2016
Configuration: 1
Test Setup The EUT is placed on the wooden table with Styrofoam lining Two wafers are installed in
the EUT.
Freq: 1.487MHz
Modulation: OOK
Protocol: Proprietary
WiFi is Disabled.
Mode A:
FOUP charging Wafer (Using a SA Utilities) (Continuous Wafer Charge Power)
Custom SA Software for FOUP
Modules tunes RF power immediately (upon wafer insertion)
Modules then applies Continuous Charge power
FOUP remains in this mode until the SW is replaced (or until the wafer is removed)
Page 12 of 48
Report No.: 98979-9A
Environmental Conditions
Temperature (ºC) 28 Relative Humidity (%): 38
Test Equipment
Asset # Description Manufacturer Model Cal Date Cal Due
02672 Spectrum Analyzer Agilent E4446A 9/30/2015 9/30/2017
00226 Loop Antenna EMCO 6502 4/4/2016 4/4/2018
P06230 Cable Andrew CXTA04A-50 3/3/2016 3/3/2018
Times Microwave
P06847 Cable LMR195-FR-6 7/9/2015 7/9/2017
Systems
P06884 Cable TMS LMR195-FR-4 10/27/2015 10/27/2017
Cable - Site A
P04249 Andrew 3/3/2016 3/3/2018
Underground
Parameter Definitions:
Measurements performed at input voltage Vnominal ± 15%.
Parameter Value
VNominal: 110 VAC
VMinimum: 93.5VAC
VMaximum: 126.5.00 VAC
In addition, power output tests were performed using a fresh battery at 7.4 dc.
Page 13 of 48
Report No.: 98979-9A
Test Data
Test Location: CKC Laboratories, Inc. • 5046 Sierra Pines Drive • Mariposa, CA 95338 • (209) 966-5240
Customer: KLA-Tencor
Specification: 15.209 Radiated Emissions
Work Order #: 98979 Date: 8/26/2016
Test Type: Radiated Scan Time: 19:58:40
Tested by: E. Wong Sequence#: 3
Software: EMITest 5.03.02
Equipment Tested:
Device Manufacturer Model # S/N
config 1
Support Equipment:
Device Manufacturer Model # S/N
config 1
Test Conditions / Notes:
The EUT is placed on the wooden table with Styrofoam lining Two wafers are installed in the EUT.
Freq: 1.487MHz
Modulation: OOK
Protocol: Proprietary
WiFi is Disabled.
Mode A:
FOUP charging Wafer (Using a SA Utilities) (Continuous Wafer Charge Power)
Custom SA Software for FOUP
Modules tunes RF power immediately (upon wafer insertion)
Modules then applies Continuous Charge power
FOUP remains in this mode until the SW is replaced (or until the wafer is removed)
Test environment conditions: Temperature: 28°C, Relative Humidity: 38%, Atmospheric Pressure: 100kPa
Note:
*Fundamental measured with RBW=30Hz, VBW=91Hz as determined during evaluation of 20dB BW at 1 meter
distance due to the presence of ambient signal. It was verified at 1 meter distance that the variation of RBW did not
change the measured amplitude of the transmit signal.
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Report No.: 98979-9A
Test Equipment:
ID Asset # Description Model Calibration Date Cal Due Date
AN02672 Spectrum Analyzer E4446A 9/30/2015 9/30/2017
T1 ANP04249 Cable CXTA04A-50 3/3/2016 3/3/2018
T2 ANP06230 Cable CXTA04A-50 3/3/2016 3/3/2018
T3 ANP06847 Cable LMR195-FR-6 7/9/2015 7/9/2017
T4 ANP06884 Cable LMR195-FR-4 10/27/2015 10/27/2017
T5 AN00226 Loop Antenna 6502 4/4/2016 4/4/2018
Page 16 of 48
Report No.: 98979-9A
Test Location: CKC Laboratories, Inc. • 5046 Sierra Pines Drive • Mariposa, CA 95338 • (209) 966-5240
Customer: KLA-Tencor
Specification: 15.209 Radiated Emissions
Work Order #: 98979 Date: 8/26/2016
Test Type: Radiated Scan Time: 19:10:37
Tested by: E. Wong Sequence#: 4
Software: EMITest 5.03.02
Equipment Tested:
Device Manufacturer Model # S/N
Config1
Support Equipment:
Device Manufacturer Model # S/N
Config1
Test Conditions / Notes:
The EUT is placed on the wooden table with Styrofoam lining Two wafers are installed in the EUT.
Freq: 1.528MHz
Modulation: OOK
Protocol: Proprietary
WiFi is Disabled.
Test environment conditions: Temperature: 28°C, Relative Humidity: 38%, Atmospheric Pressure: 100kPa
Note: Fundamental measured at 1 meter distance due to the extremely weak signal strength.
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Report No.: 98979-9A
Test Equipment:
ID Asset # Description Model Calibration Date Cal Due Date
T1 AN02672 Spectrum Analyzer E4446A 9/30/2015 9/30/2017
T2 ANP04249 Cable CXTA04A-50 3/3/2016 3/3/2018
T3 ANP06230 Cable CXTA04A-50 3/3/2016 3/3/2018
T4 ANP06847 Cable LMR195-FR-6 7/9/2015 7/9/2017
T5 ANP06884 Cable LMR195-FR-4 10/27/2015 10/27/2017
T6 AN00226 Loop Antenna 6502 4/4/2016 4/4/2018
T7 ANP06231 Cable CXTA04A-70 3/3/2016 3/3/2018
T8 ANP06232 Cable CXTA04A-35 3/3/2016 3/3/2018
Page 19 of 48
Report No.: 98979-9A
Test Setup Photo(s)
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Report No.: 98979-9A
15.209 Radiated Emissions
Test Setup/Conditions
Test Location: Mariposa Lab A Test Engineer: E. Wong
Test Method: ANSI C63.10 (2013) Test Date(s): 8/25/2016
Configuration: 1
Environmental Conditions
Temperature (ºC) 28 Relative Humidity (%): 38
Test Data
Test Location: CKC Laboratories, Inc. • 5046 Sierra Pines Drive • Mariposa, CA 95338 • (209) 966-5240
Customer: KLA-Tencor
Specification: 15.209 Radiated Emissions
Work Order #: 98979 Date: 8/26/2016
Test Type: Radiated Scan Time: 19:58:40
Tested by: E. Wong Sequence#: 3
Software: EMITest 5.03.02
Equipment Tested:
Device Manufacturer Model # S/N
config 1
Support Equipment:
Device Manufacturer Model # S/N
config 1
Test Conditions / Notes:
The EUT is placed on the wooden table with Styrofoam lining two wafers are installed in the EUT.
Freq: 1.487MHz
Modulation: OOK
Protocol: Proprietary
WiFi is Disabled.
Mode A:
FOUP charging Wafer (Using a SA Utilities) (Continuous Wafer Charge Power)
Custom SA Software for FOUP
Modules tunes RF power immediately (upon wafer insertion)
Modules then applies Continuous Charge power
FOUP remains in this mode until the SW is replaced (or until the wafer is removed)
Page 21 of 48
Report No.: 98979-9A
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Report No.: 98979-9A
Test Equipment:
ID Asset # Description Model Calibration Date Cal Due Date
T1 AN02672 Spectrum Analyzer E4446A 9/30/2015 9/30/2017
T2 AN01993 Biconilog Antenna CBL6111C 3/11/2016 3/11/2018
T3 ANP05656 Attenuator PE7004-6 12/22/2015 12/22/2017
T4 ANP04249 Cable CXTA04A-50 3/3/2016 3/3/2018
T5 ANP06230 Cable CXTA04A-50 3/3/2016 3/3/2018
T6 ANP06847 Cable LMR195-FR-6 7/9/2015 7/9/2017
T7 AN00449 Preamp-Top Amp 8447F 2/18/2016 2/18/2018
(dB)
T8 ANP06884 Cable LMR195-FR-4 10/27/2015 10/27/2017
T9 AN00226 Loop Antenna 6502 4/4/2016 4/4/2018
Page 23 of 48
Report No.: 98979-9A
10 90.369M 31.8 +0.0 +8.8 +6.0 +0.8 +10.5 32.3 43.5 -11.2 Vert
+1.1 +0.2 -27.1 +0.2
+0.0
11 206.331M 29.0 +0.0 +9.7 +6.0 +1.1 +10.5 32.1 43.5 -11.4 Horiz
+1.7 +0.3 -26.5 +0.3
+0.0
12 85.933M 24.9 +0.0 +8.4 +6.0 +0.8 +10.5 24.9 40.0 -15.1 Vert
+1.0 +0.2 -27.1 +0.2
+0.0
13 172.106M 22.2 +0.0 +9.5 +6.0 +1.0 +10.5 24.6 43.5 -18.9 Horiz
+1.5 +0.3 -26.6 +0.2
+0.0
14 10.310M 10.6 +0.0 +0.0 +0.0 +0.2 -19.1 2.1 29.5 -27.4 Perpe
+0.4 +0.1 +0.0 +0.1
+9.8
Page 24 of 48
Report No.: 98979-9A
Test Location: CKC Laboratories, Inc. • 5046 Sierra Pines Drive • Mariposa, CA 95338 • (209) 966-5240
Customer: KLA-Tencor
Specification: 15.209 Radiated Emissions
Work Order #: 98979 Date: 8/26/2016
Test Type: Radiated Scan Time: 19:10:37
Tested by: E. Wong Sequence#: 4
Software: EMITest 5.03.02
Equipment Tested:
Device Manufacturer Model # S/N
Config1
Support Equipment:
Device Manufacturer Model # S/N
Config1
Test Conditions / Notes:
The EUT is placed on the wooden table with Styrofoam lining Two wafers are installed in the EUT.
Freq: 1.528MHz
Modulation: OOK
Protocol: Proprietary
WiFi is Disabled.
Test environment conditions: Temperature: 28°C, Relative Humidity: 38%, Atmospheric Pressure: 100kPa
Page 25 of 48
Report No.: 98979-9A
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Report No.: 98979-9A
Test Equipment:
ID Asset # Description Model Calibration Date Cal Due Date
T1 AN02672 Spectrum Analyzer E4446A 9/30/2015 9/30/2017
T2 AN01993 Biconilog Antenna CBL6111C 3/11/2016 3/11/2018
T3 ANP05656 Attenuator PE7004-6 12/22/2015 12/22/2017
T4 ANP04249 Cable CXTA04A-50 3/3/2016 3/3/2018
T5 ANP06230 Cable CXTA04A-50 3/3/2016 3/3/2018
T6 ANP06847 Cable LMR195-FR-6 7/9/2015 7/9/2017
T7 AN00449 Preamp-Top Amp 8447F 2/18/2016 2/18/2018
(dB)
T8 ANP06884 Cable LMR195-FR-4 10/27/2015 10/27/2017
AN00226 Loop Antenna 6502 4/4/2016 4/4/2018
T9 ANP05494 Dipole Antenna VHAP 12/11/2014 12/11/2016
ANP06231 Cable CXTA04A-70 3/3/2016 3/3/2018
ANP06232 Cable CXTA04A-35 3/3/2016 3/3/2018
Page 27 of 48
Report No.: 98979-9A
9 66.017M 39.6 +0.0 +5.4 +6.0 +0.7 +10.5 36.4 40.0 -3.6 Vert
QP +1.0 +0.2 -27.1 +0.1
+0.0
^ 66.017M 42.6 +0.0 +5.4 +6.0 +0.7 +10.5 39.4 40.0 -0.6 Vert
+1.0 +0.2 -27.1 +0.1
+0.0
11 357.210M 32.1 +0.0 +15.2 +6.0 +1.5 +10.5 41.9 46.0 -4.1 Vert
+2.3 +0.5 -26.6 +0.4
+0.0
12 142.579M 31.7 +0.0 +11.5 +6.0 +1.0 +10.5 35.7 43.5 -7.8 Vert
+1.4 +0.3 -26.9 +0.2
+0.0
13 333.830M 28.9 +0.0 +14.6 +6.0 +1.4 +10.5 37.7 46.0 -8.3 Vert
+2.1 +0.4 -26.5 +0.3
+0.0
14 213.850M 29.6 +0.0 +10.3 +6.0 +1.2 +10.5 33.6 43.5 -9.9 Vert
+1.7 +0.4 -26.4 +0.3
+0.0
15 63.100M 27.9 +0.0 +5.7 +6.0 +0.7 +10.5 24.9 40.0 -15.1 Horiz
+0.9 +0.2 -27.1 +0.1
+0.0
16 130.520M 23.8 +0.0 +11.7 +6.0 +0.9 +10.5 27.7 43.5 -15.8 Horiz
+1.3 +0.3 -27.0 +0.2
+0.0
17 341.500M 18.0 +0.0 +14.8 +6.0 +1.5 +10.5 27.4 46.0 -18.6 Horiz
+2.2 +0.5 -26.5 +0.4
+0.0
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Report No.: 98979-9A
Test Setup Photo(s)
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Report No.: 98979-9A
15.207 AC Conducted Emissions
Test Setup/Conditions
Test Location: Mariposa Lab A Test Engineer: E. Wong
Test Method: ANSI C63.10 (2013) Test Date(s): 8/27/2016
Configuration: 1
Environmental Conditions
Temperature (ºC) 27 Relative Humidity (%): 39
Test Data
Test Location: CKC Laboratories, Inc. • 5046 Sierra Pines Drive • Mariposa, CA 95338 • (209) 966-5240
Customer: KLA-Tencor
Specification: 15.207 AC Mains - Average
Work Order #: 98979 Date: 8/27/2016
Test Type: Conducted Emissions Time: 17:08:07
Tested by: E. Wong Sequence#: 20
Software: EMITest 5.03.02 110V 60Hz
Equipment Tested:
Device Manufacturer Model # S/N
Config1
Support Equipment:
Device Manufacturer Model # S/N
Config1
Test Conditions / Notes:
The EUT is placed on the wooden table. Two wafers are installed in the EUT.
Freq: 1.487MHz
Modulation: OOK
Protocol: Proprietary
WiFi is Disabled.
Mode A:
FOUP charging Wafer (Using a SA Utilities) (Continuous Wafer Charge Power)
Custom SA Software for FOUP
Modules tunes RF power immediately (upon wafer insertion)
Modules then applies Continuous Charge power
FOUP remains in this mode until the SW is replaced (or until the wafer is removed)
The EUT is connected to a charger during the evaluation.
Frequency range of measurement = 150kHz- 30MHz.
150 kHz-30 MHz; RBW=9 kHz, VBW=9kHz
Test environment conditions: Temperature: 27°C, Relative Humidity: 38%, Atmospheric Pressure: 100kPa
Page 30 of 48
Report No.: 98979-9A
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Report No.: 98979-9A
Test Equipment:
ID Asset Description Model Calibration Date Cal Due Date
T1 AN02672 Spectrum Analyzer E4446A 9/30/2015 9/30/2017
T2 AN02609 High Pass Filter HE9615-150K- 2/18/2016 2/18/2018
50-720B
T3 ANP06884 Cable LMR195-FR-4 10/27/2015 10/27/2017
T4 AN06231 Cable CXTA04A-70 3/3/2016 3/3/2018
T5 ANP06232 Cable CXTA04A-35 3/3/2016 3/3/2018
T6 ANP06847 Cable LMR195-FR-6 7/9/2015 7/9/2017
T7 ANP05624 Attenuator PE7010-10 1/15/2015 1/15/2017
T8 AN00374 50uH LISN-Line 8028-TS-50- 1/4/2016 1/4/2017
(dB) BNC
AN00374 50uH LISN-Return 8028-TS-50- 1/4/2016 1/4/2017
(dB) BNC
Page 32 of 48
Report No.: 98979-9A
14 703.404k 24.0 +0.0 +0.3 +0.0 +0.1 +0.0 34.4 46.0 -11.6 L1-Li
Ave +0.0 +0.0 +9.9 +0.1
^ 703.403k 38.1 +0.0 +0.3 +0.0 +0.1 +0.0 48.5 46.0 +2.5 L1-Li
+0.0 +0.0 +9.9 +0.1
16 629.229k 23.5 +0.0 +0.3 +0.0 +0.1 +0.0 33.9 46.0 -12.1 L1-Li
Ave +0.0 +0.0 +9.9 +0.1
^ 629.228k 38.7 +0.0 +0.3 +0.0 +0.1 +0.0 49.1 46.0 +3.1 L1-Li
+0.0 +0.0 +9.9 +0.1
18 1.949M 22.4 +0.0 +0.2 +0.0 +0.2 +0.0 32.9 46.0 -13.1 L1-Li
Ave +0.1 +0.0 +9.9 +0.1
^ 1.949M 35.4 +0.0 +0.2 +0.0 +0.2 +0.0 45.9 46.0 -0.1 L1-Li
+0.1 +0.0 +9.9 +0.1
20 819.030k 18.5 +0.0 +0.3 +0.0 +0.1 +0.0 28.9 46.0 -17.1 L1-Li
Ave +0.0 +0.0 +9.9 +0.1
^ 819.029k 35.4 +0.0 +0.3 +0.0 +0.1 +0.0 45.8 46.0 -0.2 L1-Li
+0.0 +0.0 +9.9 +0.1
Page 33 of 48
Report No.: 98979-9A
Test Location: CKC Laboratories, Inc. • 5046 Sierra Pines Drive • Mariposa, CA 95338 • (209) 966-5240
Customer: KLA-Tencor
Specification: 15.207 AC Mains - Average
Work Order #: 98979 Date: 8/27/2016
Test Type: Conducted Emissions Time: 17:14:18
Tested By: E. Wong Sequence#: 21
Software: EMITest 5.03.02 110V 60Hz
Equipment Tested:
Device Manufacturer Model # S/N
Config1
Support Equipment:
Device Manufacturer Model # S/N
Config1
Test Conditions / Notes:
The EUT is placed on the wooden table. Two wafers are installed in the EUT.
Freq: 1.487MHz
Modulation: OOK
Protocol: Proprietary
WiFi is Disabled.
Mode A:
FOUP charging Wafer (Using a SA Utilities) (Continuous Wafer Charge Power)
Custom SA Software for FOUP
Modules tunes RF power immediately (upon wafer insertion)
Modules then applies Continuous Charge power
FOUP remains in this mode until the SW is replaced (or until the wafer is removed)
Test environment conditions: Temperature: 27°C, Relative Humidity: 38%, Atmospheric Pressure: 100kPa
Page 34 of 48
Report No.: 98979-9A
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Report No.: 98979-9A
Test Equipment:
ID Asset # Description Model Calibration Date Cal Due Date
AN02672 Spectrum Analyzer E4446A 9/30/2015 9/30/2017
T1 AN02609 High Pass Filter HE9615-150K- 2/18/2016 2/18/2018
50-720B
T2 ANP06884 Cable LMR195-FR-4 10/27/2015 10/27/2017
T3 AN06231 Cable CXTA04A-70 3/3/2016 3/3/2018
T4 ANP06232 Cable CXTA04A-35 3/3/2016 3/3/2018
T5 ANP06847 Cable LMR195-FR-6 7/9/2015 7/9/2017
T6 ANP05624 Attenuator PE7010-10 1/15/2015 1/15/2017
AN00374 50uH LISN-Line 8028-TS-50- 1/4/2016 1/4/2017
(dB) BNC
T7 AN00374 50uH LISN-Return 8028-TS-50- 1/4/2016 1/4/2017
(dB) BNC
Page 36 of 48
Report No.: 98979-9A
13 639.410k 25.0 +0.3 +0.0 +0.1 +0.0 +0.0 35.4 46.0 -10.6 L2-Ne
Ave +0.0 +9.9 +0.1
^ 639.409k 39.3 +0.3 +0.0 +0.1 +0.0 +0.0 49.7 46.0 +3.7 L2-Ne
+0.0 +9.9 +0.1
15 1.974M 23.7 +0.2 +0.0 +0.2 +0.1 +0.0 34.2 46.0 -11.8 L2-Ne
Ave +0.0 +9.9 +0.1
^ 1.974M 33.9 +0.2 +0.0 +0.2 +0.1 +0.0 44.4 46.0 -1.6 L2-Ne
+0.0 +9.9 +0.1
17 717.948k 23.6 +0.3 +0.0 +0.1 +0.0 +0.0 34.0 46.0 -12.0 L2-Ne
Ave +0.0 +9.9 +0.1
^ 717.947k 38.5 +0.3 +0.0 +0.1 +0.0 +0.0 48.9 46.0 +2.9 L2-Ne
+0.0 +9.9 +0.1
Page 37 of 48
Report No.: 98979-9A
Test Location: CKC Laboratories, Inc. • 5046 Sierra Pines Drive • Mariposa, CA 95338 • (209) 966-5240
Customer: KLA-Tencor
Specification: 15.207 AC Mains - Average
Work Order #: 98979 Date: 8/27/2016
Test Type: Conducted Emissions Time: 17:35:54
Tested by: E. Wong Sequence#: 23
Software: EMITest 5.03.02 110V 60Hz
Equipment Tested:
Device Manufacturer Model # S/N
Config1
Support Equipment:
Device Manufacturer Model # S/N
Config1
Test Conditions / Notes:
The EUT is placed on the wooden table. Two wafers are installed in the EUT.
Freq: 1.487MHz
Modulation: OOK
Protocol: Proprietary
WiFi is Disabled.
Test environment conditions: Temperature: 27°C, Relative Humidity: 38%, Atmospheric Pressure: 100kPa
Page 38 of 48
Report No.: 98979-9A
Page 39 of 48
Report No.: 98979-9A
Test Equipment:
ID Asset # Description Model Calibration Date Cal Due Date
AN02672 Spectrum Analyzer E4446A 9/30/2015 9/30/2017
T1 AN02609 High Pass Filter HE9615-150K- 2/18/2016 2/18/2018
50-720B
T2 ANP06884 Cable LMR195-FR-4 10/27/2015 10/27/2017
T3 AN06231 Cable CXTA04A-70 3/3/2016 3/3/2018
T4 ANP06232 Cable CXTA04A-35 3/3/2016 3/3/2018
T5 ANP06847 Cable LMR195-FR-6 7/9/2015 7/9/2017
T6 ANP05624 Attenuator PE7010-10 1/15/2015 1/15/2017
T7 AN00374 50uH LISN-Line 8028-TS-50- 1/4/2016 1/4/2017
(dB) BNC
AN00374 50uH LISN-Return 8028-TS-50- 1/4/2016 1/4/2017
(dB) BNC
Page 40 of 48
Report No.: 98979-9A
15 664.862k 22.0 +0.3 +0.0 +0.1 +0.0 +0.0 32.4 46.0 -13.6 L1-Li
Ave +0.0 +9.9 +0.1
^ 664.861k 39.9 +0.3 +0.0 +0.1 +0.0 +0.0 50.3 46.0 +4.3 L1-Li
+0.0 +9.9 +0.1
17 763.762k 21.2 +0.3 +0.0 +0.1 +0.0 +0.0 31.6 46.0 -14.4 L1-Li
Ave +0.0 +9.9 +0.1
^ 763.761k 37.6 +0.3 +0.0 +0.1 +0.0 +0.0 48.0 46.0 +2.0 L1-Li
+0.0 +9.9 +0.1
19 727.402k 20.9 +0.3 +0.0 +0.1 +0.0 +0.0 31.3 46.0 -14.7 L1-Li
Ave +0.0 +9.9 +0.1
^ 727.401k 35.3 +0.3 +0.0 +0.1 +0.0 +0.0 45.7 46.0 -0.3 L1-Li
+0.0 +9.9 +0.1
^ 731.764k 34.0 +0.3 +0.0 +0.1 +0.0 +0.0 44.4 46.0 -1.6 L1-Li
+0.0 +9.9 +0.1
22 621.229k 19.7 +0.3 +0.0 +0.1 +0.0 +0.0 30.1 46.0 -15.9 L1-Li
Ave +0.0 +9.9 +0.1
^ 621.229k 34.9 +0.3 +0.0 +0.1 +0.0 +0.0 45.3 46.0 -0.7 L1-Li
+0.0 +9.9 +0.1
24 4.037M 18.6 +0.1 +0.0 +0.2 +0.1 +0.0 29.1 46.0 -16.9 L1-Li
Ave +0.1 +9.9 +0.1
^ 4.037M 33.0 +0.1 +0.0 +0.2 +0.1 +0.0 43.5 46.0 -2.5 L1-Li
+0.1 +9.9 +0.1
Page 41 of 48
Report No.: 98979-9A
Test Location: CKC Laboratories, Inc. • 5046 Sierra Pines Drive • Mariposa, CA 95338 • (209) 966-5240
Customer: KLA-Tencor
Specification: 15.207 AC Mains - Average
Work Order #: 98979 Date: 8/27/2016
Test Type: Conducted Emissions Time: 17:28:36
Tested by: E. Wong Sequence#: 22
Software: EMITest 5.03.02 110V 60Hz
Equipment Tested:
Device Manufacturer Model # S/N
Config1
Support Equipment:
Device Manufacturer Model # S/N
Config1
Test Conditions / Notes:
The EUT is placed on the wooden table. Two wafers are installed in the EUT.
Freq: 1.487MHz
Modulation: OOK
Protocol: Proprietary
WiFi is Disabled.
Test environment conditions: Temperature: 27°C, Relative Humidity: 38%, Atmospheric Pressure: 100kPa
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Report No.: 98979-9A
Page 43 of 48
Report No.: 98979-9A
Test Equipment:
ID Asset # Description Model Calibration Date Cal Due Date
AN02672 Spectrum Analyzer E4446A 9/30/2015 9/30/2017
T1 AN02609 High Pass Filter HE9615-150K- 2/18/2016 2/18/2018
50-720B
T2 ANP06884 Cable LMR195-FR-4 10/27/2015 10/27/2017
T3 AN06231 Cable CXTA04A-70 3/3/2016 3/3/2018
T4 ANP06232 Cable CXTA04A-35 3/3/2016 3/3/2018
T5 ANP06847 Cable LMR195-FR-6 7/9/2015 7/9/2017
T6 ANP05624 Attenuator PE7010-10 1/15/2015 1/15/2017
AN00374 50uH LISN-Line 8028-TS-50- 1/4/2016 1/4/2017
(dB) BNC
T7 AN00374 50uH LISN-Return 8028-TS-50- 1/4/2016 1/4/2017
(dB) BNC
Page 44 of 48
Report No.: 98979-9A
14 683.042k 24.4 +0.3 +0.0 +0.1 +0.0 +0.0 34.8 46.0 -11.2 L2-Ne
Ave +0.0 +9.9 +0.1
^ 683.041k 40.5 +0.3 +0.0 +0.1 +0.0 +0.0 50.9 46.0 +4.9 L2-Ne
+0.0 +9.9 +0.1
16 755.035k 20.3 +0.2 +0.0 +0.1 +0.0 +0.0 30.6 46.0 -15.4 L2-Ne
Ave +0.0 +9.9 +0.1
^ 755.035k 37.5 +0.2 +0.0 +0.1 +0.0 +0.0 47.8 46.0 +1.8 L2-Ne
+0.0 +9.9 +0.1
18 734.674k 16.6 +0.2 +0.0 +0.1 +0.0 +0.0 26.9 46.0 -19.1 L2-Ne
Ave +0.0 +9.9 +0.1
^ 734.673k 34.9 +0.2 +0.0 +0.1 +0.0 +0.0 45.2 46.0 -0.8 L2-Ne
+0.0 +9.9 +0.1
Page 45 of 48
Report No.: 98979-9A
Test Setup Photo(s)
Page 46 of 48
Report No.: 98979-9A
SUPPLEMENTAL INFORMATION
Measurement Uncertainty
Uncertainty Value Parameter
4.73 dB Radiated Emissions
3.34 dB Mains Conducted Emissions
3.30 dB Disturbance Power
Reported uncertainties represent expanded uncertainties expressed at approximately the 95% confidence level
using a coverage factor of k=2. Compliance is deemed to occur provided measurements are below the specified
limits.
The equipment under test (EUT) was set up in a manner that represented its normal use, as shown in the setup
photographs. Any special conditions required for the EUT to operate normally are identified in the comments that
accompany the emissions tables.
The emissions data was taken with a spectrum analyzer or receiver. Incorporating the applicable correction factors
for distance, antenna, cable loss and amplifier gain, the data was reduced as shown in the table below. The
corrected data was then compared to the applicable emission limits. Preliminary and final measurements were
taken in order to ensure that all emissions from the EUT were found and maximized.
CORRECTION FACTORS
The basic spectrum analyzer reading was converted using correction factors as shown in the highest emissions
readings in the tables. For radiated emissions in dBµV/m, the spectrum analyzer reading in dBµV was corrected by
using the following formula. This reading was then compared to the applicable specification limit. Individual
measurements were compared with the displayed limit value in the margin column. The margin was calculated
based on subtracting the limit value from the corrected measurement value; a positive margin represents a
measurement exceeding the limit, while a negative margin represents a measurement less than the limit.
SAMPLE CALCULATIONS
Meter reading (dBµV)
+ Antenna Factor (dB/m)
+ Cable Loss (dB)
- Distance Correction (dB)
- Preamplifier Gain (dB)
= Corrected Reading (dBµV/m)
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Report No.: 98979-9A
TEST INSTRUMENTATION AND ANALYZER SETTINGS
The test instrumentation and equipment listed were used to collect the emissions data. A spectrum analyzer or
receiver was used for all measurements. Unless otherwise specified, the following table shows the measuring
equipment bandwidth settings that were used in designated frequency bands. For testing emissions, an
appropriate reference level and a vertical scale size of 10 dB per division were used.
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Report No.: 98979-9A