Unit-Iv Laser Metrology
Unit-Iv Laser Metrology
Unit-Iv Laser Metrology
LASER METROLOGY
CONTENTS
PRECISION INSTRUMENT BASED ON LASER
Laser Metrology
Use of Laser
Principle of Laser
LASER INTERFEROMETRY
LASER INTERFEROMETER
Michelson Interferometer
Dual Frequency Laser Interferometer
Twyman-Green Interferometer
Laser Viewers
INTERFEROMETRIC MEASUREMENT OF ANGLE
MACHINE TOOL TESTING
CO-ORDINATE MEASURING MACHINES
Types of Measuring Machines
Constructions of CMM
Types of CMM
Causes of Errors in CMM
Calibration of Three Co-Ordinate Measuring Machine
APPLICATIONS
COMPUTER CONTROLLED CO-ORDINATE MEASURING MACHINE
Trigger type probe system
Measuring type probe system
CNC-CMM
COMPUTER AIDED INSPECTION USING ROBOTS
Integration of CAD/CAM with Inspection System
Flexible Inspection System
Machine Vision
Vision System
Function of Machine Vision
Applications
TECHNICAL TERMS
Interferometer
Interferometer is optical instruments used for measuring flatness and determining
the lengths of slip gauges by direct reference to the wavelength of light.
Machine Vision
Machine vision can be defined as a means of simulating the image recognition and
analysis capabilities of the human system with electronic and electromechanical techniques.
Inspection
It is the ability of an automated vision system to recognize well-defined pattern and
if these pattern match these stored in the system makes machine vision ideal for inspection
of raw materials, parts, assemblies etc.
CMM
It is a three dimensional measurements for various components. These machines have
precise movement is x,y,z coordinates which can be easily controlled and measured. Each
slide in three directions is equipped with a precision linear measurement transducer which
gives digital display and senses positive and negative direction.
Laser Metrology
Metrology lasers are low power instruments. Most are helium-neon type. Wave
output laser that emit visible or infrared light. He-Ne lasers produce light at a wavelength
of 0.6µm that is in phase, coherent and a thousand times more intense than any other
monochromatic source. Laser systems have wide dynamic range, low optical cross talk
and high contrast. Laser fined application in dimensional measurements and surface
inspection because of the properties of laser light. These are useful where precision,
accuracy, rapid non-contact gauging of soft, delicate or hot moving points.
Use of Laser
Laser Telemetric system
Laser telemetric system is a non-contact gauge that measures with a collimated
laser beam. It measures at the rate of 150 scans per second. It basically consists of three
components, a transmitter, a receiver and processor electronics. The transmitter module
produces a collimated parallel scanning laser beam moving at a high constant, linear
speed. The scanning beam appears a red line. The receiver module collects and
photoelically senses the laser light transmitted past the object being measured. The
processor electronics takes the received signals to convert them 10 a convenient form and
displays the dimension being gauged. The transmitter contains a low power helium-neon
gas laser and its power supply, a specially designed collimating lens, a synchronous
motor, a multi faceted reflector prism, a synchronous pulse photo detector and a
protective replaceable window. The high speed of scanning permits on line gauging and
thus it is possible to detect changes in dimensions when components are moving on a
continuous product such as in rolling process moving at very high speed. There is no
need of waiting or product to cool for taking measurements. This system can also be
applied on production machines and control then with closed feedback loops. Since the
output of this system is available in digital form, it can run a process controller limit
alarms can be provided and output can be taken on digital printer.
Fig 4.1 Laser Telemetric System
The two-frequency laser head provides one frequency with P-polarization and
another frequency with S-polarization. The laser beam is split at the polarizing beam
splitter into its two separate frequencies. The measuring beam is directed through the
interferometer to reflect off a target mirror or retro reflector attached to the object to be
measured. The reference beam is reflected from fixed retro reflector. The measurement
beam on its return path recombines with the reference beam and is directed to the
electronic receiver.
Figure shows the length measurement by fringe counting. The laser output, which
may be incoherent illumines three slits at a time in the first plane which form interference
fringes. The movement can be determined by a detector. The total number of slits in the
first plane is governed by the length over which measurement is required
The spacing between the slits and distance of the slit to the plane of the grating
depend on the wavelength of the light used.
Principle of Laser
The photon emitted during stimulated emission has the same energy, phase and
frequency as the incident photon. This principle states that the photon comes in contact
with another atom or molecule in the higher energy level E2 then it will cause the atom
to
return to ground state energy level E1 by releasing another photon. The sequence of
triggered identical photon from stimulated atom is known as stimulated emission. This
multiplication of photon through stimulated emission leads to coherent, powerful,
monochromatic, collimated beam of light emission. This light emission is called laser.
b) Beam benders
These are used to deflect the light beam around corners on its path from the laser
to each axis. These are actually just flat mirrors but having absolutely flat and very high
reflectivity. Normally these are restricted to 90° beam deflections to avoid disturbing the
polarizing vectors.
c) Retro reflectors
These can be plane mirrors, roof prism or cube corners. Cube corners are three
mutually perpendicular plane mirrors and the reflected beam is always parallel to the
incidental beam. Each ACLI transducers need two retro reflectors. All ACLI
measurements are made by sensing differential motion between two retro reflectors
relative to an interferometer. Plane mirror used as retro reflectors with the plane mirror
interferometer must be flat to within 0.06 micron per cm.
LASER INTERFEROMETER
It is possible to maintain the quality of interference fringes over longer distance
when lamp is replaced by a laser source. Laser interferometer uses AC laser as the light
source and the measurements to be made over longer distance. Laser is a monochromatic
optical energy, which can be collimated into a directional beam AC. Laser interferometer
(ACLI) has the following advantages.
High repeatability
High accuracy
Long range optical path
Easy installations
Wear and tear
Schematic arrangement of laser interferometer is shown in fig. Two-frequency
zeeman laser generates light of two slightly different frequencies with opposite circular
polarisation. These beams get split up by beam splitter B One part travels towards B and
from there to external cube corner here the displacement is to the measured.
This interferometer uses cube corner reflectors which reflect light parallel to its
angle of incidence. Beam splitter B2 optically separates the frequency J which alone is
sent to the movable cube corner reflector. The second frequency from B2 is sent to a
fixed reflector which then rejoins f1 at the beam splitter B2 to produce alternate light and
dark interference flicker at about 2 Mega cycles per second. Now if the movable reflector
moves, then the returning beam frequency Doppler-shifted slightly up or down by Δf.
Thus the light beams moving towards photo detector P2 have frequencies f2 and (f1 ±
Δf1) and P2 changes these frequencies into electrical signal. Photo detector P2 receive
signal from beam splitter B2 and changes the reference beam frequencies f1 and f2
into
electrical signal. An AC amplifier A separates frequency. Difference signal f2 – f1 and
A2 separates frequency difference signal. The pulse converter extracts i. one cycle per
half wavelength of motion. The up-down pulses are counted electronically and displayed
in analog or digital form.
Michelson Interferometer
Michelson interferometer consists of a monochromatic light source a beam
splitter and two mirrors. The schematic arrangement of Michelson interferometer is
shown in fig. The monochromatic light falls on a beam splitter, which splits the light into
two rays of equal intensity at right angles. One ray is transmitted to mirror M1 and other
is reflected through beam splitter to mirror M2,. From both these mirrors, the rays are
reflected back and these return at the semireflecting surface from where they are
transmitted to the eye. Mirror M2 is fixed and mirror M1 is movable. If both the mirrors
are at same distance from beam splitter, then light will arrive in phase and observer will
see bright spot due to constructive interference. If movable mirror shifts by quarter
wavelength, then beam will return to observer 1800 out of phase and darkness will be
observed due to destructive interference
Each half-wave length of mirror travel produces a change in the measured optical
path of one wavelength and the reflected beam from the moving mirror shifts through
360° phase change. When the reference beam reflected from the fixed mirror and the
beam reflected from the moving mirror rejoin at the beam splitter, they alternately
reinforce and cancel each other as the mirror moves. Each cycle of intensity at the eye
represents l/2 of mirror travel. When white light source is used then a compensator plate
is introduced in each of the path of mirror M1 So that exactly the same amount of glass is
introduced in each of the path.
Laser Viewers
The profile of complex components like turbine blades can be checked by the use
of optical techniques. It is based on use of laser and CCTV. A section of the blade,
around its edge is delineated by two flat beam of laser light. This part of the edge is
viewed at a narrow angle by the TV camera or beam splitter
Both blade and graticule are displayed as magnified images on the monitor, the
graticule position being adjustable so that its image can be superimposed on the profile
image. The graticule is effectively viewed at the same angle as the blade. So, distortion
due to viewing angle affects both blade and graticule. This means that the graticule
images are direct 1:1.
INTERFEROMETRIC MEASUREMENT OF ANGLE
With laser interferometer it is possible to measure length to accuracy of 1 part in
106 on a routine basis. With the help of two retro reflectors placed at a fixed distance and
a length measuring laser interferometer the change in angle can be measured to an
accuracy of 0.1 second. The device uses sine Principle. The line joining the poles the
retro-reflectors makes the hypotenuse of the right triangle. The change in the path
difference of the reflected beam represents the side of the triangle opposite to the angle
being measured. Such laser interferometer can be used to measure an angle up to ± 10
degrees with a resolution of 0. 1 second. The principle of operation is shown in fig.
The alignment tests can be carried out over greater distances and to a greater degree
of accuracy using laser equipment.
Laser equipment produces real straight line, whereas an alignment telescope provides
an imaginary line that cannot be seen in space.
This is important when it is necessary to check number of components to a
predetermined straight line. Particularly if they are spaced relatively long distances
apart, as in aircraft production and in shipbuilding.
Laser equipment can also be used for checking flatness of machined surface by direct
displacement. By using are optical square in conjunction with laser equipment
squareness can be checked with reference to the laser base line.
Measuring machines are used for measurement of length over the outer surfaces
of a length bar or any other long member. The member may be either rounded or flat and
parallel. It is more useful and advantageous than vernier calipers, micrometer, screw
gauges etc. the measuring machines are generally universal character and can be used for
works of varied nature. The co-ordinate measuring machine is used for contact inspection
of parts. When used for computer-integrated manufacturing these machines are
controlled by computer numerical control. General software is provided for reverse
engineering complex shaped objects. The component is digitized using CNC, CMM and
it is then converted into a computer model which gives the two surface of the component.
These advances include for automatic work part alignment on the table. Savings in
inspection 5 to 10 percent of the time is required on a CMM compared to manual
inspection methods.
Types of Measuring Machines
1. Length bar measuring machine.
2. Newall measuring machine.
3. Universal measuring machine.
4. Co-ordinate measuring machine.
5. Computer controlled co-ordinate measuring machine.
Constructions of CMM
Co-ordinate measuring machines are very useful for three dimensional
measurements. These machines have movements in X-Y-Z co-ordinate, controlled and
measured easily by using touch probes. These measurements can be made by positioning
the probe by hand, or automatically in more expensive machines. Reasonable accuracies
are 5 micro in. or 1 micrometer. The method these machines work on is measurement of
the position of the probe using linear position sensors. These are based on moiré fringe
patterns (also used in other systems). Transducer is provided in tilt directions for giving
digital display and senses positive and negative direction.
Types of CMM
Working Principle
CMM is used for measuring the distance between two holes. The work piece is
clamped to the worktable and aligned for three measuring slides x, y and z. The
measuring head provides a taper probe tip which is seated in first datum hole and the
position of probe digital read out is set to zero. The probe is then moved to successive
holes, the read out represent the co-ordinate part print hole location with respect to the
datum hole. Automatic recording and data processing units are provided to carry out
complex geometric and statistical analysis. Special co-ordinate measuring machines are
provided both linear and rotary axes. This can measure various features of parts like
cone, cylinder and hemisphere. The prime advantage of co-ordinate measuring machine
is the quicker inspection and accurate measurements.
Fig 4.13 Schematic Diagram
Performance of CMM
Geometrical accuracies such as positioning accuracy, Straightness and Squareness.
Total measuring accuracy in terms of axial length measuring accuracy. Volumetric
length measuring accuracy and length measuring repeatability. i.e., Coordinate
measuring machine has to be tested as complete system.
Since environmental effects have great influence for the accuracy testing, including
thermal parameters, vibrations and relative humidity are required.
APPLICATIONS
Co-ordinate measuring machines find applications in automobile, machine tool,
electronics, space and many other large companies.
These machines are best suited for the test and inspection of test equipment, gauges
and tools.
For aircraft and space vehicles, hundred percent inspections is carried out by using
CMM.
CMM can be used for determining dimensional accuracy of the components.
These are ideal for determination of shape and position, maximum metal condition,
linkage of results etc. which cannot do in conventional machines.
CMM can also be used for sorting tasks to achieve optimum pairing of components
within tolerance limits.
CMMs are also best for ensuring economic viability of NC machines by reducing
their downtime for inspection results. They also help in reducing cost, rework cost at
the appropriate time with a suitable CMM.
Advantages
The inspection rate is increased.
Accuracy is more.
Operators error can be minimized.
Skill requirements of the operator is reduced.
Reduced inspection fixturing and maintenance cost.
Reduction in calculating and recording time.
Reduction in set up time.
No need of separate go / no go gauges for each feature.
Reduction of scrap and good part rejection.
Reduction in off line analysis time.
Simplification of inspection procedures, possibility of reduction of total inspection
time through use of statistical and data analysis techniques.
Disadvantages
The lable and probe may not be in perfect alignment.
The probe may have run out.
The probe moving in Z-axis may have some perpendicular errors.
Probe while moving in X and Y direction may not be square to each other.
There may be errors in digital system.
The buckling mechanism is a three point hearing the contacts which are arranged at
1200 around the circumference. These contacts act as electrical micro switches.
When being touched in any probing direction one or f contacts is lifted off and the
current is broken, thus generating a pulse, when the circuit is opened, the co-ordinate
positions are read and stored.
After probing the spring ensures the perfect zero position of the three-point bearing.
The probing force is determined by the pre stressed force of the spring with this
probe system data acquisition is always dynamic and therefore the measuring time is
shorter than in static principle.
Measuring type probe system
easily.
Fig 4.18 Buckling Mechanism
The mathematical model of the mechanical
system is shown in figure. If the components of the CMM are assumed as rigid
bodies, the deviations of a carriage can be described by three displacement
deviations.
Parallel to the axes 1, 2 and 3 and by three
rotational deviations about the axes 4, 5 and
6.Similarly deviations 7-12 occur for
carriage and 13-18 occur for Z carriage and
the three squareness deviations 19, 20 and 21
are to be measured and to be treated in the
mathematical model.
Moving the probe stylus in the Y direction the co-ordinate system L is not a straight
line but a curved one due to errors in the guide.
If moving on measure line L further corrections are required in X, Y and Z
coordinates due to the offsets X and Z from curve L resulting from the pitch angle 5,
the roll angle 4 and the yaw angle 6.
Similarly the deviations of all three carriages and the squareness errors can be taken
into account.
The effect of error correction can be tested by means of calibrated step gauges.
The following test items are carried out for CMM.
(i) Measurement accuracy
a. Axial length measuring accuracy
b.Volumetric length measuring
accuracy
(ii) Axial motion accuracy
a. Linear displacement accuracy
b. Straightness
c. Perpendicularity
d. Pitch, Yaw and roll.
The axial length measuring accuracy is tested at the lowest position of the Z-axis.
The lengths tested are approximately 1/10, 1/5, 2/5, 3/5 and 4/5 of the measuring range of
each axis of CMM. Tile test is repeated five times for each measuring length and results
plotted and value of measuring accuracy is derived.
CNC-CMM
Constructio
n
The main features of CNC-CMM are shown in figure has stationary granite
measuring table, Length measuring system. Air bearings; control unit and software are
the important parts of CNC & CMM.
Fig 4.19 CNC - CMM
A new software for reverse engineering complex shaped objects. The component
is digitized using CNC CMM. The digitized data is converted into a computer model
which is the true surface of the component. Recent advances include the automatic work
part alignment and to orient the coordinate system. Savings in inspection time by using
CMM is 5 to 10% compared to manual inspection method.
Robots can be used to carry out inspection or testing operation for mechanical
dimension physical characteristics and product performance. Checking robot,
programmable robot, and co-ordinate robot are some of the types given to a multi axis
measuring machines. These machines automatically perform all the basic routines of a
CNC co ordinate measuring machine but at a faster rate than that of CMM. They are not
as accurate as p as CMM but they can check up to accuracies of 5micrometers. The co-
ordinate robot can take successive readings at high speed and evaluate the results using a
computer graphics based real time statistical analysis system.
Machine Vision
Vision System
The schematic diagram of a typical vision system is shown. This system involves
image acquisition; image processing Acquisition requires appropriate lighting. The
camera and store digital image processing involves manipulating the digital image to
simplify and reduce number of data points. Measurements can be carried out at any angle
along the three reference axes x y and z without contacting the part. The measured values
are then compared with the specified tolerance which stores in the memory of the
computer.
Fig 4.22 Machine Vision
The main advantage of vision system is reduction of tooling and fixture costs,
elimination of need for precise part location for handling robots and integrated
automation of dimensional verification and defect detection.
Principle
Four types of machine vision system and the schematic arrangement is shown
(i) Image formation.
(ii) Processing of image in a form suitable for analysis by computer.
(iii) Defining and analyzing the characteristic of image.
(iv) Interpretation of image and decision-making.
Vidicon camera
Image is formed by focusing the incoming light through a series of lenses onto
the photoconductive faceplate of the vidicon tube. The electron beam scans the
photoconductive surface and produces an analog voltage proportional to the variation in
light intensity for each scan line of the original scene.
Solid-state camera
The image sensors change coupled device (CCD) contain matrix of small array,
photosensitive elements accurately spaced and fabricated on silicon chips using
integrated circuit technology. Each detector converts in to analog signal corresponding to
light intensity through the camera lens.
Image processor
A camera may form an image 30 times per sec at 33 m sec intervals. At each time
interval the entire image frozen by an image processor for processing. An analog to
digital converter is used to convert analog voltage of each detector in to digital value. If
voltage level for each pixel is given by either 0 or I depending on threshold value. It is
called binary system on the other hand grey scale system assigns upto 256 different
values depending on intensity to each pixel. Grey scale system requires higher degree of
image refinement, huge storage processing capability. For analysis 256 x 256 pixels
image array up to 256 different pixel values will require 65000-8 bit storage locations at
a speed of 30 images per second. Techniques windowing and image restoration are
involved.
Windowing
Processing is the desired area of interest and ignores non-interested part of image.
Image restoration
Digital image of the object formed is analyzed in the central processing Unit of
the system. Three important tasks performed by machine vision system are measuring the
distance of an object from a vision system camera, determining object orientation and
defining object position. The distance of an object from a vision system camera can be
determined by triangulation technique. The object orientation can he determined by the
methods of equivalent ellipse. The image can be interpreted by two-dimensional image.
For complex three-dimensional objects boundary locations are determined and the image
is segmented into distinct region.
Image Interpretation
Applications
Machine vision can he used to replace human vision fur welding. Machining and
maintained relationship between tool and work piece and assembly of parts to
analyze the parts.
This is frequently used for printed circuit board inspection to ensure minimum
conduction width and spacing between conductors. These are used for weld seam
tracking, robot guideness and control, inspection of microelectronic devices
and
tooling, on line inspection in machining operation, assemblies monitoring high-
speed packaging equipment etc.
It gives recognition of an object from its image. These are designed to have
strong geometric feature interpretation capabilities and pa handling equipment.
QUESTION BANK
Part-A (2 Marks)
1. With neat sketch explain the various types of CMM based on its construction. Write the
advantages of computer aided inspection.
2. Explain the construction and working principle of laser interferometer with neat
diagram? Explain the use of laser interferometer in angular measurement.
3. Explain with a neat sketch the working of talysurf instrument for surface finish
measurement. What is the symbol for fully defining surface roughness and explain each
term?
4. Describe in detail the method of checking roundness by using Roundness Measuring
Machine. State its advantages.
5. Sketch and describe the optical system of a laser interferometer.
6. Define explain the working principle of Tomlinson surface meter with a neat sketch.
Define straightness. Describe any one method of measuring straightness of a surface.
7. Explain how the straightness error of a Lathe bed is checked using a Auto-collimator
8. With neat sketches, explain the significance of some important parameters used for
measuring surface roughness. Why so many parameters are needed?
9. How surface finish is measured using LASER. How the angle is measured using a laser
interferometer?
10. Discuss the steps involved in computing flatness of surface plate.
11. How are CMMs classified with respect to constructional features? Sketch and state their
main applications, merits and demerits.