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    Micro Electronic Mechanical Systems (MEMS)

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    Aditya Narayan Sahoo
    Micro Electro Mechanical Systems (MEMS) are devices that combine microelectronics and micromechanical components with dimensions on the micron scale. MEMS are manufactured using very large scale integration processing techniques to batch produce miniaturized sensors, actuators and microstructures. Some key benefits of MEMS include low cost mass production, system integration, small size, and enabling new applications in fields like transportation, communications, analytical and medical devices.

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    Micro Electronic Mechanical Systems (MEMS)

    Uploaded by

    Aditya Narayan Sahoo
    404 views3 pages
    Micro Electro Mechanical Systems (MEMS) are devices that combine microelectronics and micromechanical components with dimensions on the micron scale. MEMS are manufactured using very large scale integration processing techniques to batch produce miniaturized sensors, actuators and microstructures. Some key benefits of MEMS include low cost mass production, system integration, small size, and enabling new applications in fields like transportation, communications, analytical and medical devices.

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    Mems

    Original Title

    MEMS-Lecture Notes-1

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    Micro Electro Mechanical Systems (MEMS) are devices that combine microelectronics and micromechanical components with dimensions on the micron scale. MEMS are manufactured using very large scale integration processing techniques to batch produce miniaturized sensors, actuators and microstructures. Some key benefits of MEMS include low cost mass production, system integration, small size, and enabling new applications in fields like transportation, communications, analytical and medical devices.

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    © All Rights Reserved
    Download as DOCX, PDF, TXT or read online from Scribd
    Download as docx, pdf, or txt
    404 views3 pages

    Micro Electronic Mechanical Systems (MEMS)

    Uploaded by

    Aditya Narayan Sahoo
    Micro Electro Mechanical Systems (MEMS) are devices that combine microelectronics and micromechanical components with dimensions on the micron scale. MEMS are manufactured using very large scale integration processing techniques to batch produce miniaturized sensors, actuators and microstructures. Some key benefits of MEMS include low cost mass production, system integration, small size, and enabling new applications in fields like transportation, communications, analytical and medical devices.

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    © All Rights Reserved
    Download as DOCX, PDF, TXT or read online from Scribd
    Download as docx, pdf, or txt
    of 3

    Micro Electronic Mechanical Systems (MEMS)

    Micro Electro Mechanical Systems (MEMS) are devices that have static or movable components
    with some dimensions of the order of microns.

    MEMS combine microelectronics and micromechanics.

    MEMS refer to miniature mechatronic systems bulk fabricated using VLSI (Very Large Scale
    Integration) technology

    MEMS deals with:

    1) Miniaturization and batch processing of Sensors, Actuators & micro structures


    2) Integration of mechanical components with electronics
    Batch Processing:
     Cost Reduction
     Reliability & Reproducibility
    Miniaturization
     Low Power operation
     Biomedical & Aerospace applications

    MEMS benefits
     Micro size sensors and actuators: Integration with electronics on single chip (system or lab on
    chip)
     Decreased cost of production: bulk processing
     Many new features and products previously unthought-of of can be possible.
     Combination of MEMS with other branches:
    Example optical MEMS, Bio-MEMS – futuristic devices
    Silicon Micromachining
     Suitable for batch processing similar to fabrication of ICs
     Production cost independent of the number of components fabricated
     Miniaturization with finest details in the range of 0.1 to 10 microns possible based on
    photolithography
    Classification of MEMS
     Passive structures (non-moving) -- microtips
     Sensors --- pressure sensors
     Actuators – Pump, valve
    Micro-systems integrate both sensors and actuators for functional uses
    MEMS Categories & Application Domains
     MEMS structures
    Transportation – Infrared imagers
    Communications – Optical & RF signal guides, Field emission arrays
    Analytical & Medical – Micro filters, micro channels and mixers

     MEMS Sensors

    Transportation – Pressure and acceleration sensors

    Communications – Acoustic sensors

    Analytical & Medical – Gas sensors

     MEMS Actuators
    Transportation – Aerodynamic flow control
    Communications – Displays, Optical switches, RF switches & Filters
    Analytical & Medical – Micro pumps and valves
    Transducers
     Sensors – convert measured quantities into electrical signals
    Examples: Pressure sensors, accelerometer, gyro, temperature sensor, flow sensor and gas sensor
     Actuators – convert different type of energy into mechanical energy
    Examples: Micro pump, RF switches, Resonators, micro mirror, ES comb drive
     Structures
    AFM tip, Field emission arrays, Micro fluidic channels
    MEMS Materials
    Silicon
     Stronger than steel
     Light as aluminium
     Can be coated with varieties of materials
    Other Materials
     Polycrystalline silicon (polysilicon)
     Silicon dioxide (SiO2)
     Silicon nitride (Si3N4)
     Aluminum (thin film)
     Gold (thin film)
     Many more including polymers now a days
     Doping of silicon

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