Coordinate Measuring Machines Products equipped with the measurement

Precision measuring technology in three dimensions data output function can be connected to the
measurement data network system MeasurLink
(refer to page A-5 for details).

Shop-floor Type CNC Coordinate Measuring Machine

MiSTAR 555

• Has achieved an accuracy guaranteed • Adopts the horizontal-arm structure and installs the
temperature range of 10 to 40 °C thanks to the CMM controller and PC under the measuring table
combination of technologies such as a symmetric to save installation space. This has reduced the
guide structure, uniform material and footprint to about 70% compared with that of the
temperature compensation. conventional moving bridge model.
• Has achieved a contamination resistance more
than 2 times better than Mitutoyo's conventional
machine by adopting a newly developed absolute
scale* that is highly resistant to the challenging
production-line environment.
Equipped with the PH10MQ probe head
* Absolute scale that provides an absolute XYZ-values
relative to an internal reference point for each coordinate
captured. This eliminates the need for an initialization
operation.

MiSTAR 555

SPECIFICATIONS
Model MiSTAR 555
Items
X axis 570 mm
Measuring range Y axis 500 mm
Z axis 500 mm
Maximum permissible length measurement error*1*2
(2.2+3L /1000) μm
ISO 10360-2: 2009
Drive speed 5 - 350 mm/s (max. combined speed 606 mm/s) in CNC MODE
Drive acceleration 1556 mm/s2 (max. combined acceleration 2695 mm/s2)
Max. height 660 mm
Workpiece
Max. loading 120 kg
N Accuracy guaranteed temperature 10 °C - 40 °C
Catalog No. E16024(2)

Mass (including the control device and 655 kg

installation platform) Operable Adjacent to a Machine Tool on the Production Line

*1 Specifications vary by configuration, size, and thermal environment.

*2 L = Measuring length (unit: mm)
Note: While the appearance of the natural stone measuring table varies according to the source, the high stability for which this
material is known can always be relied upon.

Coordinate Measuring Machines

Refer to the MiSTAR 555

Brochure (No. E16024) for more details.

N-3 Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.
 Products equipped with the measurement
data output function can be connected to the
measurement data network system MeasurLink
(refer to page A-5 for details).

Standard CNC CMM

MICROCORD CRYSTA-Apex V Series
• The CRYSTA-Apex V500/700/900 series, CNC • Equipped with a temperature compensation system
CMMs deliver high accuracy (1.7 μm), high speed, and that guarantees the specified accuracy within a wide
high acceleration. This series offers flexibility with a wide range of 16 °C to 26 °C under certain environmental
range of models to suit practically any size workpiece. conditions, although high-accuracy CMMs should
• Has achieved a contamination resistance more than ideally be installed in a temperature controlled room.
2 times better than Mitutoyo's conventional machine by
adopting a newly developed absolute scale* that is highly
resistant to the challenging production-line environment.
* Absolute scale that provides an absolute value for each measurement
point. This eliminates the need for an initialization operation.

CRYSTA-Apex V 574 CRYSTA-Apex V 776

CRYSTA-Apex V 9106

SPECIFICATIONS
Model CRYSTA-Apex V 544 CRYSTA-Apex V 574 CRYSTA-Apex V 776 CRYSTA-Apex V 7106
Items
X axis 500 mm 700 mm
Measuring Y axis 400 mm 700 mm 700 mm 1000 mm N
range
Z axis 400 mm 600 mm

Model CRYSTA-Apex V CRYSTA-Apex V CRYSTA-Apex V

Items 9106 (Z600) / 9108 (Z800) 9166 (Z600) / 9168 (Z800) 9206 (Z600) / 9208 (Z800)
X axis 900 mm
Measuring Y axis 1000 mm 1600 mm 2000 mm
range
Z axis 600 mm / 800 mm
Note: W
 hile the appearance of the natural stone measuring table varies according to the source, the high stability for which this
material is known can always be relied upon.

CRYSTA-Apex V Series Accuracy Unit: µm

Series Probe used Length measurement error*1
ISO 10360-2: 2009
500 / 700 /900 Series SP25M E 0, MPE =1.7+3L/1000*2
*1 Specifications vary by configuration, size, and thermal environment.
*2 L = Measuring length (unit: mm)

Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice. N-4
 Coordinate Measuring Machines Products equipped with the measurement
Precision measuring technology in three dimensions data output function can be connected to the
measurement data network system MeasurLink
(refer to page A-5 for details).

Standard CNC CMM

MICROCORD CRYSTA-Apex S1200/1600/2000 Series
• The CRYSTA-Apex S1200/1600/2000 series • Equipped with a temperature compensation
are large-sized CNC CMMs developed for system that guarantees the specified accuracy
supporting quality evaluation of large parts. within a wide range of 16 °C to 24 °C for
CRYSTA-Apex S1600/2000 and 16 °C to
26 °C for S1200 under certain environmental
conditions, although high-accuracy CMMs should
ideally be installed in a temperature controlled
room.

CRYSTA-Apex S122010

CRYSTA-Apex S163012

SPECIFICATIONS
Model CRYSTA-Apex S CRYSTA-Apex S CRYSTA-Apex S
Items 121210 122010 123010
X axis 1200 mm
Measuring Y axis 1200 mm 2000 mm 3000 mm
range
Z axis 1000 mm

Model CRYSTA-Apex S CRYSTA-Apex S CRYSTA-Apex S

Items 162012(Z1200)/162016(Z1600) 163012(Z1200)/163016(Z1600) 164012(Z1200)/164016(Z1600)
X axis 1600 mm
Measuring Y axis 2000 mm 3000 mm 4000 mm
range
Z axis 1200 mm/1600 mm

Model
CRYSTA-Apex S 203016 CRYSTA-Apex S 204016
N Items
X axis 2000 mm
Measuring Y axis 3000 mm 4000 mm
range
Z axis 1600 mm
Note: W
 hile the appearance of the natural stone measuring table varies according to the source, the high stability for which this
material is known can always be relied upon.

CRYSTA-Apex S Series Accuracy Unit: µm

Length measurement error *1
Series Probe used
ISO 10360-2: 2009
1200 Series E 0, MPE =2.3+3L/1000*2
1600 Series SP25M E 0, MPE =3.3+4.5L/1000 (4.5+5.5L/1000)*2 *3
2000 Series E0, MPE =4.5+8L/1000*2
*1 Specifications vary by configuration, size, and thermal environment.
*2 L = Measuring length (unit: mm) Refer to the CRYSTA-Apex C / FALCIO Apex Series
*3 ( ) indicates Z: 1600 mm specification Brochure (No. E16009) for more details.

N-5 Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.
 Products equipped with the measurement
data output function can be connected to the
measurement data network system MeasurLink
(refer to page A-5 for details).

Standard CNC CMM

MICROCORD CRYSTA-Apex EX 1200R Series
• CRYSTA-Apex EX 1200R series products are • Allows ultra high-speed 5-axis scanning (max. 500
advanced CNC CMMs equipped with the REVO mm/s), far surpassing conventional 3-axis control.
probe head and a choice of probes to create a Support for high-speed sampling of up to 4,000
range of standard 5-axis measuring machines. points per second allows acquisition of densely
• 5-axis operation reduces the time required for spaced measurement points, even during fast
probe repositioning movements and allows more scanning.
flexible positioning. This also facilitates access to • Internal implementation of laser sensing
complex workpieces and saves time during both technology ensures high-accuracy measurement,
programming and measurement. even with long styli (up to 500 mm*).
* Distance from probe rotation center to stylus tip
Helical scan Gasket scan

Sweep scan

Airfoil section scan

CRYSTA-Apex EX 123010R

SPECIFICATIONS
Model CRYSTA-Apex EX 121210R CRYSTA-Apex EX 122010R CRYSTA-Apex EX 123010R
Items
X axis 1200 mm
Measuring Y axis 1200 mm 2000 mm 3000 mm
range
Z axis 960 mm
Note: W
 hile the appearance of the natural stone measuring table varies according to the source, the high stability for which this
material is known can always be relied upon.

CRYSTA-Apex EX 1200R Series Accuracy Unit: μm

Length measurement error*1
N
Probe used
ISO 10360-2: 2009
REVO+RSP2+RSH250 E 0, MPE =2.9+4L/1000*2
REVO+RSP3-3+RSH3-3 E 0, MPE =2.5+3L/1000*2
*1 Specifications vary by configuration, size, and thermal environment.
*2 L = Measuring length (unit: mm)

Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice. N-6
 Coordinate Measuring Machines Products equipped with the measurement
Precision measuring technology in three dimensions data output function can be connected to the
measurement data network system MeasurLink
(refer to page A-5 for details).

High Accuracy CNC CMM

MICROCORD STRATO-Apex Series
• The STRATO-Apex series of CNC CMMs offer • Ultra-high precision linear encoders (manufac-
improved structural rigidity and guide systems to tured by Mitutoyo) are used on each axis to
guarantee very high accuracy measurement. High provide a higher resolution and accuracy that
drive speed and high acceleration provide lower complements the improved overall performance.
cycle times in critical measurement applications.

STRATO-Apex 574
STRATO-Apex 776

STRATO-Apex 9106

STRATO-Apex 163016
SPECIFICATIONS
Model STRATO-Apex 574 STRATO-Apex 776 STRATO-Apex 7106
Items
X axis 500 mm 700 mm
Measuring Y axis 700 mm 700 mm 1000 mm
range
Z axis 400 mm 600 mm
N
Model STRATO-Apex STRATO-Apex STRATO-Apex STRATO-Apex STRATO-Apex STRATO-Apex
Items 9106 9166 162012 162016 163012 163016
X axis 900 mm 1600 mm
Measuring Y axis 1000 mm 1600 mm 2000 mm 3000 mm
range
Z axis 600 mm 1200 mm 1600 mm 1200 mm 1600 mm
Note: W
 hile the appearance of the natural stone measuring table varies according to the source, the high stability for which this
material is known can always be relied upon.
STRATO-Apex Series Accuracy Unit: μm

Series Probe used Length measurement error*1

ISO 10360-2: 2009
574 Series E0, MPE = 0.7+2.5L/1000*2
700 / 900 Series SP25M E0, MPE = 0.9+2.5L/1000*2
1600 Series E0, MPE = 2.5+4.0L/1000 (3.0+4.0L/1000)*2 *3
*1 Specifications vary by configuration, size, and thermal environment.
*2 L = Measuring length (unit: mm) Refer to the STRATO-Apex Series
*3 ( ) indicates Z: 1600 mm specification Brochure (No. E16001) for more details.

N-7 Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.
 Products equipped with the measurement
data output function can be connected to the
measurement data network system MeasurLink
(refer to page A-5 for details).

High-accuracy Separate Guide Type

MICROCORD FALCIO Apex 2000G/3000G Series
• These series are equipped with a system to • The FALCIO Apex 2000G/3000G series are • Ultra-high precision linear encoders (manufactured
automatically restore accuracy deterioration CNC CMMs that use Mitutoyo's standard by Mitutoyo) are used on each axis to provide a
(MOVAC) caused by foundation deformation structure for large machines which are designed higher resolution and accuracy that complements
as a standard feature. to be used for measuring large and heavy the improved overall performance.
• Equipped with a temperature compensation workpieces with high accuracy. The picture below
system that guarantees the specified accuracy gives a good idea of how large the machine is.
within a wide range of 18 °C to 22 °C under The measuring accuracy and drive speed are the
certain environmental conditions, although world's highest in the X-axis measuring range of
high-accuracy CMMs should ideally be 2000 mm and 3000 mm.
installed in a temperature controlled room.
• Safety devices such as a Z-axis beam sensor,
tape switch, and area sensor are available as
options.

FALCIO Apex 305015G

SPECIFICATIONS
ModelFALCIO Apex FALCIO Apex FALCIO Apex FALCIO Apex
Items 203015G 204015G 205015G 305015G
X axis 2000 mm 2000 mm 2000 mm 3000 mm
Measuring Y axis 3000 mm 4000 mm 5000 mm 5000 mm
range
Z axis 1500 mm 1500 mm 1500 mm 1500 mm
Note: While the appearance of the natural stone measuring table varies according to the source, the high stability for which this
material is known can always be relied upon.

FALCIO Apex Series Accuracy Unit: μm N

Probe used Length measurement error*1
ISO 10360-2: 2009
SP25M E0, MPE =3.5+4L/1000*2
*1 Specifications vary by configuration, size, and thermal environment.
*2 L = Measuring length (unit: mm)

Refer to the Large Bridge and Gantry CNC

Coordinate Measuring Machines Brochure
(No. E16009) for more details.

Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice. N-8
 Coordinate Measuring Machines Products equipped with the measurement
Precision measuring technology in three dimensions data output function can be connected to the
measurement data network system MeasurLink
(refer to page A-5 for details).

Ultra-high Accuracy CNC CMM

MICROCORD LEGEX 574/774/776/9106
• The LEGEX series is an ultra-high precision CNC • The combination of a Mitutoyo ultrahigh accuracy
CMM with the world's highest level of accuracy, made crystallized glass scale with a coefficient of thermal
possible by rigorous analysis of all possible error- expansion of almost zero and a high resolution, high-
producing factors and the elimination or minimization performance reflection type linear encoder provides
of their effects. excellent position detection for premium performance.
• The fixed bridge structure and precision air bearings • Many optional systems are available, including probes
running on highly rigid guideways ensure superior (contact and non-contact types), data processing
motion stability and ultra-high geometrical accuracy. units, and many other items to support the ultra-high
Thorough testing, using FEM structure analysis accuracy measurement of a wide variety of workpieces.
simulation, guarantees geometric motion accuracy with
minimal errors due to fluctuations in inertial loading
and other variables. In addition, other technologies
have been utilized in the structure of the drive unit,
minimizing vibration, etc., to provide ultra-high
accuracy.

LEGEX 574 LEGEX 776

N
LEGEX 9106

SPECIFICATIONS
Model LEGEX 574 LEGEX 774 LEGEX 776 LEGEX 9106
Items
X axis 500 mm 700 mm 700 mm 900 mm
Measuring Y axis 700 mm 700 mm 700 mm 1000 mm
range
Z axis 450 mm 450 mm 600 mm 600 mm
Note: Choose either a cast iron or a ceramic coated measuring table.
Main unit accuracy Unit: μm
Length measurement error*1
Probe used ISO 10360-2: 2009
MPP-310Q E0, MPE =0.28+L/1000*2
*1 Specifications vary by configuration, size, and thermal environment. Refer to the LEGEX Series Brochure
*2 L = Measuring length (unit: mm) (No. E16012) for more details.

N-9 Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.
 Products equipped with the measurement
data output function can be connected to the
measurement data network system MeasurLink
(refer to page A-5 for details).

Car Body Measuring System

MICROCORD CARBstrato Series
• The world's largest class of CMM • Single- & Dual-ram systems
The CARBstrato series is a lineup of horizontal- Single- and dual-ram types are available to suit
ram type CNC CMMs, offering the world's largest the intended use.
measurement range that even makes it possible to Single-ram type: M
 easures a workpiece using a
measure car bodies. single ram
Dual-ram type: M
 easures a workpiece placed
between two simultaneously
controlled rams

Measurement example for dual-ram type

(Simultaneous use of touch-trigger probe and line laser probe)

Refer to the CARB Series Brochure CARBstrato 601624D (Dual-ram type)

(No. E16014) for more details.

Car Body Measuring System

MICROCORD CARBapex Series
• The world's largest class of CMM • Single- & Dual-ram systems
The CARBapex series is a lineup of cost-effective Single- and dual-ram types are available to suit
horizontal-ram type, large CNC CMMs, and offers the intended use.
the world's largest measurement range that even Single-ram type: M  easures a workpiece with a
makes it possible to measure car bodies. single-ram
Dual-ram type: M  easures a workpiece placed
between two simultaneously
controlled rams
Also, since the height of the X-axis bases of both
the single-ram type and the dual-ram type are set
lower, the required depth for the foundation
before installation is comparatively shallow.
N

CARBapex 601624 (single-ram type)

Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice. N-10
 Coordinate Measuring Machines Products equipped with the measurement
Precision measuring technology in three dimensions data output function can be connected to the
measurement data network system MeasurLink
(refer to page A-5 for details).

In-line Type CNC CMM

MICROCORD MACH-3A 653
• In-line type CNC CMM (Horizontal-ram type)
Incorporating the CMM controller and the host
computer in the main unit results in a compact SPECIFICATIONS
space-saving footprint for the shop floor. This series
Model MACH-3A 653
is designed for 24-hour operation with high stability Items
remarkable durability. X axis 600 mm
Measuring Y axis 500 mm
range
Z axis 280 mm
3
1 2 19 to 21 °C E0, MPE = 2.5+3.5L/1000 µm*
Accuracy* *
5 to 40 °C E0, MPE = 3.9+6.5L/1000 µm*3
*1 Specifications vary by configuration, size, and thermal
environment.
*2 Using a TP7M (Stylus: ø4×20mm)
*3 L = Measuring length (unit: mm)
Note: For information about guaranteed accuracy within
MACH-3A 653 a temperature range other than 5 to 40 °C, contact
The indexing table shown is optional your local Mitutoyo sales office.

Products equipped with the measurement

In-line Type CNC CMM data output function can be connected to the
measurement data network system MeasurLink
MICROCORD MACH-V9106 (refer to page A-5 for details).

• The MACH-V has been refined and has evolved

over time to maximize CNC-machine-tool utiliza-
tion by performing in-line or near-line, high-speed
coordinate measurement to match the speed of SPECIFICATIONS
machining. These high throughput machines can Model MACH-V9106
Items
be incorporated within the manufacturing line and
X axis 900 mm
can provide pre / post machining feedback to your Measuring Y axis 1000 mm
machine tools for process tuning. range
Z axis 600 mm
19 to 21 °C E0, MPE = 2.5+3.5L/1000 µm*3
Accuracy*1*2
5 to 35 °C E0, MPE = 3.6+5.8L/1000 µm*3
*1 Specifications vary by configuration, size, and thermal
environment.
*2 Using a TP7M (Stylus: ø4×20mm)
*3 L = Measuring length (unit: mm)
Note: F or information about guaranteed accuracy within
a temperature range other than 5 to 35 °C,
MACH-V 9106 contact your local Mitutoyo sales office.
The sub-plate shown is optional

Products equipped with the measurement

Agile Measuring System data output function can be connected to the
measurement data network system MeasurLink
MACH Ko-ga-me (refer to page A-5 for details).

• Can be used in standalone applications or

integrated into work cells.
• If required, the system can measure workpiece
N features that exceed the Ko-ga-me’s X stroke
Standalone system
by mounting the workpiece, or the Ko-ga-me,
on an auxiliary X axis.
• Ideal for inspection of large or small work- SPECIFICATIONS
pieces and offers a wide choice of measuring Items Model KGM888-B KGM12128-B
probes including touch-trigger and scanning X axis 80 mm 120 mm
types. (Note: Probe choice may be restricted, Measuring Y axis 80 mm 120 mm
range
depending on the application.) Z axis 80 mm 80 mm
19 to 21 °C E0, MPE = 2.4+5.7L/1000 µm*3
15 to 25 °C E0, MPE = 2.7+6.4L/1000 µm*3
Accuracy*1*2
10 to 30 °C E0, MPE = 3.1+7.2L/1000 µm*3
10 to 35 °C E0, MPE = 3.4+7.9L/1000 µm*3
*1 Specifications vary by configuration, size, and thermal
environment.
*2 Using a TP200 or SP25M
The stand shown is optional *3 L = Measuring length (unit: mm)

N-11 Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.
 Products equipped with the measurement
data output function can be connected to the
measurement data network system MeasurLink
(refer to page A-5 for details).

Manual Type CMM

MICROCORD Crysta-Plus M Series
• Manual floating type CMMs developed in • The Crysta-Plus M700 series is equipped with a • Equipped with a temperature compensation system
the quest for high-accuracy, low cost and mobile clamp so that one-touch clamping on each axis that guarantees the specified accuracy within a wide
easy operation. can be performed by hand. Continuous fine feed over range of temperature under certain environmental
• Ultra-high-precision linear encoders the entire measuring range can be performed. conditions, although CMMs should ideally be installed
(manufactured by Mitutoyo) are used on in a temperature controlled room.
each axis to provide high performance. • Available options include the auto-leveling
air-spring vibration isolator and the illuminator
unit for the probe.

Crysta-Plus M443 Crysta-Plus M574

N
Refer to the Crysta-Plus M Series
Brochure (No. E16013) for more details.
Crysta-Plus M7106
SPECIFICATIONS
Model Crysta-Plus M443 Crysta-Plus M544 Crysta-Plus M574 Crysta-Plus M776 Crysta-Plus M7106
Items
X axis 400 mm 500 mm 700 mm
Measuring range Y axis 400 mm 400 mm 700 mm 700 mm 1000 mm
Z axis 300 mm 400 mm 600 mm
E0, MPE 3.0+4L/1000 µm 3.5+4L/1000 µm 4.5+4.5L/1000 µm
Accuracy *1*2
P FTU, MPE 4.0 µm 4.0 µm 5.0 µm
*1 According to ISO 10360-2 methods. L = Measuring length (unit: mm)
*2 When using the touch-trigger probe MH20i/ MH20 / TP20 and stylus (L 10 mm)
Note: W
 hile the appearance of the natural stone measuring table varies according to the source, the high stability for which this
material is known can always be relied upon.

Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice. N-12
 Coordinate Measuring Machines Products equipped with the measurement
Precision measuring technology in three dimensions data output function can be connected to the
measurement data network system MeasurLink
(refer to page A-5 for details).

Portable Articulated Arm Coordinate Measuring System

SpinArm-Apex

• SpinArm-Apex is a fully articulated coor-

dinate measuring system featuring a wide
range of measurement. The highly portable
design of SpinArm-Apex enables the
system to be positioned at any point within
reach of the workpiece.
• Enables measurement of workpieces of
complex shape in any direction.
• Brake mechanism greatly enhances usability.
• Counterbalance for easier operation.
• Supports both non-contact line laser probes
and contact probes concurrently.

SpinArm-Apex 186H SpinArm-Apex 367H

SurfaceMeasure Series
Note: N
 ot for use in, or export to, to the United States of
SPECIFICATIONS America.
SpinArm-Apex H series (High accuracy, 6-axis model)
Model No. SpinArm-Apex 186H SpinArm-Apex 246H SpinArm-Apex 306H SpinArm-Apex 366H
Measuring envelop 1800 mm 2400 mm 3000 mm 3600 mm
(Probe reaching diameter) *1
Repeatability *2 *4 ±0.021 mm ±0.026 mm ±0.044 mm ±0.060 mm
Accuracy (Arm type) *2 *4 ±0.028 mm ±0.035 mm ±0.058 mm ±0.072 mm
SpinArm-Apex H series (High accuracy, 7-axis model)
Model No. SpinArm-Apex 247H SpinArm-Apex 307H SpinArm-Apex 367H
Measuring envelop 2400 mm 3000 mm 3600 mm
(Probe reaching diameter) *1
Repeatability *2 *4 ±0.031 mm ±0.051 mm ±0.071 mm
Accuracy (Arm type) *2 *4 ±0.042 mm ±0.072 mm ±0.103 mm
SpinArm-Apex S series (Standard, 6-axis model)
Model No. SpinArm-Apex 186S SpinArm-Apex 246S SpinArm-Apex 306S SpinArm-Apex 366S
Measuring envelop 1800 mm 2400 mm 3000 mm 3600 mm
(Probe reaching diameter) *1
Repeatability *2*3 ±0.040 mm ±0.050 mm ±0.080 mm ±0.100 mm
Accuracy (Arm type) *2 *3 ±0.055 mm ±0.065 mm ±0.100 mm ±0.135 mm
SpinArm-Apex S series (Standard, 7-axis model)
Model No. SpinArm-Apex 247S SpinArm-Apex 307S SpinArm-Apex 367S
N Measuring envelop 2400 mm 3000 mm 3600 mm
(Probe reaching diameter) *1
Repeatability *2 *3 ±0.055 mm ±0.090 mm ±0.110 mm
Accuracy (Arm type) *2 *3 ±0.080 mm ±0.135 mm ±0.165 mm
*1 Measurement range is expressed as a diameter value at the maximum reach using software with the Sø10 mm standard probe mounted.
 ccording to Mitutoyo’s acceptance procedure. The accuracy guaranteed value above is determined when MS5-5R11G probe is
*2 A
mounted.
*3 Guaranteed accuracy temperature: 16 ºC - 24 ºC (temperature gradient: 2 ºC per hour)
*4 Guaranteed accuracy temperature: 18 ºC - 22 ºC (temperature gradient: 2 ºC per hour)

Refer to the SpinArm-Apex Series

Brochure (No. E16006) for more details.

N-13 Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.
 Software for Manual/CNC Coordinate Measuring Machines
MCOSMOS
• It is unnecessary to learn any special code MCOSMOS software modules • MCOSMOS is the data processing
since measurement can be performed by GEOPAK CAT1000P CAT1000S SCANPAK program family for the CMM that runs on
selecting the icons or the pull-down menu MCOSMOS-1 3 Windows.
to select functions in the same manner as MCOSMOS-2 3 3 3
for Windows OS operation. MCOSMOS-3 3 3 3 3

CAT1000S [Curved surface evaluation program] GEOPAK [General purpose measurement program] CAT1000P [On-/Off-line teaching program]
This software is used for free-form surface evaluation and This is the basic software for dimension measurement. The enhanced This software is used for on-/ off-line teaching. The interference
online/offline teaching. It is possible to display measurement graphic functionality allows real time drawing of the measurement check function is also added so that programming error when
results on CAD data in various ways. result, and the best-fit function, previously optional, and even the off-line can be prevented. In addition to SAT and STEP (standard
geometrical deviation drawing function are now provided as standard. functions) as CAD data that can be imported, CATIA V4 / V5,
PARASOLID, Creo, etc. are supported (optional).

SURFPAK-SP [Analysis program]

This is a software program as used for the roughness probe
SURFTEST for a CMM. With this program, surface roughness SCANPAK [Contour measurement program] FORMTRACEPAK-AP [Analysis program]
analysis conforming to standards such as ISO, JIS, ANSI, and This software enables measurement/evaluation of two-dimensional This program is used for minutely analyzing two-dimensional
VDA are available. Cooperation with MCOSMOS enables fully sectional contours. The data output function to CAD, etc. that curved lines captured by SCANPAK.
automatic dimensional measurement and surface roughness had been optional before is now provided as standard.
measurement.

ROUNDPAK-CMM GEARPAK-Cylindrical [Gear evaluation program]

MAFIS [Blade evaluation program] The functionality of analysis software as used for roundness This is a program for evaluation of involute gear teeth obtained
This software is used for evaluation of sectional contours of measuring machines is now available on MCOSMOS. As well as from CNC CMMs, and tooth profile based on cylindrical gear
blades to be used in jet engines for aircraft. roundness and cylindricity evaluation, various filters are also available. measurement data.

[Result drawing]
GEARPAK-Worm [Gear evaluation program] MAFIS Express [Blade measurement/Evaluation program]
This is a program for evaluation of tooth form based on worm This software program enables creation of measurement programs
measurement data obtained from CNC CMMs. and measurement and analysis of blades and blisks. A part program
for measurement can be automatically created just by selecting
GEARPAK-Bevel/Hypoid required contents and evaluation conditions. The measurement
[Gear production support/evaluation program] results will be displayed in a report including 2D graphics.
This is a program for evaluation of tooth form, pitch error, etc.,
based on measurement data from bevel or hypoid gears obtained N
by CNC CMM.

Refer to the MCOSMOS Software

Brochure (No. E16008) for more details. [Result drawing]

Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice. N-14
 Coordinate Measuring Machines
Precision measuring technology in three dimensions

Automatic measurement program generation software

MiCAT Planner
One-click programming that changes the relationship between people and
precision measurement
• Through its optimization function, the software • Utilizing the rule editor function to set the • Identifies tolerance information included in
estimates the shortest route for measurement measurement rules prevents variation in 3D models with Product and Manufacturing
with the minimum of probe repositioning and tool measurement quality between program writers. Information (PMI), defines measurement
changing, and creates a program that enables locations and creates a measurement
measurement in the minimum possible time. program fully automatically.
Also, even with the 3D CAD model without
CAD data with tolerances CMM System configuration User-defined measurement rules tolerance information, the measurement
(number of locations to measure with tolerance program can be created automatically just
information and sampling method, etc.,)
by adding tolerance information on the
MiCAT Planner. This is more efficient than
the conventional teaching model.
Note: To use a measuring program created by
the MiCAT Planner you will need a special
"right to execute".
Example of sampling method: contact measurement A "right to execute" for one 3D measuring
machine is included in the MiCAT Planner.

Tolerance information add function

Lets you add tolerances in the software even for 3D
CAD models containing no tolerance information.
Example of sampling method: scanning measurement
Automatically create optimal measuring programs
based on the added tolerance specifications.
Instantly and
automatically creates a Supported languages
measurement program
Available in 15 languages (Japanese, English (US,
UK), German, French, Spanish, Portuguese, Italian,
simplified Chinese, traditional Chinese, Korean,
Polish, Czech, Dutch, and Turkish)

An optimized measurement program for MCOSMOS

Case study
Compare the measurement part-programming time for a test piece.
1: Programming in 2D drawing: 45-60 minutes
2 : Programming using 2D drawing + 3D CAD: 15-20 minutes
3 : Create with MiCAT Planner (using 3D CAD model + PMI): approx. 3 minutes!
Note: The measurement rules are defined in advance.

N Part-programming time
Reduced by up to 95% !!
Guarantee a
dramatically reduced
development phase
and at the same time improve
product quality.

N-15 Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.
 Non-contact type laser probe
• Three lasers used with the cross type line
SurfaceMeasure
laser enable batch scanning. Complicated
form can be measured efficiently (in the case • Ultra-high speed data collection • Powder-less measurement
of SurfaceMeasure 606T). SurfaceMeasure is a laser probe that Automatic configuration of the camera
Less changing of the probe orientation collects coordinate values of the surface of the sensitivity and the laser intensity settings
contributes to the improvement of workpiece by moving and irradiating laser light according to the environment and materials
measurement efficiency over the workpiece. enable establishing a simple and comfortable
* When using SurfaceMeasure 606/610/1010 laser-scanning environment since measurement
is now powder and spray free.
• Advantages of non-contact type
Non-contact measurement enables • Evaluation cases
measurement of materials that can be easily- The collected point cloud data can be used by
deformed by contact measurement, including various optional software in a wide range of
Without change of Laser selection is resin or thin, elastic parts. applications, such as editing, plane creation,
orientation available
comparison using CAD data and more.
Scanning from three directions enables
simultaneous measurement of the top
surface and inner surface
The laser light is
emitted from three
oblique directions.

• The flying spot type is capable of scanning Measurement of color Measurement of glossy parts
difficult parts, such as this impeller, precisely sample plate
and achieves highest scanning accuracy in the
class (in the case of SurfaceMeasure 201FS).

403/606/610/1010 606T 201FS

SPECIFICATIONS
SurfaceMeasure Surface Surface Surface Surface Surface
403 *1 Measure 606 Measure 610 Measure 1010 Measure 606T Measure 201FS
Laser irradiation method Line Laser (single) Line Laser (cross) Flying spot
Max. scan width 40 mm 60 mm 60 mm Max. 100 mm 3×65 mm Max. 23 mm
Max. scan depth 30 mm 60 mm 100 mm 100 mm 65 mm 15 mm
Working distance 66 mm 123 mm 165 mm 165 mm 203.5 mm 57.5 mm
Scanning error *2 8 µm 12 µm 15 µm 18 µm 17 µm 1.8 µm
Max. Acquisition rate 60,000 points / sec 75,000 points / sec 3×25,500 points / sec 25,000 points / sec
Mass 430 g 430 g 400 g 400 g 480 g 500 g
EN /IEC Class2 [ EN/IEC 60825-1 (2014) ]
Laser Class JIS Class2 [ JIS C 6802: 2014 ]
Laser Type Red-light semiconductor Semiconductor
Wave length 660 nm 670 nm
Line Laser
Power output 4 mW 1 mW
Wavelength — 635 nm —
Point Laser
Power output — 1 mW —
*1 Made-to-order models
*2 According to Mitutoyo’s acceptance procedure. (1σ/ sphere measurement, probe alone)
Unit: μm N
403 606 610 1010 606T 201FS
General-purpose General-purpose Deep workpiece Large workpiece Deep workpiece/sheet Highly sensitive and general-
measurement measurement measurement measurement metal measurement purpose measurement
183

147.5
240
51

50
282

282
66

57.5
289
93

115

115
123
30

171

15
165
165

203.5

40
60

100
100

60
65

60 100 60

Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice. N-16
 Coordinate Measuring Machines
Precision measuring technology in three dimensions

Point Cloud Processing Software for Coordinate Measuring Machines

MSURF
• MSURF is a software program that
MSURF software modules enables users to perform operations from
Software On-line Off-line measurement to evaluation on the same
package MSURF-S MSURF-S MSURF-S MSURF-S MSURF-G MSURF-G MSURF-G MSURF-I platform when the non-contact line laser
Software RUN 1 2 3 1 2 3 PRO probe, SurfaceMeasure, is used.
MSURF-S 3 3 3 3 Eight software modules are provided
MSURF-G 3 3 3 according to the task.
MSURF-I 3
MSURF-I Option 3 3 3 3
MSURF-MESH PRO 3 3 3 3 3
MSURF-PLANNER* 3 3 3 3
MSURF-PLANNER RUN* 3
* To run a measurement macro created by MSURF-PLANNER, the module "MSURF-PLANNER RUN" is required separately.

MSURF-S MSURF-I
Calculates point cloud data measured by CNC Conducts analysis or comparison verification of
CMM with SurfaceMeasure. It generates measured point cloud data in reference to nominal
scanning paths by defining the scanning start data (supporting CAD data import).
position, length, and width.

Note: If not using the ACR3 probe changer, probe

replacement is performed manually.

Section evaluation (dimensional calculation)

Error color-coded map Thickness color-coded map

Evaluation of step / clearance Surface curvature evaluation

MSURF-G MSURF-MESH PRO MSURF-PLANNER

MSUR-G is the off-line version of MSURF-S. This software is provided with various functions MSURF-PLANNER is software to automatically
It allows users to create measurement such as filtering point cloud data and mesh data. create measurement macros (surface form,
programs in advance of actual measurements The software is enhanced by adding functions to feature form) for the line laser probe from 3D
on a CMM by using CAD data. Therefore, standard ones. It also enables functions such as CAD data.
users can start measurement immediately mesh data thinning-out, highlighting, interpolation Optimized data (travel path, number of probe
at the time a real workpiece is ready. Since and outlier removal that are unavailable as standard. head revolutions, etc.) of a measurement path
N MSURF-S is a standalone PC application, will contribute to improvements in productivity.
Note: MSURF-MESH PRO has the optional functions of MSURF-I.
only requiring installation by the user, it helps
preserve valuable CMM time exclusively for MSURF-PLANNER RUN
productive measurement.
MSURF-PLANNER RUN is optional software
Note: MSURF-G cannot be combined with MSURF-S. required to execute and edit measurement macros
created by MSURF-PLANNER.
Note 1: M SURF-PLANNER RUN is optional software
added to MSURF-S or MSURF-G.
Note 2: T his optional software is not required for a PC with
MSURF-PLANNER installed. Automatic z of measurement macros
by MSURF-PLANNER

N-17 Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.
 Scanning probes
SP25M MPP-310Q SP80
Compact high accuracy type Ultra-high accuracy and low High accuracy scanning probe
scanning probe measuring force scanning probe (supports long styli)
This compact, multifunctional and highly This ultra-high precision scanning probe A highly accurate stylus up to 500 mm in
accurate scanning probe is only 25 mm incorporates built-in XYZ scales for highest- length (both horizontally and vertically) can
in diameter, which enables it to access accuracy performance. The compact size of be installed on this probe. This ultra-high
shrouded workpiece features. Data this probe is ideal for low measuring force and precision scanning probe allows data collection
collection is by scanning measurement, high speed scanning. Data collection can be by scanning measurement, ultra-high precision
ultra-high precision point measurement performed by scanning measurement, ultra- point measurement and center alignment point
and center alignment point measurement. high precision point measurement and center measurement.
The probe can be attached to a probe alignment measurement.
head (PH10M / 10MQ) to automatically
change the orientation allowing for MPP-10 REVO-2
maximum flexibility in measurement.
Probe for effective thread-depth High speed 5-axis scanning head
measurement This high-speed scanning head delivers high
This is the only probe in the world that is accuracy measurement while delivering high-
dedicated to measure effective screw-thread throughput. Contact measurement with a stylus
depth on a CNC CMM. The probe can also that can be up to 500 mm in length increases
attach to a probe head (PH10M /10MQ) to flexibility and makes simultaneous 5-axis
change the orientation to measure bores in measuring with non-step indexing possible.
various directions.

Non-contact probes
SurfaceMeasure
Non-contact type laser probe
This compact, high accuracy, non-contact type laser
probe is designed for use with CNC CMMs. The scanning
probe automatically adjusts to workpiece surface
characteristics to deliver highly efficient measurements.
Automatic laser intensity and camera sensitivity adjust
according to the environment and the workpiece
material, for simpler and more comfortable laser
scanning.
SurfaceMeasure606 SurfaceMeasure606T 201FS

QVP CF20
QUICK VISION probe Centering microscope for CMMs
This CNC CMM Quick Vision Probe This centering microscope enables
utilizes Mitutoyo's technology in a measurement of small holes or elastic bodies
vision measuring machine for totally- that are very difficult to measure using a
automated video measurement. contact measurement method such as with a
touch-trigger probe. It also allows a CMM to
be used as a very large microscope.

CCTV Monitor System for CMM (optional)

A probe for roughness measurement

SURFTEST PROBE
Probe for surface roughness measurement
Mounting this probe on a CMM enables surface roughness measurement and analysis to
be included in fully automatic CNC measurement cycles. This probe is compatible with
an automatic probe changer, and therefore can be automatically replaced with another
type of probe for 3D coordinate measurement. A wide variety of roughness analyses
can be performed using the dedicated evaluation program.

Touch-trigger probes
TP7M TP200 TP20 N

High accuracy touch-trigger probe Compact high-accuracy touch-trigger probe Compact touch-trigger probe
This high-accuracy touch-trigger probe has a high This compact, high accuracy, touch-trigger probe is only 13.5 mm in This compact touch-trigger probe is only 13.5 mm in diameter, making it an
repeatability figure of of 2σ ≤ 0.25 µm. A long stylus, diameter, making it an ideal choice where high-accuracy measurement ideal choice for probing deep inside narrow or shrouded workpiece features.
up to 150 mm in length, can be installed. inside narrow or shrouded workpiece features is needed. Styli auto-changing (optional) is supported when mounted on a CNC CMM.
Styli auto-changing (optional) is supported.

Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice. N-18
 Coordinate Measuring Machines
Precision measuring technology in three dimensions

MH20i MH20
Touch-trigger probe with manual Touch-trigger probe with manual
probe head probe head
This touch-trigger probe equipped with a This touch-trigger probe equipped with a
manual probe head is designed for use with manual probe head is designed for use with
manual CMMs. The probe head may be manual CMMs. The probe head can be
manually indexed to 168 positions. manually positioned to the desired orientation.

UMAP-CMM PH20
Micro touch-trigger probe 5-axis control touch-trigger system
A stylus with an ultra-small diameter of Thanks to unique "head touches", it is possible
0.1 mm or 0.3 mm can be used. to measure by movement of the probe head
Measurement of miniscule form is possible by itself instead of moving the CMM elements.
mounting on the PH10MQ. Also, measuring time can significantly be
shortened by means of 5-axis concurrent
control and stepless positioning angle.

Probe heads
PH10M/10MQ MIH
Motorized probe head Manually indexable head
The probe allows automatic control of This probe head allows manual positioning (up
positioning (up to 720 directions) of the to 720 directions) of the mounted probe (for
mounted probe. It is possible to mount TP200 /TP20 /TP2-5W). A probe extension of
not only a touch-trigger probe but also any up to 300 mm in length can be attached.
scanning probe, vision probe, laser probe,
screw-thread depth probe, etc.
Auto-changing is available (optional).

sMounting example of sMounting example of

touch-trigger probe touch-trigger probe

PH1 PH6M
Manual probe head Fixed probe head
This manual probe head is A fixed probe head with autojoint connector
designed for use with the for use with TP7M or SP25M.
TP200 /TP20 touch-trigger
probes.
The attached probe is
manually positioned in the
desired orientation to suit sMounting example of Refer to the Probes for Coordinate Measuring Machines
the measuring task. touch-trigger probe Brochure (No. E16005) for more details.

Clamping System
• A workpiece can be mounted on a CMMs • Economical starter kits "Eco-fix Kit S" and
measuring table using a variety of combinations "Eco-fix Kit L" are available as shown below.
of Eco-Fix clamping components.
A dedicated fixturing jig isn't necessary.

Eco-fix Kit S

A kit includes a 250 mm × 250 mm base plate and a variety of clamping components.

N Eco-fix Kit L

Usage example

A kit includes a 500 mm × 400 mm base plate and a variety of clamping components.

N-19 Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.