Ds 0002d.sp Series
Ds 0002d.sp Series
Ds 0002d.sp Series
Differential Low Pressure Sensors
Spirometry Applications
Highly integrated sensor with ADC and DSP
Programmable ranges from ±250 Pa to ±40 kPa
16 bit resolution each range
Ultra low noise, 19+ bit Effective Resolution
Selectable Bandwidth Filter from 25Hz to 250Hz
Z‐Track™ virtually eliminates zero drift
Very High Accuracy +/‐ 0.1% of Selected Range
Long Term Stability +/‐ 0.1% FSS/year
Enhanced EMI Immunity
Output Update Rate of 500Hz
Temperature Compensated 0°C to 50°C
Supply Voltage Compensation
Standard I2C and SPI Interface
Product Summary
Superior’s SP Series low pressure sensor module element with integrated amplification, ADC,
family employs NimbleSense™ a proprietary DSP and processor intelligence to greatly
architecture achieving very high dynamic range simplify customer integration efforts. The
to create the industry’s highest performing SP Series leverages floating point technology to
Spirometry pressure sensing device. This wider provide a highly precise digital output. This
dynamic range is ideally suited to offer precise precision, when combined with the enhanced
near zero measurements to support the zero point and the industry’s best positional
demanding functional requirements of the immunity enables the ultimate in Spirometry
Spirometry market. Selectable multiple system sensing performance. The SP Series
pressure ranges are now supported in a single optimizes performance, reliability and system
package. The SP110/SP210 can be user cost for the challenging Spirometry market.
programmed to ±250, 500, 1k and 2.5k Pa full
scale ranges while the SP160 is programmable Industry leading accuracy performance ‐ The
to ±5, 10, 20 and 40 kPa ranges. SP Series measures dry air and non‐aggressive
gas pressure with very high accuracy better
The SP Series family provides a new level of than 0.10% FS and Total Error Band is also
sensor integration into the Spirometry market industry leading which is typically better than
combining an advanced piezoresistive sensing 0.15% FSS.
www.SuperiorSensors.com 1 DS‐0002D.DOCX
SP Series
Differential Low Pressure Sensors
Table of Contents 1 Maximum Ratings
1 Maximum Ratings ................................................................ 2 Parameter Sym Min Max Units
2 Suggested Operating Conditions ......................................... 2
Supply Voltage VDDM Gnd‐0.3 4.0 V
3 Environmental ..................................................................... 2
4 Equivalent Circuit ................................................................. 2 Voltage on I/O Pins
5 Feature List .......................................................................... 3 VDD > 3.3V VIOML Gnd‐0.3 5.8 V
6 Performance Characteristics ............................................... 3 VDD ≤ 3.3V VIOMH Gnd‐0.3 VDD+2.5 V
7 Electrical Characteristics ...................................................... 4 I/O Current IIOM ‐25 25 mA
7.1 Supply Characteristics ................................................. 4
7.2 Reset Characteristics .................................................. 4
7.3 DAV Characteristics .................................................... 4 2 Suggested Operating Conditions
7.4 SPI Characteristics ...................................................... 5
Parameter Sym Min Max Units
7.5 I2C Characteristics ....................................................... 5
8 Materials .............................................................................. 5 Supply Voltage VDDOP 2.8 3.5 V
8.1 Wetted Materials ........................................................ 5
Temperature TA 0 50 °C
8.2 Material Compliance .................................................. 6
9 System Overview ................................................................. 6
10 Interface .............................................................................. 7 3 Environmental
10.1 Reset ........................................................................... 7
10.2 Communication Interface Selection ........................... 7 Parameter Sym Min Max Units
10.3 SPI Interface ................................................................ 7 Temperature Range
10.4 I2C Interface ................................................................ 8 Compensated TCMP 0 50 °C
10.4.1 I2C Address ....................................................... 8 Operating TOP ‐20 85 °C
10.4.2 I2C Communications Model ............................. 8 Storage TSTG ‐40 85 °C
10.4.3 I2C Clock Stretching .......................................... 9
Humidity
10.4.4 I2C Bus Compatibility ........................................ 9 RHOP 0 95 % RH
(Non‐condensing)
10.5 Extended Data Acquisition ......................................... 9
10.5.1 Available Extended Data .................................. 9 Vibration
GVIBE ‐ 15 g
10.5.2 SPI Extended Data Read ................................... 9 (10Hz‐2kHz)
10.5.3 I2C Extended Data Read ................................... 9 Shock (6 ms) GSHOCK ‐ 100 g
10.6 Control Registers ...................................................... 10
Life CYLIFE 1M ‐ Pressure
10.6.1 Mode Control Register ................................... 10
Cycles
10.6.2 Rate Control Register ..................................... 11
10.7 Computing Pressure ................................................. 11
11 Mechanical and Manufacturing ......................................... 12 4 Equivalent Circuit
11.1 Package Dimensions ................................................. 12
11.2 Suggested Pad Layout ............................................... 12 DAV DAV
11.3 Pinout ....................................................................... 13 nRST nRST
PLOW Port A PLOW Port A
11.4 Reflow Soldering and Handling Conditions .............. 13
11.5 Pick and Place Pick‐up Zone ..................................... 13 PHIGH Port B
MISO/SDA
PHIGH Port B
MISO/SDA
12 Ordering Information ........................................................ 16
13 Packaging Labeling............................................................. 16
14 Revisions ............................................................................ 17
15 Warranty ............................................................................ 17
www.SuperiorSensors.com 2 DS‐0002D.DOCX
SP Series
Differential Low Pressure Sensors
5 Feature List
Parameter Sym SP110 SP210 SP160 Units Notes
6 Performance Characteristics
Note: Unless otherwise specified, characteristics specified with VDD = 3.3V, TA = 25C
SP210 SP110 SP160
Parameter Sym Units Notes
Min Typ Max Min Typ Max Min Typ Max
Accuracy PACC ‐ 0.05 0.1 ‐ 0.05 0.1 ‐ 0.05 0.1 % RNG 1
Total Error Band TEB ‐ 0.05 0.15 ‐ 0.1 0.3 ‐ 0.1 0.3 % FSS 2
Long Term Stability LTS ‐ 0.05 0.1 ‐ 0.1 0.25 ‐ 0.1 0.25 % FSS/Yr
Thermal Hysteresis THYS ‐ 0.025 ‐ ‐ 0.05 ‐ ‐ 0.05 ‐ % FSS
Pressure Hysteresis PHYS ‐ 0.05 ‐ ‐ 0.05 ‐ ‐ 0.05 ‐ % RNG 1
Position Sensitivity PPS ‐ 0.25 ‐ ‐ 2.0 ‐ ‐ 2.0 ‐ Pa
Supply Rejection PSR ‐ 0.0005 ‐ ‐ 0.0005 ‐ ‐ 0.005 ‐ Pa/mV
Resolution RES ‐ 16 ‐ ‐ 16 ‐ ‐ 16 ‐ bit 3
System ENOB ENOB ‐ 18 ‐ ‐ 18 ‐ ‐ 18 ‐ Bit 4
Data Update Rate fUPDATE 485 498 512 485 498 512 485 498 512 Hz 5
1) Percentage of selected range.
2) Includes errors of offset, span and thermal effects.
3) Each of programmable range has the specified resolution.
4) ENOB stated for fBW set to 25 Hz, with Z‐Track™ active.
5) The internal update rate is fixed and does not change with range or filter settings. Sampling at lower data rates are possible provided the
Nyquist frequency is observed. It is suggested to sample at least 2x the set fBW frequency.
www.SuperiorSensors.com 3 DS‐0002D.DOCX
SP Series
Differential Low Pressure Sensors
7 Electrical Characteristics
7.1 Supply Characteristics
SP210 SP110 SP160
Parameter Sym Units Notes
Min Typ Max Min Typ Max Min Typ Max
Supply Current IDD ‐ 6.0 6.5 ‐ 5.0 5.5 ‐ 5.0 5.5 mA
Supply Capacitance CDD ‐ 10 ‐ ‐ 10 ‐ ‐ 10 ‐ uF 1
1) Supply capacitance is provided within the part however it is recommended to include a 0.1 uF decoupling cap near the supply pads.
www.SuperiorSensors.com 4 DS‐0002D.DOCX
SP Series
Differential Low Pressure Sensors
7.4 SPI Characteristics
SP210 / SP110 / SP160
Parameter Sym Condition Units Notes
Min Typ Max
Output High Voltage VOH IO = ‐3 mA VDD‐0.7 ‐ ‐ V 1
Output Low Voltage VOL IO = 8 mA ‐ ‐ 0.6 V 1
Input High Voltage VIH VDD‐0.6 ‐ ‐ 2, 3
Input Low Voltage VIL ‐ ‐ 0.6 2, 3
Internal Pull‐Up
IPU VIN = 0V ‐ ‐10 ‐30 uA 2, 3
Current
Time nSS to First tSC 100 ‐ ‐ us
SCK Edge
Clock Cycle Time tCC 8 ‐ ‐ us
Byte to Byte Cycle tBC 100 ‐ ‐ us
Time
Time Last Clock to tCN 20 ‐ ‐ us
nSS High
Cycle Time nSS tCS 8 ‐ ‐ us
Input Capacitance CIN ‐ 7 ‐ pF 2
1) Output MOSI
2) Inputs MISO, SCK, nSS
3) Inputs are 5V compliant.
8 Materials
8.1 Wetted Materials
SP210 SP110 SP160
Parameter Sym Units Notes
PA PB PA PB PA PB
Wetted Materials MATWET Epoxy Epoxy Epoxy Epoxy Epoxy Epoxy
Nylon Nylon Nylon Nylon Nylon Nylon
RTV RTV RTV RTV RTV RTV
Silicon Silicon Silicon Silicon Silicon Silicon
Gold Gold Gold Gold
Aluminum Aluminum Aluminum Aluminum
www.SuperiorSensors.com 5 DS‐0002D.DOCX
SP Series
Differential Low Pressure Sensors
8.2 Material Compliance
SP210 SP110 SP160
Parameter Sym Units Notes
PA PB PA PB PA PB
RoHS REGRoHS RoHS Compliant
REACH REGREAC REACH Compliant
9 System Overview
The SP Series pressure sensor is a fully integrated pressure acquisition system in a sensor module. The acquisition system includes
anti‐alias filters, data acquisition, sensor compensation, AZ Control, noise suppression, bandwidth limiting and I/O functions. Refer
to the figure below for the SP Series block diagram.
User Control Registers DAV
HW
Interface nRST
Mode Control Rate Control
Rate
Pressure Anti‐Alias Δ‐Sigma Controller
Range AZ with Enable/ BW
Sensor Filter Modulator 2b Control 2b Control 1b Disable 3b Control
AZ Block
Anti‐Alias Δ‐Sigma With
Va Z‐Track
Filter Modulator MISO/SDA
4 Compensation ‐ Zero Noise
BW Limit
SPI/I2C
MOSI/SCL
Decimation FPU with ∑ IIR SCK
Linearization + Suppression
(2nd Order) Interface
nSS
To SAR ADC
26 Term
Compensation
Coefficients
Vs
SAR ADC
SYS
FIG‐0042A
There are also two user controlled registers that tune the sensor to the specific user requirements. The first register is the Mode
Control register that determines the output pressure range, the corner frequency of the bandwidth limiting filter, enables or disables
the noise suppression filter and controls the Auto‐Zero block with Z‐Track™.
The second register is the Rate Control register which
controls the rate at which the Data Available (DAV) pin is
asserted. The internal sensor data update rate is 498 Hz. Rate Control
Register
The Rate Control register will throttle down the rate at
Reload Value
which the Data Available pin (DAV) is asserted by
counting down from the value set in the Rate Control Internal Update Zero DAV
Down Counter S Q
(fUPDATE)
Register and setting the DAV pin upon reaching zero in
the down counter. The DAV is reset upon each read of
Data Read
the pressure sensor. An internal model of the Rate R
FIG‐0012B
Controller is illustrated in the figure to the right. In the
event the Rate Control Register is set to zero, the sensor
will automatically select a Rate Control Register value that is determined by the currently selected bandwidth. Refer to Section
10.6.2 for details on the rate control register functionality.
www.SuperiorSensors.com 6 DS‐0002D.DOCX
SP Series
Differential Low Pressure Sensors
10 Interface
10.1 Reset
Reset timing is shown in the diagram below.
The communications method (SPI or I2C) is established during the time just after rest. During this time (tIOD), no communications
should take place.
Also, the internal filters are settling during the time tFRD and data acquired during this time may not be fully settled.
Reset Timing Diagram
Internal Reset
tRSTL
_RST
tIOD tIOD
Communications
Available
tFRD tFRD
Filters Settled
FIG‐0021A
10.2 Communication Interface Selection
The communications interface is selected by interrogating the nSS pin after the internal power on reset delay. If nSS is high, the SPI
interface will be selected otherwise (if low) the I2C interface will be selected. Grounding the nSS pin is an acceptable method for
selecting the I2C interface.
SPI Timing Diagram
SCK
MOSI Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0
MISO Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0
FIG‐0013A
nSS
The data communications has been reduced to a simple 16 bit transfer model for reading the pressure output. Each communication
cycle consists of master sending the Mode and Rate data to be placed into the sensor Mode Register and Rate Registers respectively.
Simultaneously, the sensor sends the pressure data for the master to receive. Refer to the figure below for the data communication
model of the SP Series sensor.
www.SuperiorSensors.com 7 DS‐0002D.DOCX
SP Series
Differential Low Pressure Sensors
The requirement to send the Mode and Rate bytes on each data read cycle is intentional. The purpose is to force the master to send
specific data for each communication and prevent inadvertent data from being sent to the sensor. Since a SPI interface will generally
re‐circulate data through its shift register, the intention is to prevent the pressure output from the sensor from being re‐circulated
back to the sensor and potentially causing unintended corruption of manufacturing data.
SPI Data Diagram
SCK
FIG‐0014A
nSS
10.4 I2C Interface
The SP Series is compatible with the I2C protocol. For detailed information regarding the I2C protocol, please refer to the Philips I2C
Bus Specification, Version 2.
www.SuperiorSensors.com 8 DS‐0002D.DOCX
SP Series
Differential Low Pressure Sensors
10.4.3 I2C Clock Stretching
The figure to the right illustrates the I2C
clock stretching by the sensor. At times, the
sensor requires additional time to respond
to the host and utilizes the clock stretching
feature of the I2C protocol. This is
accomplished by holding the SCL low after
the ACK cycle of a data transfer. Refer to
Section 7.5 for the clock stretching timing.
Note, the maximum clock stretch time will
generally only occur once during the three
ACK cycles of a two byte transfer. That is,
the balance of ACK's during a multi‐byte
transfer will generally include the typical clock stretching time.
www.SuperiorSensors.com 9 DS‐0002D.DOCX
SP Series
Differential Low Pressure Sensors
10.6 Control Registers
10.6.1 Mode Control Register Mode Control Register Detail
Default Value: 0x93
Mode Register (General)
Details of the Mode Control register are illustrated in the figure to b7 b6 b5 b4 b3 b2 b1 b0
the right.
Pressure Range Select
Bits 0‐1 control the output pressure range. BW Limit Select
AZ Enable
Bits 2‐4 control the BW Limit Filter. AZ Mode
Zero‐Noise
Bit 5 enables the Auto‐Zero function. Upon the rising edge of bit 5 Suppression Enable
(writing a 1 with the prior value being a 0), the current pressure
output is captured as the zero point. The detailed behavior of this Mode Register (Detail)
zero value is determined by bit 6 (Auto‐Zero Mode bit). The Auto‐
b7 b6 b5 b4 b3 b2 b1 b0
Zero behavior will continue while bit 5 remains set. When bit 5
returns to 0, the Auto‐Zero function will be turned off and there
Pressure Range Select (by Model)
will be no forced zero of the part output. SP210 SP110 SP160
0 0 1.0 inH 2O 1.0 inH 2O 20 inH2O
Bit 6 determines the specific Auto‐Zero mode. It is captured on the
0 1 2.0 inH 2O 2.0 inH 2O 40 inH2O
rising edge of bit 5. If bit 6 is zero, a standard Auto‐Zero is
performed. If bit 6 is 1, the Z‐Track mode is initiated. 1 0 5.0 inH 2O 5.0 inH 2O 80 inH2O
off. 0 1 0 50 Hz
0 1 1 65 Hz
Z‐Track Mode 1 0 0 100 Hz
When the Z‐Track Mode is initiated, the current zero pressure 1 0 1 130 Hz
point is captured and subtracted from the compensated
1 1 0 180 Hz
output. The zero point is also tracked while the pressure
1 1 1 250 Hz
output is within the noise floor of the sensor. During a
pressure excursion, the zero tracking is suspended until such Auto‐Zero Enable
time as the sensor output returns to the sensor noise floor. At 0 Disabled
this time, the sensor recaptures the zero point and continues ↑ Capture Zero
tracking zero. This function remains active while the Auto‐Zero 1 Enabled
Enable bit (bit 5) remains high.
Auto‐Zero Mode (1)
Bit 7 is the Zero‐Noise Suppression Enable bit. Setting this bit will
0 Standard (Capture Only)
cause the sensor to suppress noise around the zero pressure
1 Z‐Track (Capture‐Track)
output value. It is beneficial to set this bit any time the Auto‐Zero
function is enabled. Zero‐Noise Suppress
0
Disabled
1
Enabled
FIG‐0043A
Note 1: Auto‐Zero Mode is captured on the rising edge of Auto‐Zero Enable
It should also be noted that upon changing the Mode Control
value, there is a one cycle latency before the new Mode Control
value becomes valid. That is, the data of the communication cycle following a change to the Mode Control register will not reflect
the change. It is not until the second communication cycle that the change in the Mode Control register will be reflected in the
output data.
25 Hz 49.8 Hz
Note: Start‐up time for the sensor is approximately 60ms for
35 Hz 71.2 Hz
the first sample to be settled. Requesting data during this
time will result in invalid information. However, this start‐up 50 Hz 99.7 Hz
time can be used for configuring the Mode and Rate 65 Hz 124.6 Hz
registers by performing a transfer with the desired Mode 100 Hz 249.2 Hz
and Rate register values and discarding the received 130 Hz 249.2 Hz
pressure data. After waiting the required start‐up time, the 180 Hz 498.5 Hz
sensor will respond with desired data since the Mode and
FIG‐0044A
250 Hz 498.5 Hz
Rate registers have been pre‐established.
12 Ordering Information
Part Packaging
Part Number Packaging Order Number
Package Qty
Tape and Reel 256 SP160‐SM02‐R
Multi‐Tray 512 SP160‐SM02‐M
SP160‐SM02 SM02
Single Tray 64 SP160‐SM02‐T
Quarter Reel 64 SP160‐SM02‐Q
Cut Tape 1‐63 SP160‐SM02‐C
Tape and Reel 256 SP110‐SM02‐R
Multi‐Tray 512 SP110‐SM02‐M
SP110‐SM02 SM02
Single Tray 64 SP110‐SM02‐T
Quarter Reel 64 SP110‐SM02‐Q
Cut Tape 1‐63 SP110‐SM02‐C
Tape and Reel 256 SP210‐SM02‐R
Multi‐Tray 512 SP210‐SM02‐M
SP210‐SM02 SM02
Single Tray 64 SP210‐SM02‐T
Quarter Reel 64 SP210‐SM02‐Q
Cut Tape 1‐63 SP210‐SM02‐C
13 Packaging Labeling
Packaging labels are provided with barcode Code 128 symbology. The provided fields are Company
Name, Part Number, Packaging ID, Quantity and Country of Origin. The Packaging ID traces back to
the Lot Number (or Lot Numbers) contained in the package. The purpose is to eliminate multiple
labels (one for each included Lot Number) in the event of multiple Lot Numbers within a single
package. This is for ease of customer tracking and maintenance. The Packaging ID is a 24 bit value
printed in hexadecimal format.
15 Warranty
Superior Sensor Technology and its subsidiaries warrant goods of its manufacture as being free of defective materials and faulty
workmanship during the applicable warranty period. In all cases, Superior Sensor Technology's standard product warranty applies;
please refer to your order acknowledgement or consult your local sales office for specific warranty details.
If warranted goods are returned to Superior Sensor Technology during the period of coverage, Superior Sensor Technology will
repair or replace, at its option, without charge those items that Superior Sensor Technology, in its sole discretion, finds defective.
The foregoing is buyer’s sole remedy and is in lieu of all other warranties, expressed or implied. In no event shall Superior Sensor
Technology be liable for consequential, special, or indirect damages.
While Superior Sensor Technology may provide application assistance personally, through literature or the Superior Sensor
Technology web site, it is buyer's sole responsibility to determine the suitability of the product in their application. Superior Sensor
Technology assumes no liability for applications assistance or customer product design.
Superior Sensor Technology reserves the right to make corrections, modifications, enhancements, improvements and other changes
to its products and services at any time and to discontinue any product or service without notice. Customers should obtain the
latest relevant information before placing orders and should verify that such information is current and complete.
Superior SENSOR TECHNOLOGY
3080 Oakmead Village Road
Santa Clara, CA 95051
www.SuperiorSensors.com
info@SuperiorSensors.com
+1.408.703.2950
NimbleSense and Z‐Track are trademarks of Superior Sensor Technology