Scribd Logo
Upload

Welcome to Scribd!

  • 35 views

    MEMS Design Chap 1 - OVERVIEW

    Uploaded by

    vuonglup
    This document provides an overview of a course on MEMS (Micro Electro Mechanical Systems) design. It discusses key concepts like sensors and actuators. Sensors are devices that convert mechanical, thermal, optical or other signals into electrical signals. Examples of sensors discussed include pressure, force, acceleration and thermal sensors. Actuators are devices that convert electrical, thermal or chemical signals into mechanical signals or movement. Example actuator types and devices discussed include electrostatic, thermal, piezoelectric and shape memory alloy actuators. The document also discusses integrated MEMS systems that combine multiple single systems on a chip, like micro pumps and grippers. It concludes with potential future directions for MEMS, like nano-scale devices, smarter

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd

    MEMS Design Chap 1 - OVERVIEW

    Uploaded by

    vuonglup
    35 views24 pages
    This document provides an overview of a course on MEMS (Micro Electro Mechanical Systems) design. It discusses key concepts like sensors and actuators. Sensors are devices that convert mechanical, thermal, optical or other signals into electrical signals. Examples of sensors discussed include pressure, force, acceleration and thermal sensors. Actuators are devices that convert electrical, thermal or chemical signals into mechanical signals or movement. Example actuator types and devices discussed include electrostatic, thermal, piezoelectric and shape memory alloy actuators. The document also discusses integrated MEMS systems that combine multiple single systems on a chip, like micro pumps and grippers. It concludes with potential future directions for MEMS, like nano-scale devices, smarter

    Original Description:

    MEMS Design Chap 1- OVERVIEW (2)

    Original Title

    MEMS Design Chap 1- OVERVIEW (2)

    Copyright

    © © All Rights Reserved

    Available Formats

    PDF, TXT or read online from Scribd

    Did you find this document useful?

    Is this content inappropriate?

    This document provides an overview of a course on MEMS (Micro Electro Mechanical Systems) design. It discusses key concepts like sensors and actuators. Sensors are devices that convert mechanical, thermal, optical or other signals into electrical signals. Examples of sensors discussed include pressure, force, acceleration and thermal sensors. Actuators are devices that convert electrical, thermal or chemical signals into mechanical signals or movement. Example actuator types and devices discussed include electrostatic, thermal, piezoelectric and shape memory alloy actuators. The document also discusses integrated MEMS systems that combine multiple single systems on a chip, like micro pumps and grippers. It concludes with potential future directions for MEMS, like nano-scale devices, smarter

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    35 views24 pages

    MEMS Design Chap 1 - OVERVIEW

    Uploaded by

    vuonglup
    This document provides an overview of a course on MEMS (Micro Electro Mechanical Systems) design. It discusses key concepts like sensors and actuators. Sensors are devices that convert mechanical, thermal, optical or other signals into electrical signals. Examples of sensors discussed include pressure, force, acceleration and thermal sensors. Actuators are devices that convert electrical, thermal or chemical signals into mechanical signals or movement. Example actuator types and devices discussed include electrostatic, thermal, piezoelectric and shape memory alloy actuators. The document also discusses integrated MEMS systems that combine multiple single systems on a chip, like micro pumps and grippers. It concludes with potential future directions for MEMS, like nano-scale devices, smarter

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    You are on page 1of 24

    Course’s name: MEMS Design

    Chapter 1-
    OVERVIEW of MEMS

    Lecturer : A/Prof. Pham Hong Phuc


    Dept. Mechatronics
    Hanoi University of Science and Technology (HUST)
    (https://sme.hust.edu.vn/can-bo/pgs-ts-pham-hong-phuc.html)
    phuc.phamhong@hust.edu.vn
    1
    Contents

    1. Concepts and definitions


    2. Sensor system
    3. Actuator system
    4. Integrated system
    5. Applications and Development
    6. Future of MEMS

    2
    References
    1. Thesis, textbook:
    Handbook of transducers, MEMS design, Introduction-
    micro-fabrication…
    2. Scientific journals:
    From international publication (Springer, Elsevier, IOP,
    IEEE, ASME …)

    3. Others: Video, poster, catalogue, internet…


    3
    Introduction of MEMS (Micro Electro Mechanical Systems)

    ME EE

    IT, Simulation
    Physics MEMS

    Chemistry Material
    Science
    Mathematics…

    4
    Concept of MEMS Devices
    Processing ICs Sensors Actuators
    RF circuits
    Memory

    In Out
    Thermal Thermal
    Electrical Electrical
    Mechanical Mechanical
    Optical Optical
    Chemical Silicon chip Chemical
    Biological… Biological…

    Integrated devices, fundamentally expanding possibilities of ICs


    Inputs and outputs are not only electrical signal but also thermal, mechanical,
    chemical, biological information, etc.
    Movable (or living) devices
    1980s - 1990s: Answer the problem: “how to make” MEMS
    2001 - present: “what to make”, specific products emerging from laboratories
    Expected to come into practical use for human society in the near future 5
    Introduction of MEMS

    Ref. : James J. Allen, “MEMS Design”, © 2005 by Taylor & Francis Group
    6
    MEMS fabrication technology
    Extension of IC (Integrated Circuit) Fabrication Technology

    Bulk Surface SMILE


    Micromachining Micromachining SR Micro Lithography &
    Photolithography Photolithography Etching
    Anisotropic etching Thin film deposition High Aspect Ratio Process
    Deep-RIE Sacrificial layer etching LIGA process
    Wafer bonding... Dry etching

    MEMS R&D, Prototyping, Fabrication and Packaging Service 7


    Definition and Classification of Sensors
    Sensors are MEMS devices, which convert mechanical signals (force, pressure,
    acceleration, angular rate, velocity, displacement) or others (thermal, optical…)
     to the electrical signal (Piezoelectric, piezoresistive, capacitive…)

    • Mechanical sensors
    • Pressure sensor
    • Force/moment sensors
    • Inertial Sensors
    – Accelerometer
    – Gyroscope
    • Thermal sensors
    • Optical sensors
    • Fluidics/flow sensors
    • … 8
    Example 1: 3-DOF Silicon Force Sensors

    Design and Simulation Packaging

    F
    Micro Tester
    Fingertip sensor

    Fingertip sensor

    Power supply

    AD converter

    Testing Applications 9
    Micro fabrication
    Example 2: 3-DOF Accelerometer

    Fixed f rame Sensing beam


    Inertial sensors

    Seismic mass

    Cover size: 4x4 (mm2)


    Beam length: 1000 mm, beam width: 60 mm, beam thickness: 10 mm
    10
    Definition and Classification of Actuators

    Actuators are MEMS devices, which convert electrical, thermal or


    chemical signals…  to the mechanical signal (force, pressure, moment,
    or displacement)

    • Electrostatic actuators
    • Thermal actuators
    • Piezoelectric actuators
    • Magnetic actuators
    • Shape memory alloys actuators
    • Polymer actuators …

    11
    Example 3: Electrostatic Actuators

    • Electrostatic Comb Actuators:

    Linear Comb Actuators


    Rotational Comb Actuators
    12
    Scratch Drive Actuator (SDA)

    13
    Electrostatic Microgripper

    14
    Example 4: Hot-cold arms Actuators

    The difference of thermal expansion coefficient between 2 or 3


    arms will generate force and displacement… 15
    Example 5: V-shaped actuator

    The thermal expansion of V-shaped beams (2) will generate a


    thermal force and displacement of the shuttle (1) in Y-direction

    16
    Micro linear motor based on V-shaped actuator

    4
    V2

    β V1
    3
    g1
    α
    2
    1

    g2 V1

    V2

    Micro linear motor using 6 V-shaped actuators for both moving directions:
    4 actuators for driving; 2 centered actuators for holding.
    17
    Micro Gripper Using V-shaped actuator

    Working principle

    - Actuator: Working on the principle


    of thermal expansion of V - beam.

    - The claw can drive gripping arm


    through two revolute joints
    0
    v

    18
    Exp. 6- Integrated systems: Micro pump
    Consist of more than 2 single systems, which integrated on a
    chip: (micro pump, micro robot system, micro gearing…)

    Micropump with check-valve


    In
    PZT Si

    Out
    PDMS
    inlet outlet

    19
    Integrated systems: Pump and Flow sensor

    Thien Dinh Xuan, Van Thanh Dau, Susumu Sugiyama, Phuc Hong Pham, “Fluidic device
    with pumping and sensing functions for precise flow control”, Sensors and Actuators B
    (SCI), Vol. 150, Issue 2 (2010), pp 819-824. ISSN: 0925-4005
    20
    Exp. 7: Gripper and force sensor

    Electrothermal micro-gripper integrated to 1-DOF piezoresistive sensor,


    aiming to measure displacement of jaw 21
    Application and development of MEMS Devices
    Production
    Delivery
    Transport
    Factory
    Agriculture

    Environment, Aerospace
    Bio

    Sens. RF

    Trans. CPU I/O


    Information
    Bio- Technology
    Chemical Act. Mem Gen./
    Stor.
    o.
    Analysis

    Medical Treatment Robotics,


    Diagnosis Internet Medical Engineering Flexible Automation 22
    Sports
    Future of MEMS

    o Nano-scale
    o Smarter and integrated devices
    o Green MEMS: Microsystems or Micro technologies
    for green and safety applications
     Green micro-technologies and micro-fabrication
     Ultra low energy MEMS technologies: production and
    operation
     Energy harvesting and saving technologies: green and
    environmental applications

    23
    Thanks for listening !
    Any question or comment ?

    24

    You might also like