LF-DN

Large Format
Digital Platform
for VHX-7000N Controllers

Get More From

Your Microscope
 Contents

Introduction 1
How it Works 2
Specifications 3
Dimensions 4
LF-DN-300-MT 4
LF-DN-300-GR 5
LF-DN-600-GR 6
Maximum Part Sizes 7
LF-DN-300 7
LF-DN-600 8
Ordering Options 9
Ordering Info 9
Example Part String 10
Examples of Ordering Options 11
Customization Options 12
What to Order from Keyence 13
Accessory Fixture Plates 14

peakmetrology.com
 <Text>
LF-DN
Large Format
Digital Platform

300 x 300 mm Inspection Area System

Larger stages increase the working area and

sample payload capacity. Work 100% from
within the standard Keyence VHX software
while utilizing a much larger inspection
envelope.

600 x 600 mm Inspection Area System

Wafer imaging with the VHX-7100 microscope

A variety of accessories are available to

meet the needs of customers in
environments spanning from R&D to
production. Configure a system that works
best for your application.

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 How it
Works

The VHX-7000N microscope controller

paired with Keyence VK-S1000K stepper
motor controller allows for seamless
integration of Peak XY stages directly in
the standard VHX software interface.
Enjoy nearly all functionality available with
standard Keyence stages but over an
extended travel range up to 800x800 mm.
• 2D/3D Concatenation
• Navigation
• Registration of stage position
• Split photography
• Contamination analysis
• XY stage measurement
• and many more…

The following functions are NOT available

with the LF-DN Platform:
• One-push calibration
• Eucentric adjustment for tilt axis
• FI Head collision prevention
• Focus View camera

VHX Software Interface

Need additional automation features?

Check out our LF-D product which uses
ScanX software to unlock advanced
features such as: unlimited stitching,
programmable autofocus, customized
image naming, and more!

VK-S1000K Stepper Motor Controller

and Integrated Stage Settings Menu

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 Specs

LF-DN Specifications
Travel 300 x 300 mm 600 x 600 mm
XY Performance
Accuracy ± 10 μm ± 16 μm
Repeatability ± 1 μm
Max Jog Speed 25 mm/sec
Large V-Axis (Optional) Performance
Travel 200 mm
Accuracy ± 8 μm
Repeatability ± 1 μm
Minimum Incremental Motion 1.0 μm
Max Jog Speed 25 mm/sec
Mechanical Specifications
Payload Capacity 35 kg 45 kg
MTBF (Mean Time Before Failure) 20,000 Hours

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 Dimensions
AXIS NOMINAL TRAVEL ADDITIONAL STAGES IMAGE PLANE ADJUSTABILITY B
X 300 (-AS0) NONE ±29.5 (USING POST) 25
Y 300 (-AS1) KEYENCE Z ±24.5 25
KEYENCE Z 49 (-AS2) MANUAL V & KEYENCE Z ±124.5 125
V 200 (-AS3) POWERED V & KEYENCE Z ±124.5 125

584 584
55 55

(-AS0) NONE (-AS1) KEYENCE Z

831
866

(-AS2) MANUAL V & KEYENCE Z

`
(-AS3) POWERED V & KEYENCE Z
790
628

64 THRU
FOR CABLES

965
CL Y TRAVEL
765
305 4X MOUNTING HOLES
FOR M16 BOLTS
4X LIFTING EYES
JOYSTICK

380 CUSTOMER MOUNTING HOLES

CL X TRAVEL 24X M6X1.0 7

165
150
100
75

B
363 25
50 IMAGE PLANE
162

180

DIMENSIONS: MILLIMETERS

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 Dimensions
AXIS NOMINAL TRAVEL ADDITIONAL STAGES IMAGE PLANE ADJUSTABILITY B C
X 300 (-AS1) KEYENCE Z ±24.5 25 468
Y 300 (-AS2) MANUAL V & KEYENCE Z ±124.5 125 395
KEYENCE Z 49 (-AS3) POWERED V & KEYENCE Z ±124.5 125 395
V 200

941
53 906

658

(-AS3) POWERED V & KEYENCE Z

(-AS1) KEYENCE Z (-AS2) MANUAL V & KEYENCE Z

790
628

4X HOIST RINGS

64 THRU
FOR CABLES JOYSTICK

970 CL Y TRAVEL
765
C 4X MOUNTING HOLES
FOR M16 BOLTS

380
CL X TRAVEL CUSTOMER MOUNTING HOLES
24X M6X1.0 7

165
150
100
75

25
50 B
162
357
IMAGE PLANE

255

OPTIONAL AIR ISOLATION KIT

772 OPTIONAL MACHINE BASE

OPTIONAL E-STOP BOX

476 613
150 MAX
92 MIN

DIMENSIONS: MILLIMETERS

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 Dimensions
AXIS NOMINAL TRAVEL ADDITIONAL STAGES IMAGE PLANE ADJUSTABILITY B C
X 600 (-AS1) KEYENCE Z ±24.5 25 713
Y 600 (-AS3) POWERED V & KEYENCE Z ±124.5 125 628
KEYENCE Z 49
V 200

1017
66
66
662

(-AS1) KEYENCE Z (-AS3) POWERED V & KEYENCE Z

4X MOUNTING HOLES
FOR M16 BOLTS CUSTOMER MOUNTING HOLES
4X HOIST RINGS 33X M6X1.0 10

1315
1150
CL Y TRAVEL
195
JOYSTICK 175
100
C

583
963
50
1125
150
CL X TRAVEL 190

B
357
IMAGE PLANE

210

OPTIONAL OPTIONAL AIR

E-STOP 772 ISOLATION KIT
BUTTON

OPTIONAL
MACHINE BASE
811 998
150 MAX
92 MIN

DIMENSIONS: MILLIMETERS

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 Part Sizes

LF-DN-300-MT
Option Height Max Max
(mm) Width Length
(mm) (mm)
310¹
-AS0 0 to 52 307
(500) Lengt
-AS1 0 to 49 434
310¹ h
(467)
310¹ Heig
-AS2 0 to 250 434
(425)
ht
310¹
-AS3 0 to 250 434
(425)
310¹
-AS6 0 to 250 434
(425)
310¹
-AS7 0 to 250 434
(425)

LF-DN-300-GR
Option Height Max Max
(mm) Width Length
(mm) (mm)
-AS1 0 to 49 434 429

-AS2 0 to 250 434 429

Le

-AS3 0 to 250 434 429

ng
th

Hei -AS6 0 to 250 434 429

ght
-AS7 0 to 250 434 429

* All dimensions assume part is centered on travel.

Consult Peak about non-symmetric parts.
¹ Parts exceeding this size will extend beyond front edge
of base when Y-axis reaches extent of travel. See
parentheses for max size with overhang.

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 Part Sizes

LF-DN-600
Option Height Max Max
(mm) Width Length
(mm) (mm)
600¹
-AS0 0 to 52 610
(800)
650¹
-AS1 0 to 49 610
(770)
650¹
-AS2 0 to 250 610
(770)
650¹
-AS3 0 to 250 610
(770)

Leng
th
Heig
ht

* All dimensions assume part is centered on travel.

Consult Peak about non-symmetric parts.
¹ Parts exceeding this size will extend beyond front/rear
edge of base when Y-axis reaches extent of travel.
See parentheses for max size with overhang.

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 Ordering

Step 1 - Select your travel

-300 (300 x 300 mm) Stacked XY axes, with 300 mm of square travel
-600 (600 x 600 mm) Lower axis mounted to base, upper axis mounted to the bridge
Step 2 - Select your base material
-MT (Aluminum/Steel)³ Lightweight, aluminum base with welded steel bridge
-GR (Granite) Granite used for vibration isolation concerns
Step 3 - Choose your options
VHX Camera2 (Required)
-V1 (VHX-7100) Keyence VHX-7100 Fully Integrated Camera Head
-V2 (VHX-7020) Camera unit with manual lens changes for the VHX-7000 series
Additional Stages (Required)
-AS0 (None) No additional stages provided
-AS1 (Small Z) 49 mm of motorized vertical travel range with Keyence VHX-S700F²
-AS2 (Large Manual V) 200 mm vertical travel via handwheel; 49 mm of fine adjustment with Keyence VHX-S700F²
-AS3 (Large Motorized V) 200 mm of motorized vertical travel; 49 mm of fine adjustment with Keyence VHX-S700F²
-AS6 (Manual Tilt)³ 49 mm of fine adjustment with Keyence VHX-S700F²; +/- 90 deg manual tilt adjustment
-AS7 (Large V and Manual Tilt)³ Everything included in -AS3, plus +/- 90 deg manual tilt adjustment
Machine Base (Optional)
-MB (Machine Base) Steel weldment with leveling feet, doors, and mounting features for electronics
Isolation (Required)
-ISO1 (Elastomer) Vibration reduction via elastomer pads designed to provide high damping
-ISO2 (Passive Air)¹ Increased isolation of environmental vibrations with self-leveling air isolators
Emergency Stop (Optional)
-ESTOP (Emergency Stop) Mushroom button to cut power to stage motors
Line Cord (Required)
-LC0 (None) No line cord
-LC1 (US115VAC) US (115VAC) compatible line cord
-LC2 (US230VAC) US (230VAC) compatible line cord
-LC3 (German) Germany compatible line cord
-LC4 (UK) UK compatible line cord
Vacuum Line (Optional)
-VAC (Vacuum Line)� Vacuum line cable routing
¹ Requires “Machine Base” option
² Provided by Keyence
³ Only available with -300 Travel Option
⁴ For use with accessory vacuum chucks

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 Ordering

Required
LF-DN -300 -GR -V1 -AS3 -MB -ISO1 -ESTOP -LC1 -VAC

Travel VHX Camera² Machine Base* Emergency Stop* Vacuum Line⁴

-300: 300 x 300 mm -V1: VHX-7100 -MB: Machine Base -ESTOP: Emergency Stop -VAC: Vacuum Line
-600: 600 x 600 mm -V2: VHX-7020

Product Base Material Additional Stages Isolation Line Cord

-MT: Aluminum/Steel³ -AS0: None -ISO1: Elastomer -LC0: None
-GR: Granite -AS1: Small Z² -ISO2: Passive Air¹ -LC1: US115VAC
-AS2: Large Manual V -LC2: US230VAC
-AS3: Large V -LC3: German
-AS6: Manual Tilt³ -LC4: UK
-AS7: Large V and Manual Tilt³
* Optional - omit if not desired
¹ Requires “Machine Base” option
² Provided by Keyence
³ Only available with -300 Travel Option
⁴ For use with accessory vacuum chucks

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 Ordering

We’ll work with you to characterize your

floor vibrations and identify any
necessary isolation measures to preserve
measurement performance. Our
standard air and active isolation systems
are available to make sure your
measurements are rock solid. Please see
this video for more details.

Showing -ISO2 (Passive Air) Option

Choose from available ordering options to

get exactly what you need.
The optional machine base provides
storage for all PCs and control electronics
- all within the envelope of the machine.
Get only the stages you need by selecting
from our combinations of different travel
sizes and vertical stage offerings.

Optional Machine Base (-MB) with PC and controls

Choose from our standardly available

accessories such as: fixture plates, wafer
chucks, and more!

Showing Zone-Selectable Vacuum Chuck

PM-FP-VZR

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 Customize

We offer various levels of clean room

preparation. From material selection and
design to component cleaning and
assembling/bagging in our own clean room
- no matter your room’s requirements, we
have a solution for you.
Cleanroom Facility

Don’t see exactly what you need? Don’t

compromise, customize. At Peak, nearly
half of our machines are customized per
our customers’ requirements - so don’t
hesitate to contact us to find out how we
can deliver exactly what you need.

Are your parts difficult to hold? We’ll

work with you to design custom part
fixturing to make sure your inspections
are reliable and repeatable.

300 mm, zone-selectable wafer chuck

Parts still too big to move? We’ve still got

you covered! If our standard stage layout
does not work for you, we will design your
system as a purpose-built machine tailor-
made for your parts!

We’re here to make your measurements

easy. Leverage our decades of experience Overhead gantry system
building custom motion platforms to make
sure you get exactly what you need.

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 Keyence
Kit

Complete the system

Peak provides all the motion equipment you need to be up and running in no time. The
Keyence equipment listed below is required to complete the system. Have questions?
Don’t hesitate to contact us for answers on what is required.
Microscope Head
VHX-7100 or VHX-7020
Microscope Controller
VHX-7000N
Motion Controller
VK-S1000K
Z Stage
VHX-S700F1 (as needed)
Software
VHX Software (comes standard)
VHX-H3M3 XY Measurement Module
VHX-H5M 3D Profile Measurement Module (as needed)
Other
OP-88338 Lens Joint2
OP-88336 & OP-88337 Cable Repeaters
Head and Stage Cables

¹ Required for Additional Stages options -AS1-3

² Required for Camera Type -V2/3 options

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 ECO REV. DESCRIPTION DATE APPROVED APPR. LSTAHL 21-FEB-22
SHEET 1 OF 1
REVISIONS

ECO REV. DESCRIPTION DATE APPROVED

Fixtures
PLACE DRAWING VIEWS BELOW

PLACE DRAWING VIEWS BELOW

360 mm Square Tooling Plate 600 mm Square Tooling Plate

3X M5X0.8 THRU ALL
FOR CIRCULAR CHUCK MOUNT, 112X M6X1.0 12
CENTERED ON PLATE ON 50 mm GRID,
CENTERED ON PLATE
600

4X 6.6 THRU ALL 330.2

11 6 165.1
FOR M6 SHCS

247.7
360

330.2

100

100

4X 6.6 THRU ALL

11 6
FOR M6 SHCS

286

12.7 19.1

3X M6X1.0 THRU ALL 45X M6X1.0 12

ON 25 mm GRID,
FOR RECTANGULAR CHUCK MOUNTING
CENTERED ON PLATE
165X M6X1.0 THRU ALL ON
25 mm GRID CENTERED ON PLATE

NOTE: PLATE EXTENDS APPROX. 25 mm BEYOND FRONT

EDGE OF STANDARD LF-B, LF-X, AND LF-D SYSTEMS
300 mm Diameter
WITH -300 Porous
TRAVEL SELECTION WHENVacuum
STAGES ARE ATChuck 300 mm Square Porous Vacuum Chuck
THEIR HARDSTOP EXTENT OF TRAVEL.

DIMENSIONS: MILLIMETERS
DIMENSIONS: MILLIMETERS

300 mm Diameter Zone-Selectable Vacuum Chuck

5 4 3 2 1
REVISIONS

Zones: 25 mm, 100 mm, 200 mm, and 300 mm Diameters ECO ZONE REV.
A
DESCRIPTION
HNB0003016 WAS HNB0004020
DATE
19-JAN-22
DRAWN
RNAVID
APPROVED
RNAVID

MFB02610-01
4X HNB0004010
3X PLACES
3.

90115-202 3.

EIZ01024

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HNC0004008
3.
14