Science 276 5317 1404
Science 276 5317 1404
Science 276 5317 1404
tivity between the PB and PS domains. fer would be patterned with the ordered nanostruc-
___________________________ However, in the case of the ozonated copolymer films ture arrays.
1. H. Masuda and K. Fukuda, Science 268, 1466 (1995); (Fig. 1B), a pattern transfer to silicon nitride can be 25. We thank P. Mansky for helpful discussions. This
R. Gupta, J. J. McClelland, Z. J. Jabbour, R. J. Ce- achieved whether pure CF4 or CF4/O2 is used. project was supported by NSF through the Princeton
lotta, Appl. Phys. Lett. 67, 1378 (1995); M. J. Lercel et 22. We observed that the discreteness of the microdomain Center for Complex Materials under grant DMR
al., J. Vac. Sci. Technol. B 13, 1139 (1995); M. Wen- monolayer thickness was less apparent for SI 68/12 9400362. Parts of the processing were carried out at
del, S. Kuhn, H. Lorenz, J. P. Kotthaus, M. Holland, when compared with SB 36/11. Even at thicknesses the Advanced Technology Center for Photonics and
Appl. Phys. Lett. 65, 1775 (1994); M. A. McCord and below 70 nm, we observed spherical PI microdomains Optoelectronic Materials at Princeton University and
D. D. Awschalom, ibid. 57, 2153 (1990); H. Fang, R. over the entire sample area but with a poorer order. at the Cornell Nanofabrication Center. The silicon
Zeller, P. J. Stiles, ibid. 55, 1433 (1989). 23. C. Harrison et al., in preparation. nitride windows were fabricated at the Cornell Nano-
2. G. M. Whitesides, J. P. Mathias, C. T. Seto, Science 24. We have produced a uniform microdomain monolay- fabrication Center.
254, 1312 (1991). er template by spin-coating over an entire 76-mm
3. D. Hofstadter, Phys. Rev. B 14, 2239 (1976); D. wafer. With a larger ozonator system, the entire wa- 3 February 1997; accepted 16 April 1997
J. Thouless, M. Kohmoto, M. P. Nightingale, M. den
Nijs, Phys. Rev. Lett. 49, 405 (1982).
4. D. Weiss et al., Phys. Rev. Lett. 66, 2790 (1991).
5. W. Kang, H. L. Stormer, L. N. Pfeiffer, K. W. Baldwin,
K. W. West, ibid. 71, 3850 (1993).
6. W. D. Volkmuth and R. H. Austin, Nature 358, 600
Control of Mouse Cardiac Morphogenesis and
(1992); W. D. Volkmuth, T. Duke, M. C. Wu, R. H.
Austin, A. Szabo, Phys. Rev. Lett. 72, 2117 (1994).
Myogenesis by Transcription Factor MEF2C
7. S. Y. Chou, M. S. Wei, P. R. Krauss, P. B. Fischer,
J. Appl. Phys. 76, 6673 (1994). Qing Lin, John Schwarz, Corazon Bucana, Eric N. Olson*
8. T. L. Morkved et al., Science 273, 931 (1996).
9. T. L. Morkved, P. Wiltzius, H. M. Jaeger, D. G. Grier,
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