Hot Ion Vacuum

Gauges
From atmosphere to ultrahigh vacuum
with one gauge
From atmosphere to
ultrahigh vacuum
with one gauge
The INFICON Hot Ion Family of vacuum gaug-
es combines the advantages of up to three ADVANTAGES
different technologies in a single compact eco- AT A GL ANCE
nomic package to measure process and base ƒ Up to 13 decades in one gauge
pressure from 5 x10 -10
to 1500 mbar (3.75
ƒ Save costs and tool space
x10-10
to 1125 Torr). Combining techno-
logies reduces the complexity of installation, ƒ Install and forget
setup, and integration, thus reducing cost and ƒ Long lifetime
valuable tool space.
ƒ Easy to exchange sensing element

T YP ICAL AP P LICATIONS
ƒ P
 ressure measurement for semiconductor process,
For applications that require stand alone hot
transfer, and load lock chambers
ion gauge technology, INFICON offers the
ƒ General vacuum measurement and control in the low to single technology Bayard Alpert Hot Ion Gauge
ultrahigh vacuum range BAG402-S.

ƒ Physical vapor deposition (PVD) in industrial coating The supported single or dual filament options
offer superior accuracy and longevity. A broad
range of interface options enable simple
system integration.
The Hot Ion Family
MEASUREMENT RANGE
Ultra High Vacuum High Vacuum Medium Vacuum Low Vacuum

10-11 10-7 10-3 1 1000

Vacuum Gauge
Model Technology

BAG402 Bayard-Alpert

BPG400 Bayard-Alpert Pirani

(single filament)
BPG402 Bayard-Alpert Pirani
(dual filament)
BCG450 Bayard-Alpert
Capacitance
diaphragm

Atmospheric Pressure (ATM) = 1000 mbar (at sea level)

Hot Ion Pirani Capacitance Diaphragm

From atmosphere to CDG WORKING PRINCIPLE REPLACEMENT SENSOR WITH ON-BOARD
CALIBRATION DATA CHIP
DIFFERENTIAL PRESSURE MEASUREMENT INTERFACES

ultrahigh vacuum
'LUHFWSUHVVXUHPHDVXUHPHQW (BAG402, BPG402,BCG450)
E\GLDSKUDJP

with one gauge

¨G S
S
&DSDFLWDQFHUHDGRXW ON OFF
S 
S
¨&
P ATM P chamber
¨G
The INFICON Hot Ion Family of vacuum gaug- S (OHFWURGH
es combines the advantages of up to three ADVANTAGES 'LDSKUDJP
S
different technologies in a single compact eco- AT A GL ANCE S SUHVVXUH

nomic package to measure process and base ƒ Up to 13 decades in one gauge

pressure from 5 x10 -10
to 1500 mbar (3.75
ƒ Save costs and tool space
x10-10
to 1125 Torr). Combining techno-
logies reduces the complexity of installation, ƒ Install and forget
setup, and integration, thus reducing cost and ƒ Long lifetime BAYARD-ALPERT
valuable tool space. SENSOR SYSTEM
ƒ Easy to exchange sensing element
Analog / RS232
(optional display)
T YP ICAL AP P LICATIONS
ƒ P
 ressure measurement for semiconductor process,
For applications that require stand alone hot
transfer, and load lock chambers
ion gauge technology, INFICON offers the
ƒ General vacuum measurement and control in the low to single technology Bayard Alpert Hot Ion Gauge
ultrahigh vacuum range BAG402-S.
FEATURES
ƒ Physical vapor deposition (PVD) in industrial coating The supported single or dual filament options
offer superior accuracy and longevity. A broad
ƒ Standard Logarithmic analog
range of interface options enable simple output signal
system integration. ƒ Display
ƒ Setpoints
ƒ Status LED
ƒ Single-, Dual, Triple Gauge
Sensor
Long lifetime yttrium oxide coated ƒ ATM SWITCH function
iridium filaments

GAS TYPE INDEPENDENCE

(BCG450)
PIRANI PRINCIPLE STABILITY AND ACCURACY CDG sensor technology

ATM
Other typical sensor technologies ENHANCED LIFETIME THROUGH
1000
He H2 Air
O2
INTELLIGENT FILAMENT ON/OFF CONTROL
CO

Filaments are V-shaped

N2
Wire 120°
OFF Auto ON
kept precisely filaments sag
in position and displace

Indicated pressure
Xe

Ptot = Pgas + Pconnection + Pradiation Controlled

tension

The temperature will be conducted

through the gas molecules. The Hot Ion Pirani CDG
temperature loss of the hot filament 10-10 ATM

is a function of the pressure. Stable Nonstable 10-10 True pressure 1000 10E -10 mbar 5E -3mbar 1500mbar
HOT ION VACUUM GAUGES

SPECIFICATIONS BPG400 BPG402 BCG450

Sensor technology Bayard-Alpert + Pirani Bayard-Alpert Bayard-Alpert +
(dual filament) + Pirani Pirani + CDG +
ATM sensor
Measurement range 5 x 10-10 ... 1000 mbar 5 x 10-10 ... 1500 mbar
3.8 x 10-10 ... 750 Torr 3.75 x 10-10 ... 1125
Torr
Accuracy (N2) 1 10-8 ... 10-2 mbar ±15 % of reading -

10-8 ... 50 mbar ±15% of reading

50 ... 950 mbar - ±5% of reading
950 ... 1050 mbar ±2.5% of reading
Repeatability (N2) 1) 10-8 ... 10-2 mbar 5% of reading
Degas p < 7.2 x 10 mbar -6
Electron bombardment (max. 3 min)
Electrical connection (analog / RS232) D-sub, 15-pin, male
Supply voltage +20 ... +28V / 0.8 A (dc) 2
Output signal analog 0 ... 10 V (dc) 10.13 V (dc)
Voltage vs. pressure log-linear, 0.75 V/decade
Materials exposed to vacuum Yt2O3, Ir, Mo,
Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, Cu, W, NiFe,
stainless steel, glass NiCr, Al2O3, SnAg
stainless steel, glass
Temperature Operating 0 ... +50°C
Bake- at flange 80°C
out with flange 150°C 3
extension 150°C
electronics
removed
Storage -20 ... +70°C
Degree of protection IP30
Onboard sensor calibration data - yes yes
Setpoints Two with digital One for analog version Two along with digital
interfaces 2 Two with digital interfaces 2
interfaces 2
Display (optional) yes (only analog / RS232 versions)
Interfaces digital interface 1 RS232 (integrated in D-sub15 connector)
digital interface 2 Profibus DP, DeviceNet Profibus DP, DeviceNet, EtherCAT, ProfiNET
1 Typically
2 2W protected against power reversal and transient over-voltages
3 horizontally mounted

DIMENSIONS

BPG40x / BCG450
DeviceNet Profibus ProfiNET EtherCAT
(BPG402 & BCG450) (BPG402 & BCG450)
only only
(2.32)
59

(1.65)

(1.89)
42

48

67
(2.64) DN 25 ISO-KF
DN 40 CF-R
155.2
(6.11)

(0.55)
14
112.5
(4.43)

mm (inch)
DN 40 CF-R
long tube

(BPG402 only)

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Due to our continuing program of product improvements, specifications are subject to change without notice.
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