Papers by Frank J. van Soest
Japanese Journal of Applied Physics, Sep 1, 2005
Three dimensional photonic crystals, e.g. for obtaining the so-called woodpile structure, can, am... more Three dimensional photonic crystals, e.g. for obtaining the so-called woodpile structure, can, among others, be fabricated by vertical stacking of multiple gratings. One of the requirements for obtaining a full photonic bandgap in such a photonic crystal is an accurate angular and lateral alignment of the successive gratings. Using laser interference lithography at 266 nm wavelength, we fabricated gratings in silicon with periods down to 300 nm. We present a method for aligning further grating exposures with respect to this grating with a 0.001 degree angular and a few nanometers lateral resolution.
Proceedings of 2004 6th International Conference on Transparent Optical Networks (IEEE Cat. No.04EX804)
An important requirement in the fabrication of photonic crystal structures is the correct relativ... more An important requirement in the fabrication of photonic crystal structures is the correct relative alignment of structural elements. Accuracy should be in the order of some tens of nanometres. Some of the options for providing such accuracy will be discussed. Examples will be given of aligning defects with respect to a predefined 2D lattice, aligning access waveguides with respect to a small local photonic crystal structure, and the alignment of successive periodically structured layers in a 3D "woodpile" structure.
Japanese Journal of Applied Physics, 2005
It is shown experimentally that in laser interference lithography, by using a reference grating, ... more It is shown experimentally that in laser interference lithography, by using a reference grating, respective grating layers can be positioned with high relative accuracy. A 0.001° angular and a few nanometers lateral resolution have been demonstrated.
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Papers by Frank J. van Soest