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A new valveless micro piezoelectric pump has been designed and fabricated. The pump with a check valve has a risk of reduction in performance and reliability due to wear and fatigue. Instead of passive check valves the pump uses two specially designed nozzle/diffuser elements which give a fluid directing effect. Diffuser/Nozzle element is connected to a chamber with an oscillating diaphragm. The vibrating diaphragm produces an oscillating chamber volume, which together with the diffuser/nozzle elements creates a one-way fluid flow. A micropump prototype with a rectangular chamber and conical diffuser nozzle elements has fabricated. A prototype of the piezoelectric stack is developed which is used as the actuating element.
2012
In this paper some discrete parts of a valveless p iezoelectric micropump for drug delivery system is designed and simulated. The core components of the micropump are actuator unit that converts the reciprocating movement of a diaphragm actuated by a piezoelectric actuator into a pumping effect and Nozzle/diffuser elements that are used to direct the flow from inlet to outlet. Simulations are performed for actuator unit and diffuser/nozzle element individually, using Comsol software. The simulation results show that displacement of PZT actuator is directly proportional to the applied electric field. Flow is greater at contraction and lower at expansion for the diffuser/nozzle elements.
Procedia Chemistry, 2009
The operation principle of a traveling wave rotary type ultrasonic motor can be successfully applied to the fluidic transfer mechanism of the micro-pump. This paper proposes an innovative valveless micro-pump type that uses an extensional vibration mode of a traveling wave as a volume transportation means. The proposed pump consists of coaxial cylindrical shells that join the piezoelectric ceramic ring and metal body, respectively. In order to confirm the actuation mechanism of the proposed pump model, a numerical simulation analysis was implemented. In accordance with the variations in the exciting wave mode and pump body dimension, we analyzed the vibration displacement characteristics of the proposed model, determined the optimal design condition, fabricated the prototype pump from the analysis results and evaluated its performance. The maximum flow rate was approximately 595 μL/min and the highest back pressure was 0.88 kPa at an input voltage of 130 V rms. We confirmed that the peristaltic motion of the piezoelectric actuator was effectively applied to the fluid transfer mechanism of the valveless type micro pump throughout this research.
This study presents the design and fabrication of a novel piezoelectric actuator for a micropump with check valve having the advantages of miniature size, light weight and low power consumption. The micropump is designed to have five major components, namely a piezoelectric actuator, a stainless steel chamber layer with membrane, two stainless steel channel layers with two valve seats, and a nickel check valve layer with two bridgetype check valves. A prototype of the micropump, with a size of 10 9 10 9 1.0 mm, is fabricated by precise manufacturing. The check valve layer was fabricated by nickel electroforming process on a stainless steel substrate. The chamber and the channel layer were made of the stainless steel manufactured using the lithography and etching process based on MEMS fabrication technology. The experimental results demonstrate that the flow rate of micropump accurately controlled by regulating the operating frequency and voltage. The flow rate of 1.82 ml/min and back pressure of 32 kPa are obtained when the micropump is driven with alternating sine-wave voltage of 120 Vpp at 160 Hz. The micropump proposed in this study provides a valuable contribution to the ongoing development of microfluidic systems.
ASME 2009 Second International Conference on Micro/Nanoscale Heat and Mass Transfer, Volume 1, 2009
A dynamic micropumping device has been developed, which is based on acoustic streaming generated by a piezoelectric microtransducer actuated in d31 mode without any check valve. Piezoelectric microtransducers immersed in liquid (water) are used as actuators due to some of their unique properties such as lower noise generation and ease of miniaturization. Quantitative results of maximum local velocity are presented for different tip configuration of the same actuator for comparison. In addition, this work also demonstrates the quantitative measures of the pumping performance such as the pressure head generated as a function of different relevant parameters such as applied electrical field, AC frequency and length of the actuator.
2011
Micro-fluidic devices and their applications have received a lot of attention in recent years due to the fast growing progress in the field of Micro-fluid systems. Micropumps are one of the most important micro-fluidic components. In this work, a 2D simulation, using Computerized Fluid Dynamic CFD software, is performed to study the fluid coupling effect driven by piezoelectric actuation of a valveless micropump. The results show the relationship between inlet velocity, actuation value, the flow velocity and pressure inside the valveless micropump using laminar and turbulent models solutions. © 2011 Jordan Journal of Mechanical and Industrial Engineering. All rights reserved
Volume 2: Automotive Systems, Bioengineering and Biomedical Technology, Fluids Engineering, Maintenance Engineering and Non-Destructive Evaluation, and Nanotechnology, 2006
Valveless piezoelectric micropumps are in wide practical use due to their ability to conduct particles with absence of interior moving mechanical parts.
Mechatronics, 2020
The precise manipulation of fluid through pumping systems has been the technological challenge in microfluidic applications. The biomedical applications call for precise and accurate delivery of fluid through miniaturized pumping systems. This paper presents a novel valveless micropump for biomedical applications operated by the Amplified Piezo Actuator. Integrating the disposable chamber and reusable actuator with the proposed micropump allows the actuator to be reused and eliminates the possibility of infection or contagion. The micropump was fabricated using low-cost polymeric materials like Polymethylmethacrylate (PMMA), Silicone rubber through CNC milling, Laser Cutting, conventional moulding operation. The micropump chamber, nozzle/diffusers, and a bossed diaphragm constituted disposable part and Amplified Piezo Actuator with structural support formed the reusable part of the micropump. The bossed diaphragm of the pump chamber consists of a central cylindrical protrusion to reduce the force of adhesion on the diaphragm and transmit force required for micropump actuation. A theoretical analysis was performed to assess the effect of diaphragm thickness and the bossed region on the effective stiffness of the diaphragm, which in turn influences the deflection achieved. Besides, an analytical approach has been presented to address the effect of adhesive force on the diaphragm surface due to the residual fluid and chamber depth. The experimental characterization of the micropump was carried out to determine the optimal performance parameters with water, fluids mimicking blood plasma, and whole blood. Based on the experimental results, the pumping rate and head developed by the micropump have been significantly affected by factors such as bossed ratio, diaphragm thickness, depth of the micropump chamber, and viscosity of the fluid. The optimum configuration of the micropump cosidered silicone rubber diaphragm with thickness of 0.20 mm having a bossed ratio of 0.33 and a chamber depth of 1.25 mm. With the optimal operating parameters of 150 V sinusoidal input of frequency 5 Hz, the proposed micropump was capable of delivering 7.192 ml/min, 6.108 ml/min, and 5.013 ml/min of water and blood plasma, whole blood mimicking fluid with the maximum backpressure of 294.00 Pa, 226.243 Pa, and 204.048 Pa respectively. The corresponding resolution, i.e., pumping volume/stroke of the micropump was about 23.972 μl, 20.358 μl, and 16.708 μl, respectively.
2019
Micropumps are one of the most important parts of a microfluidic system. In particular, for biomedical applications such as Lab-on-Chip systems, micropumps are used to transport and manipulate test fluids in a controlled manner. In this paper, a low-cost, structurally simple, piezoelectrically actuated micropump was simulated and fabricated using poly-dimethylsiloxane (PDMS). The channels in PDMS were fabricated using patterned SU-8 structures. The pump flow rate was measured to be 9.49 µL/min, 14.06 µL/min and 20.87 µL/min for applied voltages of 12 V, 14 V and 16 V respectively. Further, we report finite element analysis (FEA) simulation to confirm the operation of the micropump and compare favorably the experimentally obtained flowrate with the one predicted by simulation. By taking these flow rates as a reference, the chamber pressure was found to be 1.1 to 1.5 kPa from FEA simulations.
The European Physical Journal Applied Physics, 2010
This article provides an extensive outlook of different types of piezoelectric actuated micropumps published in the literature recently. We start by reminding the reader about the conventional operating parameters used to quantify the capabilities of these devices. After this introductory stage, we describe and classify the most prominent micro-pump's geometries found with piezoelectric actuation. At this point we identify the parameters given previously for each pump in order to establish a subsequent discussion in which the trends of different families are compared. Specific attention is given to the particularities of each case namely: flow rates and backpressures.
Sensors
A piezoelectrically actuated valveless micropump has been designed and developed. The principle components of this system are piezoelectrically actuated (PZT) metal diaphragms and a complete fluid flow system. The design of this pump mainly focuses on a cross junction, which is generated by a nozzle jet attached to a pump chamber and the intersection of two inlet channels and an outlet channel respectively. During each PZT diaphragm vibration cycle, the junction connecting the inlet and outlet channels with the nozzle jet permits consistencies in fluidic momentum and resistances in order to facilitate complete fluidic path throughout the system, in the absence of any physical valves. The entire micropump structure is fabricated as a plate-by-plate element of polymethyl methacrylate (PMMA) sheets and sandwiched to get required fluidic network as well as the overall device. In order to identify the flow characteristics, and to validate the test results with numerical simulation data, FEM analysis using ANSYS was carried out and an eigenfrequency analysis was performed to the PZT diaphragm using COMSOL Multiphysics. In addition, the control system of the pump was designed and developed to change the applied frequency to the piezoelectric diaphragms. The experimental data revealed that the maximum flow rate is 31.15 mL/min at a frequency of 100 Hz. Our proposed design is not only for a specific application but also useful in a wide range of biomedical applications.
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