CMOS Process

Material mainly taken from UMBC, Kang and Campbell

Motivation
MOSFET is the predominant VLSI device Many limitations imposed on performance of ICs are directly related to CMOS fabrication issues

Why MOS/CMOS - dimensions of MOS devices can be scaled down more easily than other transistor types Starting mid 1960s: Shift from NMOS to CMOS. Main reason: Zero static power dissipation CMOS technology was attractive because of the relative small number of masks (about 7) Modern CMOS processes: about 200 process steps, about 25 masks Number of masks heavily impacts unit price of the chip. Each mask costs n*$1k (total mask cost typ. $200k). Lithography is slow. up to 6 (and sometimes more) metal layers Poly layers: 1 or 2 (standard) or more (non-standard, e.g. E2prom) Todays standard: n-well CMOS process with self-aligned polysilicon gates

 NMOS and PMOS devices must be fabricated on the same wafer, i.e. the same substrate. One device must be placed in a local substrate or well. Typically the PMOS device is fabricated in an n-well. The n-well must be connected to a potential such that the S/D junction diodes of the PMOS transistor remain reverse-biased under all conditions. In most circuits the n-well is tied to the most positive supply voltage using a well-tie.

CMOS/Mosfets/Mosfet as a Switch
MOSFET
Metal Oxide Silicon Field Effect Transistor

Gate

Symbol
Shown is a symbol for an n-type mosfet

Operation as a switch
Voltage at gate VG is high:
Source and drain connected

Source

Drain

Voltage at gate VG is low:

Source and drain isolated

CMOS/Mosfets/Basic Structure
Basic MOSFET Structure
Shown is a simplified structure of an n-type MOSFET (NMOS, NFET) Fabricated on p-type substrate (bulk, body) Device consists of
two heavily-doped n-regions forming Source (S) and Drain (D) a heavily-doped piece of polysilicon (poly, amorphous Si) a thin layer of silicon oxide (SiO2) insulating the gate from the substrate. Gate oxide thickness tox.

Poly Oxide W

Useful action of the device occurs in the substrate region under the gate oxide Symmetrie (S and D) Mosfet idea was patented 1930 (Lilienfeld)
well before BJT (Shockley, 1947, see above)

p+

n+
Leff Ldrawn

n+

p-substrate

CMOS/Mosfets/Mosfet IV Characteristics
Threshold voltage:
Gate voltage Vg increases from zero. Gate and substrate form a capacitor. Holes in substrate are repelled from the gate area leaving negative ions behind. A negative space-charge region is created. The negative charge in the induced depletion region corresponds to the negative charge on the bottom plate of the gate-oxide capacitor. No current flows from D to S because no free charge carriers are available. As Vg increases so does the width of the depletion region and the potential at the oxidesilicon interface. The structure resembles two capacitors in series: the gate-oxide capacitor, and the depletion region capacitor. When the interface potential reaches Vg a sufficiently positive value, Vd (0.1V) electrons flow from the S to the interface and on to the D. A channel of charge carriers is formed between S and D, the transistor is on. The + + + p n n interface is inverted. Vg has reached the threshold voltage Vth. If Vg rises further the channel charge p-substrate density increases further

Why MOS/CMOS - dimensions of MOS devices can be scaled down more easily than other transistor types Starting mid 1960s: Shift from NMOS to CMOS. Main reason: Zero static power dissipation CMOS technology was attractive because of the relative small number of masks (about 7) Modern CMOS processes: about 200 process steps, about 25 masks Number of masks heavily impacts unit price of the chip. Each mask costs n*$1k (total mask cost typ. $200k). Lithography is slow. up to 6 (and sometimes more) metal layers Poly layers: 1 or 2 (standard) or more (non-standard, e.g. E2prom) Todays standard: n-well CMOS process with self-aligned polysilicon gates

CMOS/Processing technology

Source: TSMC

CMOS/Process steps
Process step: Grow thin layer of SiO2 on p-type wafer
Place wafer in an oxidizing atmosphere at around 1000C Unique property of Si: a very uniform oxide layer can be produced on the surface with little strain in the lattice Oxide layers can be very thin (e.g. 50=5nm), only a couple of atomic layers Oxide can be used as gate dielectric (TOX). Oxide can also grown thick (field oxide FOX) as a foundation for interconnect lines Oxide also serves as a protective coating during many process steps
(like in this process step)

SiO2

p-substrate

CMOS/Process steps
Process step: Lithography sequence for n-well
Photolithography: Transfer circuit layout information to the wafer
Layout consists of polygons. Layout is first written to a transparant glass mask by a precisely controlled electron beam.

Negative Photoresist (PR) deposition

PR: A material whose etching properties change upon exposure to light. Negative PR hardens in regions exposed to UV light. Positive PR hardens in regions not exposed to UV light.

Exposure to ultraviolet (UV) light using the n-well mask Selective etching. Etchant dissolves soft PR
Photoresist

p-substrate

CMOS/Process steps
Process step: Create n-wells through ion implantation
n-wells required for p-channel devices
n-channel devices will be fabricated directly in the native p-substrate

Ion implantation: Selectively introduce dopants into the wafer

Doping atoms are accelerated as a high-energy focused beam, hitting the surface and penetrating the exposed areas. Doping level determined by intensity and duration of implantation. Retrograde profile: Peak of the doping concentration occurs well below the surface

Ion implantation n-type

p-substrate

CMOS/Process steps
Process step: Remove PR and oxide layer
n-well completed Note: Ion implantation damages the Si lattice
Si lattice can be repaired through an annealing process. Annealing: Wafer is heated to 1000C for 15-30min allowing the lattice bonds to form again. Annealing causes dopant diffusion in all directions (e.g. side diffusion of S/D regions). Therefore, wafer is annealed only once after all implantations have been completed

n-well p-substrate

Poly Interconnect

CMOS/Process steps
Process step: Channel-stop implant (1)

Gate M1

Gate M2

n+

n+

n+

n+

Parasitic Inversion Layer

Channel-stop implant required to prevent parasitic mosfets

Prevents conduction between unrelated transistor sources and drains (and wells). Two n+ regions and the FOX from a transistor. FOX is thick, therefore transistor has a large Vth. Nonetheless, a sufficiently positive potential on the interconnect line will turn on the transistor slightly (causing a leakage path). Channel-stop implant raises Vth of parasitic transistor to a very large value.

Create a stack of silicon oxide, silicon nitride, and positive PR

PR (positive) Si3N4 SiO2

n-well p-substrate

CMOS/Process steps
Process step: Channel-stop implant (2)
Lithography sequence for channel-stop implant (based on positive PR)
Active or diffusion areas include the source/drain regions and the p+ and n+ openings for the substrate and well ties

n-well p-substrate

CMOS/Process steps
Process step: Channel-stop implant (3)
Perform channel-stop ion implantation

Channel-stop implant

n-well p-substrate

CMOS/Process steps
Process step: Channel-stop implant (4)
Remove PR Thick oxide layer is grown in the exposed silicon areas producing the field oxide (FOX)
FOX grows in areas where the silicon nitride layer is absent

Channel-stop implant

FOX

n-well p-substrate

CMOS/Process steps
Process step: Channel-stop implant (5)
Remove protective silicon nitride layer Remove protective thin oxide layer Result: Active areas are exposed

n-well p-substrate

CMOS/Process steps
Process step: Growth of gate oxide
Growth of gate oxide serving as gate dielectric (TOX)
The growth of the gate oxide is a very critical step in the process. Its thickness tox determines a multitude of parameters of mosfets (current handling, transconductance, reliability). In order to achieve good matching of transistors extremely uniform thickness across the wafer is required. The oxide is therefore grown in a slow low-pressure CVD (chemical vapor deposition) process. Also, the cleanness of the silicon surface underneath the oxide affects the electrical behaviour of the mosfet.

TOX

n-well p-substrate

CMOS/Process steps
Process step: Threshold-adjust implant
Threshold-adjust implant after photolithographic process
The native threshold voltage of transistors is typically far from the desired value (VTHN0V and VTHP -1V). A thin layer of dopants near the surface is implanted to adjust the native threshold voltage. Thresholds of both NMOS and PMOS transistors will become more positive.

Threshold-adjust implant

n-well p-substrate

CMOS/Process steps
Process step: Create polysilicon (poly) layer
Deposit a layer of polysilicon on top of the gate oxide
Polysilicon is noncrystalline (or amorphous) silicon because this layer grows on top of silicon dioxide, i.e. cannot form a crystal. Since polysilicon only serves as a conductor its amorphous nature is unimportant.

Carry out poly mask lithography

Poly

n-well p-substrate

CMOS/Process steps
Process step: n-type implant (1)
Deposit negative photoresist Photolithography using N source/drain mask
After the photolithography all areas to receive an n+ implant are exposed. These areas consist of source and drain junctions of NMOS transistors, and the n-well ties.

Neg. PR

n-well p-substrate

CMOS/Process steps
Process step: n-type implant (2)
Ion implantation
Ion implantation forms the S/D regions of NMOS transistors and n-well ties. Note that the implant also dopes the polysilicon layer of the NMOS transistors, reducing its sheet resistance.

N-type implant

n-well p-substrate

CMOS/Process steps
Process step: n-type implant (3)
Remove PR Self-aligned structure
The sequence of creating the gates first prior to n-type implantation yields a self-aligned structure. The S/D regions are implanted at precisely the edges of the gate area. A small misalignment in lithography has no major effect (it simply makes one junction slightly narrower than the other).

n+ p-substrate

n+

n+ n-well

CMOS/Process steps
Process step: p-type implant (1)
Photolithography sequence using P source/drain mask
After the photolithography all areas to receive an p+ implant are exposed. These areas consist of source and drain junctions of PMOS transistors, and the substrate ties.

Ion implantation
The implant also dopes the polysilicon layer of the PMOS transistors, reducing its sheet resistance

P-type implant

n+ p-substrate

n+

n+ n-well

CMOS/Process steps
Process step: p-type implant (2)
Remove PR Basic transistor fabrication complete Remaining processing steps: Back-end processing

p+ p-substrate

n+

n+

p+

p+

n+ n-well

CMOS/Process steps
Process step: Silicidation (1)
Creation of oxide spacer
Purpose of Silicidation: Reduction of sheet resistance of doped polysilicon and S/D regions by about an order of magnitude. During silicidation active areas (S/D regions, substrate and well ties) are covered with a thin layer of highly conductive material (titanium silicide or tungsten). The silicidation process begins with creating an oxide spacer at the edges of the polysilicon gate such that the deposition of the silicide will not short the gate to the S/D regions.

Oxide spacer p+ p-substrate n+ n+ p+ p+ n+ n-well

CMOS/Process steps
Process step: Silicidation (2)
Silicidation
Deposition of conductive material through CVD process

p+ p-substrate

n+

n+

p+

p+

n+ n-well

CMOS/Process steps
Process step: Contact windows
Cover wafer with a thick layer of oxide
Thickness: 300-500nm

Lithography using the contact mask Plasma etching

For increased reliability contacts to the gate polysilicon are not placed on top of the gate area

p+ p-substrate

n+

n+

p+

p+

n+ n-well

CMOS/Process steps
Process step: Metal interconnect 1 (1)
Deposit layer of metal over the entire wafer
Common metals: Aluminium or copper

p+ p-substrate

n+

n+

p+

p+

n+ n-well

CMOS/Process steps
Process step: Metal interconnect 1 (2)
Photolithography sequence using Metal 1 mask Metal selectively etched

p+ p-substrate

n+

n+

p+

p+

n+ n-well

CMOS/Process steps
Process step: Via windows
Cover wafer with a layer of SiN3 Lithography using the via mask Plasma etching

p+ p-substrate

n+

n+

p+

p+

n+ n-well

CMOS/Process steps
Process step: Metal interconnect 2 (1)
Deposit layer of metal over the entire wafer

p+ p-substrate

n+

n+

p+

p+

n+ n-well

CMOS/Process steps
Process step: Metal interconnect 2 (2)
Photolithography sequence using Metal 2 mask Metal selectively etched

Metal interconnect layers:

Two masks required for each additional metal layer: via n mask and metal n mask Reliability: Dimensions of contacts/vias cannot be changed by layout designer (to avoid contact spiking). If a large contact area is required, many small contacts/vias are used in parallel.

p+ p-substrate

n+

n+

p+

p+

n+ n-well

CMOS/Process steps
Process step: Passivation
Passivation
Wafer is covered with a layer of glass or passivation, protecting the surface against damages caused by subsequent mechanical handling and dicing.

Passivation

p+ p-substrate

n+

n+

p+

p+

n+ n-well

CMOS/Process steps
Process step: Contact windows for bond pads
Photolithography sequency

Final processing steps:

Testing, dicing, packaging, bonding, testing.
Bond pad

p+ p-substrate

n+

n+

p+

p+

n+ n-well