P9826 HW2 2013

The University of Western Ontario
Department of Physics and Astronomy

P9826b Winter 2013
March 13, 2013

Homework Assignment #1 (due on March 25, 2013)
Problems:
1. (3 points) XPS spectrum for unknown sample is presented below with exact binding energies
list. Identify the peaks (element and transition) at the listed binding energy positions.
B.E.
Unknown Sample A
Peak
40
1071.9
978.8
x 104
35
763.2
718.4
30
644.2
25
604.3
573.5
20
532.9
CPS
546.9
15
497.2
374.7
10
368.4
353.7
335.5
285.6
269.7
1000
800
600
Binding Energy (eV)
400
200
SURFACE SCIENCE W ESTERN
198.3
150.7
99.6
88.4
84.1

mark
out of
Total
15
2. (4 points) In Rutherford backscattering spectrometry, the kinematics of the collisions and the
scattering cross section are independent of the chemical bonding, but only dependent on the
masses of the target atoms. The diagram of the collision events is shown below:
M2
M2, v0=0
M1
vo E0
v2
M1
v1
In the collision, energy is transferred from the moving particle to the stationary target atom; the
reduction in energy of the scattered particle depends on the masses of incident and target atoms
and provides the signatures of the target atoms.
Assuming that an incident energetic particle of mass M1 has velocity v0 and energy E0, and target
atom of mass M2 is at rest. After the collision, the values of the velocities v1 and v2, the projectile
and target atoms are determined by the scattering angle and recoil angle .
One can write equations for conservation of energy, and conservation of momentum parallel and
perpendicular to the direction of incidence (3 equations total, see lecture notes). One can go
through a page of algebra to get the following expression for the energy of projectile (M1) after
collision:
M 2 M 2 sin 2 1 / 2 + M cos
1
1
E1 = E0 2
M
M
+
2
1
(a) Assuming that M1<M2, find the ration of
E1
at direct backscattering condition (=1800).
E0
Show the details of your calculations.

(b) Assuming collision where M1=M2, and the incident particle is at rest after the collision, with
all the energy transferred to the target atom, a feature well known in billiards. Find the ration of
E2
as a function of M1, M2 and angle .
E0
(c) Under which conditions the maximum value of
E2
(or the maximum energy transfer)?
E0
(d) If you use alpha particles (M1=4a.m.u.) with incident energy Eo=2MeV, detector is at =1800;
and your target is ~100 thick gold film on top of silicon substrate), find your energy positions
of Si and Au elements in Rutherford Backscattering spectrum. Draw RBS spectrum
schematically but mark energy positions for all observed features.

3. (3 points) Silicon nanocrystals (Si-ncs) embedded in SiO2 exhibit strong luminescence at room
temperature and are of interest in the drive to produce silicon photonic devices that are
compatible with silicon processing techniques. Formation of Si-ncs can be done using ion
implantation of excess silicon into SiO2 film, followed by high temperature annealing
(nucleation and growth via Ostwald ripening).
(a) Your sample is composed of 100nm SiO2 film on top of Si(001) substrate. Use SRIM to find
the incident energy of Si ions to place excess Si atoms in the middle of SiO2 layer (assume that
implantation angle is 10 degrees).
(b) To achieve excess silicon in SiO2 layer, one has to use implantation dose as high as 1E1017 Si
atoms/cm2. As a result of Si-ncs formation, SiO2 layer expands or swells, because of this effect
thickness of SiO2 layer becomes larger. Calculate this increase in SiO2 layer thickness, assuming
a simplified model when 100% of implanted Si form Si-ncs that are cubic in shape with the
dimensions d=3 x lattice constant of Si (aSi). As a reminder, Si has a diamond lattice structure
with the lattice constant a=5.43). (Hint: you may choose to calculate (i) number of Si atoms in
unit cell; (ii) how many Si atoms per cm-3.)

(c) During implantation process, some fraction of Si and O atoms will be sputtered. Use SRIM to
estimate the total sputtering effect by running SRIM simulation with 1000 incident ions, writing
down sputtering yield of Si and O, and extrapolating to the dose of 1E1017 Si atoms.
(d) Compare your sputtering results in (c) with swelling results in (b), and comment on
whether you should use your ion energy for the Si-ncs formation.
4. (2 points) In your own words explain the meanings of matrix effects in SIMS.
5. (3 points) (a) When measuring spherical particles of less than 10 nm on a substrate with an
atomic force microscope, an experienced operator uses the height of the sphere to estimate the
size of the object. Explain why, instead of using the measured lateral dimension (size) of the
sphere, he/she selects to do so.
(b) Explain why phase shift imaging in AFM may be useful in differentiating composite
materials. Hint: Think about AFM tip as of a forced oscillator.

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The University of Western Ontario

Department of Physics and Astronomy

March 13, 2013

SURFACE SCIENCE W ESTERN

The University of Western Ontario

(a) Assuming that M1<M2, find the ration of

Show the details of your calculations.

The University of Western Ontario

(c) Under which conditions the maximum value of

The University of Western Ontario

The University of Western Ontario

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