769 Integrated Display Type Digital Flow Sensor For Gas

FM-200 SERIES
■■General terms and conditions.............. F-3 ■■Selection guide.............................. P.699~
FIBER Related Information
SENSORS ■■Glossary of terms........................ P.1569~ ■■General precautions.................... P.1571~
LASER
SENSORS

PHOTOELECTRIC
SENSORS
MICRO
PHOTOELECTRIC
SENSORS
AREA
SENSORS
SAFETY LIGHT
CURTAINS /
SAFETY COMPONENTS
PRESSURE /
FLOW
SENSORS
INDUCTIVE
PROXIMITY
SENSORS
PARTICULAR
USE SENSORS

SENSOR
OPTIONS
SIMPLE
WIRE-SAVING
UNITS
WIRE-SAVING
SYSTEMS

MEASUREMENT
SENSORS panasonic.net/id/pidsx/global Digital With analog
output
STATIC
CONTROL
DEVICES
LASER
MARKERS

PLC
Dual color with sub display at a glance
HUMAN MACHINE
INTERFACES Easy-to-see dual color with sub display!
ENERGY
MANAGEMENT The setting conditions are displayed on the sub display, making it much easier to keep track of operations.
SOLUTIONS
In addition, the digital display which switches between 2 colors lets you check the status of sensor operation at a
FA COMPONENTS glance.
MACHINE VISION
SYSTEMS Sub display
UV CURING
SYSTEMS Main display

Selection
Guide
Pressure/
Digital Display
Pressure/
Head-separated
Flow

FM-200

Dual color display at a glance

Easy to see with the sub display! The display color changes in accordance
Setting values and setting items can be checked at the same time. with output ON/OFF operations.

Main display Sub display Main display Sub display

Setting value Setting item Linked to output 1 Linked to output 2

 FM-200 SERIES
Integrated Display Type Digital Flow Sensor
770

APPLICATIONS FIBER
SENSORS

Controlling purge gas and air blowing Checking seating Checking suction LASER
SENSORS
By controlling purge gas and air blowing, Flow sensors can be used for stable detection of Detection of objects is possible even on
performance and quality of the products transparent objects which were difficult to detect conveyors with low suction pressures PHOTOELECTRIC
SENSORS
can be maintained, while contributing to using photoelectric sensors. The nozzle can be where air is flowing constantly (such as
MICRO
cost reduction. extended for detection even in places where oil collet conveyors and network conveyors). PHOTOELECTRIC
spatter occurs. SENSORS
Collet AREA
SENSORS
SAFETY LIGHT
CURTAINS /
SAFETY COMPONENTS
PRESSURE /
FLOW
SENSORS
Lead frame Flexible printed circuit board INDUCTIVE
PROXIMITY
SENSORS
PARTICULAR
USE SENSORS
High precision of ±3 % F.S. One sensor for both intake and exhaust
SENSOR
OPTIONS
A new rectification mechanism and Micro Electro A single sensor can detect flows bidirectionally. In
SIMPLE
Mechanical System (MEMS) technology allow the sensor to addition, it can be set to detect flows in either the WIRE-SAVING
be mounted on a Si sensor chip (3 × 3.5 mm 0.118 × 0.138 forward or reverse direction only, making it suitable for a UNITS
in). This provides an extremely small heat capacity, high variety of applications. WIRE-SAVING
precision of ±3 % F.S. and high-speed response. The two SYSTEMS
temperature sensors on each side of the heater detect the One sensor detects both directions
MEASUREMENT
heat distribution to make bidirectional detection possible. SENSORS
For example, using a single sensor to check chip suction STATIC
Principle of Si sensor chip
CONTROL
When there is no flow When there is flow Suction Vacuum breakdown DEVICES
Temperature distribution Flow LASER
MARKERS
Temperature sensor 1 Heater Temperature sensor 22 Low High
PLC

Si substrate HUMAN MACHINE

Chip Chip
Suction nozzle INTERFACES
New rectification mechanism Si sensor chip
ENERGY
Forward direction Reverse direction MANAGEMENT
SOLUTIONS

FA COMPONENTS

MACHINE VISION
SYSTEMS
No straight pipes needed Flexible installation direction
UV CURING
SYSTEMS
The rectification method Other than the ability to carry out bidirectional detection,
used by the new there are no limitations on the installation direction,
mechanism makes straight making the installation very flexible.
pipes unnecessary at both
the intake and exhaust Selection
sides. Guide
Pressure/
Digital Display
Connection Pressure/
Head-separated
Quick connection is Flow
possible with a cover-
attached connector.
FM-200

Equipped with a wide variety of functions for greater ease of use

• Integrated value reset function • Display rate setting
During integrated mode, external input allows reset of The display update period for the digital display can
the integrated value. be changed to 250 ms, 500 ms or 1,000 ms in order to
• Analog voltage output eliminate display flickering.
1 to 5 V analog voltage output is incorporated. • ECO mode
• Key lock function After approx. one minute of no operation, sensor will
Key operation can be disabled to prevent mis- be switched to ECO mode.
operation. Backlight will be turned off to reduce power
consumption.
• Rattle prevention function (Response time setting)
The response time can be set to one of seven steps
from 50 ms to approximately 1,500 ms. This prevents
rattling from rapid changes in flow or from noise.
 FM-200 SERIES
771 Integrated Display Type Digital Flow Sensor

FIBER Suitable for cost and quality control! Integrated output mode incorporated
SENSORS

LASER The FM-200 series can control and manage flows in a wide variety of output modes such as integrated output mode,
SENSORS depending on the required application.
PHOTOELECTRIC
SENSORS INTEGRATED FLOW RATE DISPLAY
MICRO
PHOTOELECTRIC
SENSORS Integrated flow rate can be
• Integrated output mode
AREA displayed with 7 digits
SENSORS Quality control
SAFETY LIGHT
CURTAINS /
When the volume of flow of the gas being measured reaches the set integrated value,
SAFETY COMPONENTS output switches to ON or OFF.
PRESSURE /
FLOW • Controls N2 charging volumes for electronic components

Integrated flow rate

SENSORS
INDUCTIVE • Controls air blowing volumes, etc. Integrated
PROXIMITY flow value
SENSORS
PARTICULAR 0
USE SENSORS Time
SENSOR ON
Comparative output
OPTIONS OFF
ON
SIMPLE Comparative output
OFF
WIRE-SAVING
UNITS
• Integrated pulse output mode
WIRE-SAVING
SYSTEMS Cost management
MEASUREMENT The pulse output is generated once at every specified integrated value*.
SENSORS
This lets you know the amount of air consumed per unit of time easily.
STATIC

Integrated flow rate

3ℓ
CONTROL • Controls N2 purge volumes in reflow furnaces 2ℓ
DEVICES
LASER
• Controls overall volumes of air consumed by equipment, etc. ℓ
MARKERS 0
ℓ: Specified integrated Time
PLC value* 40 ms approx.
(Fixed value)
* Integrated values are specified by range and can vary. ON
HUMAN MACHINE Comparative output
INTERFACES For details, refer to “SPECIFICATIONS” (p.773). OFF

ENERGY
MANAGEMENT
SOLUTIONS
Energy-saving and environmental-friendly
FA COMPONENTS
The pulse output from the flow sensor can be inputted to the pulse counter of an Eco-Power Meter so that air
MACHINE VISION
consumption and power consumption can both be measured simultaneously.
SYSTEMS
Integrated pulse output
UV CURING (The pulse output is generated
SYSTEMS according to the volume of gas flow.)
Air consumption measurement (Note 1)
Air consumption To upper-level
communication
FM-200 series RS-485 communication Convert the data
Selection according to the
Guide Equipment or facility CT Power consumption
measurement range
with a data logger, etc.
Pressure/ Dedicated current sensor
Digital Display Power consumption measurement Eco-Power Meter
Pressure/
Head-separated KW2G (Note 2)
Flow Notes: 1) Displayed value data is not outputted.
2) Refer to p.1372 for the Eco-Power Meter KW2G (AKW2010GB).

FM-200
INSTANT FLOW RATE DISPLAY (FACTORY SETTING)

• Window comparator mode • Hysteresis mode • Output OFF mode

This mode is used for setting This mode is used for setting Comparative output is forcibly
comparative output to ON or comparative output hysteresis to maintained at OFF regardless of
OFF at flow rates within the the desired level and for carrying the setting value.
setting range. out ON/OFF control.
H: 1 % F.S.(Factory setting) H: 1 digit or more
H (Hysteresis)
Flow rate

Flow rate

Flow rate

Hi Hi Hi
H (Hysteresis) H (Hysteresis)
Lo Lo Lo
0 0 0
Comparative ON Comparative ON Comparative ON
output OFF output OFF output OFF
Comparative ON Comparative ON Output is turned off regardless
output OFF output OFF of whether the setting value is ON or OFF.
 FM-200 SERIES
Integrated Display Type Digital Flow Sensor
772

ORDER GUIDE FIBER

SENSORS

LASER
SENSORS
Applicable Flow rate
Type Appearance Model No. Port size Comparative output
fluid range PHOTO-
ELECTRIC
SENSORS
FM-252-4 NPN Open-collector transistor MICRO
500 mℓ/min. PHOTO-
ELECTRIC
FM-252-4-P PNP Open-collector transistor SENSORS

FM-213-4 NPN Open-collector transistor AREA

SENSORS
1,000 mℓ/min.
FM-213-4-P PNP Open-collector transistor SAFETY LIGHT
ø4 ø0.157 push-in CURTAINS /
SAFETY
FM-253-4 NPN Open-collector transistor COMPONENTS
5 ℓ/min.
Resin body

PRESSURE /
FM-253-4-P PNP Open-collector transistor FLOW
SENSORS
FM-214-4 NPN Open-collector transistor
INDUCTIVE
10 ℓ/min. PROXIMITY
FM-214-4-P PNP Open-collector transistor SENSORS
Clean air (Note)
PARTICULAR
Compressed air FM-254-8 NPN Open-collector transistor USE
50 ℓ/min. SENSORS
(Note) FM-254-8-P PNP Open-collector transistor
Nitrogen gas ø8 ø0.315 push-in SENSOR
OPTIONS
FM-215-8 NPN Open-collector transistor
100 ℓ/min. SIMPLE
FM-215-8-P PNP Open-collector transistor WIRE-SAVING
UNITS
FM-255-AR2 NPN Open-collector transistor
Rc1/2 female thread WIRE-SAVING
SYSTEMS
500 ℓ/min. FM-255-AR2-P PNP Open-collector transistor
Aluminum body

MEASURE-
FM-255-AG2-P G1/2 female thread PNP Open-collector transistor MENT
SENSORS
FM-216-AR2 NPN Open-collector transistor
STATIC
Rc1/2 female thread CONTROL
1,000 ℓ/min. FM-216-AR2-P PNP Open-collector transistor DEVICES

FM-216-AG2-P G1/2 female thread PNP Open-collector transistor LASER

MARKERS
Note: The clean air complies with JIS B 8392-1.1.1 to 5.6.2, and the compressed air complies with JIS B 8392-1.1.1 to 1.6.2.
PLC

Accessory HUMAN
MACHINE
INTERFACES
• CN-F15-C1 (Connector attached cable 1 m 3.281 ft)
ENERGY
MANAGEMENT
SOLUTIONS

FA
COMPONENTS

MACHINE
OPTIONS VISION
SYSTEMS

UV
CURING
SYSTEMS

Designation Model No. Description

Sensor MS-FM2-1 Allows resin body type sensor to be installed on the flooring.
Selection
mounting Guide
bracket Allows aluminum body type sensor to be installed on the Pressure/
MS-FM2-2 flooring. Digital Display
Pressure/
Head-separated
Flow
Sensor mounting bracket Recommended vacuum filter
• MS-FM2-1 • MS-FM2-2 Manufactured by Nihon Pisco Co., Ltd.
VFU1-44-15P (Element length 15 mm 0.591 in) FM-200
VFU1-44-25P (Element length 25 mm 0.984 in)
(
VFE015B01 Filter element for refill,
length 15 mm 0.591 in )
(
VFE025B01 Filter element for refill,
length 25 mm 0.984 in )
M3 screw
(Purchase separately.)
M3 screw
M3 (length 6 mm 0.236 in) screw with washers (Purchase separately.)
(Attached to MS-FM2-1)
M3 (length 6 mm 0.236 in) screw with washers
(Attached to MS-FM2-2)

Note: Contact the manufacturer for details of the

recommended products.
 FM-200 SERIES
773 Integrated Display Type Digital Flow Sensor

FIBER SPECIFICATIONS
SENSORS

LASER Individual specifications

SENSORS
Type Resin body type
PHOTO-
ELECTRIC
SENSORS
Item Model No. FM-252-4(-P) FM-213-4(-P) FM-253-4(-P) FM-214-4(-P) FM-254-8(-P) FM-215-8(-P)
MICRO Full scale flow rate (Note 1) 500 mℓ/min. 1,000 mℓ/min. 5 ℓ/min. 10 ℓ/min. 50 ℓ/min. 100 ℓ/min.
PHOTO-
Display range (Note 2) –550 to +550 mℓ/min. –1,100 to +1,100 mℓ/min. –5.5 to +5.5 ℓ/min. –11 to +11 ℓ/min. –55 to +55 ℓ/min. –110 to +110 ℓ/min.
flow rate flow rate

ELECTRIC
Integrated Instant

SENSORS
Setting and display resolution 1 mℓ/min. 0.01 ℓ/min. 0.1 ℓ/min.
AREA Display range (Note 2) ±9999999 mℓ ±99999.99 ℓ ±999999.9 ℓ
SENSORS
Setting and display resolution 1 mℓ 0.01 ℓ 0.1 ℓ
SAFETY LIGHT
CURTAINS / Specified integrated value 5 mℓ 10 mℓ 0.05 ℓ 0.1 ℓ 0.5 ℓ 1ℓ
SAFETY
COMPONENTS Port size ø4 ø0.157 push-in ø8 ø0.315 push-in
PRESSURE / Weight Net weight: 50 g approx., Gross weight: 115 g approx. Net weight: 70 g approx., Gross weight: 135 g approx.
FLOW
SENSORS

INDUCTIVE Type Aluminum body type

PROXIMITY
SENSORS Item Model No. FM-255-AR2(-P) FM-255-AG2-P FM-216-AR2(-P) FM-216-AG2-P
PARTICULAR Full scale flow rate (Note 1) 500 ℓ/min. 1,000 ℓ/min.
USE
SENSORS Display range (Note 2) –550 to +550 ℓ/min. –1,100 to +1,100 ℓ/min.
flow rate flow rate
Integrated Instant

SENSOR
Setting and display resolution 1 ℓ/min.
OPTIONS Display range (Note 2) ±9999999 ℓ
SIMPLE Setting and display resolution 1ℓ
WIRE-SAVING
UNITS Specified integrated value 5ℓ 10 ℓ
Port size Rc1/2 female thread G1/2 female thread Rc1/2 female thread G1/2 female thread
WIRE-SAVING
SYSTEMS Weight Net weight: 155 g approx., Gross weight: 220 g approx.

MEASURE-
MENT
SENSORS Common specifications
STATIC
CONTROL Type NPN output type PNP output type
DEVICES
Item Model No. FM-2□ FM-2□-P
LASER CE marking directive compliance EMC Directive, RoHS Directive
MARKERS
Rated pressure range −0.09 to +0.7 MPa
Pressure withstandability 1 MPa
PLC
Applicable fluid Clean air (Note 3), compressed air (Note 3), nitrogen gas
HUMAN Supply voltage 12 to 24 V DC ±10 % Ripple P-P10 % or less
MACHINE
INTERFACES Current consumption Normal mode: 60 mA or less, ECO mode: 40 mA or less
ENERGY NPN open-collector transistor PNP open-collector transistor
MANAGEMENT Comparative outputs • Maximum sink current: 50 mA or less • Maximum source current: 50 mA or less
SOLUTIONS

FA
( Comparative
Comparative output 2 )
output 1 / • Applied voltage: 26.4 V DC or less
(between comparative output and 0 V)
• Applied voltage: 26.4 V DC or less
(between comparative output and +V)
COMPONENTS • Residual voltage: 2.4 V or less (at 50 mA sink current) • Residual voltage: 2.4 V or less (at 50 mA source current)
MACHINE Output modes Output OFF mode, window comparator mode, hysteresis mode, integrated output mode, integrated pulse output mode
VISION
SYSTEMS Short-circuit protection Incorporated
UV
Hysteresis Window comparator mode: 1 to 8 % F.S. approx. (variable) (Factory settings: approx. 1 % F.S.), Hysteresis mode: Variable (minimum 1 digit)
CURING Response time 50 ms, 80 ms, 120 ms, 200 ms, 400 ms, 800 ms, 1,500 ms, selectable by key operation
SYSTEMS
Analog voltage output Output voltage: 1 to 5 V, Output impedance: 1 kΩ approx. [For details, refer to “Analog voltage output” (p.774)]
Repeatability Within ±1 % F.S.
Accuracy assurance range (Note 4) Bi-direction : -100 to -3 % F.S., +3 to +100 % F.S., One-side direction : +3 to +100 % F.S.
ON voltage: 0 to +0.4 V, OFF voltage: +5 V to +V, or open ON voltage: +5 V to +V, OFF voltage: 0 to +0.6 V, or open
External input
Selection Input time: 80 ms or more Input time: 80 ms or more
Guide
Pressure/
Linearity Within ±3 % F.S. (Ambient temperature +25 °C +77 °F, flow rate range 3 to 100 % F.S., atmospheric criteria on secondary side)
Digital Display Display 4 digits + 4 digits 2-color LCD display (Display refresh rate: 250 ms, 500 ms, 1,000 ms, selectable by key operation)
Pressure/
Protection IP40 (IEC)
Environmental resistance

Head-separated
Flow Ambient temperature 0 to +50 °C +32 to +122 °F (No dew condensation allowed), Storage: -10 to +60 °C +14 to +140 °F
Ambient humidity 35 to 90 % RH, Storage: 35 to 90 % RH
Voltage withstandability 1,000 V AC for one min. between all supply terminals connected together and enclosure (Excluding the aluminum body type)
FM-200 Insulation resistance 10 MΩ, or more, with 500 V DC megger between all supply terminals connected together and enclosure (Excluding the aluminum body type)
Vibration resistance 10 to 150 Hz frequency, 0.75 mm 0.030 in double amplitude or 49 m/s2 max. acceleration, in X, Y and Z directions for two hours each
Shock resistance 100 m/s2 acceleration (10 G approx.) in X, Y and Z directions three times each
Temperature characteristics Within ±0.2 % F.S./°C (+25 °C +77 °F criteria, +15 to +35 °C +59 to +95 °F ambient temperature range)
Pressure characteristics Within ±5 % F.S. (-0.09 to +0.7 MPa, +25 °C +77 °F, atmospheric criteria on secondary side)
Enclosure earthing Floating (Note 5)
Enclosure: ABS, Body: Polyamide (Aluminum body type: Aluminum), Switch: EPDM, Display: Acrylic, Mounting screw part (Resin body type): Brass
Material
Current plate / Port filter: Stainless steel (used for the gas contact area), Sensor chip: Silicon, Gasket: Fluorine rubber
Connecting method Connector
Cable length Total length up to 10 m 32.808 ft is possible with 0.3 mm2, or more, cable.
Accessory CN-F15-C1 (Connector attached cable 1 m 3.281 ft): 1 pc.
Notes: 1) Converted to volumetric flow at +20 °C +68 °F and 1 atmospheric pressure (101 kPa).
2) The display flow rate range is the case when setting to bi-direction at the flow direction setting. When the flow direction is set to one-side forward
direction or one-side reverse direction, the negative side of the display flow rate range shows 10 % of the full-scale (F.S.).
3) The clean air complies with JIS B 8392-1.1.1 to 5.6.2, and the compressed air complies with JIS B 8392-1.1.1 to 1.6.2.
4) Take care that if fluid flows in the vicinity of zero-point which is out of the accuracy assurance range, the instant flow rate value may forcibly display “zero”,
or the integrated flow display value may not be counted up, or the integrated pulse output may not be outputted.
5) As a varistor (clamping voltage: approx. 40 V) is connected to the aluminum body type, do not apply voltage higher than the rated voltage of the sensor.
 FM-200 SERIES
Integrated Display Type Digital Flow Sensor
774

I/O CIRCUIT AND WIRING DIAGRAMS FIBER

SENSORS

LASER
FM-2□ NPN output type SENSORS

PHOTO-
I/O circuit diagram Wiring diagram ELECTRIC
SENSORS
MICRO
Terminal No. Color code of connector attached cable Brown PHOTO-
ELECTRIC
(Brown) +V Black Load SENSORS
1 *1
D1 (Black) CH1 Load
D2 (Comparative output 1) Load AREA
Tr1 2 + 12 to 24 V DC SENSORS
Load * 1 White
Main circuit

D3 50 mA max. - ±10 % SAFETY LIGHT

Tr3 + 12 to 24 V DC
D4 (White) CH2 (Comparative output 2 / External input) *2 CURTAINS /
3 - ±10 % Gray (Note 2) SAFETY
Tr2 50 mA max. COMPONENTS
*2
4 (Gray) Analog voltage output PRESSURE /
1 kΩ approx. Blue FLOW
(Note 2)
5 SENSORS
(Blue) 0 V
Varistor (Note 1) * 1: When using CH2 as a comparative output 2 INDUCTIVE
Internal circuit Users’ circuit * 2: When using CH2 as an external input PROXIMITY
SENSORS

Notes: 1) As for the aluminum body type, varistor (clamping voltage approx. PARTICULAR
Non-voltage contact or NPN open-collector transistor USE
40 V) is connected between the internal power circuit and the SENSORS
metal body to prevent breakdown of the sensor. Connect the metal
body to +V of power supply or to frame ground (F.G.) of a device or SENSOR
OPTIONS
that is connected to 0 V. High potential and insulation resistance
tests between the internal power circuit and the metal body must SIMPLE
not be done. High (+5 V to +V, or Open): Invalid WIRE-SAVING
Low (0 to +0.4 V): Valid UNITS
2) Short-circuit protection is not incorporated into the analog voltage
output. Do not connect the power supply or capacitive load directly WIRE-SAVING
to the analog voltage output. SYSTEMS

Analog voltage output MEASURE-

MENT
SENSORS
Symbols… D1 to D4 : R
 everse supply polarity protection diode <Bi-direction detection> <One-side detection>
Tr1,Tr2 : NPN output transistor STATIC
5 5 CONTROL
Tr3 : PNP input transistor DEVICES
voltage (V)

voltage (V)
3 3
Output

Output
LASER
MARKERS
1 1

–F.S. 0 F.S. 0 F.S. PLC

Flow rate Flow rate
(ℓ/min.) (ℓ/min.)
HUMAN
MACHINE
INTERFACES
FM-2□-P PNP output type
ENERGY
MANAGEMENT
SOLUTIONS
I/O circuit diagram Wiring diagram
Brown FA
Terminal No. Color code of connector attached cable COMPONENTS

(Brown) +V Black *2 MACHINE

1 VISION
D1 + 12 to 24 V DC SYSTEMS
Tr1 2 - ±10 %
D2 (Black) CH1 (Comparative output 1) White Load
*2 UV
Main circuit

Tr2 D3 50 mA max. CURING

+ 12 to 24 V DC Gray (Note 2) Load * 1 SYSTEMS
3
Tr3 (White) CH2 (Comparative output 2 / Load - ±10 %
D4 External input) Blue
4
Load * 1
(Gray) Analog
Approx. 1 kΩ voltage output (Note 2)
5 * 1: When using CH2 as a comparative output 2
Varistor (Note 1) (Blue) 0 V
* 2: When using CH2 as an external input
Internal circuit Users’ circuit Selection
Guide
Notes: 1) As for the aluminum body type, varistor (clamping voltage approx. Non-voltage contact or PNP open-collector transistor Pressure/
Digital Display
40 V) is connected between the internal power circuit and the
Pressure/
metal body to prevent breakdown of the sensor. Connect the metal or Head-separated
body to +V of power supply or to frame ground (F.G.) of a device
Flow
that is connected to 0 V. High potential and insulation resistance
tests between the internal power circuit and the metal body must High (+5 V to +V): Valid
not be done. Low (0 to +0.6 V, or Open): Invalid
2) Short-circuit protection is not incorporated into the analog voltage FM-200
output. Do not connect the power supply or capacitive load directly
to the analog voltage output.
Analog voltage output
Symbols… D1 to D4 : R
 everse supply polarity protection diode <Bi-direction detection> <One-side detection>
Tr1,Tr2 : PNP output transistor 5 5
Tr3 : NPN input transistor
voltage (V)

voltage (V)

3 3
Output

Output

1 1

–F.S. 0 F.S. 0 F.S.

Flow rate Flow rate
(ℓ/min.) (ℓ/min.)
 FM-200 SERIES
775 Integrated Display Type Digital Flow Sensor

FIBER PRESSURE LOSS CHARACTERISTICS (TYPICAL)

SENSORS

LASER
SENSORS FM-252-4(-P) FM-213-4(-P) FM-253-4(-P) FM-214-4(-P)
PHOTO-
ELECTRIC 0.10 0.20 1.6 4.5
SENSORS
MICRO 0.09 0.1 MPa 0.18 0.1 MPa 1.4 0.1 MPa 4.0 0.1 MPa
PHOTO-
0.08 0.3 MPa 0.16 0.3 MPa 0.3 MPa 0.3 MPa
ELECTRIC 0.5 MPa 0.5 MPa 1.2 0.5 MPa 3.5 0.5 MPa
SENSORS
0.07 0.14
Pressure loss (kPa)

Pressure loss (kPa)

Pressure loss (kPa)

Pressure loss (kPa)

3.0
AREA 0.06 0.12 1.0
SENSORS 2.5
0.05 0.10 0.8
SAFETY LIGHT 2.0
CURTAINS / 0.04 0.08 0.6
SAFETY 1.5
COMPONENTS 0.03 0.06
0.4 1.0
PRESSURE / 0.02 0.04
FLOW
SENSORS 0.01 0.02 0.2 0.5
INDUCTIVE
PROXIMITY 0 0.1 0.2 0.3 0.4 0.5 0 0.2 0.4 0.6 0.8 1.0 0 1 2 3 4 5 0 2 4 6 8 10
SENSORS Flow rate (ℓ/min.) Flow rate (ℓ/min.) Flow rate (ℓ/min.) Flow rate (ℓ/min.)
PARTICULAR
USE
SENSORS
FM-254-8(-P) FM-215-8(-P) FM-255-A□2(-P) FM-216-A□2(-P)
SENSOR
OPTIONS
6 8 12 40
SIMPLE 0.1 MPa 0.1 MPa 0.3 MPa 0.3 MPa
WIRE-SAVING 7 35
UNITS 5 0.3 MPa 0.3 MPa 10 0.5 MPa 0.5 MPa
0.5 MPa 6 0.5 MPa 0.7 MPa 30 0.7 MPa
Pressure loss (kPa)

Pressure loss (kPa)

Pressure loss (kPa)

Pressure loss (kPa)

WIRE-SAVING 4 8
SYSTEMS 5 25

MEASURE- 3 4 6 20
MENT
SENSORS 3 15
2 4
STATIC 2 10
CONTROL
DEVICES 1 2
1 5
LASER
MARKERS 0 10 20 30 40 50 0 20 40 60 80 100 0 100 200 300 400 500 0 200 400 600 800 1,000
Flow rate (ℓ/min.) Flow rate (ℓ/min.) Flow rate (ℓ/min.) Flow rate (ℓ/min.)
PLC

HUMAN
MACHINE PRECAUTIONS FOR PROPER USE Refer to p.1571~ for general precautions.
INTERFACES

ENERGY
MANAGEMENT
SOLUTIONS Terminal arrangement diagram
• Never use this product as a sensing device
FA for personnel protection. Terminal arrangement of the connectors of this product
COMPONENTS
• In case of using sensing devices for (sensor body)
MACHINE
VISION personnel protection, use products which
SYSTEMS
meet laws and standards, such as OSHA,
UV
CURING
ANSI or IEC etc., for personnel protection
SYSTEMS applicable in each region or country.
1 2 3 4 5
• This product is for use in air and nitrogen
only. Do not use the product for other fluids Color code of the
since the sensing accuracy cannot be Connector
connector attached Terminal
guaranteed. pin No. cable
Selection
Guide
• Take care that if foreign materials are mixed 1 Brown +V
Pressure/
Digital Display in the sensing part, the product may break.
Pressure/
2 Black CH1 (comparative output 1)
Head-separated
3 White CH2 (comparative output 2 / external input)
Flow Part description
4 Gray Analog voltage output
Main display Comparative output 1 indicator (Green)
FM-200 (Green / Red)
5 Blue 0V
MODE key Comparative output 2 indicator (Green)

UP key
DOWN key
Sub display (Green / Red) Forward direction display
(Note 1)
Connector area for
connector attached cable

Connector area Connector area

for piping for piping
(Note 2) (Note 2)

Notes: 1) Direction of the arrow indicates the forward direction of flow rate
when setting the flow direction to bi-direction or one-side forward
direction. When setting the flow direction to one-side reverse
direction, a direction opposite to the forward direction display will
be the forward direction of the flow rate.
2) ø4 mm ø0.157 in push-in joint / ø8 mm ø0.315 in push-in joint is
incorporated in FM-2□-4(-P) / FM-2□-8(-P), respectively.
The push-in joint is not incorporated in the aluminum body type.
 FM-200 SERIES
Integrated Display Type Digital Flow Sensor
776

PRECAUTIONS FOR PROPER USE Refer to p.1571~ for general precautions. FIBER
SENSORS

LASER
Mounting • Install a filter, an air dryer and an oil mist filter (micro- SENSORS

alescer) onto the primary side (upstream) of this product

• This product can be installed facing up or down or to the since the compressed air from the compressor contains
PHOTO-
ELECTRIC
left or right. drain (water, oil oxide and foreign materials, etc.). Mesh
SENSORS
MICRO
PHOTO-
Horizontal mounting (wire net) in this product is used to rectify the flow rate in ELECTRIC
SENSORS
the pipe. Always install a filter to the primary side of this
• Use M3 screws, and the tightening torque should be 0.5 product since this mesh is not a filter to remove foreign AREA
SENSORS
N·m. materials. SAFETY LIGHT
<Resin body type> CURTAINS /
SAFETY
COMPONENTS
M3 screw
PRESSURE /
(Purchase separately.) FLOW
SENSORS
17 mm Pneumatics Air dryer Filter Regulator Oil mist filter Flow sensor INDUCTIVE
0.669 in pressure (Micro-alescer) FM-200 PROXIMITY
source SENSORS

PARTICULAR
• When using a valve on the primary side of the product, USE
SENSORS
only use an oil-prohibit specification valve. This product
SENSOR
may malfunction or break if subject to splattering grease OPTIONS
Vertical mounting or oil, etc.
SIMPLE
• When using this product for suction verification, etc., WIRE-SAVING
• Use M3 screws, and the tightening torque should be 0.5 always install an air filter whose filtration property is
UNITS

N·m. 10 µm 0.394 mil or less onto the suction side to prevent WIRE-SAVING
SYSTEMS
<Resin body type> <Aluminum body type> suction of foreign materials and water. Furthermore,
MEASURE-
consider atmospheric dew point and ambient temperature MENT
SENSORS
of the product, use the product under the conditions that
dew condensations will not be formed in the inside of STATIC
CONTROL
pipe. DEVICES

• In case of mounting commercial joint to the aluminum LASER

MARKERS
M3 screw body type, apply a spanner on the metal part of this
M3 screw
(Purchase separately.)
(Purchase separately.)
product and tighten by the tightening torque of 16 to PLC
18 N·m. If excessive torque is applied, the commercial
When using sensor mounting bracket joint or the main body may break. HUMAN
MACHINE
• When piping, take care that foreign materials such as INTERFACES
• When mounting the product on the sensor mounting sealing tape and adhesive must not enter into the inside ENERGY
bracket MS-FM2-1 (optional) or MS-FM2-2 (optional), use of the pipe. If foreign materials are entered, the product
MANAGEMENT
SOLUTIONS
the M3 screws (length 6 mm 0.236 in) attached to the may malfunction or break. FA
sensor mounting bracket. The tightening torque should be • Make sure to mount the joint when using the product with COMPONENTS
0.5 N·m. Use M3 screws to mount the sensor mounting its secondary side (downstream) open to the air. If the MACHINE
bracket on a sensing surface. joint is not mounted, the port filter of the product may fall VISION
SYSTEMS
off. UV
CURING
<Resin body type> <Aluminum body type> SYSTEMS
Wiring
Use MS-FM2-1 Use MS-FM2-2
• Make sure that the power supply is OFF during wiring.
• Take care that wrong wiring will damage this product.
• Take care if applying voltage exceeding the rated range, Selection
or connecting to AC power supply, this product may break Guide

M3 screw or burn. Pressure/

Digital Display
(Purchase separately.)
M3 screw • If power is supplied from a commercial switching Pressure/
Head-separated
M3 (length 6 mm 0.236 in)
screw with washers
(Purchase separately.) regulator, ensure that the frame ground (F.G.) terminal of
Flow
(Attached to MS-FM2-1) M3 (length 6 mm 0.236 in) the power supply is connected to an actual ground.
screw with washers
• In case noise generating equipment (switching regulator,
(Attached to MS-FM2-2)
inverter motor, etc.) is used in the vicinity of this FM-200
Piping sensor, connect the frame ground (F.G.) terminal of the
equipment to an actual ground.
• The following specified tube should be used to insert to
• Do not run the wires together with high-voltage lines or
the push-in joint type product.
power lines or put them in the same raceway. This can
cause malfunction due to induction.
Tube diameter
Material of tube Allowable diameter • Extension up to total 10 m 32.808 ft is possible with
(mm in)
0.3 mm2, or more, cable.
Polyamide ø4 ø0.157, ø8 ø0.315 Within ±0.1 mm ±0.004 in • Make sure that stress by forcible bend or pulling is not
ø4 ø0.157 Within ±0.1 mm ±0.004 in applied directly to the sensor cable joint.
Polyurethane
ø8 ø0.315 Within +0.1 / -0.15 mm ±0.004 in / -0.006 in

• Before using this product, make sure to check that the

tube is firmly inserted.
 FM-200 SERIES
777 Integrated Display Type Digital Flow Sensor

FIBER PRECAUTIONS FOR PROPER USE Refer to p.1571~ for general precautions.
SENSORS

LASER
SENSORS
Others

PHOTO- • Do not use this product for commercial purposes since • Do not use this product in places having excessive vapor,
ELECTRIC
SENSORS the product does not comply with International System of dust, etc., or where it may come in contact with corrosive
MICRO Units (SI). gas, etc.
PHOTO-
ELECTRIC • Do not apply pressure that exceed resistant-pressure. • Take care that the product does not come in contact with
SENSORS
• Do not use during the initial transient time (approx. water, oil, grease, or organic solvents such as thinner,
AREA
SENSORS 5 sec.) after the power supply is switched ON. etc., strong acid or alkaline.
SAFETY LIGHT • The specifications may not be satisfied in a strong • Do not drop the product or apply hard shock. This can
CURTAINS /
SAFETY magnetic field. cause product breakage.
COMPONENTS
PRESSURE / • Accuracy of the display and the analog voltage output is
FLOW
SENSORS influenced by self-heating by applying current other than
INDUCTIVE
the temperature characteristics. Standby time (5 min. or
PROXIMITY
SENSORS
more after applying current) should be taken when using
PARTICULAR
the product.
USE
SENSORS
• These sensors are only for indoor use.
SENSOR
OPTIONS
FLOW SENSOR SELECTION
SIMPLE
WIRE-SAVING
UNITS • If using a flow sensor for tasks such as checking suction and release from suction nozzles and sensing leaks, use the flow
WIRE-SAVING rate range setting table as a guide. The effective cross-section area of the nozzle (pinhole) and the difference in pressure
SYSTEMS
inside and outside the nozzle can be used to calculate the flow rate.
MEASURE-
MENT ● For P1 ≥ 1.89 × P2 (acoustic velocity) P2 : Vacuum P1 : Pressurized
SENSORS
Q=113.2 × S × P1
STATIC
CONTROL
DEVICES
● For P1 < 1.89 × P2 (sub-acoustic velocity)
LASER Q=226.4 × S × P2(P1–P2) P1 : Atmosphere Suction P2 : Atmosphere
MARKERS pressure nozzle pressure
Q : Flow rate ℓ/min. P1 : Pressurized
PLC P1 : Absolute pressure at primary side (MPa)
P2 : Absolute pressure at secondary side (MPa)
HUMAN P2 : Atmosphere
MACHINE S≥ : Effective cross-section area of nozzle (pinhole) mm2 pressure Pinhole
INTERFACES

ENERGY
MANAGEMENT <Calculation example>
SOLUTIONS
The flow rate calculation value for a nozzle diameter of ø0.1 to ø2.0 mm ø0.004 to ø0.079 in when P2 is varied is shown in the table below.
FA
COMPONENTS
Calculated flow rate value (ℓ/min)
P1(MPa) P1(MPa) P2(MPa) P2(MPa) Acoustic velocity /
MACHINE
VISION Absolute pressure Gauge pressure Absolute pressure Gauge pressure Sub-acoustic velocity ø0.1 mm ø0.2 mm ø0.3 mm ø0.4mm ø0.5mm ø0.7 mm ø1.0 mm ø1.5 mm ø2.0 mm
SYSTEMS ø0.004 in ø0.008 in ø0.012 in ø0.016 in ø0.020 in ø0.027 in ø0.039 in ø0.059 in ø0.079 in
0.1013 0 0.0313 –0.07 Acoustic velocity 0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
UV
CURING 0.1013 0 0.0413 –0.06 Acoustic velocity 0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
SYSTEMS
0.1013 0 0.0513 –0.05 Acoustic velocity 0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
Suction

0.1013 0 0.0613 –0.04 Sub-acoustic velocity 0.088 0.352 0.792 1.408 2.200 4.312 8.800 19.801 35.202
0.1013 0 0.0713 –0.03 Sub-acoustic velocity 0.082 0.329 0.740 1.315 2.055 4.028 8.220 18.494 32.878
0.1013 0 0.0813 –0.02 Sub-acoustic velocity 0.072 0.287 0.645 1.147 1.792 3.512 7.166 16.125 28.666
Selection 0.1013 0 0.0913 –0.01 Sub-acoustic velocity 0.054 0.215 0.483 0.859 1.343 2.631 5.370 12.083 21.480
Guide
0.1113 0.01 0.1013 0 Sub-acoustic velocity 0.057 0.226 0.509 0.905 1.414 2.772 5.657 12.727 22.626
Pressure/
0.1213 0.02 0.1013 0 Sub-acoustic velocity 0.080 0.320 0.720 1.280 2.000 3.920 8.000 17.999 31.998
Blow (leakage detection)

Digital Display
Pressure/ 0.1413 0.04 0.1013 0 Sub-acoustic velocity 0.113 0.453 1.018 1.810 2.828 5.543 11.313 25.454 45.252
Head-separated
0.1613 0.06 0.1013 0 Sub-acoustic velocity 0.139 0.554 1.247 2.217 3.464 6.789 13.856 31.175 55.423
Flow
0.1813 0.08 0.1013 0 Sub-acoustic velocity 0.160 0.640 1.440 2.560 4.000 7.840 15.999 35.998 63.996
0.2013 0.1 0.1013 0 Acoustic velocity 0.179 0.716 1.610 2.862 4.472 8.765 17.888 40.248 71.552
FM-200 0.3013 0.2 0.1013 0 Acoustic velocity 0.268 1.071 2.410 4.284 6.694 13.119 26.774 60.242 107.096
0.4013 0.3 0.1013 0 Acoustic velocity 0.357 1.426 3.209 5.706 8.915 17.474 35.660 80.236 142.641
0.5013 0.4 0.1013 0 Acoustic velocity 0.445 1.782 4.009 7.127 11.137 21.828 44.547 100.230 178.186
0.6013 0.5 0.1013 0 Acoustic velocity 0.534 2.137 4.809 8.549 13.358 26.182 53.433 120.224 213.731
Notes: 1) In case of any leakage from tubes, etc., actual values will differ greatly from calculated values. When measuring flows, make sure that there is no
leakage from any tubes.
2) In case of any points in the tubes which are narrower than the diameter of the suction nozzle, flow rate will be restricted and may turn out to be lower
than the calculated values.
In addition, suction verification may not be possible in such cases.
3) The effective cross-section area is a guide only. If the nozzle is long and narrow, the effective cross-section area may be smaller than the area at the tip
of the nozzle.
4) Response times are determined by the internal volume of the tube from the flow sensor to the suction nozzle (pinhole). If carrying out high-speed
sensing, reduce the internal volume of the tube as much as possible such as by locating the flow sensor as close as possible to the suction nozzle.
 FM-200 SERIES
Integrated Display Type Digital Flow Sensor
778

DIMENSIONS (Unit:mm in) The CAD data can be downloaded from our website. FIBER
SENSORS

FM-2□-4(-P) Sensor FM-2□-8(-P) Sensor LASER

SENSORS

17 17 PHOTO-
0.669 0.669 ELECTRIC
SENSORS
1.5 15 1.5
15 55 0.591 55 MICRO
0.591 2.165 0.059 2.165 0.059 PHOTO-
ELECTRIC
SENSORS

AREA
3.6 37 43 SENSORS
( 24.2
0.953 ) 8.5 0.335 0.142 1.457
( 30.2
1.189 ) 3.6 1.693
0.142 SAFETY LIGHT
13 CURTAINS /
0.512 SAFETY
27 COMPONENTS
27 1.063
64 1.063
ø4 ø0.157 push-in joint 2-ø3.4 ø0.134 thru-hole (
2.520) ø8 ø0.315 push-in joint 2-ø3.4 ø0.134 thru-hole (2.780
70.6
) PRESSURE /
FLOW
SENSORS

INDUCTIVE
PROXIMITY
2-M3, 5 0.197 deep 15.5 9.5 2-M3, 5 0.197 deep 15.5 9.5 SENSORS
0.610 0.374 0.616 0.374
PARTICULAR
USE
SENSORS

FM-2□-A□(-P) Sensor CN-F15-C1 Connector attached cable (Accessory) SENSOR

OPTIONS

SIMPLE
WIRE-SAVING
30
1.181 30 1.181
1,040
40.945 ( 0.984
25
) UNITS

or less WIRE-SAVING
1.5 Connector cover
0.059 SYSTEMS
80 3.150 Material: EPDM
MEASURE-
MENT
SENSORS
50
STATIC
(1.457
37
)15 30
1.969 CONTROL

0.591
1.181 ( 0.146
3.7
) DEVICES
Rc1/2 Contact: 5-SSHL-002T-P0.2 LASER
female thread manufactured by J.S.T. Mfg. Co., Ltd. MARKERS
(Note)
13 Housing: GHR-05V-S
0.512 manufactured by J.S.T. Mfg. Co., Ltd. PLC

2-M3, 5 0.197 deep 30 HUMAN

1.181 MACHINE
INTERFACES
Note: FM-2□-AG2-P has G1/2 female thread.
ENERGY
MANAGEMENT
SOLUTIONS

MS-FM2-1 Sensor mounting bracket (Optional) MS-FM2-2 Sensor mounting bracket (Optional) FA
COMPONENTS
2-ø3.5 65 2.559 t 1 t 0.039 MACHINE
R1.75 R0.069 55 0.217 2-ø0.138 30 1.181 VISION
3.5 18.5
4 0.157 30 1.181 0.278 SYSTEMS
6 0.236 0.138 t 1 t 0.039
UV
8.4 0.331 CURING
27 14.5 40 13 30 50 SYSTEMS
1.063 17 0.609 0.571 1.575 0.512 1.181 1.969

9.5 2-ø3.5
0.374 2-ø0.138 5
15.5 0.197 5
0.610 R1.75 R0.069 6 3.5 0.197
0.236 0.138
Selection
Guide
Material: Cold rolled carbon steel (SPCC)(Nickel plated) Material: Cold rolled carbon steel (SPCC)(Nickel plated)
Pressure/
Two M3 (length 6 mm 0.236 in) screws with washers are attached. Two M3 (length 6 mm 0.236 in) screws with washers are attached. Digital Display
Pressure/
Head-separated
Flow
Assembly dimensions Assembly dimensions
Mounting drawing with FM-252-4 Mounting drawing with FM-255-AR2
FM-200
30 65
1.181 3.5 18.5 2.559
R1.75 R0.069 6 0.236 0.138 0.728 R1.75
R0.069 30 1.181
6 0.236
27 23 14.5
1.063 0.906 17 0.571 25 20
0.669 0.984 0.787
30 40 50
1.181 1.575 1.969
1.5
0.059

80 1.5
3.150 0.059
42
t1
t 0.039 (1.150
29.2
) 13.5 1.654

0.531
27 55
5
0.197
1.063 8.6
0.339 t1 (1.654
42
) 35
1.378
2.165
t 0.039 20
0.787

5
0.197