208960-2F Exposed Linear Encoders en

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Exposed

Linear Encoders

05/2019
Exposed linear encoders

Linear encoders measure the position of Exposed linear encoders are used on Mechanical design
linear axes without additional mechanical machines and equipment that require high Exposed linear encoders consist of a scale
transfer elements. A number of potential measuring accuracy. Typical applications or scale tape and a scanning head that
error sources are thereby eliminated: include the following: operate without mechanical contact.
• Positioning error due to heat generation • Measuring and production equipment in The scales of exposed linear encoders are
in the recirculating ball screw the semiconductor industry fastened to a mounting surface. High
• Reversal error • PCB assembly machines flatness of the mounting surface is thus an
• Kinematic error through the ball-screw • Ultra-precision machines and devices important requirement for the high
pitch error such as diamond lathes for optical accuracy of linear encoders.
components, facing lathes for magnetic
Linear encoders are therefore indispensable storage disks, and grinding machines for
for machine tools on which high positioning ferrite components
accuracy and a high machining rate are • High-accuracy machine tools
essential. • Measuring machines and comparators,
measuring microscopes, and other
precision measuring devices
• Direct drives

Information on the following topics is


available upon request or on the Internet
at www.heidenhain.de:
• Angle encoders with integral bearing
• Modular angle encoders with optical
scanning
This brochure supersedes all previous
• Modular angle encoders with magnetic
editions, which thereby become invalid.
scanning Further information:
The basis for ordering from HEIDENHAIN
• Rotary encoders
is always the brochure edition valid when For comprehensive descriptions of all
• Encoders for servo drives
the order is made. available interfaces, as well as general
• Linear encoders for numerically
electrical information, please refer to the
controlled machine tools
Standards (ISO, EN, etc.) apply only Interfaces of HEIDENHAIN Encoders
• Interface electronics
where explicitly stated in the brochure. brochure.
• HEIDENHAIN controls
Contents

Overview

Exposed linear encoders  2  

Selection guide  4  

Technical characteristics

Measuring principles  8  

Reliability 12  

Measuring accuracy 14  

Mechanical design types and mounting 17  

General mechanical information 21


Functional safety 22  

Specifications

For absolute position measurement LIC 4113, LIC 4193 24  

LIC 4115, LIC 4195 26  

LIC 4117, LIC 4197 28  

LIC 4119, LIC 4199 30  

LIC 4119 FS  32
LIC 2117, LIC 2197 34  

LIC 2119, LIC 2199 36  

For high accuracy LIP 382 38  

LIP 211, LIP 281, LIP 291 40  

LIP 6071, LIP 6081 42  

LIF 471, LIF 481 44  

For high traversing speed LIDA 473, LIDA 483 46  

LIDA 475, LIDA 485 48  

LIDA 477, LIDA 487 50  

LIDA 479, LIDA 489 52  

LIDA 277, LIDA 287 54  

LIDA 279, LIDA 289 56  

For two-coordinate measurement PP 281 R 58  

Electrical connection

Interfaces 60  

Testing equipment and diagnostics 67  

Interface electronics 69
Selection guide
Absolute encoders and encoders with position value output

Absolute position measurement Baseline error Substrate and mounting


The LIC exposed linear encoders permit
absolute position measurement over long Accuracy Interval
traverse paths of up to 28 m at high grade
traversing speed.
1)
LIC 4100 ±1 µm  ±0.275 µm/ Glass or glass ceramic scale,
For high accuracy and ±3 µm 10 mm adhesively bonded to the mounting
Encoders for use in a vacuum high traversing speed ±5 µm surface or fastened with fixing
environment clamps
HEIDENHAIN standard encoders are
suitable for use in rough or fine vacuums.
Encoders used in high and ultrahigh
vacuums must meet special requirements. ±5 µm  ±0.750 µm/ Steel scale tape drawn into
The design and materials used for such 50 mm aluminum extrusions and tensioned
encoders must be specifically tailored to (typical)
these conditions. For more information,
please refer to the Linear Encoders for
Vacuum Technology Technical Information
document.
±3 µm2)  ±0.750 µm/ Steel scale tape drawn into
The LIC 4113 V and LIC 4193 V linear ±5 µm3) 50 mm aluminum extrusions and secured
encoders are specifically designed for use ±15 µm4) (typical)
in high vacuums. For more information,
please refer to the appropriate Product
Information documents.

±3 µm  ±0.750 µm/ Steel scale tape, adhesively


Incremental encoders with position ±15 µm4) 50 mm bonded to mounting surface
value output (typical)
The LIP 211 and LIP 291 incremental linear
encoders output the position information
as a position value. For this to occur, the
sinusoidal scanning signals are highly
interpolated in the scanning head and
converted into a position value by the
integrated counter function. As with all
incremental encoders, the absolute LIC 2100 ±15 µm – Steel scale tape drawn into
reference is established by means of For high traversing speed aluminum extrusions and secured
reference marks.

±15 µm – Steel scale tape, adhesively


bonded to mounting surface

2)
LIP 200 ±1 µm  ±0.125 µm/ Scale made of Zerodur glass
For very high accuracy ±3 µm 5 mm ceramic, fastened with fixing
clamps

1)
Up to a measuring length (ML) of 1640 mm
2)
Up to a measuring length (ML) of 1020 mm or 1040 mm

4
Interpolation Signal Measuring Interface Model Page
error period length

±20 nm – 240 mm to EnDat 2.2 LIC 4113 24  


3040 mm
Fanuc Þi LIC 4193
Mitsubishi LIC 41x3
Panasonic  
Yaskawa

±20 nm – 140 mm to EnDat 2.2 LIC 4115 26
28 440 mm  
Fanuc Þi LIC 4195
Mitsubishi  
Panasonic
Yaskawa
LIC 41x5  

±20 nm – 240 mm to EnDat 2.2 LIC 4117 28



6040 mm
Fanuc Þi LIC 4197
Mitsubishi
Panasonic  
Yaskawa
LIC 41x7  
±20 nm – 70 mm to EnDat 2.2 LIC 4119 30
1020 mm  
Fanuc Þi LIC 4199
Mitsubishi

Panasonic
Yaskawa


70 mm to EnDat 2.2 LIC 4119 32
1820 mm  
±2 µm – 120 mm to EnDat 2.2 LIC 2117 34  
3020 mm
Fanuc Þi LIC 2197  
Mitsubishi
Panasonic LIC 21x7  
Yaskawa

±2 µm – 120 mm to EnDat 2.2 LIC 2119 36
3020 mm

Fanuc Þi LIC 2199  
Mitsubishi
Panasonic  
Yaskawa LIC 21x9

5)
±0.4 nm 0.512 µm 20 mm to EnDat 2.2 LIP 211 40  
3040 mm
Fanuc Þi LIP 291  
Mitsubishi

3)
For a measuring length (ML) of 1240 mm or greater
4)
±5 µm after linear length-error compensation in the evaluation electronics
5) LIP 211
With HEIDENHAIN interface electronics


5
Selection guide
Incremental encoders

Very high accuracy Baseline error Substrate and mounting


The LIP exposed linear encoders are
characterized by their very small measuring Accuracy Interval
steps combined with extremely high grade1)
accuracy and repeatability. They utilize the
interferential scanning principle and feature LIP ±0.5 µm
3)
 ±0.075 µm/ Zerodur glass ceramic embedded
an OPTODUR phase grating as their For very high accuracy 5 mm within a screw-on Invar carrier
measuring standard.
±1 µm2)  ±0.125 µm/ Scale made of Zerodur glass ce-
High accuracy ±3 µm 5 mm ramic, fastened with fixing clamps
The LIF exposed linear encoders utilize the
interferential scanning principle and possess ±1 µm5)  ±0.175 µm/ Scale made of Zerodur glass
a measuring standard made with the ±3 µm 5 mm ceramic or glass, adhesively bonded
SUPRADUR process. They feature high or fastened with fixing clamps
accuracy and repeatability, are particularly
easy to mount, and are equipped with limit LIF ±1 µm
8)
 ±0.225 µm/ Scale made of Zerodur glass
switches and homing tracks. The special For high accuracy ±3 µm 5 mm ceramic or glass, adhesively
version LIF 481 V can be used in high bonded or fastened with fixing
vacuums of up to 10–7 millibars (see separate clamps
Product Information document).
±1 µm5)  ±0.225 µm/ Scale made of Zerodur glass
High traversing speeds ±3 µm 5 mm ceramic or glass, adhesively
The LIDA exposed linear encoders are bonded by means of PRECIMET
designed for high traversing speeds of up adhesive mounting film
to 10 m/s. Their various mounting options
allow for particularly flexible deployment. LIDA ±1 µm
9)
 ±0.275 µm/ Scale made of glass or glass
Depending on the version, steel scale For high traversing ±3 µm 10 mm ceramic, adhesively bonded to the
tapes, glass, or glass ceramic are used as speeds and large ±5 µm mounting surface
the carriers for METALLUR gratings. They measuring lengths
also feature limit switches. ±5 µm  ±0.750 µm/ Steel scale tape drawn into
50 mm aluminum extrusions and
Two-coordinate measurement (typical) tensioned
The measuring standard of the PP two-
coordinate encoder is an interferentially ±3 µm2)  ±0.750 µm/ Steel scale tape drawn into
scanned planar phase grating manufactured ±5 µm 50 mm aluminum extrusions and secured
with the DIADUR process. Position ±15 µm6) (typical)
measurement is thereby possible within
a plane. ±3 µm2)  ±0.750 µm/ Steel scale tape, adhesively
±15 µm6) 50 mm bonded to mounting surface
(typical)

±15 µm – Steel scale tape drawn into


Encoders for use in vacuum aluminum extrusions and secured
environments
HEIDENHAIN standard encoders are
suitable for use in rough or fine vacuums. ±15 µm – Steel scale tape, adhesively
Encoders used in high and ultrahigh bonded to mounting surface
vacuums must meet special requirements.
The design and materials used for such
encoders must be specifically tailored to
these conditions. For more information, PP ±2 µm – Glass grid plate, secured with
please refer to the Linear Encoders for For two-coordinate full-surface adhesive bond
Vacuum Technology Technical Information measurement
document.

The following exposed linear encoders are LIP/LIF ±0.5 µm  ±0.175 µm/ Scale made of Zerodur glass
specifically designed for use in a high and For use in high and ±1 µm 5 mm ceramic or glass, fastened with
ultrahigh vacuum: ultrahigh vacuums fixing clamps
• High vacuum: LIP 481 V and LIF 481 V ±3 µm  ±0.225 µm/
• Ultrahigh vacuum: LIP 481 U 5 mm
For more information, please refer to the
1)
appropriate Product Information At an interval of 1 m or a measuring length < 1 m (accuracy grade)
2)
documents. Up to measuring lengths of 1020 mm or 1040 mm
3)
Higher accuracy grades upon request
4)
Other measuring lengths / measuring ranges upon request

6
Interpolation Signal Measuring Interface Model Page
error period length

±0.01 nm 0.128 µm 70 mm to » 1 VPP LIP 382 38  


270 mm LIP 382

±0.4 nm7) 0.512 µm 20 mm to » 1 VPP LIP 281 40


3040 mm  
– 4 µm 20 mm to « TTL LIP 6071 42  
3040 mm
±4 nm » 1 VPP LIP 6081  
– 4 µm 70 mm to « TTL LIF 171 Product LIP 281  
3040 mm4) Infor­
±12 nm » 1 VPP LIF 181 mation  

– 4 µm 70 mm to « TTL LIF 471 44
1640 mm
±12 nm » 1 VPP LIF 481 LIP 6081

– 20 µm 240 mm to « TTL LIDA 473 46  
3040 mm
±45 nm » 1 VPP LIDA 483  

– 20 µm 140 mm to « TTL LIDA 475 48  


30040 mm
±45 nm » 1 VPP LIDA 485
LIF 481  

– 20 µm 240 mm to « TTL LIDA 477 50
6040 mm  
±45 nm » 1 VPP LIDA 487

– 20 µm Up to « TTL LIDA 479 52
6000 mm4) LIDA 489

±45 nm » 1 VPP LIDA 489

– 200 µm Up to « TTL LIDA 277 54
10 000 mm4)  
±2 µm » 1 VPP LIDA 287

– 200 µm Up to « TTL LIDA 279 56  
10 000 mm4) LIDA 287
±2 µm » 1 VPP LIDA 289  

±12 nm7) 4 µm Measuring area: » 1 VPP PP 281 58
68 x 68 mm4)  

±7 nm 2 µm 70 mm to » 1 VPP LIP 481V   Product  
420 mm LIP 481 U Infor­
mation
±12 nm7) 4 µm 70 mm to LIF 481V

1020 mm

5)
Only for Zerodur glass ceramic up to a measuring length of 1020 mm
6)
±5 µm after linear length-error compensation in the subsequent electronics PP 281  
7)
With HEIDENHAIN interface electronics (e.g., EIB 741)  
8)
Up to a measuring length of 1640 mm
9)
Only for Robax glass ceramic up to a measuring length of 1640 mm
7
Measuring principles
Measuring standard Absolute measuring method

HEIDENHAIN encoders with optical scanning With the absolute measuring method, the
use measuring standards consisting of position value is available immediately
periodic structures known as graduations. upon switch-on of the encoder and can be
These graduations are applied to a carrier requested at any time by the subsequent
substrate made of glass or steel. For electronics. There is no need to move the
encoders with large measuring lengths, axes to find the reference position. The
steel tape is used as the scale substrate. absolute position information is read from
the graduation on the measuring
HEIDENHAIN manufactures the precision standard, which is designed as a serial
graduations in the following specially absolute code structure. A separate
developed, photolithographic processes: incremental track is interpolated for the
• METALLUR: contamination-tolerant position value and, depending on the
graduation consisting of metal lines on interface version, is also used to generate
gold; typical graduation period: 20 μm an optional incremental signal.
• SUPRADUR phase grating: optically
three-dimensional, planar structure;
particularly tolerant to contamination;
typical graduation period: 8 μm and finer
• OPTODUR phase grating: optically
three-dimensional, planar structure with
particularly high reflectance; typical
graduation period: 2 μm and finer
• TITANID phase grating: exceptionally
robust optically three-dimensional structure
with a high degree of reflectance; typical
grating period: 8 µm

Along with the very fine grating periods,


these processes permit high edge definition
and excellent homogeneity of the graduation.
Together with the photoelectric scanning
method, this high edge definition is critical
for the high quality of the output signals.

The master graduations are manufactured


by HEIDENHAIN on custom-built, high-
precision dividing engines.

Graduation of an absolute linear encoder

Schematic representation of a code structure with an additional


incremental track (example from the LIC 411x)
8
Incremental measuring method

With the incremental measuring method, In the most unfavorable case, machine
the graduation consists of a periodic grating movements over sizeable sections of the
structure. The position information is obtained measuring range may be necessary. To
by counting the individual increments speed up and simplify such “reference  
(measuring steps) from some point of origin. runs,” many HEIDENHAIN encoders feature
Since an absolute reference is required to distance-coded reference marks—multiple  
ascertain positions, the measuring standard reference marks that are variously spaced
is provided with an additional track that in accordance with a mathematical algorithm.
bears a reference mark. The absolute The subsequent electronics find the absolute
position on the scale, which is established reference after traversing two successive  
by the reference mark, is assigned to reference marks—thus after a traverse path
exactly one signal period. The reference of only a few millimeters (see table below).  
mark must therefore be scanned to Encoders with distance-coded reference
establish an absolute reference or to find marks are identified with a “C” following  
the last selected datum. the model designation (e.g., LIF 181 C).

With distance-coded reference marks,
the absolute reference B is calculated  
by counting the increments between two
reference marks and by applying the  
following formula:


P1 = (abs R–sgn R–1) x N + (sgn R–sgn D) x abs MRR  
2 2
and  
R = 2 x MRR–N  

Where:  
P1 = Position of the first traversed N = Nominal increment between two
reference mark in signal periods fixed reference marks in signal

periods (see table below)  
abs = Absolute value
D = Direction of traverse (+1 or –1).  
sgn = Algebraic sign function (“+1” or “–1”) Traverse of scanning unit to the
right (when properly installed)  
MRR = Number of signal periods between equals +1
the traversed reference marks  



Graduations of incremental linear encoders

Signal Nominal Maximum
period increment N in traverse  
signal periods

LIF 1x1 C 4 µm 5000 20 mm

LIDA 4x3 C 20 µm 1000 20 mm




Schematic representation of an incremental graduation with distance-coded
reference marks (LIDA 4x3 C as example)
9
Photoelectric scanning

Most HEIDENHAIN encoders utilize the Imaging scanning principle


photoelectric scanning principle. Photoelectric Put simply, the imaging scanning principle
scanning is performed without contact and uses projected-light signal generation: two
Signal period
thus does not induce wear. This method gratings with, for example, equal or similar
360° elec.
detects even extremely fine graduation grating periods—the scale and the scanning
lines with a width of only a few micrometers reticle—are moved relative to each other.
and generates output signals with very The carrier material of the scanning reticle
small signal periods. is transparent, whereas the graduation of
the measuring standard may likewise be
The finer the grating period of a measuring applied to a transparent material or to a
standard is, the greater the effect of reflective material.
diffraction on photoelectric scanning.
HEIDENHAIN linear encoders employ two When parallel light passes through a grating,
scanning principles: light and dark fields are projected at a
particular distance. At this location there is
• The imaging scanning principle for an index grating with the same or similar
grating periods from 10 μm to 200 μm. grating period. When the two graduations
• The interferential scanning principle move relative to each other, the incident
for very fine grating periods of 4 µm and light is modulated: If the gaps are aligned,
smaller. light passes through. If the lines of one
grating coincide with the gaps of the other,
no light passes through. Photocells convert
these light fluctuations into electrical signals.
The specially structured grating of the
scanning reticle filters the light to generate
nearly sinusoidal output signals. The smaller
the grating period of the grating structure
is, the closer and more tightly toleranced
the gap must be between the scanning
reticle and the scale. Workable mounting
tolerances of an encoder with the imaging
scanning principle are achieved with grating
periods of 10 μm and larger.

The LIC and LIDA linear encoders use the


imaging scanning principle.

90° Phase shift


elec.

Structured
Scale Window detector

Scanning reticle
Condenser lens

Index grating

LED light source

Photoelectric scanning in accordance with the imaging principle with a steel scale and single-field
scanning (LIDA 400)
10
Interferential scanning principle When there is relative motion between the
The sensor generates four nearly The interferential scanning principle exploits scale and the scanning reticle, the diffracted
sinusoidal current signals (I0°, I90°, I180°, the diffraction and interference of light on wavefronts undergo a phase shift: move­
and I270°), phase-shifted to each other finely divided gratings in order to produce ment by the amount of one grating period  
by 90° elec. These scanning signals do the signals used to measure displacement. shifts the positive first-order diffraction
not initially exhibit symmetry about the wavefront by one wavelength in the positive  
zero line. For this reason, the photocells A step grating is used as the measuring direction, while the negative first-order
are connected in anti-parallel, thereby standard: reflective lines with a height diffraction wavefront is displaced by one
producing two 90° elec. phase-shifted of 0.2 µm are applied to a flat, reflective wavelength in the negative direction. Since
output signals, I1 and I2, which are surface. In front of this is the scanning the two waves interfere with each other  
symmetrical about the zero line. reticle—a transparent phase grating with upon exiting the phase grating, these
the same grating period as the scale. waves are shifted relative to each other by  
In the X/Y representation on an two wavelengths. This results in two signal
oscilloscope, the signals form a When a light wave passes through the periods when there is relative motion of  
Lissajous figure. Ideal output signals scanning reticle, it is diffracted into three just one grating period.
appear as a centered circle. Deviations partial waves of the orders +1, 0, and –1,  
in the circular form and position are with nearly equal luminous intensity. The Interferential encoders use grating periods
caused by position errors and therefore waves are diffracted by the scale such that of, for example, 8 µm, 4 µm, or finer. Their  
go directly into the result of measure­ most of the luminous intensity is found in scanning signals are largely free of harmonics
ment. The size of the circle, which the reflected diffraction orders +1 and –1. and can be highly interpolated. These  
corresponds to the amplitude of the These partial waves meet again at the encoders are therefore especially well-suited
output signal, can vary within certain phase grating of the scanning reticle, for small measuring steps and high accuracy.
limits without influencing the measuring where they are diffracted again and They nevertheless feature workable
accuracy. interfere. This produces essentially three mounting tolerances.  
waves that leave the scanning reticle at
different angles. Photocells convert these The LIP, LIF, and PP linear encoders use  
alternating light intensities into electrical the interferential scanning principle.
signals.  






X/Y representation of the output signals


Orders of diffraction
–1 0 +1  
Scale Scale graduation with
DIADUR phase grating  

Condenser lens

LED light
source




Grating period


Scanning reticle:
transparent phase grating
Photocells  

Photoelectric scanning in accordance with the interferential measuring principle and single-field scanning

11
Reliability

Exposed linear encoders from HEIDENHAIN


are optimized for use on fast, precise
machines. Despite their exposed mechanical
design, these encoders are highly insensitive
to contamination, ensure high long-term
stability, and are quickly and easily mounted.

Lower sensitivity to contamination


Both the high quality of the grating and the
scanning method are responsible for the
accuracy and reliability of linear encoders.
Exposed linear encoders from HEIDENHAIN
employ single-field scanning, in which a
single large scanning field is used to
generate the scanning signals. Local
contamination on the measuring standard
(e.g., fingerprints from the mounting process
or oil residues from guideways) has only a
slight influence on the light intensity of the
signal components and thus on the scanning
signals. Although this contamination does
cause a change in the amplitude of the
output signals, their offset and phase position
remain unaffected. The signals remain
highly interpolable, and the position error
within one signal period remains small.
Fingerprint Wire Oil1) Oil2)
The large scanning field further reduces
the sensitivity to contamination. Depending
1.2
Signal in VPP 

on the nature of the contamination, this


feature can even prevent encoder failure. 1.0
This is particularly true of the LIDA 400 and 0.8
LIF 400, which feature a very large scanning
surface area (14.5 mm2) relative to their 0.6
grating period. The same goes for the 0.4
LIC 4100, which has a scanning surface
0.2
area of 15.5 mm2. Even in the case of
contamination from printer’s ink, PCB dust, 0
or drops of water or oil up to 3 mm in 0 40 60 80 100 120
diameter, these encoders continue to Position in mm 
provide high-quality signals. The position
Interpolation error and noise in µm 

error remains far below the values specified 1


for the accuracy grade of the scale.

The LIDA, LIC, LIF, and LIP 6000 encoders 0


are equipped with the HSP 1.0 signal
processor ASIC from HEIDENHAIN. This
ASIC continuously monitors the scanning –1
signal and compensates nearly completely
for fluctuations in signal amplitude. If the 100 nm
signal amplitude decreases as the result of
50 nm
contamination on the scanning reticle or
measuring standard, the ASIC reacts by 0
increasing the LED current. The ensuing –50 nm
increase in LED light intensity barely raises
the noise level, even in the case of strong –100 nm
signal stabilization. As a result, contamination
has only a very slight influence on With HSP 1.0 signal processing ASIC
interpolation errors and the position noise. Without HSP 1.0 signal processing ASIC
1), 2) = Oil drops ¬ 2 mm half1) or fully2) convering the incremental track

Measuring standard with contamination and the associated signal amplitudes with conventional
scanning and scanning with the HSP 1.0 signal processing ASIC

12
Durable measuring standards OPTODUR
By nature of their design, the measuring SUPRADUR
standards of exposed linear encoders are Reflective layer
less protected from their environment.  
For this reason, HEIDENHAIN always uses
tough gratings manufactured in special Transparent  
processes. layer

In the OPTODUR and SUPRADUR


processes, a transparent layer is first
Reflective  
applied onto the reflective primary layer. primary layer
For creating an optically three-dimensional  
phase grating, an extremely thin, hard Substrate
chrome layer is applied to a thickness of  
only a few nanometers. The graduations
for the imaging scanning principle exhibit  
a similar design and are manufactured in
the METALLUR process. A reflective gold METALLUR  
layer is covered with a thin layer of glass.
On it are chromium lines acting as absorbers.
Semitransparent  
layer
Since they are only several nanometers
thick, these lines are semitransparent. Transparent
layer
Measuring standards with OPTODUR,
SUPRADUR, or METALLUR graduations  
have proven to be particularly robust and
insensitive to contamination because the  
low height of their structure leaves practically
no surface for dust, dirt, or water particles  
to accumulate.

Workable mounting tolerances Reflective
Very small signal periods usually come primary layer  
with very narrow mounting tolerances for
the gap between the scanning head and  
scale tape. This is the result of diffraction

Signal amplitude in % 

caused by the grating structures. Such


diffraction can lead to a signal attenuation of  
50 % upon a gap change of only ±0.1 mm.
The interferential scanning principle and  
innovative index gratings on encoders that
use the imaging principle allow for workable
Mounting tolerance

mounting tolerances despite tiny signal (e.g., LIDA 403/409)
periods.  
The mounting tolerances of exposed linear  
encoders from HEIDENHAIN have only a
slight influence on the output signals. In  
particular, the specified distance tolerance = During mounting (without HSP 1.0)
between the scale and scanning head = During operation (with HSP 1.0) Scanning gap in mm   
(scanning gap) causes only a negligible  
change in the signal amplitude. During
operation, the reliability and stability of the  
Signal amplitude in % 

signals are additionally improved by the


HSP 1.0. The two diagrams illustrate the  
correlation between the scanning gap and
signal amplitude for the encoders of the  
LIDA 400 and LIF 400 series.
Mounting tolerance
LIF 400



= During mounting (without HSP 1.0) Scanning gap in mm 
= During operation (with HSP 1.0)

13
Measuring accuracy

The accuracy of the linear measurement Encoder-specific position error Accuracy of the interpolation
is mainly determined by Encoder-specific position error includes The accuracy of the interpolation is mainly
• the quality of the graduation, • the accuracy of the measuring standard, influenced by
• the quality of the graduation carrier, • the accuracy of the interpolation, and • the size of the signal period,
• the quality of the scanning process, • the position noise. • the homogeneity and period definition
• the quality of the signal processing of the graduation,
electronics, and by Accuracy of the measuring standard • the quality of scanning filter structures,
• how the encoder is installed within the The accuracy of the measuring standard • the characteristics of the sensors, and
machine. is mainly determined by • the quality of the signal processing.
• the homogeneity and period definition
These factors can be subdivided into of the graduation, The accuracy of the interpolation is
encoder-specific position errors and • the alignment of the graduation on its ascertained with a serially produced
application-dependent factors. For carrier, and measuring standard and is indicated by a
assessment of the attainable system • the stability of the graduation carrier. typical maximum value u of the inter­
accuracy, all of the individual factors must polation error. Encoders with an analog
be taken into account. The accuracy of the measuring standard is interface are tested with a HEIDENHAIN
indicated by the uncompensated maximum electronic device (e.g., EIB 741). The
value of the baseline error. This accuracy maximum values do not include position
is ascertained under ideal conditions via noise and are indicated in the specifications.
measurement of the position errors with a
serially produced scanning head. The The interpolation error already has an effect
distance between the measuring points is at very low traversing speeds and during
equivalent to the integer multiple of the repeated measurements. This error leads
signal period. As a result, interpolation to fluctuations in the traversing speed,
errors have no effect. particularly within the speed control loop.

The accuracy grade a defines the upper


limit of the baseline error within any section
up to one meter in length. For special
encoders, an additional baseline error is
stated for defined intervals of the
measuring standard.

Accuracy of the measuring standard Accuracy of the interpolation


Position error

Position error 

Baseline error

Interpolation
error
Signal level 

Signal period 360°


Position elec.

Position

14
Position noise Application-dependent Vibration
Position noise is a random process leading position error To function properly, linear encoders must
to unpredictable position errors. The position In the case of encoders without integral not be continuously subjected to strong
values are grouped around an expected bearing, installing the encoder in the vibration. The best mounting surfaces are  
value in the form of a frequency distribution. machine has a significant influence on the therefore solid and stable machine elements.
attainable overall accuracy beyond the Encoders should not be mounted on  
The amount of position noise depends specified encoder-specific position error. hollow parts or with adapter blocks, etc.
on the signal processing bandwidths For assessment of the overall accuracy,
necessary for forming the position values. the individual application-dependent errors Influence of temperature
It is ascertained within a defined time In order to avoid temperature effects, the
must be measured and taken into account.  
interval and is stated as a product-specific linear encoders should not be mounted in
RMS value. Deformation of the graduation close proximity to heat sources.  
Errors due to a deformation of the graduation
In the velocity control loop, position noise are not to be neglected. Such deformation  
influences the speed stability at low occurs when the measuring standard is
traversing speeds. mounted on an uneven surface (e.g., a  
convex surface).

Mounting location  
Poor mounting of linear encoders can
aggravate the effect of guideway error on
measuring accuracy. To keep the resulting
Abbé error as small as possible, the scale
should ideally be mounted to the machine  
slide and at the height of the table. It is
important to ensure that the mounting  
surface is parallel to the machine guideway.









Position noise

Position error 


RMS






Time  Frequency density



15
Calibration chart

All HEIDENHAIN linear encoders are


inspected for accuracy and proper functioning
prior to shipping.

The accuracy of the linear encoders is


ascertained during traversing movements in
both directions. The number of measuring
positions is selected such that not only the
long-range errors but also the position
errors within a single signal period are very
accurately determined. LIP 201 R
ID 631000-13
The Quality Inspection Certificate Qualitätsprüf-Zertifikat Quality Inspection Certificate SN 44408260
DIN 55 350-18-4.2.2 DIN 55 350-18-4.2.2
confirms the specified accuracy grades of
each encoder. The calibration standards Positionsabweichung F [µm]
Position error F [µm]
ensure traceability to recognized national
or international standards, such as required
by EN ISO 9001.

For the LIP and PP encoder series, an


additional calibration chart documents the
ascertained position error over the
measuring range. It also specifies the
measuring parameters and the measure­ Messposition PosE [mm] / Measured position PosE [mm]

ment uncertainty.
Die Messkurve zeigt die Mittelwerte der Positionsabweichungen The error curve shows the mean values of the position errors from
aus Vorwärts- und Rückwärtsmessung. measurements in forward and backward direction.

Temperature range Positionsabweichung F des Maßstab: F = PosM – PosE


PosM = Messposition der Messmaschine
Position error F of the scale: F = PosM – PosE
PosM = position measured by the measuring machine
The linear encoders are calibrated at a PosE = Messposition des Maßstab PosE = position measured by the scale

reference temperature of 20 °C. The Maximale Positionsabweichung der Messkurve


innerhalb 670 mm ± 0,30 µm
Maximum position error of the error curve
within 670 mm ± 0.30 µm
position error documented in the calibration
chart is valid at this temperature. Unsicherheit der Messmaschine
U95% = 0,040 µm + 0,400 ·10–6 · L (L = Länge des Messintervalls)
Uncertainty of measuring machine
U95% = 0.040 µm + 0.400 ·10–6 · L (L = measurement interval length)

Messparameter Measurement parameters


Messschritt 1000 µm Measurement step 1000 µm
Erster Referenzimpuls bei Messposition 335,0 mm First reference pulse at measured position 335.0 mm
Relative Luftfeuchtigkeit max. 50 % Relative humidity max. 50 %

Dieser Maßstab wurde unter den strengen This scale has been manufactured and inspected in accordance with
HEIDENHAIN-Qualitätsnormen hergestellt und geprüft. the stringent quality standards of HEIDENHAIN.
Die Positionsabweichung liegt bei einer Bezugstemperatur The position error at a reference temperature of 20 °C lies within
von 20 °C innerhalb der Genauigkeitsklasse ± 1,0 µm. the accuracy grade ± 1.0 µm.

Kalibriernormale Kalibrierzeichen Calibration standards Calibration references


Jod-stabilisierter He-Ne Laser 40151 PTB 11 Iodine-stabilized He-Ne Laser 40151 PTB 11
Wasser-Tripelpunktzelle 61 PTB 10 Water triple point cell 61 PTB 10
Gallium-Schmelzpunktzelle 62 PTB 10 Gallium melting point cell 62 PTB 10
Barometer A6590 D-K-15092-01-00 2012-12 Pressure gauge A6590 D-K-15092-01-00 2012-12
Luftfeuchtemessgerät 0230 DKD-K-30601 2012-11 Hygrometer 0230 DKD-K-30601 2012-11

28.01.2014
DR. JOHANNES HEIDENHAIN GmbH · 83301 Traunreut, Germany · www.heidenhain.de · Telefon: +49 8669 31-0 · Fax: +49 8669 5061 Prüfer/Inspected by K. Sommerauer

16
Mechanical design types and mounting
Linear scales

Exposed linear encoders are made up of


two separate components: the scanning
head and linear scale or scale tape, which
are brought together solely over the machine  
guideway. For this reason, the machine
must be designed from the very beginning Scale  
to meet the following requirements: LIP 201
• The machine guideway must be designed
such that the scanning gap tolerances
are complied with at the location where  
the encoder is installed (see Specifications)
• The mounting surface of the scale must  
meet the flatness requirements
• To facilitate adjustment of the scanning  
head to the scale, the scanning head
should be fastened with a mounting  
bracket Scale
LIP 6001  
LIC 4003
Scale versions
HEIDENHAIN provides the appropriate  
scale version for the given application and
accuracy requirements.

LIP 201  
LIP 6001
LIC 4003 Scale  
The graduation carriers are fastened directly LIF  101 C
to the mounting surface with clamps.  
A holder is used to define the thermal fixed
point.  
Accessories for the LIC 41x3 and LIP 60x1:  
Fixing clamps ID 1176458-01
Holder for thermal  
fixed point ID 1176475-01
Spacer shims ID 1176441-01
Scale  
LIP 6001
Adhesive* ID 1180444-01 LIF 401

Double-cartridge gun ID 1180450-01 LIDA 403
LIC 4003
Dispensing nozzles  
and mixing tubes ID 1176444-01

LIP 6001
LIF 401  
LIDA 403
LIC 4003  
The graduation carriers are adhesively
bonded directly to the mounting surface  
with PRECIMET adhesive mounting film,
with even pressure applied by means

of a roller. A thermal fixed point can be  
established at a location with epoxy
adhesive.  
Accessory  
Roller ID 276885-01

* Caution: no transport by air (dangerous


goods)  
Trade name: 3M Scotch-Weld Epoxy
Adhesive DP-460 EG  

17
LIC 41x5
Scale for LIC 4005, LIDA 405
LIDA 4x5
Linear encoders of the LIC 41x5 and
LIDA 4x5 series are specially designed for
large measuring lengths. They are mounted
with scale carrier sections screwed onto
the mounting surface or adhesively bonded
with PRECIMET adhesive mounting film.
The single-piece steel scale tape is then
pulled through the carrier, tensioned as
specified, and secured at its ends to the
machine base. The LIC 41x5 and LIDA 4x5
encoders thereby exhibit the same thermal
behavior as that of the mounting surface.

LIC 21x7
LIC 41x7
LIDA 2x7
LIDA 4x7
Encoders of the LIC 41x7, LIC 21x7, LIDA 2x7,
and LIDA 4x7 series are also designed for
large measuring lengths. The scale carrier
sections are adhesively bonded to the mount-
ing surface with PRECIMET adhesive mount-
ing film; the single-piece scale tape is pulled
through, and the midpoint is secured to the
machine bed. This mounting method allows Scale for LIC 4007, LIC 2107, LIDA 207/407
the scale to expand freely at both ends and
ensures a defined thermal behavior.

Accessory for LIC 41x7, LIDA 4x7


Mounting aid ID 373990-01

Mounting aid
(for LIC 41x7, LIDA 4x7)

LIC 21x9
LIC 41x9 Scale for LIC 4009, LIC 2109, LIDA 209/409
LIDA 2x9
LIDA 4x9
The steel scale tape of the graduation is
adhesively bonded directly to the mounting
surface with PRECIMET adhesive mounting
film, with pressured applied evenly with a
roller. A ridge or aligning rail with a height
of 0.3 mm must be provided for the
horizontal alignment of the scale tape.

Accessories for versions with PRECIMET


Roller ID 276885-01
Mounting aid, LIDA 2x9 ID 1070307-01
Mounting aid, LIC 21x9 ID 1070853-01
18
Mechanical design types and mounting
Scanning heads

Because exposed linear encoders are


assembled on the machine, they must be LIP 200
precisely adjusted after mounting. This
adjustment determines the final accuracy  
of the encoder. It is therefore advisable to
design the machine such that this Spacer shim  
adjustment is as easy and practical as
possible, while also ensuring the greatest
possible degree of mounting stability.

Mounting the LIP 2x1
The LIP 2x can be fastened from the side as  
well as from above. The housing cover has a
raised contact surface for the thermal con-  
nection to ensure optimal heat dissipation.
The contact surface is compressed against  
the mounting element during mounting. LIP 6000

Mounting the LIP 60x1
The LIP 60x can be fastened from the side  
as well as from above. When mounted
Spacer shim
from above, it is additionally possible to
define a fixed center of rotation by inserting
an alignment pin with ¬ 2 mm or ¬ 3 mm. Option 1  
This facilitates the alignment of the scanning
Option 2
head parallel to the scale. The alignment  
pin can be removed when mounting is
completed.  
Mounting the LIF  
This scanning head features a centering LIF 400
collar with which the scanning head can be  
Spacer shim
rotated in the location hole of the angle
bracket and thereby aligned parallel to the  
scale.

Mounting the LIC/LIDA  
There are three options for mounting the
scanning head (see Dimensions). A spacer  
shim makes it quite easy to set the gap
between the scanning head and the scale  
or scale tape. It is helpful to fasten the
scanning head from behind with a mounting
LIC/LIDA

bracket. The scanning head can be very
precisely adjusted through a hole in the  
Spacer shim
mounting bracket with the aid of a tool.

Adjustment
The gap between the scale and scanning

head is easily adjusted with the aid of a  
spacer shim.

The signals from the LIC, LIP 6000, and
LIP 200 can be quickly and easily adjusted  
with the aid of the PWM 20/21 adjustment
and testing package. For all other exposed  
linear encoders, the incremental and
reference mark signals are adjusted through
a slight rotation of the scanning head (for
the LIDA 400, it is possible with the aid of
a tool).


HEIDENHAIN offers the appropriate
measuring and testing devices as  
adjustment aids (see Testing equipment
3) Only with the LIDA 400
and diagnostics).
19
Function indicator

The LIDA, LIF, and LIP 6071 linear encoders


feature an integrated function indicator with
a multicolor LED. This makes it possible to
quickly and easily check the signal quality
during normal operation.

The function indicator offers a number of


benefits:
• Indication of the scanning signal quality
via a multicolor LED
• Continuous monitoring of incremental
signals over the entire measuring length
• Function indicator of the reference-mark
signal
• Quick check of correct operation in the
field without technical aids
LIDA: function indicator in the scanning head
The integrated function indicator permits
both a reliable assessment of the
incremental signals as well as a check of
the reference mark signal. The quality of
the incremental signals is indicated by
color gradations that provide a detailed
indication of the signal quality. Whether or
not the reference mark signal complies
with tolerances is shown by a pass/fail
indicator.

LED indicator for incremental signals


LED color Quality of the scanning
signals LIF, LIP 6071: function indicator in the interface electronics

 Optimal

 Good

 Acceptable

 Unsatisfactory

LED indicator for reference-mark-signal


(functional check)
When the reference mark is traversed, the
LED lights up briefly in blue or red:
 Out of tolerance
 Within tolerance

20
General mechanical information

Temperature range Protection (EN 60529) System tests


The operating temperature range states The scanning heads of exposed linear Encoders from HEIDENHAIN are usually
the limits of ambient temperature within encoders feature the following degrees of integrated as components into complete
which the specifications of the linear protection: systems. Such applications require  
encoder are complied with. The storage comprehensive testing of the complete
temperature range of –20 °C to +70 °C Scanning head Protection system, irrespective of the encoder’s  
applies when the unit remains in its specifications.
packaging. LIC IP67
The specifications provided in this brochure
Thermal characteristics LIDA IP40 apply to the specific encoder, not to the  
The thermal behavior of the linear encoder complete system. Any operation of the
is an essential criterion for the working LIF IP50 encoder outside of the specified range or  
accuracy of the machine. As a general rule, outside of its proper and intended use is
the thermal behavior of the linear encoder LIP 200 IP40 at the user’s own risk.  
should match that of the workpiece or
measured object. During temperature LIP 300 IP50 In safety-related systems, the encoder’s  
changes, the linear encoder should expand LIP 6000 position value must be tested by the
or contract in a defined, reproducible higher-level system after switch-on.

manner. PP IP50  
The graduation carriers of HEIDENHAIN
linear encoders (see Specifications) have The scales have no special protection.
differing coefficients of thermal expansion. If the scales are exposed to contamination,
This makes it possible to select the linear protective measures must be taken.  
encoder with the thermal behavior best
suited to the application. Acceleration
Assembly  
Linear encoders are subjected to various
The applicable steps and dimensions that
Parts subject to wear types of acceleration during operation and
must be complied with during mounting

Encoders from HEIDENHAIN are designed mounting.
are specified solely in the mounting  
for a long service life. Preventive mainte- • The indicated maximum values for
instructions supplied with the device.
nance is not required. However, they do vibration apply to frequencies of 55 Hz
contain components that are subject to wear, to 2000 Hz (EN 60068-2-6). If, depending
All mounting-related information in this  
brochure is therefore provisional and
depending on the application and how they on the application and the mounting
are deployed. This especially ­applies to scenario, the permissible acceleration
non-binding, and will not become the  
subject matter of a contract.
­cables subjected to frequent flexing. Other values are exceeded (e.g., in the case
parts subject to wear are the bearings in of resonances), then the encoder can

encoders with integral bearing, the radial become damaged. Comprehensive  
shaft seal rings in rotary encoders and testing of the entire system is therefore
­angle encoders, and the sealing lips on required  
­linear encoders. • The maximum permissible acceleration
values (semi-sinusoidal shock) for shock  
and impact loads are valid for 11 ms
or 6 ms (EN 60068-2-27). Under no  
circumstances should a hammer or
similar implement be used to adjust or  
position the encoder





SUPRADUR, METALLUR, and OPTODUR


are registered trademarks of  
DR. JOHANNES HEIDENHAIN GmbH,
Traunreut, Germany.  
Zerodur is a registered trademark of
Schott-Glaswerke, Mainz, Germany.  

21
Functional safety

With the absolute linear encoders of the The reliable transmission of the position is In addition to the data interface, the me-
LIC 4100 series, HEIDENHAIN offers an based on two independently generated chanical connection of the encoder to the
ideal solution for position acquisition on absolute position values and on error bits drive is also safety-relevant. In table D8 of
linear axes in safety-related applications. provided to the safe control. The functions the standard for electrical drive systems,
In conjunction with a safe control, the of the encoder can be used for numerous EN 61800-5-2, the loosening of the me-
encoders can be used as single-encoder safety functions of the complete system chanical connection between the encoder
systems in applications with control category as per EN 61800-5-2. and the motor is listed as a fault that re-
SIL 2 (as per EN 61508) or performance quires consideration. Since it cannot be
level "d" (as per EN ISO 13849). The LIC 4100 linear encoder can provide a guaranteed that the control will detect such
safe, absolute position value at any time— errors, fault exclusion for the loosening of
including immediately after switch-on. the mechanical connection is required in
Purely serial data transfer takes place via many cases.
the bidirectional EnDat 2.2 interface.
Unless otherwise specified, HEIDENHAIN
encoders are designed for a service life of
20 years (in accordance with ISO 13849).

Fault exclusion for the loosening of the Mounting and operating conditions
mechanical connection The qualification of the mechanical fault
The machine manufacturer is responsible exclusion was performed for a broad range
for the dimensioning of mechanical of encoder applications. As a result, fault
connections in a drive system. When exclusion is ensured for the following
planning the mechanical design, the OEM operating conditions.
should ideally consider the conditions
within the application. However, establishing
proof of a safe connection is cost- and
effort-intensive.
For this reason, HEIDENHAIN has
developed a mechanical fault exclusion for
the LIC 4100 series and has confirmed it
through a type examination.

3)
Mechanical Fastening Safe position for the Confined parameters
connection mechanical coupling
1) 2)
Scale Screw connection ±0.0 mm See Specifications:
• Vibration
Scanning head Mounting configurations I and II: • Shock
Screw connection:2)
M2x25 ISO 4762 8.8 screws See Mounting:
• Usable materials
Mounting configuration III: • Mounting conditions
Screw connection:2)
M2x16 ISO 4762 8.8 screws
1)
A materially bonding anti-rotation lock is to be used for the screw connections of the scale (mounting/servicing)
2)
Friction class B as per VDI 2230
3)
When compared with an LIC 4100 without functional safety

22
Material Angle bracket for scanning head Mounting surface
The material used for the mounting for measuring
surfaces of the scanning head and standard
measuring standard must comply with  
the specifications provided in the table. Material Steel Aluminum Steel, aluminum

Mounting temperature Tensile strength  600 N/mm2  220 N/mm2 Not applicable
All of the information provided on screw Rm
connections assumes a mounting
temperature of 15 °C to 35 °C.  390 N/mm2  130 N/mm2
Shear strength τB Not applicable  
Mounting the scanning head Elastic modulus E  200 000 N/mm
2
 70 000 N/mm2 Not applicable  
M2 screws as per ISO 4762 8.8 are to be to 215 000 N/mm2 to 75 000 N/mm2
used for the mechanical fault exclusion  
(included in delivery). A PWM20/21 and the Coefficient of 10 · 10–6 K–1 to 25 · 10–6 K–1 10 · 10–6 K–1 to
mounting wizard of the ATS software are thermal expansion 17 · 10–6 K–1 25 · 10–6 K–1  
then used to check and optimize the Þtherm
mounting.  
Mounting the scale tape  
The steel scale tape of the graduation is
adhesively bonded directly to the mounting
surface with PRECIMET adhesive mounting
film, and pressure is applied evenly with a  
roller. The scale tape is additionally secured
by a screw (punched hole in scale tape).  
The mounting aid (included in delivery)
facilitates the symmetrical alignment of the  
screw to the punched hole.

Note:
The scanning head may be operated only  
within the permissible mounting tolerances
and measuring length of the measuring  
standard.

Included in delivery:  
Scanning head
• Fastener kit ID 1233536-01  
(2 x M2x16 screws)
• Fastener kit ID 1233536-02  
(2 x M2x25 screws)
• Spacer shim ID 578983-06  
Scale  
• One screw ID 1233558-01
• Mounting aid ID 1244387-02  

Accessories:

• Mounting wizard in ATS software  
• Roller ID 276885-01




23
LIC 4113, LIC 4193
Absolute linear encoders for measuring lengths of up to 3 m
• Measuring steps of down to 1 nm
• Glass or glass ceramic measuring standard
• Measuring standard is secured with adhesive film or with fixing clamps
• Consists of a linear scale and scanning head
• Version available for use in a high vacuum (see separate Product Information document)

Scale, clamped

33.2

Scale, adhesively
bonded

0.05

Mounting possibilities for scanning head


(shown without fixing clamps)

7.15±0.1 Clamped 0.75 +0.25


−0.20 Clamped
7.28±0.1 Bonded 0.75 +0.25
−0.20 Clamped
0.75 ±0.25 Bonded
0.75 ±0.25 Bonded

0.75 +0.25 7.15±0.1 Clamped 15.65 Clamped


−0.20 Clamped
7.28±0.1 Bonded 15.78 Bonded
0.75 ±0.25 Bonded

F = Machine guideway
* = Mounting error plus dynamic guideway error
Ⓢ = Beginning of measuring length (ML)
Ⓒ = Code start value: 100 ±1 mm
Ⓛ = Scale length
Ⓖ = Fixed-point element for defining the thermal fixed point
1 = Gap is adjusted with a spacer shim during mounting
2 = Depending on the measuring length (ML), use an additional pair of fixing clamps

24
Linear scale LIC 4003

Measuring standard METALLUR grating on glass ceramic or glass


Coefficient of linear expansion* –6 –1
Þtherm  8 · 10 K (glass)  
Þtherm = (0 ±0.5) · 10–6 K–1 (Robax glass ceramic)

Accuracy grade* ±1 µm (only for Robax glass ceramic), ±3 µm, ±5 µm

Baseline error  ±0.275 µm/10 mm



Measuring length (ML)*  240  340  440  640  840 1040 1240 1440 1640 1840 2040 2240 2440
in mm 2640 2840 3040 (Robax glass ceramic only up to ML of 1640)  
Mass 3 g + 0.11 g/mm of measuring length  

Scanning head LIC 411 LIC 419 F LIC 419 M LIC 419 P LIC 419Y


Interface EnDat 2.2 Fanuc Mitsubishi high Panasonic Yaskawa
Serial interface Þi speed interface Serial Interface Serial Interface  

Ordering designation* EnDat22 Fanuc05 Mit03-4 Mit02-2 Pana01 YEC07

Measuring step* 0.01 µm (10 nm)  


0.005 µm (5 nm)
0.001 µm (1 nm)1)  
Calculation time tcal  5 µs –  
Clock frequency  16 MHz

2)
Traversing speed  600 m/min

Interpolation error ±20 nm

Electrical connection* Cable, 1 m or 3 m, with 8-pin M12 coupling (male) or 15-pin D-sub connector (male)  
Cable length  100 m  50 m  30 m  50 m  
(with HEIDENHAIN cable)

Supply voltage DC 3.6 V to 14 V

Power consumption2) (max.) At 3.6 V:  700 mW At 3.6 V:  850 mW
At 14 V:  800 mW At 14 V:  950 mW  
Current consumption (typical) At 5 V: 75 mA At 5 V: 95 mA (without load)  
(without load)

2
Vibration 55 Hz to 2000 Hz    500 m/s (EN 60068-2-6)
Shock 6 ms  1000 m/s2 (EN 60068-2-27)


Operating temperature –10 °C to 70 °C

Mass Scanning head  18 g (without cable)
Connecting cable 20 g/m  
Connecting element M12 coupling: 15 g; D-sub connector: 32 g

* Please select when ordering
1)
Mitsubishi: measuring length  2040 mm
Yaskawa: measuring length  1840 mm
2)
See General electrical information in the Interfaces of HEIDENHAIN Encoders brochure

Robax is a registered trademark of Schott-Glaswerke, Mainz, Germany  

25
LIC 4115, LIC 4195
Absolute linear encoders for measuring lengths of up to 28 m
• For measuring steps of down to 1 nm
• Steel scale tape is drawn into the aluminum extrusions and tensioned
• Consists of a linear scale and scanning head

12
6.23±0.1

6.1±0.1

2.5
3

0.55/50 *

M3x7

7.3
3.5

1 8

3.7
16.5 R>

3
8 30±0.1 >8

ML
ML>>2040
2040(e.g.,
(z.B.5040)
5040)

Mounting possibilities for scanning head

9.6±0.1 ②

18.1±0.1
② 18.23±0.1
9.6±0.1

Ô = Scale carrier sections secured with screws Ⓩ = Spacer for measuring lengths of 3040 mm
Õ = Scale carrier sections secured with or greater
PRECIMET Ⓣ = Carrier length
F = Machine guideway Ⓜ = Mounting surface for scanning head
P = Measuring points for alignment 1 = Optical centerline
* = Mounting error plus dynamic guideway error 2 = Mounting clearance between scanning
Ⓒ = Code start value: 100 mm head and extrusion
Ⓢ = Beginning of measuring length (ML) 3 = Direction of motion of the scanning unit for
ascending position values
26
Scale LIC 4005

Measuring standard Steel scale tape with absolute and incremental METALLUR track
Coefficient of linear expansion Depends on the mounting surface  
Accuracy grade ±5 µm  

Baseline error  ±0.750 µm/50 mm (typical)

Measuring length (ML)*  140  240  340  440  540  640  740  840  940 1040 1140 1240 1340 1440  
in mm 1540 1640 1740 1840 1940 2040

Greater measuring lengths of up to 28 440 mm with a single-section scale tape and individual scale
carrier sections  
Mass Scale tape 31 g/m  
1)
Parts kit 80 g + n · 27 g
Scale tape carrier 187 g/m  

Scanning head LIC 411 LIC 419 F LIC 419 M LIC 419 P LIC 419Y

Interface EnDat 2.2 Fanuc Mitsubishi high Panasonic Yaskawa


Serial Interface Þi speed interface Serial Interface Serial Interface  
Ordering designation* EnDat22 Fanuc05 Mit03-4 Mit02-2 Pana01 YEC07  
Measuring step* (note 0.01 µm (10 nm)  
measuring length limitation2)) 0.005 µm (5 nm)
0.001 µm (1 nm)  
Calculation time tcal  5 µs –  
Clock frequency  16 MHz

3)
Traversing speed  600 m/min  
Interpolation error ±20 nm  
Electrical connection* Cable, 1 m or 3 m, with 8-pin M12 coupling (male) or 15-pin D-sub connector (male)  
Cable length  100 m  50 m  30 m  50 m  
(with HEIDENHAIN cable)

Supply voltage DC 3.6 V to 14 V

3)
Power consumption (max.) At 3.6 V:  700 mW At 3.6 V:  850 mW
At 14 V:  800 mW At 14 V:  950 mW  

Current consumption (typical) At 5 V: 75 mA At 5 V: 95 mA (without load)



(without load)  
2
Vibration 55 Hz to 2000 Hz    500 m/s (EN 60068-2-6)  
Shock 6 ms  1000 m/s2 (EN 60068-2-27)

Operating temperature –10 °C to 70 °C

Mass Scanning head  18 g (without cable)
Connecting cable 20 g/m
Connecting element M12 coupling: 15 g; D-sub connector: 32 g

* Please select when ordering
1)
n = 1 for ML 3140 mm to 5040 mm; n = 2 for ML 5140 mm to 7040 mm; etc.*  
2)
Mitsubishi: 1 nm: measuring length  2040 mm; 5 nm: measuring length  10 040 mm; 10 nm: measuring length  20 040 mm
Yaskawa: 1 nm: measuring length  1840 mm; 5 nm: measuring length    9040 mm; 10 nm: measuring length  18 040 mm
3)

See General electrical information in the Interfaces of HEIDENHAIN Encoders brochure

27
LIC 4117, LIC 4197
Absolute linear encoders for measuring lengths of up to 6 m
• For measuring steps of down to 1 nm
• Steel scale tape is drawn into the aluminum extrusions and fastened at center
• Consists of a linear scale and scanning head


0.55/50 *

Mounting possibilities for scanning head


F = Machine guideway
P = Measuring points for alignment
* = Mounting error plus dynamic guideway error
Ⓒ = Code start value: 100 mm
Ⓢ = Beginning of measuring length (ML)
Ⓣ = Carrier length
1 = Optical centerline
2 = Mounting clearance between scanning head and extrusion
3 = Direction of motion of the scanning unit for ascending position values
28
Scale LIC 4007

Measuring standard Steel scale tape with absolute and incremental METALLUR track
Coefficient of linear expansion –6 –1
Þtherm  10 · 10 K  

Accuracy grade* ±3 µm (up to ML 1040), ±5 µm (at ML 1240 or greater), ±15 µm1)  

Baseline error  ±0.750 µm/50 mm (typical)

Measuring length (ML)*  240  440  640  840 1040 1240 1440 1640 1840 2040 2240 2440 2640 2840  
in mm 3040 3240 3440 3640 3840 4040 4240 4440 4640 4840 5040 5240 5440 5640
5840 6040  
Mass Scale tape 31 g/m  
Parts kit 20 g
Scale tape carrier 68 g/m  

Scanning head LIC 411 LIC 419 F LIC 419 M LIC 419 P LIC 419Y


Interface EnDat 2.2 Fanuc Mitsubishi high Panasonic Yaskawa
Serial Interface Þi speed interface Serial Interface Serial Interface

Ordering designation* EnDat22 Fanuc05 Mit03-4 Mit02-2 Pana01 YEC07  


Measuring step* 0.01 µm (10 nm)  
0.005 µm (5 nm)
0.001 µm (1 nm)2)  
Calculation time tcal  5 µs –  
Clock frequency  16 MHz

3)
Traversing speed  600 m/min

Interpolation error ±20 nm  
Electrical connection* Cable, 1 m or 3 m, with 8-pin M12 coupling (male) or 15-pin D-sub connector (male)  
Cable length  100 m  50 m  30 m  50 m  
(with HEIDENHAIN cable)

Supply voltage DC 3.6 V to 14 V

Power consumption3) (max.) At 3.6 V:  700 mW At 3.6 V:  850 mW
At 14 V:  800 mW At 14 V:  950 mW  

Current consumption (typical) At 5 V: 75 mA At 5 V: 95 mA (without load)  


(without load)

2
Vibration 55 Hz to 2000 Hz    500 m/s (EN 60068-2-6)  
Shock 6 ms  1000 m/s2 (EN 60068-2-27)

Operating temperature –10 °C to 70 °C

Mass Scanning head  18 g (without cable)
Connecting cable 20 g/m  
Connecting element M12 coupling: 15 g; D-sub connector: 32 g

* Please select when ordering


1)
±5 µm after linear length-error compensation in the evaluation electronics
2)  
Mitsubishi: measuring length  2040 mm
Yaskawa: measuring length  1840 mm  
3)
See General electrical information in the Interfaces of HEIDENHAIN Encoders brochure

29
LIC 4119, LIC 4199
Absolute linear encoders for measuring lengths of up to 1 m
• For measuring steps of down to 1 nm
• Steel scale tape is adhesively bonded to mounting surface
• Consists of a linear scale and scanning head

Mounting possibilities for scanning head

F = Machine guideway
* = Mounting error plus dynamic guideway error
Ⓒ = Code start value: 100 mm
Ⓢ = Beginning of measuring length (ML)
Ⓛ = Scale tape length
1 = Optical centerline
2 = Mounting clearance between scanning head and linear scale
3 = Direction of motion of the scanning unit for ascending position values

30
Scale LIC 4009

Measuring standard Steel scale tape with absolute and incremental METALLUR track
Coefficient of linear expansion –6 –1
Þtherm  10 · 10 K  

Accuracy grade* ±3 µm, ±15 µm1)  

Baseline error  ±0.750 µm/50 mm (typical)

Measuring length (ML)* 70 120 170 220 270 320 370 420 520 620 720 820 920 1020  
in mm

Mass 31 g/m

Scanning head LIC 411 LIC 419 F LIC 419 M LIC 419 P LIC 419Y
   
Interface EnDat 2.2 Fanuc Mitsubishi high Panasonic Yaskawa  
Serial Interface Þi speed interface Serial Interface Serial Interface

Ordering designation* EnDat22 Fanuc05 Mit03-4 Mit02-2 Pana01 YEC07

Measuring step* 0.01 µm (10 nm)


0.005 µm (5 nm)  
0.001 µm (1 nm)2)

Calculation time tcal  5 µs –
Clock frequency  16 MHz  
Traversing speed3)  600 m/min  
Interpolation error ±20 nm  

Electrical connection* Cable, 1 m or 3 m, with 8-pin M12 coupling (male) or 15-pin D-sub connector (male)


Cable length  100 m4)  50 m  30 m  50 m
(with HEIDENHAIN cable)  
Supply voltage DC 3.6 V to 14 V  
Power consumption3) (max.) At 3.6 V:  700 mW At 3.6 V:  850 mW  
At 14 V:  800 mW At 14 V:  950 mW

Current consumption (typical) At 5 V: 75 mA At 5 V: 95 mA (without load)
(without load)  

Vibration 55 Hz to 2000 Hz    500 m/s2 (EN 60068-2-6)  


Shock 6 ms  1000 m/s2 (EN 60068-2-27)

Operating temperature –10 °C to 70 °C  
Mass Scanning head  18 g (without cable)  
Connecting cable 20 g/m
Connecting element M12 coupling: 15 g; D-sub connector: 32 g  
* Please select when ordering  
1)
±5 µm after linear length-error compensation in the evaluation electronics
2)
Mitsubishi: measuring length  2040 mm
Yaskawa: measuring length  1840 mm
3)
See General electrical information in the Interfaces of HEIDENHAIN Encoders brochure
4)  
With LIC 411 FS scanning head: clock frequency: 8 MHz

31
LIC 4119
Absolute linear encoder with high accuracy for safety-related applications
• For measuring steps of down to 1 nm
• Steel scale tape is adhesively bonded to mounting surface
• Consists of a linear scale and scanning head
• Fault exclusion for the loosening of the mechanical connection



1.18 2.5 L 5.5
12 ML

B C

2.5
A A
14.5

13.14
19

14
0.1
7.3
 F 0.55/ 50 * B C

0.43 3 
B-B 46
(L-9)  
0.75

 A-A
C-C

9
1.70.05

M3 - 6H
0.1
Rz 16
3.5

0.05
R 0.1 F
3.7

16.5  

 5  
>8
8 30  50  
0.81

Mounting possibilities for scanning head


4.2
  Rz 16

0.75  0.75  0.25/ 25 A

 
M2x16 (2x) 
6



A
 0.75
M2x25 (2x) 
0.9  

Rz 16
18.1

1.6  

Rz 16 0.25/ 25 A C 14
0.25/ 25 A
M2x25 (2x)  Rz 16
2.4

  3.1
A
B A
6

4.68  
4.68
M2 A
0.4 13.18

A
 2.4  

B
4:1 4:1 C
4:1
0.4 M2

I, II, III = Mounting possibilities


F = Machine guideway
* = Mounting error plus dynamic guideway error
C = Absolute track start value: 100 mm
ML = Measuring length
L = Length of scale tape (L = ML+38)
1 = Start of measuring length
2 = Mounting clearance between scanning head and scale tape
3 = Optical centerline
4 = Direction of motion of scanning unit for ascending position values
5 = Bend radius R of the cable:
– Stationary cable  8 mm
– Frequent flexing  40 mm
6 = Cable support
7 = Screw (symmetrically aligned to the punched hole),
ISO 10664-10 hexalobular socket;
materially bonding threadlocker required;
tightening torque = 40 Ncm±2.4 Ncm
8 = M2x16 ISO 4762 - 8.8 + ISO 7089 - 2 - 200HV

9 = M2x25 ISO 4762 - 8.8 + ISO 7089 - 2 - 200HV
10 = Angle bracket for scanning head
11 = Mounting surface for measuring standard

32
Scale LIC 4009

Measuring standard Steel scale tape with absolute and incremental METALLUR track
Coefficient of linear expansion –6 –1
Þtherm  10 · 10 K  
Accuracy grade* 1)
±3 µm , ±15 µm
2)  
Baseline error  ±0.750 µm/50 mm (typical)

Measuring length (ML)* 70 120 170 220 270 320 370 420 520 620 720 820
in mm 920 3) 1020 3) 1220 3) 1420 3) 1620 3) 1820 3)  
Mass Scale tape 31 g/m  
Screw <1g

Protection 4) IP00

Scanning head5) LIC 411  
Interface EnDat 2.2  

Ordering designation EnDat22

Measuring step* 0.01 µm (10 nm)  


0.005 µm (5 nm)
0.001 µm (1 nm)  
Calculation time tcal  5 µs  
Clock frequency  16 MHz

Functional safety • SIL 2 as per EN 61508 (further basis for testing: EN 61800-5-2)
for applications with up to • Category 3, PL "d "as per EN ISO 13849-1:2015  

PFH  20 · 10
–9
(up to 6000 m above sea level)


Safe position6) Encoder: ±550 µm (safety-relevant measuring step: SM = 220 µm);
mechanical coupling: fault exclusions for the loosening of the scanning head and scale tape  
(see Functional safety)

Traversing speed7)  600 m/min

Interpolation error ±20 nm

2
Vibration 55 Hz to 2000 Hz  200 m/s (EN 60068-2-6)
Shock 11 ms  200 m/s2 (EN 60068-2-27)  

Operating temperature –10 °C to 70 °C




Relative air humidity  93 % (at 40 °C/4d as per EN 60068-2-78); without condensation
4)  
Protection EN 60529 IP67

Mass Scanning head  18 g (without cable)
Connecting cable 20 g/m  
Connector M12 coupling: 15 g; D-sub connector: 32 g

* Please select when ordering
1)
Up to a measuring length of 1020 mm
2)
±5 µm after linear length-error compensation in the subsequent electronics
3)
Additional measuring length only on steel mounting surface  
4)
In the application, the device must be protected from contamination by solids and liquids. If necessary, use a suitable enclosure
with a gasket and sealing air.  
5)
For the electrical connection, look under LIC 411 without functional safety
6)
Further tolerances may apply in the subsequent electronics after position value comparison (contact the manufacturer of the  
subsequent electronics)
7)
See General electrical information in the Interfaces of HEIDENHAIN Encoders brochure
33
LIC 2117, LIC 2197
Absolute linear encoders for measuring lengths of up to 3 m
• Measuring step of 100 nm or 50 nm
• Steel scale tape is drawn into the aluminum extrusions and fastened at center
• Consists of a linear scale and scanning head

Mounting possibilities for scanning head

F = Machine guideway
* = Maximum change during operation
Ⓒ = Code start value: 100 mm
Ⓢ = Beginning of measuring length (ML)
Ⓣ = Carrier length
1 = Optical centerline
2 = M3 threaded mating hole, 5 mm deep
3 = Mounting clearance between scanning head and scale tape
4 = Direction of motion of the scanning unit for ascending position values

34
Scale LIC 2107

Measuring standard Steel scale tape with absolute track


Coefficient of linear expansion –6 –1
Þtherm  10 · 10 K  
Accuracy grade ±15 µm  

Measuring length (ML)* 120 320 520 770 1020 1220 1520 2020 2420 3020
in mm (measuring lengths up to 6020 mm upon request)

Mass Scale tape 20 g/m
Scale tape carrier 70 g/m  

Scanning head LIC 211 LIC 219 F LIC 219 M LIC 219 P LIC 219Y


Interface EnDat 2.2 Fanuc Mitsubishi high Panasonic Yaskawa
Serial Interface Þi speed interface Serial Interface Serial Interface  
Ordering designation* EnDat22 Fanuc05 Mit03-4 Mit02-2 Pana01 YEC07  

Measuring step* 0.1 µm (100 nm)


0.05 µm (50 nm)

Calculation time tcal  5 µs –
Clock frequency  16 MHz –  
Traversing speed1)  600 m/min  
Interpolation error ±2 µm  
Electrical connection* Cable, 1 m or 3 m, with 8-pin M12 coupling (male) or 15-pin D-sub connector (male)  

Cable length  100 m  50 m  30 m  50 m



(with HEIDENHAIN cable)  
Supply voltage DC 3.6 V to 14 V  
Power consumption1) (max.) At 3.6 V:  700 mW At 3.6 V:  850 mW  
At 14 V:  800 mW At 14 V:  950 mW

Current consumption (typical) At 5 V: 75 mA At 5 V: 95 mA (without load)
(without load)  
Vibration 55 Hz to 2000 Hz    500 m/s2 (EN 60068-2-6)  
Shock 6 ms  1000 m/s2 (EN 60068-2-27)

Operating temperature –10 °C to 70 °C

Mass Scanning head  18 g (without cable)  
Connecting cable 20 g/m
Connecting element M12 coupling: 15 g; D-sub connector: 32 g  
* Please select when ordering
1)

See General electrical information in the Interfaces of HEIDENHAIN Encoders brochure



35
LIC 2119, LIC 2199
Absolute linear encoders for measuring lengths of up to 3 m
• Measuring step of 100 nm or 50 nm
• Steel scale tape is adhesively bonded to mounting surface
• Consists of a linear scale and scanning head

③ R

Mounting possibilities for scanning head

② ②

F = Machine guideway
* = Maximum change during operation
Ⓒ = Code start value: 100 mm
Ⓢ = Beginning of measuring length (ML)
Ⓛ = Scale tape length
1 = Optical centerline
2 = Mounting clearance between scanning head and scale tape
3 = Direction of motion of the scanning unit for ascending position values

36
Scale LIC 2109

Measuring standard Steel scale tape with absolute track


Coefficient of linear expansion –6 –1
Þtherm  10 · 10 K  
Accuracy grade ±15 µm  

Measuring length (ML)* 120 320 520 770 1020 1220 1520 2020 2420 3020
in mm (measuring lengths up to 6020 mm upon request)

Mass 20 g/m

Scanning head LIC 211 LIC 219 F LIC 219 M LIC 219 P LIC 219Y
   
Interface EnDat 2.2 Fanuc Mitsubishi high Panasonic Yaskawa  
Serial Interface Þi speed interface Serial Interface Serial Interface

Ordering designation* EnDat22 Fanuc05 Mit03-4 Mit02-2 Pana01 YEC07

Measuring step* 0.1 µm (100 nm)
0.05 µm (50 nm)

Calculation time tcal  5 µs –  


Clock frequency  16 MHz –

Traversing speed1)  600 m/min

Interpolation error ±2 µm

Electrical connection* Cable, 1 m or 3 m, with 8-pin M12 coupling (male) or 15-pin D-sub connector (male)

Cable length  100 m  50 m  30 m  50 m
(with HEIDENHAIN cable)


Supply voltage DC 3.6 V to 14 V

Power consumption1) (max.) At 3.6 V:  700 mW At 3.6 V:  850 mW
At 14 V:  800 mW At 14 V:  950 mW  
Current consumption (typical) At 5 V: 75 mA At 5 V: 95 mA (without load)  
(without load)

Vibration 55 Hz to 2000 Hz    500 m/s2 (EN 60068-2-6)
Shock 6 ms  1000 m/s2 (EN 60068-2-27)  
Operating temperature –10 °C to 70 °C  

Mass Scanning head  18 g (without cable)



Connecting cable 20 g/m  
Connecting element M12 coupling: 15 g; D-sub connector: 32 g

* Please select when ordering
1)
See General electrical information in the Interfaces of HEIDENHAIN Encoders brochure  



37
LIP 382
Incremental linear encoders with very high accuracy
• Measuring steps < 1 nm
• Measuring standard is fastened by screws

VISIBLE LASER RADIATION

IEC60825-1:2007
Pmax = 5 mW
λ= 670 nm
* = Maximum change during operation
CLASS 3B LASER PRODUCT
F = Machine guideway
Ⓢ = Beginning of measuring length (ML)
Ⓜ = Mounting surface for scanning head
1 = Direction of motion of the scanning unit for ascending position values
38

LIP 382

Measuring standard DIADUR phase grating on Zerodur glass ceramic; grating period: 0.512 µm
Coefficient of linear expansion –6 –1
Þtherm = (0 ±0.1) · 10 K  

Accuracy grade ±0.5 µm (higher accuracy grades upon request)




Baseline error  ±0.075 µm/5 mm

Measuring length (ML)* 70 120 150 170 220 270
in mm  
Reference marks No

Interface » 1 VPP

Integrated interpolation –
Signal period 0.128 µm


Cutoff frequency –3 dB  1 MHz

Scanning frequency* –
Edge separation a  
Traversing speed  7.6 m/min  
Interpolation error ±0.01 nm  
1)
RMS position noise 0.06 nm (1 MHz )

Laser Mounted scanning head and scale: Class 1
Non-mounted scanning head: Class 3B

Laser diode used: Class 3B  
Electrical connection 0.5 m cable to interface electronics (APE), separate adapter cable (1 m/3 m/6 m/9 m) connectable  
to APE

Cable length See the interface description; however,  30 m (with HEIDENHAIN cable)

Supply voltage DC 5 V ±0.25 V

Current consumption < 190 mA

Vibration 55 Hz to 2000 Hz    4 m/s2 (EN 60068-2-6)
Shock 11 ms  50 m/s2 (EN 60068-2-27)


Operating temperature 0 °C to 40 °C

Mass Scanning head 150 g
Interface electronics 100 g
Scale ML 70 mm: 260 g, ML  150 mm: 700 g
Connecting cable 38 g/m

* Please select when ordering
1)
–3 dB cutoff frequency of the subsequent electronics  

39
LIP 211, LIP 281, LIP 291
Incremental linear encoders for very high accuracy and high position stability
• For measuring steps of 1 nm and smaller
• For high traversing speeds and large measuring lengths
• Measuring standard is fastened with fixing clamps
• Consists of a linear scale and scanning head

 ISO 7984 – M3x6 ISO 7984 – M3x6


 
ISO 7092 – 3 
14.5


12.5


 Distance r depending on the scale-tape variant (standard: r = ML/2)


Quantity n of fixing clamp pairs (clamps on both sides)

Quantity n of the fixing clamp pair: Distance d between fixing clamps:
(clamps on both sides)

Mounting possibilities for scanning head


INVISIBLE LASER RADIATION


F = Machine guideway IEC60825-1:2007
Ⓡ = Reference mark position Pmax = 4 mW
Ⓛ = Scale length λ= 850 nm
Ⓢ = Beginning of measuring length (ML)
Ⓔ = Adhesive as per the mounting instructions CLASS 3B LASER PRODUCT
Ⓐ = Mounting surface
1 = Mounting element for hard adhesive bond for defining the thermal fixed point
2 = Maximum protrusion of screw head: 0.5 mm
3 = Direction of motion of the scanning unit for ascending position values
4 = Optical centerline

40
Scale LIP 201

Measuring standard OPTODUR phase grating on Zerodur glass ceramic; grating period 2.048 µm
Coefficient of linear expansion –6 –1
Þtherm = (0 ±0.1) · 10 K  
Accuracy grade* ±1 µm ±3 µm (higher accuracy grades upon request)  

Baseline error  ±0.125 µm/5 mm

Measuring length (ML)*    20    30    50    70   120   170   220  370  420  470  520  570  620  670  
in mm    270    320    370    420    470    520    570  720  770  820  870  920  970 1020
   620    670    720    770    820    870    920 1140 1240 1340 1440 1540 1640 1840  
   970 1020 2040 2240 2440 2640 2840 3040

Reference marks One at midpoint of measuring length

Mass 1.1 g + 0.11 g/mm measuring length

Scanning head LIP 21 LIP 29 F LIP 29 M LIP 28  
1)
Interface EnDat 2.2 Fanuc Serial Interface1) Mitsubishi high speed1) » 1 VPP

Ordering designation EnDat22 Fanuc02 Mit02-4 –  


Integrated interpolation 16384-fold (14 bits) –  
Clock frequency  16 MHz – –  
Calculation time tcal  5 µs – –  
Measuring step 0.03125 nm (31.25 pm) –  

Signal period – 0.512 µm




Cutoff frequency –3 dB –  3 MHz

Traversing speed  120 m/min  90 m/min
4) 4)

Interpolation error ±0.4 nm ±0.4 nm
RMS position noise 0.12 nm 0.12 nm (3 MHz3))  
Electrical connection* Cable, 0.5 m or 1 m (2 m and 3 m for 1 VPP), with interface electronics in the connector (15-pin D-sub (male))  
Cable length See interface description; however,  15 m (≤ 30 m at 1 VPP) with HEIDENHAIN cable;  
during signal adjustment with the PWM 21: ≤ 3 m

Supply voltage DC 3.6 V to 14 V DC 5 V ±0.25 V

2)
Power consumption (max.) At 14 V: 2500 mW; at 3.6 V: 2600 mW –  
Current consumption At 5 V: 300 mA (without load, typical)  390 mA  
Laser Scanning head and scale, mounted: class 1; scanning head not mounted: class 3B  
Vibration 55 Hz to 2000 Hz  200 m/s2 (IEC 60068-2-6)  
Shock 11 ms  400 m/s2 (IEC 60068-2-27)

Operating temperature 0 °C to 50 °C

Mass Scanning head: 59 g; connector: 140 g; cable: 22 g/m

* Please select when ordering; for measuring lengths < 70 mm, the “adhesively bonded” mounting type is recommended
1)
2)
Absolute position value in “Position Value 2” after crossing the reference mark  
See General electrical information in the Interfaces of HEIDENHAIN Encoders brochure
3) 4)
–3 dB cutoff frequency of the subsequent electronics With HEIDENHAIN interface electronics
41
LIP 6071, LIP 6081
Incremental linear encoders with very high accuracy
• For limited installation space
• For measuring steps of down to 1 nm
• For high traversing speeds and large measuring lengths
• Position detection through homing track and limit switches
• Measuring standard is secured by adhesive or fixing clamps
Scale, clamped (ML+10)±0.5

15±0.1
3 5 ISO 7984–M3x6 10
16

5 6 4
5
4
(ML+10)/2 r
s
(ML+10)±0.5
Scale, adhesively bonded
3 10±2
5
16

5 6

15±0.1
(ML+10)/2 r 10

s
Scanning head and scale clamped / adhesively bonded IKS 0.05 B
RI* 0.01 B
Option: Cable outlet at left
2.9±0.1

M2.5x5 2.6±0.05 20.8±0.05

1.15
1.15

M3
7 7 8

7.5
7.5
12.7

3
0.13±0.01

2.6±0.05
0.05
2.6 20.8 >R8
3.4

2.7

8 1 6 6 1
10 26 >3.4 LE 6.85 14.85
0.13 A IKS
0.08 A RI* 9 17

LE 2
Mounting possibilities for 0.06 A IKS 0.75±0.2
scanning head 0.04 A RI*
±0.1 RI* ISO 4762–M2.5x (a+4.9) - 8.8
(shown without fixing clamps) a 0.03 A IKS
ISO 7092–2.5
2 0.75±0.2
ISO 7092–3
0.02 A RI*
±0.1 RI*
ISO 4762–M3x (a+6) - 8.8
±0.1 RI*

m m
±0.1 RI*

4.9±0.1
0±0.2

12.7
0±0.2

6.8±0.03
6.8±0.03
(10.58) Clamped
(10.58) Clamped
(10.71) Bonded (10.71) Bonded

F = Machine guideway
* = Maximum change during operation
IKS = Incremental track
RI = Reference mark track
Ⓜ = Mounting surface
Ⓛ = Scale length
Ⓢ = Beginning of measuring length (ML)
Ⓖ = Fixed point for defining the thermal fixed point
Ⓡ = Reference mark position
1 = Optical center
2 = Mounting clearance of scanning head to scale; adjusted by means of a space shim
3 = Scale stop surface
4 = Use additional fixing clamp pair depending on the measuring length (ML)
5 = Adhesive
6 = Direction of motion of the scanning head for ascending position values
7 = Moiré adjustment option 1: alignment pin, ¬ 3m6, possible only with mounting option Ⓘ
8 = Moiré adjustment option 2: alignment pin, ¬ 2m6
9 = Recommendation: ¬ 3
10 = Adhesive tape (only if the scale is adhesively bonded)

42
Scale LIP 6001

Measuring standard* OPTODUR phase grating on Zerodur glass ceramic or glass; grating period: 8 µm
Coefficient of linear expansion –6 –1 –6 –1
Þtherm = (0 ±0.1) · 10 K (Zerodur glass ceramic); Þtherm ≈ 8 · 10 K (glass)  
Accuracy grade* ±1 µm (only for Zerodur glass ceramic of up to a measuring length of 1020 mm); ±3 µm  

Baseline error  ±0.175 µm/5 mm

Measuring length (ML)*   20   30   50   70  120  170  220  270  320  370  420  470  520  570  
in mm  620  670  720  770  820  870  920  970 1020 1140 1240 1340 1440 1540
1640 1840 2040 2240 2640 2840 3040  
Reference mark One at midpoint of measuring length  
Mass 1.1 g + 0.11 g/mm measuring length  

Scanning head LIP 608 LIP 607

Interface » 1 VPP TTL1)

Integrated interpolation* – 5-fold 10-fold 25-fold 50-fold 100-fold 500-fold


signal period 4 µm 0.8 µm 0.4 µm 0.16 µm 0.08 µm 0.04 µm 0.008 µm

Cutoff frequency –3 dB  1 MHz  
Scanning frequency – – – ≤ 250 kHz ≤ 125 kHz ≤ 62.5 kHz ≤ 12.5 kHz  
– ≤ 312.5 kHz ≤ 125 kHz ≤   62.5 kHz ≤ 31.25 kHz ≤   6.25 kHz
 312.5 kHz ≤ 156.25 kHz ≤   62.5 kHz ≤   31.25 kHz ≤ 15.63 kHz ≤   3.13 kHz  
Edge separation a – – –  0.03 µs  
–  0.07 µs  0.07 µs
 0.135 µs  0.135 µs  0.135 µs  
Traversing speed2)  240 m/min -- –  60 m/min  30 m/min  15 m/min  3 m/min  
–  75 m/min  30 m/min  15 m/min    7.5 m/min  1.5 m/min
 75 m/min  37 m/min  15 m/min    7.5 m/min    3.7 m/min  0.75 m/min


Interpolation error ±4 nm –
RMS position noise 0.4 nm  
3)
(1 MHZ )

Electrical connection* Cable outlet on the left/right and straight/angled
1 VPP: Cable, 0.5 m/1 m/3 m, with 15-pin D-sub connector (male)  
TTL: Cable, 0.5 m or 1 m, with interface electronics in the 15-pin D-sub connector (male)

Cable length With HEIDENHAIN cable: homing, limit: ≤ 10 m; only incremental: ≤ 20 m;
during signal adjustment with the PWM 21: ≤ 3 m  

Supply voltage DC 5 V ±0.5 V  

Current consumption  150 mA  300 mA (without load)




Vibration 55 Hz to 2000 Hz    500 m/s2 (IEC 60 068-2-6)
Shock 6 ms  1000 m/s2 (IEC 60 068-2-27)  
Operating temperature –10 °C to 70 °C

Mass Scanning head ≈ 5 g (without cable)


Connector AK LIP 608 ≈ 71 g; AK LIP 607 ≈ 74 g  
Connecting cable ≈ 24 g/m

* Please select when ordering; for measuring lengths < 70 mm, the “adhesively bonded” mounting type is recommended
1)  
Unclocked TTLx1 possible upon request 2) With TTL: maximum traversing speed during referencing: 16.8 m/min (70 kHz)
3)
–3dB cutoff frequency of the subsequent electronics

43
LIF 471, LIF 481
Incremental linear encoders for simple installation
• For measuring steps of down to 2 nm
• Position detection through homing track and limit switches
• Measuring standard secured with adhesive film
• Consists of a linear scale and scanning head
• Versions available for high vacuum (see Product Information document)

UNC 4/40

40.1
33.3
 4.5

50

* = Maximum change during operation


F = Machine guideway
ML = Measuring length
Ⓔ = Epoxy for ML < 170
1 = Dimensions of limit plate
2 = Direction of motion of the scanning unit for ascending position values

Note:
For distance-coded reference marks or
Produktinformation
larger measuring lengths, see the
LIF 171, LIF 181 Product Information
LIF 171
LIF 181
Inkrementale
Längenmessgeräte

document.
07/2018

44
Scale LIF 401 R

Measuring standard* SUPRADUR phase grating on Zerodur glass ceramic or glass; grating period: 8 µm
Coefficient of linear expansion –6 –1
Þtherm = (0±0.1) · 10 K (Zerodur glass ceramic)  
–6 –1
Þtherm  8 · 10 K (glass)

Accuracy grade* ±1 µm (only for Zerodur glass ceramic of up to a measuring length of 1020 mm), ±3 µm

Baseline error  ±0.225 µm/5 mm



Measuring length (ML)*   70  120  170  220  270  320  370  420  470  520  570  620  670
in mm  720  770  820  870  920  970 1020 1140 1240 1340 1440 1540 1640  
Reference marks One at midpoint of measuring length  
Mass 0.8 g + 0.08 g/mm measuring length  

Scanning head LIF 48 LIF 47

Interface » 1 VPP  TTL

Integrated interpolation* – 5-fold 10-fold 20-fold 50-fold 100-fold


Signal period 4 µm 0.8 µm 0.4 µm 0.2 µm 0.08 µm 0.04 µm  
Cutoff frequency –3 dB  1 MHz –  
Scanning frequency* –  500 kHz  250 kHz  250 kHz  100 kHz  50 kHz  
 250 kHz  125 kHz  125 kHz    50 kHz  25 kHz
 125 kHz    62.5 kHz    62.5 kHz    25 kHz  12.5 kHz  
Edge separation a –  0.080 µs  0.080 µs  0.040 µs  0.040 µs  0.040 µs  
 0.175 µs  0.175 µs  0.080 µs  0.080 µs  0.080 µs
 0.370 µs  0.370 µs  0.175 µs  0.175 µs  0.175 µs


Traversing speed1)  240 m/min  120 m/min  60 m/min  60 m/min  24 m/min  12 m/min
   60 m/min  30 m/min  30 m/min  12 m/min    6 m/min  
   30 m/min  15 m/min  15 m/min    6 m/min    3 m/min

Interpolation error ±12 nm –
RMS position noise 2)
0.6 nm (1 MHz )  
Electrical connection* Cable, 0.5 m/1 m/3 m, with 15-pin Sub-D connector (male); interface electronics in the connector  
Cable length See interface description; however,  
incremental:  30 m; homing, limit:  10 m; (with HEIDENHAIN cable)

Supply voltage DC 5 V ±0.25 V

Current consumption < 150 mA < 165 mA (without load)  
2
Vibration 55 Hz to 2000 Hz  400 m/s (EN 60068-2-6)  
Shock 11 ms  500 m/s2 (EN 60068-2-27)

Operating temperature 0 °C to 50 °C

Mass Scanning head* For scale made of Zerodur glass ceramic: 25 g
For scale made of glass: 9 g
Cable 38 g/m
Connector 75 g

* Please select when ordering  
1)
With TTL: maximum traversing speed during referencing: 9.6 m/min (40 kHz)
2)
–3 dB cutoff frequency of the subsequent electronics  

45
LIDA 473, LIDA 483
Incremental linear encoders with limit switches
• For measuring steps of down to 10 nm
• Glass or glass ceramic measuring standard
• Measuring standard secured with adhesive film
• Consists of a linear scale and scanning head

Mounting possibilities for scanning head

F = Machine guideway
* = Maximum change during operation
(IKS: incremental track, RI: reference mark track)
Ⓢ = Beginning of measuring length (ML)
Ⓡ = Reference-mark position on LIDA 4x3
Ⓒ = Reference-mark position on LIDA 4x3 C
Ⓛ = Scale length
Ⓐ = Selector magnet for limit switch
Ⓜ = Mounting surface for scanning head
1 = Function indicator
2 = Scanning gap
3 = Scale stop surface
4 = Direction of motion of the scanning unit for ascending position values

46
Scale LIDA 403

Measuring standard METALLUR scale grating on glass ceramic or glass; grating period: 20 µm
Coefficient of linear expansion* Þtherm  8 · 10–6 K–1 (glass)  
Þtherm = (0 ±0.5) · 10–6 K–1 (Robax glass ceramic)

Accuracy grade* ±1 µm (only for Robax glass ceramic), ±3 µm, ±5 µm

Baseline error  ±0.275 µm/10 mm



Measuring length (ML)*  240  340  440  640  840 1040 1240 1440 1640 1840 2040 2240 2440
in mm 2640 2840 3040 (Robax glass ceramic only up to ML of 1640)  
Reference marks* LIDA 4x3: one at midpoint of measuring length; LIDA 4x3 C: Distance-coded  
Mass 3 g + 0.11 g/mm of measuring length  

Scanning head LIDA 48 LIDA 47

Interface » 1 VPP  TTL

Integrated interpolation* – 5-fold 10-fold 50-fold 100-fold


Signal period 20 µm 4 µm 2 µm 0.4 µm 0.2 µm  
Cutoff frequency –3 dB  400 kHz –  
Scanning frequency* –  400 kHz  200 kHz  50 kHz  25 kHz  
 200 kHz  100 kHz  25 kHz  12.5 kHz
 100 kHz    50 kHz  12.5 kHz    6.25 kHz  
   50 kHz    25 kHz

1)
Edge separation a –  0.100 µs  0.100 µs  0.080 µs  0.080 µs
 0.220 µs  0.220 µs  0.175 µs  0.175 µs

 0.465 µs  0.465 µs  0.370 µs  0.370 µs  
 0.950 µs  0.950 µs

Traversing speed1)  600 m/min  480 m/min  240 m/min  60 m/min  30 m/min
 240 m/min  120 m/min  30 m/min  15 m/min  
 120 m/min    60 m/min  15 m/min    7.5 m/min
   60 m/min    30 m/min  
Interpolation error ±45 nm –  
Limit switches L1/L2 with two different magnets; output signals: TTL (without line driver)  

Electrical connection Cable, 0.5 m/1 m/3 m, with 15-pin D-sub connector (male)  

Cable length See interface description; however, limit:  20 m (with HEIDENHAIN cable)


Supply voltage DC 5 V ±0.5 V

Current consumption < 130 mA < 150 mA (without load)
2

Vibration 55 Hz to 2000 Hz    500 m/s (EN 60068-2-6)
Shock 6 ms  1000 m/s2 (EN 60068-2-27)  
Operating temperature –10 °C to 70 °C

Mass Scanning head 20 g (without cable)



Cable 22 g/m
Connector 32 g  
* Please select when ordering
1)

At a corresponding cutoff or scanning frequency
Robax is a registered trademark of Schott-Glaswerke, Mainz, Germany
47
LIDA 475, LIDA 485
Incremental linear encoders for measuring lengths of up to 30 m
• For measuring steps of down to 10 nm
• Limit switches
• Steel scale tape is drawn into the aluminum extrusions and tensioned
• Consists of a linear scale and scanning head

ML  2040

ML > 2040 (e.g., 5040)

Mounting possibilities for scanning head

Ô = Scale carrier sections secured with screws Ⓐ = Selector magnet for limit switch
Õ = Scale carrier sections secured with Ⓣ = Carrier length
PRECIMET Ⓩ = Spacer for measuring lengths of 3040 mm
F = Machine guideway or greater
* = Maximum change during operation Ⓜ = Mounting surface for scanning head
(IKS: incremental track, 1 = Function indicator
RI: reference mark track) 2 = Scanning gap
P = Measuring points for alignment 3 = Carrier stop surface
Ⓢ = Beginning of measuring length (ML) 4 = Direction of motion of the scanning unit
Ⓡ = Reference mark position for ascending position values
48
Scale LIDA 405

Measuring standard Steel scale tape with METALLUR scale grating; grating period: 20 µm
Coefficient of linear expansion Depends on the mounting surface  
Accuracy grade ±5 µm  

Baseline error  ±0.750 µm/50 mm (typical)

Measuring length (ML)*  140  240  340  440  540  640  740  840  940 1040 1140 1240 1340 1440  
in mm 1540 1640 1740 1840 1940 2040

Larger measuring lengths of up to 30 040 mm with a single-section scale tape
and individual scale-carrier sections  
Reference marks One at midpoint of measuring length  

Mass 115 g + 0.25 g/mm measuring length  



Scanning head LIDA 48 LIDA 47

Interface » 1 VPP  TTL



Integrated interpolation* – 5-fold 10-fold 50-fold 100-fold
Signal period 20 µm 4 µm 2 µm 0.4 µm 0.2 µm  
Cutoff frequency –3 dB  400 kHz –  
Scanning frequency* –  400 kHz  200 kHz  50 kHz  25 kHz  
 200 kHz  100 kHz  25 kHz  12.5 kHz
 100 kHz    50 kHz  12.5 kHz    6.25 kHz  
   50 kHz    25 kHz

1)
Edge separation a –  0.100 µs  0.100 µs  0.080 µs  0.080 µs  
 0.220 µs  0.220 µs  0.175 µs  0.175 µs
 0.465 µs  0.465 µs  0.370 µs  0.370 µs  
 0.950 µs  0.950 µs

Traversing speed1)  600 m/min  480 m/min  240 m/min  60 m/min  30 m/min
 240 m/min  120 m/min  30 m/min  15 m/min  
 120 m/min    60 m/min  15 m/min    7.5 m/min
   60 m/min    30 m/min  
Interpolation error ±45 nm –  

Limit switches L1/L2 with two different magnets; output signals: TTL (without line driver)  

Electrical connection Cable, 0.5 m/1 m/3 m, with 15-pin D-sub connector (male)


Cable length See interface description; however, limit:  20 m (with HEIDENHAIN cable)

Supply voltage DC 5 V ±0.5 V

Current consumption < 130 mA < 150 mA (without load)

2
Vibration 55 Hz to 2000 Hz    500 m/s (EN 60068-2-6)
Shock 6 ms  1000 m/s2 (EN 60068-2-27)

Operating temperature –10 °C to 70 °C



Mass Scanning head 20 g (without cable)  
Cable 22 g/m
Connector 32 g  
1)
* Please select when ordering At a corresponding cutoff or scanning frequency
49
LIDA 477, LIDA 487
Incremental linear encoders for measuring ranges of up to 6 m
• For measuring steps of down to 10 nm
• Limit switches
• Steel scale tape is drawn into adhesive aluminum extrusions and secured at center
• Consists of a linear scale and scanning head

ML  2040
(e.g. 840)

ML > 2040
(e.g. 5040)

Mounting possibilities for scanning head

F = Machine guideway Ⓣ = Carrier length


* = Maximum change during operation Ⓜ = Mounting surface for scanning head
(IKS: incremental track, 1 = Function indicator
RI: reference mark track) 2 = Scanning gap
P = Measuring points for alignment 3 = Carrier stop surface
Ⓢ = Beginning of measuring length (ML) 4 = Direction of motion of the scanning unit
Ⓡ = Reference mark position for ascending position values
Ⓐ = Selector magnet for limit switch
50
Scale LIDA 407

Measuring standard Steel scale tape with METALLUR scale grating; grating period: 20 µm
Coefficient of linear expansion –6 –1
Þtherm  10 · 10 K  
Accuracy grade* ±3 µm (up to ML 1040); ±5 µm (starting from ML 1240); ±15 µm
1)  

Baseline error  ±0.750 µm/50 mm (typical)

Measuring length (ML)*  240  440  640  840 1040 1240 1440 1640 1840 2040 2240 2440 2640 2840  
in mm 3040 3240 3440 3640 3840 4040 4240 4440 4640 4840 5040 5240 5440 5640
5840 6040  
Reference marks One at midpoint of measuring length  
Mass 25 g + 0.1 g/mm measuring length  

Scanning head LIDA 48 LIDA 47

Interface » 1 VPP  TTL

Integrated interpolation* – 5-fold 10-fold 50-fold 100-fold


Signal period 20 µm 4 µm 2 µm 0.4 µm 0.2 µm  
Cutoff frequency –3 dB  400 kHz –  
Scanning frequency* –  400 kHz  200 kHz  50 kHz  25 kHz  
 200 kHz  100 kHz  25 kHz  12.5 kHz
 100 kHz    50 kHz  12.5 kHz    6.25 kHz  
   50 kHz    25 kHz

2)
Edge separation a –  0.100 µs  0.100 µs  0.080 µs  0.080 µs
 0.220 µs  0.220 µs  0.175 µs  0.175 µs

 0.465 µs  0.465 µs  0.370 µs  0.370 µs  
 0.950 µs  0.950 µs

Traversing speed2)  600 m/min  480 m/min  240 m/min  60 m/min  30 m/min
 240 m/min  120 m/min  30 m/min  15 m/min  
 120 m/min    60 m/min  15 m/min    7.5 m/min
   60 m/min    30 m/min  
Interpolation error ±45 nm –  
Limit switches L1/L2 with two different magnets; output signals: TTL (without line driver)  

Electrical connection Cable, 0.5 m/1 m/3 m, with 15-pin D-sub connector (male)  

Cable length See interface description; however, limit:  20 m (with HEIDENHAIN cable)


Supply voltage DC 5 V ±0.5 V

Current consumption < 130 mA < 150 mA (without load)
2

Vibration 55 Hz to 2000 Hz    500 m/s (EN 60068-2-6)
Shock 6 ms  1000 m/s2 (EN 60068-2-27)  
Operating temperature –10 °C to 70 °C

Mass Scanning head 20 g (without cable)



Cable 22 g/m
Connector 32 g  
* Please select when ordering
1)

±5 µm after linear length-error compensation in the evaluation electronics
2)
At a corresponding cutoff or scanning frequency
51
LIDA 479, LIDA 489
Incremental linear encoders for measuring ranges of up to 6 m
• For measuring steps of down to 10 nm
• Limit switches
• Steel scale tape adhesively bonded to mounting surface
• Consists of a scale tape and scanning head

Mounting possibilities for scanning head

F = Machine guideway
* = Maximum change during operation
(IKS: incremental track, RI: reference mark track)
Ⓢ = Beginning of measuring length (ML)
Ⓡ = Reference mark position
Ⓛ = Scale tape length
Ⓐ = Selector magnet for limit switch
Ⓜ = Mounting surface for scanning head
1 = Function indicator
2 = Scanning gap
3 = Scale-tape stop surface
4 = Direction of motion of the scanning unit for ascending position values

52
Scale LIDA 409

Measuring standard Steel scale tape with METALLUR scale grating; grating period: 20 µm
Coefficient of linear expansion –6 –1
Þtherm  10 · 10 K  
Accuracy grade* ±3 µm, ±15 µm
1)  

Baseline error  ±0.750 µm/50 mm (typical)

Measuring length (ML)*  70 120 170 220 270 320  370 Scale tape from the roll: 2 m,4 m, 6 m  
in mm 420 520 620 720 820 920 1020

Reference marks One at midpoint of measuring length Every 50 mm3)

Mass 31 g/m

Scanning head LIDA 48 LIDA 47  
Interface » 1 VPP  TTL  

Integrated interpolation* – 5-fold 10-fold 50-fold 100-fold


Signal period 20 µm 4 µm 2 µm 0.4 µm 0.2 µm

Cutoff frequency –3 dB  400 kHz –

Scanning frequency* –  400 kHz  200 kHz  50 kHz  25 kHz
 200 kHz  100 kHz  25 kHz  12.5 kHz  
 100 kHz    50 kHz  12.5 kHz    6.25 kHz
   50 kHz    25 kHz  
Edge separation a2) –  0.100 µs  0.100 µs  0.080 µs  0.080 µs  
 0.220 µs  0.220 µs  0.175 µs  0.175 µs
 0.465 µs  0.465 µs  0.370 µs  0.370 µs

 0.950 µs  0.950 µs  
2)
Traversing speed  600 m/min  480 m/min  240 m/min  60 m/min  30 m/min  
 240 m/min  120 m/min  30 m/min  15 m/min
 120 m/min    60 m/min  15 m/min    7.5 m/min  
   60 m/min    30 m/min

Interpolation error ±45 nm –

Limit switches L1/L2 with two different magnets; output signals: TTL (without line driver)

Electrical connection Cable, 0.5 m/1 m/3 m, with 15-pin D-sub connector (male)

Cable length See interface description; however, limit:  20 m (with HEIDENHAIN cable)

Supply voltage DC 5 V ±0.5 V  
Current consumption < 130 mA < 150 mA (without load)  
2
Vibration 55 Hz to 2000 Hz    500 m/s (EN 60068-2-6)  
Shock 6 ms  1000 m/s2 (EN 60068-2-27)

Operating temperature –10 °C to 70 °C

Mass Scanning head 20 g (without cable)


Cable 22 g/m

Connector 32 g

* Please select when ordering
1)
2)
±5 µm after linear length-error compensation in the evaluation electronics  
At a corresponding cutoff or scanning frequency
3)
Only one reference mark may be used during operation. Recommended: use the LIDA 4xR special scanning head
53
LIDA 277, LIDA 287
Incremental linear encoder with wide mounting tolerances
• For measuring steps of down to 100 nm
• Scale tape cut from roll
• Steel scale tape is drawn into adhesive aluminum extrusions and secured
• Integrated three-color LED function indicator
• Consists of a linear scale and scanning head

Mounting possibilities for scanning head

* = Maximum change during operation


F = Machine guideway
Ⓡ = Reference mark
Ⓛ = Scale tape length
Ⓢ = Beginning of measuring length (ML)
1 = LED (integrated mounting checker)
2 = Thread at both ends
3 = Position of reference mark relative to scanning head
4 = Mounting clearance between scale and scanning head
5 = M3 threaded mating hole, 5 mm deep
6 = Direction of motion of the scanning unit for ascending position values

Reference mark:
k = Any position of the selected reference mark starting from the beginning of the measuring length
(depending on the cut)

54
Scale LIDA 207

Measuring standard Steel scale tape; grating period: 200 µm


Coefficient of linear expansion –6 –1
therm  10 · 10 K  
Accuracy grade ±15 µm  

Scale tape cut from roll* 3 m, 5 m, 10 m

Reference marks Selectable every 100 mm  


Mass Scale tape 20 g/m  
Scale tape carrier 70 g/m

Scanning head LIDA 28 LIDA 27  
Interface » 1 VPP « TTL  
Integrated interpolation* – 10-fold 50-fold 100-fold  
Signal period 200 µm 20 µm 4 µm 2 µm

Cut-off frequency  50 kHz – – –


Scanning frequency –  50 kHz  25 kHz  12.5 kHz  
Edge separation a –  0.465 µs  0.175 µs  0.175 µs

Traversing speed  600 m/min  300 m/min  150 m/min

Interpolation error ±2 µm –

Electrical connection* Cable, 1 m or 3 m, with 15-pin D-sub connector (male)

Cable length See the interface description; however,  30 m (with HEIDENHAIN cable)

Supply voltage DC 5 V ±0.25 V  
Current consumption < 155 mA < 140 mA (without load)  
Vibration 55 Hz to 2000 Hz  200 m/s2 (EN 60068-2-6)  
Shock 11 ms  500 m/s2 (EN 60068-2-27)

Operating temperature –10 °C to 70 °C

Mass Scanning head 20 g (without cable)
Cable 30 g/m  
Connector 32 g

* Please select when ordering






55
LIDA 279, LIDA 289
Incremental linear encoder with wide mounting tolerances
• For measuring steps of down to 100 nm
• Scale tape cut from roll
• Steel scale tape adhesively bonded to mounting surface
• Integrated three-color LED function indicator
• Consists of a linear scale and scanning head

Mounting possibilities for scanning head

* = Maximum change during operation


F = Machine guideway
Ⓡ = Reference mark
Ⓛ = Scale tape length
Ⓢ = Beginning of measuring length (ML)
1 = LED (integrated mounting checker)
2 = Thread at both ends
3 = Position of reference mark relative to scanning head
4 = Adhesive tape
5 = Steel scale tape
6 = Mounting clearance between scale and scanning head
7 = Direction of motion of the scanning unit for ascending position values

Reference mark:
k = Any position of the selected reference mark starting from the beginning of the measuring
length (depending on the cut)
j = Additional reference marks spaced every n x 100 mm

56
Scale LIDA 209

Measuring standard Steel scale tape; grating period: 200 µm


Coefficient of linear expansion –6 –1
therm  10 · 10 K  
Accuracy grade ±15 µm  

Scale tape cut from roll* 3 m, 5 m, 10 m

Reference marks Selectable every 100 mm  


Mass 20 g/m  

Scanning head LIDA 28 LIDA 27

Interface » 1 VPP « TTL

Integrated interpolation* – 10-fold 50-fold 100-fold
Signal period 200 µm 20 µm 4 µm 2 µm  

Cut-off frequency  50 kHz – – –


Scanning frequency –  50 kHz  25 kHz  12.5 kHz
Edge separation a –  0.465 µs  0.175 µs  0.175 µs  
Traversing speed  600 m/min  300 m/min  150 m/min  
Interpolation error ±2 µm –  
Electrical connection* Cable, 1 m or 3 m, with 15-pin D-sub connector (male)  
Cable length See the interface description; however,  30 m (with HEIDENHAIN cable)  

Supply voltage DC 5 V ±0.25 V




Current consumption < 155 mA < 140 mA (without load)

Vibration 55 Hz to 2000 Hz  200 m/s2 (EN 60068-2-6)
Shock 11 ms  500 m/s2 (EN 60068-2-27)  
Operating temperature –10 °C to 70 °C  
Mass Scanning head 20 g (without cable)  
Cable 30 g/m
Connector 32 g  

* Please select when ordering









57
PP 281 R
Two-coordinate incremental encoder
• For measuring steps of 1 µm to 0.05 µm





* = Maximum change during operation


F = Machine guideway
Ⓡ = Reference-mark position relative to center position shown
1 = Adjusted during mounting
2 = Graduation side
3 = Direction of motion of the scanning unit for ascending position values

58

PP 281 R

Measuring standard Two-coordinate TITANID phase grating on glass; grating period: 8 µm
Coefficient of linear expansion –6 –1
Þtherm  8 · 10 K  

Accuracy grade ±2 µm


Measuring area 68 mm x 68 mm,
other measuring areas upon request  
1)
Reference marks One reference mark in each axis, 3 mm after beginning of measuring length  
Interface » 1 VPP

Signal period 4 µm

Cutoff frequency –3 dB  300 kHz

Traversing speed  72 m/min  
3)
Interpolation error ±12 nm  
RMS position noise 2 nm (450 kHz2))

Electrical connection Cable, 0.5 m, with 15-pin D-sub connector (male); interface electronics in the connector

Cable length See the interface description; however,  30 m (with HEIDENHAIN cable)

Supply voltage DC 5 V ±0.25 V

Current consumption < 185 mA per axis

2
Vibration 55 Hz to 2000 Hz    80 m/s (EN 60068-2-6)  
Shock 11 ms  100 m/s2 (EN 60068-2-27)

Operating temperature 0 °C to 50 °C

Mass Scanning head 170 g (without cable)
Grid plate 75 g  
Connecting cable 37 g/m
Connector 140 g  
1)
The reference mark signal deviates from the interface specification in its zero crossovers K, L (see the mounting instructions)  
2)
–3 dB cutoff frequency of the subsequent electronics
3)
With HEIDENHAIN interface electronics (e.g., EIB 741)




59
Interfaces
» 1 VPP incremental signals

HEIDENHAIN encoders with the » 1 VPP Signal period


interface provide voltage signals that can 360° elec.
be highly interpolated.

The sinusoidal incremental signals A and


B are phase-shifted by 90° elec. and have
a typical amplitude of 1 VPP. The illustrated
sequence of output signals—with B
lagging A—applies to the direction of
motion shown in the dimension drawing.

The reference mark signal R has an


unambiguous assignment to the
incremental signals. The output signal
might be somewhat lower next to the
reference mark.

Alternative
signal shape
(rated value)

A, B, R measured with oscilloscope in differential mode

Further information:
For detailed descriptions of all available
interfaces, as well as general electrical
information, please refer to the Interfaces
of HEIDENHAIN Encoders brochure.

« TTL incremental signals

HEIDENHAIN encoders with the « TTL Fault


Signal period 360° elec.
interface incorporate electronics that
digitalize sinusoidal scanning signals with
or without interpolation.

The incremental signals are transmitted as


the square-wave pulse trains Ua1 and Ua2,
phase-shifted by 90° elec. The reference Measuring step after
mark signal consists of one or more 4-fold evaluation
reference pulses Ua0, which are gated with
the incremental signals. In addition, the
integrated electronics produce their inverted
signals ¢, £, and ¤ for noise-proof
transmission. The illustrated sequence of
output signals—with Ua2 lagging Ua1—
The inverted signals ¢, £, ¤ are not shown
applies to the direction of motion shown in
the dimension drawing.
The fault detection signal ¥ indicates
fault conditions such as an interruption in the Further information:
supply lines, failure of the light source, etc.
For detailed descriptions of all available
The distance between two successive interfaces, as well as general electrical
edges of the incremental signals Ua1 and information, please refer to the Interfaces
Ua2 through 1-fold, 2-fold, or 4-fold evaluation of HEIDENHAIN Encoders brochure.
is one measuring step.

60
Limit switches

LIDA 400 encoders are equipped with two


limit switches that enable limit-position Further information:
detection and the formation of homing
tracks. The limit switches are activated by For detailed descriptions of all available  
differing adhesive magnets to enable interfaces, as well as general electrical
switching between the left or right limit. information, please refer to the Interfaces  
The magnets can be configured in series of HEIDENHAIN Encoders brochure.
to set up homing tracks. The signals
from the limit switches L1 and L2 are
transmitted over separate lines and are  
therefore directly available. Nevertheless,
the cable has only a very thin diameter of  
3.7 mm in order to keep the forces on
movable machine elements to a minimum.  
The incremental signals conform with the  
1 VPP or TTL interface.








Position detection



Besides the incremental graduation, the
LIF 4x1 and LIP 60x1 encoders feature a Further information:  
homing track and limit switches for limit
position detection. For detailed descriptions of all available  
interfaces, as well as general electrical
The signals for position detection H and information, please refer to the Interfaces  
L are transmitted at the TTL level over the of HEIDENHAIN Encoders brochure.
separate lines H and L and are therefore  
directly available. Yet the cable has only a
very thin diameter of 4.5 mm (LIF 4x1) or  
3.7 mm (LIP 60x1) in order to keep the
forces on movable machine elements to a

minimum.  
The incremental signals conform with the  
1 VPP or TTL interface.



61
Interfaces
Pin layouts (1 VPP/TTL)

LIDA
15-pin D-sub connector

Power supply Incremental signals Other signals

4 12 2 10 1 9 3 11 14 7 13 8 6 15 5
3)
« TTL UP Sen­ 0V Sen­ Ua1 ¢ Ua2 £ Ua0  ¥ L1 L23) PWT1) Vacant
sor4) sor
4)

» 1 VPP 5V 0V A+ A– B+ B– R+ R– As­ As­ Vacant


signed signed

2) Brown/ Blue White/ White Brown Green Gray Pink Red Black Violet Green/ Yellow/ Yellow /
Green Green Black Black
1)
Shield on housing; UP = Power supply voltage TTL/11 µAPP conversion for the PWT
2)
Sensor: The sense line is connected in the encoder with the corresponding Color assignment of the connecting cable
3)
power line. Valid only for the LIDA 400
4)
Unused pins or wires must not be assigned! LIDA 200: vacant

LIF and LIP 6000


15-pin D-sub connector

Power supply Incremental signals Other signals

4 12 2 10 1 9 3 11 14 7 13 8 6 15 5
3)
« TTL UP Sensor 0V Sensor Ua1 ¢ Ua2 £ Ua0  ¥ H L3) PWT1) Vacant
5V 0V
» 1 VPP A+ A– B+ B– R+ R– As­ As­ Vacant
signed signed

2) Brown/ Blue White/ White Brown Green Gray Pink Red Black Violet Green/ Green/ Yellow /
Green Green Black Black
1)
Shield on housing; UP = Power supply voltage TTL/11 µAPP conversion for the PWT
2)
Sensor: The sense line is connected in the encoder with the corresponding Color assignment of the connecting cable
3)
power line. Valid only for the LIP 6000/LIF 400
Unused pins or wires must not be assigned!

Further information:
For detailed descriptions of cables, please
refer to the Cables and Connectors
brochure.

62
LIP 281 and PP 281 R
15-pin D-sub connector

Power supply Incremental signals Other signals



4 12 2 10 1 9 3 11 14 7 13 5 6/8 15

« TTL UP Sensor 0V Sensor Ua1 ¢ Ua2 £ Ua0  ¥ Vacant Vacant PWT1)
5V 0V  
» 1 VPP A+ A– B+ B– R+ R– Vacant Vacant Vacant
As­ As­

signed3) signed3)  
2) Brown/ Blue White/ White Brown Green Gray Pink Red Black Violet / / Yellow  
Green Green
1)
Shield on housing; UP = Power supply voltage TTL/11 µAPP conversion for the PWT
2)
Sensor: The sense line is connected in the encoder with the corresponding Color assignment of the connecting cable
power line. 3)
LIP 28  
Unused pins or wires must not be assigned!




Alternative: LIDA 400  
12-pin M23 coupling 12-pin M23 connector




Power supply Incremental signals Other signals

12 2 10 11 5 6 8 1 3 4 7 9

1)
« TTL UP Sensor 0V Sensor Ua1 ¢ Ua2 £ Ua0  ¥ PWT
UP 0V  
» 1 VPP A+ A– B+ B– R+ R– L1 L2

2) Brown/ Blue White/ White Brown Green Gray Pink Red Black Violet Yellow
Green Green

1)  
Shield on housing; UP = Power supply voltage TTL/11 µAPP conversion for the PWT
2)
Sensor: The sense line is connected in the encoder with the corresponding Color assignment of the connecting cable  
power line.
Unused pins or wires must not be assigned!  

Further information:

For detailed descriptions of cables, please  
refer to the Cables and Connectors
brochure.  

63
Interfaces
      position values

The EnDat interface is a digital, bidirectional Ordering designation Command set Incremental signals
interface for encoders. It is capable of
outputting position values, reading and EnDat01 EnDat 2.1 or EnDat 2.2 With
updating information stored in the encoder,
and storing new information in the encoder. EnDat21 Without
Thanks to the serial transmission method,
only four signal lines are required. The EnDat02 EnDat 2.2 With
DATA data are transmitted in synchronism
with the CLOCK signal from the subsequent EnDat22 EnDat 2.2 Without
electronics. The type of transmission
(position values, parameters, diagnostics,
Versions of the EnDat interface
etc.) is selected via mode commands sent
to the encoder by the subsequent
Absolute encoder Subsequent electronics
electronics. Some functions are available
only with EnDat 2.2 mode commands. Incremental » 1 VPP A*)
signals *)
» 1 VPP B*)

EnDat interface
Absolute
position value
Further information:
For detailed descriptions of all available
Parameters of the encoder
interfaces, as well as general electrical Operating Operating Parameters manufacturer for *) D
 epending on
information, please refer to the Interfaces parameters status of the OEM the device
of HEIDENHAIN Encoders brochure. EnDat 2.1 EnDat 2.2

EnDat pin layout


8-pin M12 coupling 15-pin D-sub connector

Power supply Serial data transfer

8 2 5 1 3 4 7 6

4 12 2 10 5 13 8 15

UP Sensor 0V Sensor DATA DATA CLOCK CLOCK


UP 0V

Brown/Green Blue White/Green White Gray Pink Violet Yellow

Cable shield connected to housing; UP = Power supply voltage


Sensor: The sense line is connected in the encoder with the corresponding power line.
Unused pins or wires must not be assigned!

Further information:
For detailed descriptions of cables, please
refer to the Cables and Connectors
brochure.

64
Fanuc and Mitsubishi pin layouts

Fanuc pin layout Fanuc Serial Interface – i Interface


HEIDENHAIN encoders with the code Ordering designation: Fanuc05 Further information:
letter F following the model designation are high speed, one-pair transmission
suitable for connection to Fanuc controls contains the Þ interface (normal and For detailed descriptions of cables, please  
and drive systems. high speed, two-pair transmission) refer to the Cables and Connectors
brochure.  

Fanuc pin layout


8-pin M12 coupling 15-pin D-sub connector



Power supply Serial data transfer  
8 2 5 1 3 4 7 6  
4 12 2 10 5 13 8 15  
UP Sensor 0V Sensor Serial Data Serial Data Request Request
UP 0V

Brown/Green Blue White/Green White Gray Pink Violet Yellow  

Cable shield connected to housing; UP = Power supply voltage



Sensor: The sense line is connected in the encoder with the corresponding power line.  
Unused pins or wires must not be assigned!



Mitsubishi pin layout Mitsubishi high speed interface • Ordering designation: Mit02-2
HEIDENHAIN encoders with the code • Ordering designation: Mitsu01 Generation 1, one-pair transmission  
letter M following the model designation two-pair transmission • Ordering designation: Mit03-4
are suitable for connection to Mitsubishi • Ordering designation: Mit02-4 Generation 2, two-pair transmission  
controls and drive systems. Generation 1, two-pair transmission


Mitsubishi pin layout
8-pin M12 coupling 15-pin D-sub connector  



Power supply Serial data transfer

8 2 5 1 3 4 7 6

4 12 2 10 5 13 8 15

Mit03-4 UP Sensor 0V Sensor Serial Data Serial Data Request Request
UP 0V Frame Frame  

Mit02-2 Vacant Vacant Request/ Request/


Data Data

Brown/Green Blue White/Green White Gray Pink Violet Yellow

Cable shield connected to housing; UP = Power supply voltage
Sensor: The sense line is connected in the encoder with the corresponding power line.  
Unused pins or wires must not be assigned!

65
Panasonic and Yaskawa pin layouts

Panasonic pin layout


HEIDENHAIN encoders with the code Further information:
letter P following the model designation
are suitable for connection to Panasonic For detailed descriptions of cables, please
controls and drive systems. refer to the Cables and Connectors
brochure.
• Ordering designation: Pana01

Panasonic pin layout


8-pin M12 coupling 15-pin D-sub connector

Power supply Serial data transfer

8 2 5 1 3 4 7 6

4 12 2 10 5 13 8 15
1)
UP Sensor 0V Sensor Vacant Vacant1) Request Request
UP 0V Data Data

Brown/Green Blue White/Green White Gray Pink Violet Yellow

Cable shield connected to housing; UP = Power supply voltage


Sensor: The sense line is connected in the encoder with the corresponding power line.
Unused pins or wires must not be assigned!
1)
Required for adjustment/testing with the PWM 21

Yaskawa pin layout


HEIDENHAIN encoders with the code Further information:
letter F following the model designation are
suitable for connection to Yaskawa controls For detailed descriptions of cables, please
and drive systems. refer to the Cables and Connectors
brochure.
• Ordering designation: YEC07

Yaskawa pin layout


8-pin M12 coupling 15-pin D-sub connector

Power supply Serial data transfer

8 2 5 1 3 4 7 6

4 12 2 10 5 13 8 15
1)
UP Sensor 0V Sensor Vacant Vacant1) Data Data
UP 0V

Brown/Green Blue White/Green White Gray Pink Violet Yellow

Cable shield connected to housing; UP = Power supply voltage


Sensor: The sense line is connected in the encoder with the corresponding power line.
Unused pins or wires must not be assigned!
1)
Required for adjustment/testing with the PWM 21

66
Testing equipment and diagnostics

HEIDENHAIN encoders provide all of the


information necessary for commissioning,
monitoring, and diagnostics. The type of
information available depends on whether  
the encoder is incremental or absolute and
on which interface is used.  
Incremental encoders mainly have 1 VPP,
TTL, or HTL interfaces. TTL and HTL
encoders monitor their signal amplitudes  
internally and generate a single fault
detection signal. With 1 VPP signals, the  
analysis of output signals is possible only
with external testing devices or via  
computation in the subsequent electronics
(analog diagnostics interface).  
Absolute encoders use serial data transmis-  
sion. Depending on the interface, additional
1 VPP incremental signals can be output.
Diagnostics in the control loop on HEIDENHAIN controls with display of  
the valuation number or the analog encoder signals
The signals are comprehensively monitored
within the encoder. The monitoring result
(particularly in the case of valuation numbers)
can be transmitted to the sub­sequent  
­electronics along with the position values
via the serial interface (digital diagnostics  
interface). The following information is
­available:  
• Error message: position value is not
reliable.  
• Warning: An internal functional limit of
the encoder has been reached.  
• Valuation numbers:
–– Detailed information on the encoder’s  
functional reserve
–– Identical scaling for all HEIDENHAIN

encoders  
–– Cyclic reading is possible
This enables the subsequent electronics to  
evaluate the current status of the encoder
with little effort, even in closed-loop mode.  
Diagnostics via the PWM 21 and ATS software
HEIDENHAIN offers the appropriate PWM  
inspection devices and PWT testing
devices for encoder analysis. Depending  
on how these devices are integrated, a
differentiation is made between two types  
of diagnostics:
• Encoder diagnostics: the encoder is

connected directly to the testing or  
inspection device. This makes a detailed
analysis of encoder functions possible.  
• Diagnostics in the control loop: The PWM
testing unit is linked into the closed  
control loop (e.g., via a suitable testing
adapter). This enables real-time diagnosis  
of the machine or system during operation.
The available functions depend on the
interface.



Commissioning via the PWM 21 and ATS software
67
Testing equipment and diagnostics

PWM 21 PWM 21
The PWM 21 phase-angle measuring unit,
together with the ATS adjusting and testing Encoder input • EnDat 2.1 or EnDat 2.2 (absolute value with or without
software, serves as an adjusting testing incremental signals)
package for the diagnosis and adjustment • DRIVE-CLiQ
of HEIDENHAIN encoders. • Fanuc Serial Interface
• Mitsubishi high speed interface
• Yaskawa Serial Interface
• SSI
• 1 VPP/TTL/11 µAPP

Interface USB 2.0

Supply voltage AC 100 V to 240 V or DC 24 V

Dimensions 258 mm x 154 mm x 55 mm

ATS

Languages Choice between English and German

Functions • Position display


• Connection dialog
• Diagnostics
For more information, see the PWM 21/ • Mounting wizard for the EBI/ECI/EQI, LIP 200, LIC 4100
ATS Software Product Information and others
document. • Additional functions (if supported by the encoder)
• Memory contents

System requirements PC (dual-core processor > 2 GHz)


and recommendations RAM > 2 GB
Operating system: Windows XP, Vista, 7 (32-bit/64-bit), 8, 10
200 MB of free hard disk space

DRIVE-CLiQ is a registered trademark of Siemens AG

PWT 100 PWT 100


The PWT 100 is a testing device for the
functional testing and adjustment of Encoder input • EnDat
incremental and absolute HEIDENHAIN Only for HEIDENHAIN • Fanuc Serial Interface
encoders. Thanks to its compact encoders • Mitsubishi high speed interface
dimensions and robust design, the PWT • Panasonic Serial Interface
100 is ideal for portable use. • Yaskawa Serial Interface
• 1 VPP with Z1 track
• 1 VPP
• 11 µAPP
• TTL

Display 4.3-inch touchscreen

Supply voltage DC 24 V
Power consumption: max. 15 W

Operating temperature 0 °C to 40 °C

Protection EN 60529 IP20

Dimensions  145 mm x 85 mm x 35 mm

68
Interface electronics

Interface electronics from HEIDENHAIN Input signals of the interface electronics Box design
adapt the encoder signals to the interface Interface electronics from HEIDENHAIN
of the subsequent electronics. They are can be connected to encoders with the
used when the subsequent electronics following sinusoidal signals: 1 VPP (voltage  
cannot directly process the output signals signals) or 11 μAPP (current signals).
from HEIDENHAIN encoders or when Encoders with the EnDat or SSI serial  
additional interpolation of the signals is interfaces can also be connected to various
necessary. interface electronics.

Output signals of the interface



electronics Plug design
There are interface electronics with the  
following interfaces to the subsequent
electronics:  
• TTL square-wave pulse trains
• EnDat 2.2  
• DRIVE-CLiQ
• Fanuc Serial Interface  
• Mitsubishi high speed interface
• Yaskawa Serial Interface  
• Profibus

Interpolation of the sinusoidal


input signals  
In addition to being converted, the sinusoidal
encoder signals are also interpolated in  
the interface electronics. This permits finer
measuring steps and, as a result, higher  
Version for integration
control quality and better positioning
behavior.  
Formation of a position value  
Some interface electronics have an
integrated counting function. Starting from  
the last set reference point, an absolute
position value is generated and output to

the subsequent electronics when the  
reference mark is traversed. Top-hat rail design











69
1)
Outputs Inputs Design – degree of Interpolation or subdivision Model
protection
Interface Quantity Interface Quantity

« TTL 1 » 1 VPP 1 Box design – IP65 5/10-fold IBV 101

20/25/50/100-fold IBV 102

Without interpolation IBV 600

25/50/100/200/400-fold IBV 660 B

Plug design – IP40 5/10/20/25/50/100-fold APE 371

Version for integration – 5/10-fold IDP 181


IP00
20/25/50/100-fold IDP 182

» 11 µAPP 1 Box design – IP65 5/10-fold EXE 101

20/25/50/100-fold EXE 102

Version for integration – 5-fold IDP 101


IP00

« TTL/ 2 » 1 VPP 1 Box design – IP65 2-fold IBV 6072


» 1 VPP
Adjustable 5/10-fold IBV 6172

5/10-fold and 20/25/50/100-fold IBV 6272

EnDat 2.2 1 » 1 VPP 1 Box design – IP65 † 16384-fold subdivision EIB 192

Plug design – IP40 † 16384-fold subdivision EIB 392

2 Box design – IP65 † 16384-fold subdivision EIB 1512

DRIVE-CLiQ 1 EnDat 2.2 1 Box design – IP65 – EIB 2391 S

Fanuc 1 » 1 VPP 1 Box design – IP65 † 16384-fold subdivision EIB 192 F


Serial Interface
Plug design – IP40 † 16384-fold subdivision EIB 392 F

2 Box design – IP65 † 16384-fold subdivision EIB 1592 F

Mitsubishi 1 » 1 VPP 1 Box design – IP65 † 16384-fold subdivision EIB 192 M


high speed
interface Plug design – IP40 † 16384-fold subdivision EIB 392 M

2 Box design – IP65 † 16384-fold subdivision EIB 1592 M

Yaskawa 1 EnDat 2.22) 1 Plug design – IP40 – EIB 3391Y



Serial Interface

PROFIBUS DP 1 EnDat 2.1; EnDat 2.2 1 Top-hat rail design – PROFIBUS


Gateway
1)
Switchable
2)
Only for the LIC 4100 with a 5 nm measuring step, or the LIC 2100 with a 50 nm or 100 nm measuring step

70


 
   


 


 
 

Vollständige und weitere Adressen siehe www.heidenhain.de

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NL HEIDENHAIN NEDERLAND B.V. ZA MAFEMA SALES SERVICES C.C.
CN DR. JOHANNES HEIDENHAIN 6716 BM Ede, Netherlands Midrand 1685, South Africa
(CHINA) Co., Ltd. www.heidenhain.nl www.heidenhain.co.za
Beijing 101312, China
www.heidenhain.com.cn NO HEIDENHAIN Scandinavia AB
7300 Orkanger, Norway
CZ HEIDENHAIN s.r.o. www.heidenhain.no
102 00 Praha 10, Czech Republic
www.heidenhain.cz NZ Llama ENGINEERING Ltd
5012 Wellington, New Zealand
DK TP TEKNIK A/S E-mail: info@llamaengineering.co.nz
2670 Greve, Denmark
www.tp-gruppen.dk

*I_208960-2F*
208960-2F · 7.5 · 05/2019 · F&W · Printed in Germany

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