The document describes modeling a membrane and beam structure to study vibrational modes. It outlines selecting materials, defining geometry, meshing, simulating eigenfrequencies of different vibration modes, and adding a piezoelectric ceramic. Key results shown are eigenfrequencies of 247.94 kHz for the fundamental mode of the membrane and 7.4962 kHz for the fundamental mode of the hole structure after adding a substrate. A parametric study on beam length shows longer beams have lower eigenfrequencies.
The document describes modeling a membrane and beam structure to study vibrational modes. It outlines selecting materials, defining geometry, meshing, simulating eigenfrequencies of different vibration modes, and adding a piezoelectric ceramic. Key results shown are eigenfrequencies of 247.94 kHz for the fundamental mode of the membrane and 7.4962 kHz for the fundamental mode of the hole structure after adding a substrate. A parametric study on beam length shows longer beams have lower eigenfrequencies.
The document describes modeling a membrane and beam structure to study vibrational modes. It outlines selecting materials, defining geometry, meshing, simulating eigenfrequencies of different vibration modes, and adding a piezoelectric ceramic. Key results shown are eigenfrequencies of 247.94 kHz for the fundamental mode of the membrane and 7.4962 kHz for the fundamental mode of the hole structure after adding a substrate. A parametric study on beam length shows longer beams have lower eigenfrequencies.
The document describes modeling a membrane and beam structure to study vibrational modes. It outlines selecting materials, defining geometry, meshing, simulating eigenfrequencies of different vibration modes, and adding a piezoelectric ceramic. Key results shown are eigenfrequencies of 247.94 kHz for the fundamental mode of the membrane and 7.4962 kHz for the fundamental mode of the hole structure after adding a substrate. A parametric study on beam length shows longer beams have lower eigenfrequencies.
Membrane Modeling 1. Goal Modeling a membrane and compare the results with theory . 2. Selecting physics We are going to work with solid Mechanics .In order to study the vibrational modes ,we are going to compute the eigenmodes using the eigenfrequency that we will change it to get the mode (5,5). The parameters of our membrane are: W:12mm L:12mm H:50µm
3. Geometry
4. Defining Material We have used Silicon as a material .Then, we have chosen the young’s modulus and the Poisson’s ratio : E=175GPa Nu=0.25 NB: If we add silicon we choose “add to component 1” if for example we choose “add to global materials” we don’t have the possibility to choose E and nu. 5. Meshing We have choosen the Meshing coarse
6. Membrane
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To build the well we made a block P1 :
W=1.95mm D=1.95mm H=50µm
Then we made a block P2 :
W=1.15mm D=1.15mm H=50µm
Then we calculate the difference .
7. Simulation Mode Frequency(khz) Result Fundamental 247.94
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(3,3) 72.66
(4,4) 207.66
(4,2) 126.5
(5,5) 337.15
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8. Adding piezoelectric ceramic
We add a piezoelectric ceramic PZT-H5 : W=10mm D=10mm H=127µm
9. The hole structure
We add a Si substrate: W=25mm D=30mm H=450µm
10. Simulation Mode Eigenfrequency Result fundamental 7.4962
(3.3) 84.73
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(4.4) 172.95
11. Conclusion We can notice that a different mode of vibration doesn’t affect the substrate. They affect only the membrane .This can be used when we want to manipulate only the membrane
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Beam Modeling 1. Parameters
H=350 µm W=50µm L=8µm 2. Geometry
3. Materials We use Silicon
4. Meshing
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Coarse
5. Simulation
6. Parametric study We modify the length of the beam .We have this results Length 100 200 400 Eigenfrequency 57.867 27.927 4.6969 (hz) Simulation
7. Conclusion When we the length of the beam increases, the eigenfrequency decreases .We can conclude that the variation of the length of the beam influence the vibration of the beam
