EE213 Topic01 Transistor

Download as pdf or txt
Download as pdf or txt
You are on page 1of 119

EE213

Digital Integrated Circuits II

Topic 01: Transistor Models


- What do digital IC designers need to know?
Prof. Pingqiang Zhou

ShanghaiTech University
School of Information Science and Technology

EE213-Topic01-Transistor.1 ShanghaiTech University


From Device/Wire to Circuit
 (Device) Transistor models (for manual analysis)
• Threshold voltage
• Static V-I model
• Dynamic R/C models

 Wire models
• Resistance
• Capacitance
• RC delay models

 (Circuit) Inverter
• Static response (VTC)
• Dynamic response (delay)
• Power/energy

EE213-Topic01-Transistor.2 ShanghaiTech University


Materials were Taken From
 UC Berkeley EECS
• EE141: Digital Integrated Circuits
• EE241: Advanced Digital Integrated Circuits

Chapter 2
Chapter 3

Chapter 4
EE213-Topic01-Transistor.3 ShanghaiTech University
A Good Reference Book

https://people.eecs.berkeley.edu/~hu/Book-Chapters-and-Lecture-
Slides-download.html
EE213-Topic01-Transistor.4 ShanghaiTech University
Transistor Models

EE213-Topic01-Transistor.5 ShanghaiTech University


Transistor Models (for Manual Analysis)
 What is transistor?
 Why modeling?
 Threshold voltage
 Static behavior: I-V characteristics
 Dynamic behavior: R/C-V characteristics

EE213-Topic01-Transistor.6 ShanghaiTech University


https://en.wikipedia.org/wiki/Front_end_of_line
ShanghaiTech University

https://en.wikipedia.org/wiki/Back_end_of_line
[IBM]

[Intel]

EE213-Topic01-Transistor.7
Semiconductor Materials

EE213-Topic01-Transistor.8 ShanghaiTech University


Dopants
 Silicon is a semiconductor
 Pure silicon has no free carriers and conducts poorly
 Adding dopants increases the conductivity
• Group V: extra electron (n-type)
• Group III: missing electron, called hole (p-type)

EE213-Topic01-Transistor.9 ShanghaiTech University


p-n Junctions
 A junction between p-type and n-type semiconductor
forms a diode
 Current flows only in one direction

EE213-Topic01-Transistor.10 ShanghaiTech University


Transistor Types – BJT
 Bipolar transistors
• n-p-n or p-n-p silicon structure
• Small current into very thin base layer
controls large currents between emitter
and collector
• Base currents limit integration density

NPN BJT with forward-biased E–B junction Simplified cross section of a planar
and reverse-biased B–C junction NPN bipolar junction transistor

https://en.wikipedia.org/wiki/Bipolar_junction_transistor#PNP
https://en.wikipedia.org/wiki/Transistor
EE213-Topic01-Transistor.11 ShanghaiTech University
Transistor Types – MOSFET
 Metal Oxide Semiconductor (MOS) Field Effect Transistors
• nMOS and pMOS MOSFETS
• Voltage applied to insulated gate controls current between source and
drain
• Low power allows very high integration

https://en.wikipedia.org/wiki/Field-effect_transistor
https://en.wikipedia.org/wiki/Transistor
EE213-Topic01-Transistor.12 ShanghaiTech University
nMOS Transistor
 Four terminals: gate, source, drain, body
 Gate – oxide – body stack looks like a capacitor
• Gate and body are conductors
• SiO2 (oxide) is a very good insulator
• Called metal – oxide – semiconductor (MOS) capacitor

Polysilicon Aluminum

EE213-Topic01-Transistor.13 ShanghaiTech University


Review: FinFET and GAA

EE213-Topic01-Transistor.14 ShanghaiTech University


nMOS Operation (1)
 Body is usually tied to ground (0 V)
 When the gate is at a low voltage:
• P-type body is at low voltage
• Source-body and drain-body diodes are OFF
• No current flows, transistor is OFF

Source Gate Drain


Polysilicon
SiO2

0
n+ n+
S D
p bulk Si

EE213-Topic01-Transistor.15 ShanghaiTech University


nMOS Operation (2)
 When the gate is at a high voltage:
• Positive charge on gate of MOS capacitor
• Negative charge attracted to surface
• Inverts a channel under gate to n-type
- Now current can flow through n-type silicon from source through
channel to drain, transistor is ON

Source Gate Drain


Polysilicon
SiO2

1
n+ n+
S D
p bulk Si

EE213-Topic01-Transistor.16 ShanghaiTech University


pMOS Transistor
 Similar, but doping and voltages reversed
• Body tied to high voltage (VDD)
• Gate low: transistor ON
• Gate high: transistor OFF
• Bubble indicates inverted behavior

EE213-Topic01-Transistor.17 ShanghaiTech University


Transistors as Switches
 We can view MOS transistors as electrically controlled
switches
 Voltage at gate controls path from source to drain

g=0 g=1

d d d
nMOS g OFF
ON
s s s

d d d

pMOS g OFF
ON
s s s

EE213-Topic01-Transistor.18 ShanghaiTech University


Cross-Section of Inverter Layout
VDD

A Y

GND

Want to know how to fabricate such complex things?


Read “device manufacturing” on the course page!

EE213-Topic01-Transistor.19 ShanghaiTech University


Layout of Two Chained Inverters
VDD VDD

M2
M4

Vin Vout Vout2

M1 M3

A
GND VDD
Y

n+ n+ p+ p+

n well
p substrate

nMOS transistor pMOS transistor

See http://www.vlsi-expert.com/2014/11/cmos-layout-design.html

EE213-Topic01-Transistor.20 ShanghaiTech University


Transistor Models (for Manual Analysis)
 What is transistor?
 Why modeling?
 Threshold voltage
 Static behavior: I-V characteristics
 Dynamic behavior: R/C-V characteristics

EE213-Topic01-Transistor.21 ShanghaiTech University


Switch Model of an MOS Transistor

EE213-Topic01-Transistor.22 ShanghaiTech University


Dynamic Analysis of CMOS Inverter
VDD

A Y

GND

EE213-Topic01-Transistor.23 ShanghaiTech University


Analysis of More Complex Inverter Chain

 Sizing for
• Area
• Delay
• Energy

EE213-Topic01-Transistor.24 ShanghaiTech University


Transistor I-V Modeling
 BSIM http://bsim.berkeley.edu/models/bsim4/
• Superthreshold and subthreshold models
• Need smoothening between two regions

 EKV/PSP https://en.wikipedia.org/wiki/Transistor_model

• One continuous model based on channel surface potential


EE213-Topic01-Transistor.25 ShanghaiTech University
Transistor Models (for Manual Analysis)
 What is transistor?
 Why modeling?
 Threshold voltage
 Static behavior: I-V characteristics
 Dynamic behavior: R/C-V characteristics

EE213-Topic01-Transistor.26 ShanghaiTech University


Threshold Voltage: Concept

EE213-Topic01-Transistor.27 ShanghaiTech University


Threshold Voltage: Physical Components

Four physical components:


1. Flat Band voltage V1 = VFB between
the gate and the channel

2. Change the surface potential at


inversion: V2 = s =
𝑘𝑇
,∅ =
𝑞

3. Offset the depletion region charge


(i.e., V3 = Qd/Cox)
4. Offset the fixed positive charges Qox
(due to imperfections) in the gate
oxide and in the silicon-oxide
interface (i.e., V4 = Qox/Cox)
EE213-Topic01-Transistor.28 ShanghaiTech University
Generalized Threshold Voltage ( )

Substrate-Bias
(or Body-Effect) coefficient

EE213-Topic01-Transistor.29 ShanghaiTech University


Effect of Body-Bias on Threshold Voltage

Figure 3-14
EE213-Topic01-Transistor.30 ShanghaiTech University
Dynamic Body Biasing
 Increase Vt during sleep

EE213-Topic01-Transistor.31 ShanghaiTech University


A Triple-Well Structure
 P-well allows to use different body voltages for the NMOS
gates

EE213-Topic01-Transistor.32 ShanghaiTech University


Exercise

EE213-Topic01-Transistor.33 ShanghaiTech University


Transistor Models (for Manual Analysis)
 What is transistor?
 Why modeling?
 Threshold voltage
 Static behavior: I-V characteristics
 Dynamic behavior: R/C-V characteristics

EE213-Topic01-Transistor.34 ShanghaiTech University


EE213-Topic01-Transistor.35 ShanghaiTech University
Transistor in Linear Mode

 In Linear region, Ids depends on


1. How much charge is in the channel
2. How fast is the charge moving

EE213-Topic01-Transistor.36 ShanghaiTech University


Channel Charge (Electrons for nMOS!)
 MOS structure looks like parallel plate capacitor while
operating in inversions
• Gate – oxide – channel
gate
Vg
+ +
source Vgs Cg Vgd drain
Vs - - Vd
channel
n+ - + n+
Vds
p-type body

 Qchannel = C V

C = Cg = eox/tox WL= Cox WL

Not the depletion capacitor! Vox(y) = Vgc(y) – Vt


(Vgs + Vgd)/2 – Vt
= (Vgs – Vds/2) – Vt
EE213-Topic01-Transistor.37 ShanghaiTech University
Carrier Velocity

 Charge is carried by e-, propelled by the lateral electric


field between source and drain
• E = Vds/L

 Carrier velocity v proportional to lateral E-field


• v = m E, m called mobility

 Time for carrier to cross channel:


• t = L/v

EE213-Topic01-Transistor.38 ShanghaiTech University


I-V in Linear Mode
gate
 Now we know +
Vg
+
• How much charge in the channel source Vgs Cg Vgd drain
Vs - - Vd
channel
• How much time to cross channel n+ - + n+
Vds
p-type body

EE213-Topic01-Transistor.39 ShanghaiTech University


Another Derivation: Charge Density along the Channel
 The channel potential varies with position along the channel

Areal inversion charge density


[in C/cm2]:

 The current flowing in channel:

EE213-Topic01-Transistor.40 ShanghaiTech University


I-V Summary
 Shockley 1st order transistor models

Vdsat Vgs – Vt

EE213-Topic01-Transistor.41 ShanghaiTech University


I-V Relations: An Ideal Transistor

𝐼
0 𝑉 <𝑉 cutoff
𝑉
𝛽 𝑉 −𝑉 − 𝑉 𝑉 <𝑉 linear
= 2
𝛽
𝑉 −𝑉 𝑉 >𝑉 saturation
2

EE213-Topic01-Transistor.42 ShanghaiTech University


Simulated 32nm Transistor
6.0E-04

L = 32nm
5.0E-04

4.0E-04

IDS[A] 3.0E-04 ~ Linear


2.0E-04

1.0E-04

0.0E+00
0.2 0.4 0.6 0.8 1.0

VDS[V]

EE213-Topic01-Transistor.43 ShanghaiTech University


Transistor Models (for Manual Analysis)
 What is transistor?
 Why modeling?
 Threshold voltage
 Static behavior: I-V characteristics
 Dynamic behavior: R/C-V characteristics

EE213-Topic01-Transistor.44 ShanghaiTech University


Primary Performance Metric of Logic Gates: Delay

input Vin
waveform Vin Vout

t
output
waveform Vout

t
EE213-Topic01-Transistor.45 ShanghaiTech University
Delay Definitions

Vin Vout

Vin Propagation delay


tp = (tpHL + tpLH)/2
input 50%
waveform

t
tpHL tpLH
Vout
90%
output
50% signal slopes
waveform
10%
t
tf tr

EE213-Topic01-Transistor.46 ShanghaiTech University


Review: Dynamic Analysis of Logic Gates

EE213-Topic01-Transistor.47 ShanghaiTech University


48 [Courtesy: UC Berkeley]
EE213-Topic01-Transistor.48 ShanghaiTech University
MOS Transistor as a Switch
Discharging a capacitor

vGS +
iDS vDS
- C

𝑖 =𝑖 𝑣 ,𝑣
,

EE213-Topic01-Transistor.49 ShanghaiTech University


Modeling Propagation Delay
 Model circuit as first-order RC network
VDD

Vin Vout
In Out

GND
R
vout vout (t) = (1 – e–t/)VDD,  = RC
C
Time to reach 50% point is
VDD t = ln(2)  = 0.69 
Time to reach 90% point is
t = ln(9)  = 2.2 

How to find equivalent R and C?


EE213-Topic01-Transistor.50 ShanghaiTech University
How to Find R?

Calculating MOS resistance:

[Rabaey, Ch 3.3]

EE213-Topic01-Transistor.51 ShanghaiTech University


Method One: By Integration
Traversed path

EE213-Topic01-Transistor.52 ShanghaiTech University


Method Two: Average

Averaging resistances:

EE213-Topic01-Transistor.53 ShanghaiTech University


Ron vs. VDD (Simulation Results)

or

EE213-Topic01-Transistor.54 [Rabaey, Ch 3.3] ShanghaiTech University


Exercise: Switching Trajectory (nMOS)

6.0E-04

5.0E-04

4.0E-04

IDS[A]
3.0E-04

2.0E-04

1.0E-04

0.0E+00
0.2 0.4 0.6 0.8 1.0
VDS[V]
EE213-Topic01-Transistor.55 ShanghaiTech University
MOS Capacitance

EE213-Topic01-Transistor.56 ShanghaiTech University


Component #1: Gate Capacitance
Lateral diffusion
(gate-drain overlap)

e ox Cap./unit area
Cox 
tox
Thickness of oxide

e ox
CG  WL
tox

EE213-Topic01-Transistor.57 ShanghaiTech University


Transistor in Cutoff

 When the transistor is off, no carriers in channel to form


the other side of the capacitor
• Substrate acts as the other capacitor terminal
• Capacitance becomes series combination of gate oxide and
depletion capacitance
- from gate -> body -> source/drain

EE213-Topic01-Transistor.58 ShanghaiTech University


Transistor in Linear Region

 Channel is formed and acts as the other terminal


• CGCB drops to zero (shielded by channel)

 Model by splitting oxide cap equally between source and


drain

EE213-Topic01-Transistor.59 ShanghaiTech University


Transistor in Saturation Region

 Changing source voltage doesn’t change VGC uniformly


– E.g. VGC at pinch off point still Vt
 Bottom line: CGCS ≈ 2/3·W·L·Cox
 Drain voltage no longer affects channel charge
• Set by source and VDS_sat
• If change in charge is 0, CGCD = 0

EE213-Topic01-Transistor.60 ShanghaiTech University


Component #1.1: Gate-to-Channel Capacitance

Operation CGCB CGCS CGCD CGC


Region
Cutoff CoxWLeff 0 0 CoxWLeff
Linear 0 CoxWLeff/2 CoxWLeff/2 CoxWLeff
Saturation 0 (2/3)CoxWLeff 0 (2/3)CoxWLeff

 Most important regions in digital design: Cutoff and Sat.

EE213-Topic01-Transistor.61 ShanghaiTech University


Gate-Channel Capacitance

Region of interest

VT

CGC as a function of VGS CGC as a function of the


(with VDS =0) degree of saturation

EE213-Topic01-Transistor.62 ShanghaiTech University


Exercise

An inverter (not shown in the figure) drives a PMOS device whose source, drain,
and body terminals are tied together. The PMOS is connected to the ground
through an ideal capacitor.
• Assume that the PMOS device has a sub-threshold swing S of 2×0.026×ln10
[V/dec] and a |Vt| of 0.5V. Ignore the gate-to-source and gate-to-drain overlap
capacitances. The supply voltage of the inverter is 1.0V.
• When VN is initialized to 0V and a low-to-high input signal is applied to the
inverter, VN is boosted down to -0.5V via the capacitive coupling effect.
What would be the VN voltage after the boosting if the initial VN voltage is 1.0V
instead of 0V?
Hint: For a MOS transistor working in the subthreshold regime, its sub-threshold
swing S can be approximated as S = 0.026×ln10×(1 + Cd/Cox) [V/dec], where Cd
is the deletion region capacitance, and Cox is the gate oxide capacitance.

EE213-Topic01-Transistor.63 ShanghaiTech University


Component #1.2: Gate Overlap Capacitance

OFF/LIN/SAT

EE213-Topic01-Transistor.64 ShanghaiTech University


Component #1.3: Gate Fringe Capacitance

 COV not just from metallurgic overlap – get fringing


fields too
 Typical value: ~0.2fF·W(in µm)/edge

EE213-Topic01-Transistor.65 ShanghaiTech University


Question: How to Measure the Gate Capacitance?

EE213-Topic01-Transistor.66 ShanghaiTech University


Component #2: Diffusion/Junction Capacitance
[Neil’s book, Ch. 2.3.1]

EE213-Topic01-Transistor.67 ShanghaiTech University


Junction Capacitance

EE213-Topic01-Transistor.68 ShanghaiTech University


Capacitance Model Summary

EE213-Topic01-Transistor.69 ShanghaiTech University


EE213-Topic01-Transistor.70 ShanghaiTech University
BSIM4 4.8.1 MOSFET Model (Released@2017/2/15)

EE213-Topic01-Transistor.71 ShanghaiTech University


Transistor Models

EE213-Topic01-Transistor.72 ShanghaiTech University


Ideal vs. Simulated nMOS I-V Plot
𝐼
 65 nm IBM process, VDD = 1.0 V 0 𝑉 <𝑉 cutoff
𝑉
𝛽 𝑉 −𝑉 − 𝑉 𝑉 <𝑉 linear
= 2
𝛽
𝑉 −𝑉 𝑉 >𝑉 saturation
2

EE213-Topic01-Transistor.73 ShanghaiTech University


ON/OFF Current
gate
Vg
+ +
source Vgs Cg Vgd drain
Vs - - Vd
channel
n+ - + n+
Vds
p-type body

 Ion = Ids @ Vgs = Vds = VDD


• Saturation

 Ioff = Ids @ Vgs = 0, Vds = VDD


• Cutoff

EE213-Topic01-Transistor.74 ShanghaiTech University


A Modern Sub-100nm Look of an MOS

EE213-Topic01-Transistor.75 ShanghaiTech University


EE213-Topic01-Transistor.76 ShanghaiTech University
Non-ideal Transistor Behaviors
 #1: High Field Effects
• Mobility Degradation
• Velocity Saturation

 #2: Channel Length Modulation


 #3: Threshold Voltage Effects
• Body Effect
• Drain-Induced Barrier Lowering
• Short Channel Effect

 #4: Leakage
• Subthreshold Leakage
• Gate Leakage
• Junction Leakage

 #5: Process and Environmental Variations


EE213-Topic01-Transistor.77 ShanghaiTech University
Issue #1: Electric Fields Effects
gate
Vg
+ +
source Vgs Cg Vgd drain
Vs - - Vd
channel
n+ - + n+
Vds
p-type body

 Vertical electric field: (max) Evert = Vgs/tox


• Attracts carriers into channel
• Long channel: Qchannel  Evert How about
 Lateral electric field: Elat = Vds/L short channel?
• Accelerates carriers from drain to source
• Long channel: v = mElat
EE213-Topic01-Transistor.78 ShanghaiTech University
Mobility Degradation
 High Evert effectively reduces mobility
• Collisions with oxide interface

K. Chen, C. Hu, P. Fang, M. R. Lin and D. L. Wollesen, "Predicting CMOS speed with gate oxide and
voltage scaling and interconnect loading effects," in IEEE Transactions on Electron Devices, vol. 44,
no. 11, pp. 1951-1957, Nov 1997.
EE213-Topic01-Transistor.79 ShanghaiTech University
Velocity Saturation
 At high Elat, carrier velocity rolls off
• Carriers scatter off atoms in silicon lattice
• Velocity reaches vsat
- Electrons: 107 cm/s
- Holes: 8 x 106 cm/s

 Velocity model (nonlinear!)

/
/

when

EE213-Topic01-Transistor.80 ShanghaiTech University


Simple Model for Velocity Sat.
 Approximate velocity (n = 1):

Integrate current again (in linear region)

In deep submicron, there are four regions of operation:


(1) cut off, (2) linear, (3) velocity sat., (4) current sat.

EE213-Topic01-Transistor.81 ShanghaiTech University


Simple Model for Velocity Sat.
Region I: Linear 𝑫𝑺 𝑫𝑺𝑨𝑻

Region II: Velocity Saturation


I II
(VDS 𝑫𝑺𝑨𝑻 )
𝑫𝑺𝑨𝑻
𝐼 =𝑣 ⋅𝐶 ⋅ 𝑊 ⋅ [𝑉 − 𝑉 − 𝑉’ ]

C. G. Sodini, P.-K. Ko and J. L. Moll, "The effect of high fields on MOS device and
circuit performance," in IEEE Transactions on Electron Devices, vol. 31, no. 10,
pp. 1386-1393, Oct 1984.

 We re-define the saturation voltage VDSAT to be 𝑫𝑺𝑨𝑻 , the drain


voltage at which the carriers at drain become velocity saturated
• Corresponds to the point at which the lateral electric field at the drain
end of the channel becomes equal to the critical field EC.
EE213-Topic01-Transistor.82 ShanghaiTech University
Simple Model for Velocity Sat.
Region I: Linear 𝑫𝑺 𝑫𝑺𝑨𝑻

Region II: Velocity Saturation


I II
(VDS 𝑫𝑺𝑨𝑻 )
𝑫𝑺𝑨𝑻
𝐼 =𝑣 ⋅𝐶 ⋅ 𝑊 ⋅ [𝑉 − 𝑉 − 𝑉’ ]
 Continuity at VDS = V’DSAT

’ ’

<1
’ < VGS - Vt
EE213-Topic01-Transistor.83 ShanghaiTech University
Velocity Sat. vs. Current Sat.
 Velocity saturation always occurs at LOWER VDS than
current saturation

EE213-Topic01-Transistor.84 ShanghaiTech University


Long Channel vs. Short Channel

L = 2.5 mm L = 0.25 mm

 Short channel transistors: early saturation, less VDS for


same VGS.

EE213-Topic01-Transistor.85 ShanghaiTech University


vs.
 Qquadratic relation for long channel transistors
 Linear relation for short channel transistors

EE213-Topic01-Transistor.86 ShanghaiTech University


a-Power Model

𝛽
𝐼 =𝑃 𝑉 −𝑉
2
/
𝑉 =𝑃 𝑉 −𝑉

[Neil, p78] [Sakurai, Newton, JSSC 1990]


EE213-Topic01-Transistor.87 ShanghaiTech University
Issue #2: Channel Length Modulation (CLM)
 For Sub-micron transistors, we cannot neglect the pinch-off
region (L) any more - effective channel length changes!

 Since L < L,
Why?

 Modified I-V characteristics with CLM

EE213-Topic01-Transistor.88 ShanghaiTech University


Issue #3: Threshold Voltage Effects
 Vt = Vgs @which the channel starts to invert
 Ideal models assume Vt to be constant
 Really depends (weakly) on almost everything else:
• Body voltage: Body Effect
• Drain voltage: Drain-Induced Barrier Lowering (DIBL)
• Channel: Short/Narrow Channel Effect (ref. to Neil’s book)
- Vt varies with channel length and width

EE213-Topic01-Transistor.89 ShanghaiTech University


DIBL
 Drain-Induced Barrier Lowering (DIBL)

• High drain voltage causes current to increase


[Chenming Hu, Ch07]

Narain Arora. Mosfet Modeling for VLSI Simulation: Theory and Practice. World Scientific. pp.197, 2007.
EE213-Topic01-Transistor.90 ShanghaiTech University
Exercise: How to Extract ?

A. Ortiz-Conde et al., A review of recent MOSFET threshold voltage extraction


methods, Microelectronics Reliability, vol. 42, no. 4–5, pp. 583-596, 2002.

EE213-Topic01-Transistor.91 ShanghaiTech University


Issue #4: Leakage
 What about current in cutoff region?
• Current doesn’t go to 0 in cutoff!

EE213-Topic01-Transistor.92 ShanghaiTech University


Leakage Components
• : Weak inversion (sub-threshold)
• : Drain-induced barrier lowering
(DIBL)
• : Narrow width effect
• : Gate oxide tunneling
• : Hot carrier injection
• : pn junction reverse bias current
• : Gate-induced drain leakage
(GIDL)
• : Punchthrough

.35μm node, .25μm , W=20μm


EE213-Topic01-Transistor.93 ShanghaiTech University
Issue #5: Temperature Sensitivity
 Increasing temperature
• Reduces mobility
• Reduces Vt

 ION normally decreases with temperature


 IOFF increases with temperature

I ds

increasing
temperature

Vgs

EE213-Topic01-Transistor.94 ShanghaiTech University


Next Lecture
 Wire models

Chapter 4

EE213-Topic01-Transistor.95 ShanghaiTech University


Further Reading

EE213-Topic01-Transistor.96 ShanghaiTech University


EE213-Topic01-Transistor.97 [Chenming Hu, Ch05] ShanghaiTech University
[Chenming Hu, Ch05]
EE213-Topic01-Transistor.98 ShanghaiTech University
Another Derivation: Charge Density along the Channel
 The channel potential varies with position along the channel

Areal inversion charge density


[in C/cm2]:

 The current flowing in channel:


 The carrier drift velocity at position , , is

mn is the electron mobility

EE213-Topic01-Transistor.99 ShanghaiTech University


Drain Current ID (for VDS<VGS-Vt)

Integrating from source to drain:

EE213-Topic01-Transistor.100 ShanghaiTech University


Transistor in Saturation
 If Vgd < Vt, channel pinches off near drain
• When Vds > Vdsat Vgs – Vt
• Under the influence of the lateral electric field E, carriers drift from
the source (through the inversion layer channel) toward the drain

EE213-Topic01-Transistor.101 ShanghaiTech University


Switching Trajectory [Contd.]

IL = IDS(VGS=VDD/2, VDS=VDD)
Define Ieff = (IH + IL)/2,
IH = IDS(VGS=VDD, VDS=VDD/2)
M. H. Na, et al., “The effective drive current in CMOS inverters”, IEDM 2002.
EE213-Topic01-Transistor.102 ShanghaiTech University
Transistors Never in Linear Region During Switching?
 At this given particular snapshot, all series transistors are
in the linear region!

Klaus Von Arnim et al., “An effective switching current methodology to predict
the performance of complex digital circuits”, IEDM 2007.

EE213-Topic01-Transistor.103 ShanghaiTech University


Velocity Saturation I-V Effects
 Ideal transistor ON current increases with V2DD

 Velocity-saturated ON current increases with VDD

 Real transistors are partially velocity saturated


• Approximate with a-power law model
• Ids  VDDa
• 1 < a < 2 determined empirically (≈ 1.3 for 65 nm)

EE213-Topic01-Transistor.104 ShanghaiTech University


Short-Channel MOSFET ID-VDS

P. Bai et al. (Intel Corp.),


Int’l Electron Devices Meeting, 2004.

 ID,sat is proportional to VGS-Vt rather than (VGS-Vt)2


 VD,sat is smaller than VGS-Vt

EE213-Topic01-Transistor.105 ShanghaiTech University


Subthreshold Leakage (I2) + DIBL (I3)
 Exponential subthreshold leakage with Vgs

•n is process dependent
‒ typically 1.3-1.7

 Rewrite relative to Ioff on log scale

• S ≈ 100 mV/decade @ room temperature


• Lower bound: 60 mV/decade @ room temperature

EE213-Topic01-Transistor.106 [Chapter 2.4.4 in Neil’s book] ShanghaiTech University


Gate (Direct) Tunneling Leakage (I7)
 Carriers tunnel through thin gate oxides
• FN tunneling: at high voltage/moderate 𝑡
• Direct tunneling: at low voltage/small 𝑡

 Exponentially sensitive to tox and VDD

• A and B are tech. constants


• Greater for electrons
- So nMOS gates leak more

 Negligible for older processes (tox > 20 Å)


 Critically important at 65 nm and below
(tox ≈ 10.5 Å)

From [Song01]

EE213-Topic01-Transistor.107 ShanghaiTech University


Junction Leakage (I1, I5, I4)
 Reverse-biased p-n junctions have some leakage
• Ordinary diode leakage (I1)
• Band-to-band tunneling (BTBT, I5)
• Gate-induced drain leakage (GIDL, I4)

Xj: sidewall junction depth


Eg: bandgap voltage

EE213-Topic01-Transistor.108 ShanghaiTech University


I4 : Gate-Induced Drain Leakage (GIDL)
 Occurs at overlap between gate and drain
• Most pronounced when drain is at VDD, gate is at a negative
voltage
• Thwarts efforts to reduce subthreshold leakage using a negative
gate voltage

EE213-Topic01-Transistor.109 ShanghaiTech University


Physical Limits in Scaling Si MOSFET

Net result: Bulk-Si CMOS device performance increase


commensurate with size scaling is unlikely beyond 65nm
generation.
EE213-Topic01-Transistor.110
[Source: Stanford, EE410, 2009] ShanghaiTech University
Lg scaling
10 10000

Nominal feature size

1 250nm 1000
0.7X every 2
180nm
years

130nm nm
mm
90nm
Gate Length 65nm
45nm
0.1 100
32nm
70nm
22nm
50nm
35nm
~30nm

0.01 10
1970 1980 1990 2000 2010 2020

 With scaling L, need to scale up doping - scale junction


depth (control leakage) – S/D resistance goes up
 External resistance limits current

EE213-Topic01-Transistor.111 ShanghaiTech University


Parasitic Capacitance Scaling

Reality: Overlap + fringe can be 50% of Cchannel in 32nm


EE213-Topic01-Transistor.112 S. Thompson, Materials Today, 2006. ShanghaiTech University
Problems in Scaling of Gate Oxide

EE213-Topic01-Transistor.113
Source: Stanford, EE410, 2009 ShanghaiTech University
Where Performance Comes From

EE213-Topic01-Transistor.114 ShanghaiTech University


Mobility Enhancements in Strained-Si MOSFETs

EE213-Topic01-Transistor.115
Source: Stanford, EE410, 2009 ShanghaiTech University
Hi-k/Metal gate

K. Mistry, IEDM’07

Replacement gate technology (Intel)

S. Natarajan, IEDM’08

EE213-Topic01-Transistor.116 ShanghaiTech University


New Structures/Materials for Nanoscale MOSFETs

EE213-Topic01-Transistor.117
Source: Stanford, EE410, 2009 ShanghaiTech University
Non-Classical Scaling

EE213-Topic01-Transistor.118 [Intel, Bohar] ShanghaiTech University


Silicon on Insulator (SOI)
Advantages:
• Elimination of the capacitance between
source/drain regions and body, leading
to higher speed.
• Lower threshold voltage due to smaller
carrier concentration n
Drawback:
• Floating body -> time dependent threshold
variations

EE213-Topic01-Transistor.119 ShanghaiTech University

You might also like