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    MEMS Gyroscope

    Uploaded by

    Ahmed Mawrdy
    introduction to MEMS Gyroscope

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd

    MEMS Gyroscope

    Uploaded by

    Ahmed Mawrdy
    6 views3 pages
    introduction to MEMS Gyroscope

    Copyright

    © © All Rights Reserved

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    PDF, TXT or read online from Scribd

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    introduction to MEMS Gyroscope

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    6 views3 pages

    MEMS Gyroscope

    Uploaded by

    Ahmed Mawrdy
    introduction to MEMS Gyroscope

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    You are on page 1of 3

    Mansoura University

    Faculty of Engineering
    Production Engineering & Mechanical Design
    Department

    Course Name: Production Laboratory

    Instructor Name: Dr. Mohamed El-Keran

    Subject: MEMS Gyroscope

    Student name: Ahmed Mohamed elshahat


    Serial no. (7)
    Introduction
    Micro-Electro-Mechanical Systems (MEMS) gyroscopes are a type of
    sensor that is used to measure angular velocity and rotation. They
    are widely used in various applications such as navigation, motion
    sensing, and stabilization in aerospace, automotive, and consumer
    electronics industries. MEMS gyroscopes are small, lightweight, and
    low-power devices that are capable of measuring angular motion
    with high accuracy and precision.

    working principle
    The working principle of MEMS gyroscopes is based on the Coriolis
    effect, which is a phenomenon that occurs when a rotating object
    experiences a force perpendicular to its direction of motion. In
    MEMS gyroscopes, a vibrating mass is suspended in a frame, and
    when the frame experiences angular motion, the vibrating mass is
    deflected due to the Coriolis effect. The deflection of the vibrating
    mass is then measured by a set of capacitive or piezoelectric sensors,
    which convert the mechanical motion into an electrical signal. The
    amplitude and phase of the electrical signal are proportional to the
    angular velocity and direction of rotation, respectively.

    design of MEMS gyroscopes


    The design of MEMS gyroscopes is critical to their performance,
    and there are several factors that need to be considered. The size
    and shape of the vibrating mass, the frequency and amplitude of
    the vibration, and the type of sensor used all affect the sensitivity,
    accuracy, and stability of the device. MEMS gyroscopes are
    typically fabricated using silicon-based microfabrication
    techniques, which allow for high precision and reproducibility. The
    fabrication process involves etching and deposition of thin films of
    materials such as silicon, metal, and dielectrics, and the assembly
    of the components using wafer bonding and packaging
    techniques.
    Advantages
    MEMS gyroscopes have several advantages over traditional
    mechanical gyroscopes, such as their small size, low power
    consumption, and high reliability. They are also more cost-effective
    and easier to integrate with other electronic components, making
    them ideal for mass production and commercial applications. MEMS
    gyroscopes are used in a wide range of devices, including
    smartphones, gaming consoles, drones, and autonomous vehicles,
    where they provide critical information for navigation, orientation,
    and stabilization.

    Conclusion
    In conclusion, MEMS gyroscopes are an essential component of
    modern technology, providing accurate and reliable measurements
    of angular motion in a small and lightweight package. They are
    widely used in various applications, from consumer electronics to
    aerospace, and their performance is constantly improving due to
    advances in microfabrication and sensor technology. MEMS
    gyroscopes are a testament to the power of miniaturization and the
    ingenuity of human engineering, and they will continue to play a
    vital role in shaping the future of technology.

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