Lapaz: Calibration of Optical Particle Counters
Lapaz: Calibration of Optical Particle Counters
Lapaz: Calibration of Optical Particle Counters
The national primary standard at METAS is directly traceable to METAS: The National Metrology Institute of Switzerland
SI-units and stands therefore at the cutting edge of the meas The Federal Institute of Metrology METAS is the National Metrology
urement pyramid. Institute of Switzerland. It represents the state of the art of mea
Particle number concentrations as low as 0.5 cm–3 can be gener suring accuracy in Switzerland. Through its activities in research
ated and measured with an expanded relative uncertainty be and development and its range of services, METAS is instrumental
tween 5 % and 10 %. in ensuring that measurements can be performed in Switzerland
at the level of accuracy demanded by industry, research, adminis
tration and society.
10 4
Calibration
FCE
Particle number concentrations CN/cm–3
according to CPC
METAS realises the Swiss reference standards, ensures their inter
10 3
ISO 27891 Not a primary
standard
national recognition and disseminates them with the requisite
Calibration of optical
particle counters
Extrapolation factor
20... > 1000!!!
No. 1 | 10.2018
Interested in the testing and measurement
capabilities of these METAS facilities?
Contact us with questions or a visit request.
METAS is the first metrology institute worldwide to provide cali
bration of optical particle counters in the range from 0.1 μm to
10.0 μm, traceable to SI-units.
Air supply
According ISO 14644-1 the air quality in clean rooms and similar Homogenised monodisperse
PSL-aerosol
environments is defined by the number of smallest particles per
cubic meter of air. Clean rooms are categorized into nine classes
based on the particle number concentration and particle size.
Here, it must be noted that even the lowest particle number con
centrations can be crucial in clean rooms.
Sheath air supply
10 8
ISO c
10 7 lass 9
ISO c Data acquisition;
10 6 lass 8 DUT 1.19 cm–3 calculations;
ISO c
Particle per m3