I Section

I
Optical Measuring
Profile Projectors INDEX

Profile Projectors
PJ-A3000-Vertical I-2,3
PJ-H30-High Accuracy I-4,5
PV-5110 I-6,7
PH-A14 I-8,9
PH-3515F I-10,11
Microscopes Accessories for Profile Projectors I-12
Micrometer Heads for Profile Projectors and I-12
Toolmakers’ Microscopes
Workpiece Fixtures for Profile Projectors and I-13
Measuring Microscopes
Overlay Chart Set I-14
Quick Guide to Precision Measuring I-15
Instruments - Profile Projectors
Microscopes
TM-505B/1005B Toolmakers’ Microscopes I-16
MF Measuring Microscopes I-17,18
MF Motorized Type I-19
MF-U High-power Multi-function I-20,21
MF-U Motorized Type Universal I-22
Accessories for Measuring Microscope I-23,24
QM-Data200 2-D Processing Unit I-25,26
Vision Unit System Retrofit I-27
FS-70 For Semiconductor Inspection I-28
VMU Video Microscope Unit I-29
Eyepieces I-30
Objectives I-30-34
MSM-400 Stereo Microscopes I-35-38
Pocket Magnifiers I-39
MF-B3017D Pocket Comparators I-39
Zoom Loupe I-39
Clear Loupe I-39
Quick Guide to Precision Measuring I-40,41
Instruments - Microscopes
WIDE VMU-V
MF-UB4020D
VMU-LB VMU-L4B
I-1
PJ-A3000
SERIES 302 — Vertical Profile Projectors
FEATURES
• The PJ-A3000 Series vertical profile
projectors are medium-size 11.8” (300mm)
models that feature high versatility and
easy operation.
• Easy-to-read digital XY counter is located
near the projection screen to minimize eye
movement.
• Digital readout protractor screen facilitates
angle measurement.
PJ-A3000 PROFILE PROJECTOR
OPTICAL MEASURING
A series of midsize vertical profile projectors
Bulletin No. 2021(2)
Refer to Bulletin No. (2021) for more details.
Projection Capacity
D1: Max. workpiece diameter

whose edge line can be focused
on the screen center
D2: Max. workpiece Working
diameter whose edge W distance
line can be focused on D1
the screen line D2 Max. workpiece
H height
PJ-A3010F-200
Magnification
PJ-A3005D-50 PJ-A3010F-100 10X 20X 50X 100X
View field ø31.5 ø15.7 ø6.3 ø3.1
W 66 (20) 32.5 (2) 12.6 5
H -50 models* 123.5 123.5 123.5 123.5
-100 models 91 91 91 91
-150 models 103.5 103.5 103.5 103.5
200 models 92.5 92.5 92.5 92.5
PJ-A3005F-150 PJ-A3010F-200 D1 -50 models* 224 (198) 87 (61) 27 10
-100 models 182 87 (61) 27 10
-150 models 207 (198) 87 (61) 27 10
200 models 185 87 (61) 27 10
D2 154 (120) 69 (23) 25 10
( ): When using surface illumination
I-2
SPECIFICATIONS
Optional Accessories
172-202: 10X projection lens set (Standard accessory)
172-203: 20X projection lens set
172-223: 10X projection lens Model PJ-A3010F-200 PJ-A3005F 150 PJ-A3010F-100 PJ-A3005D-50
172-224: 20X projection lens Order No. 302-701A 302-702A 302-703A 302-704A
172-204: 50X projection lens Projected Inverted image
172-207: 100X projection lens image
172-229: Oblique illumination mirror for 10X lens
172-230: Oblique illumination mirror for 20X lens Protractor Effective 12.4” / 315mm
172-116: Standard scale (50mm) screen diameter
172-117: Standard scale (2") Screen material Fine ground glass
172-118: Reading scale (200mm) Reference line Cross hair line
172-161: Reading scale (300mm) Angle display Resolution: 1° or 0.01° (switchable), Range: ±360°
172-119: Reading scale (8") (LED) Functions: Absolute/incremental mode switching, Zero Set
172-162: Reading scale (12")
172-160-2: Green filter (for PJ-A3000, -50 models) Projection lens Standard Accessory 10X (172-202)
172-160-3: Green filter (for -100, -150, -200 models) Magnification Contour ±0.1% or less
512305: Halogen bulb (24V, 150W) accuracy illumination
383876: Vinyl cover (standard accessory) Surface ±0.15% or less
illumination
Fixture and Stage Accessories
176-106: Rotary table (Effective diameter: 66mm) Contour Light source Halogen bulb (24V, 150W)
172-196: Rotary table (Effective diameter: 100mm) illumination Optical system Telecentric system
172-198: Rotary table with fine feed wheel Functions 2-stage brightness switch, Heat-absorbing filter
(Effective diameter: 4” / 100mm)
176-105: Swivel center support Surface Light source Halogen bulb (24V, 150W)
(Max. workpiece dia.: 2.7” / 70mm) illumination Optical system Vertical illumination with a half-reflection mirror
172-197: Swivel center support XY range 8” x 4” 6” x 2” 4”x 4 2” x 2”
(Max. workpiece dia.: 3.1” / 80mm) (200 x 100mm) (150 x 50mm) ” (100x100mm) (50 x 50mm)
176-107: Holder with clamp Resolution .0001” / 0.001mm .0001” / 0.001mm .0001” / 0.001mm .0001”/0.001mm
172-378: V-block with clamp
(Max. workpiece dia.: 1” / 25mm) Measuring Unit Built-in linear scales Built-in linear scales Built-in linear scales Digimatic mic heads
176-317: Stage adapter C Table size 14.96x9.84” 11.02x5.98” 9.84x9.84” 5.98x5.98”
64PMI167: Stand 22.4 x 20 x 32” (WxDxH) (380x250mm) (280x152mm) (250x250mm) (152x152mm)
Effective table 10.47x6.69” 7.24x3.23” 5.6x5.6” 3.23x3.23”
PJ-A3005D-50 PJ-A3005F-150 PJ-A3010F-100 area (266x170mm) (184x82mm) (142x142mm) (82x82mm)
Availability
PJ-A3010F-200 Max. workpiece 3.64” 4.07” 3.58” 4.86”
176-106 4 4 height (92.5mm) (103.5mm) (91mm) (123.5mm)
172-196 4 4* Functions ± direction switching, Zero-setting, ± direction Zero-setting, ± ± direction switching,
172-198 4 4* SPC output switching, SPC output direction switching, SPC output
176-105 4 zero-setting SPC output zero-setting
172-197 4 4* Power supply 120V AC, 50/60Hz
176-107 4 4 4* Mass 308 lbs. (140kg) 255 lbs. (116kg) 246 lbs. (112kg) 235 lbs. (107kg)
172-378 4 4 4* Standard 10X projection lens set, masking shield, power cord,
accessories halogen bulb, fuse, grounding wire, allen wrench, vinyl cover
* Stage adapter C (176-317) is required for PJ-3010F-200
DIMENSIONS
Unit: mm
400 (15.7”) 741 (29.2”)
1093 (43”)
QM-Data200
264-155A: Stand-mount type
854 (33.6”)
264-156A: Arm-mount type

2-D data processing unit.
(Refer to page I-25 for more details.)
A 706 (27.8”)
332-151: Optoeye
Edge detection system for QM-Data200 Model PJ-A3005D-50 PJ-A3010F-100 PJ-A3005F-150 PJ-A3010F-200
12AAE671: Detector Attachment A 17.9” / 455mm 16.8” / 427mm 17.6” / 446mm 23.3” / 593mm
I-3
PJ-H30
SERIES 303 — High-Accuracy Profile Projectors
By separating axial motion, and stabilizing FEATURES

the XY measuring table in the vertical • Newly designed optical system with high
direction, high measuring accuracy of NA lenses provides drastically brighter
(3+0.02L)µm has been achieved on the PJ- and clearer screen images during surface
H30 Series Profile Projectors. Focusing is illumination.
accomplished by moving the screen head • The three-lens mounting turret includes
itself up and down with the hand wheel a 10X lens as standard. Four types of
or motorized unit. The power focusing (PJ- projection lenses (5X, 20X, 50X, 100X) are
H30D type) provides higher performance. available.
Switchable surface illumination:

vertical or oblique
Vertical illumination
Oblique illumination
Projection Capacity
PJ-H30A3017B
XY stage travel range: 12x7” / 300x170mm
Max. workpiece
diameter whose edge
line can be focused on W Working distance
the screen center
D
Max.
H workpiece
height
Unit: mm
Magnification
5X 10X 20X 50X 100X
View field ø61.2 ø30.6 ø15.3 ø6.12 ø3.06
H 105 105 105 105 105
W 66 70.5 56.5 50 50
D 148 197 137 114 114
I-4
172-271: 5X projection lens
172-472: 10X projection lens (standard accessory)
172-473: 20X projection lens Manual Focus type Model No. PJ-H30A1010B PJ-H30A2010B PJ-H30A2017B PJ-H30A3017B
172-474: 50X projection lens Order No. 303-712-1A 303-713-1A 303-714-1A 303-715-1A
Power Focus, Model No. PJ-H30D1010B PJ-H30D2010B PJ-H30D2017B PJ-H30D3017B
172-116: Standard scale (50mm) built-in OPTOEYE type Order No.
172-117: Standard scale (2") 303-732-1A 303-733-1A 303-734-1A 303-735-1A
172-118: Reading scale (200mm) Projected Image Erect image
172-161: Reading scale (300mm) Protractor screen Effective diameter 12” / 306mm
172-162: Reading scale (12") Screen material Fine ground glass
12AAG981: Green filter Reference line Cross hair line
172-269: Machine stand Screen rotation ±360°, fine feed and clamp
512305: Halogen bulb (24V, 150W) (standard accessory) Angle display (LED) Resolution: 1° or 0.01° (switchable), Range: ±370°,
383876: Vinyl cover (standard accessory) Functions: Absolute/incremental mode switching, Zero set
Fixture and Stage Accessories Projection lens Standard accessory: 10x (172-472), Optional accessories: 2X, 5X, 20X, 50X, 100X
172-198: Rotary table (Effective diameter: 4” / 100mm) Lens mount 3-lenses mounting turret
176-305: Rotary table (Effective diameter: 7.2” / 183mm) Magnification Contour illumination ±0.1% or less
176-306: Rotary table (Effective diameter: 9.4” / 240mm) accuracy Surface illumination ±0.15% or less
176-105: Swivel center support
(Max. workpiece dia.: 2.8” / 70mm) Contour Light source Halogen bulb (24V 150W)
172-197: Swivel center support illumination Optical system Zoom telecentric system
(Max. workpiece dia.: 3.1” / 80mm) Functions Brightness adjustment, Heat-absorbing filter, Cooling fan
176-107: Holder with clamp
172-378: V-block with clamp Surface Light source Halogen bulb (24V 150W)
(Max. workpiece dia.: 1” / 25mm) illumination Optical system Vertical / Oblique illumination with an adjustable condenser lens
176-317: Fixture mount adapter C Functions Non-stepped brightness adjustment, Heat-absorbing filter, Cooling fan
176-304: Fixture mount adapter A XY Range 4 x 4” 8 x 4” 8 x 6.7” 12 x 6.7”
100 x 100mm 200 x 100mm 200 x 170mm 300 x 170mm
Availability Models Resolution .0001” / 0.001mm
PJ-H30A1010B PJ-H30A2017B Measuring unit Built-in Linear scale
PJ-H30D1010B PJ-H30D2017B Table size 11.8 x 9.4” 13.8 x 11” 16.1 x 13.5” 20 x 13.5”
300 x 240mm 350 x 280mm 410 x 342mm 510 x 342mm
PJ-H30A2010B PJ-H30A3017B
Effective table area 7.1 x 5.9” 9.8 x 5.9” 10.6 x 9.4” 14.6 x 9.4”
PJ-H30D2010B PJ-H30D3017B
180 x 150mm 250 x 150mm 270 x 240mm 370 x 240mm
172-198 4** 4**** Max. workpiece ht. 4.1” / 105mm
176-305 4** Max. workpiece load 22lbs / 10kg 22lbs / 10kg 44 lbs / 20kg 44 lbs / 20kg
176-306 4**** Power supply 120V AC, 50/60Hz
176-107 * 4** 4**** Mass 391lbs / 176kg 396lbs / 178kg 556lbs / 205kg 471lbs / 212kg
172-378 * 4** 4**** Standard accessories 10X projection lens set, masking shield, power cord, halogen bulb, tube fuse,
172-197 * 4** 4**** grounding wire, allen wrench, vinyl cover
176-105 4*** 4***
*: Able to attach to a Rotary table 172-198 or 176-305
(172-197 can only attach to 176-305).
**: Fixture mount adapter C (176-317) is required.
***: Rotary table (172-198) is required.
****: Fixture mount adapter A (176-304) is required.
DIMENSIONS
382 (15.0”) 796 (31.3”)
Unit: mm
985 - 1090 (38.8-42.9”)
480 - 585 (18.9-23”)
QM-Data200
264-156A: Arm-mount type*
0 - 105 (0-4.1”)
(Travel range)
*Attachment stand (12AAG982)

is required. (Focal point)
180 - 230 (7.1-9.1”)
(Refer to page I-25 for more
(4.9”) (6.1”)
50
127 155
details.) (2”)
374 (14.7”) 270 (10.6”) 365 (14.4”) 16 (.6”)

404 (15.9”) 86 745 (29.3”)
50 243.5 285 50 PJ-H30A1010B (3.4”) 816 (32.1”)
(2”) (9.6”) (11.2”) (2”)
0 - 105 (0-4.1”)
(travel range)
(Focal point) (9.1-12.4”)

230.5 - 315.5
184.5 (7.3”)
(4.9”) (6.1”)
127 155
374 (14.7”) 270 (10.6”) 365 (14.4”) 16 (.6”)

404 (15.9”) 745 (29.3”)
282 (11.1”)
332-151: Optoeye 150 255 401 150
85
(3.3”)
878 (34.6”)
Edge detection system for QM-Data200 (5.9”) (10”) (15.8”) (5.9”)
12AAE671: Detector Attachment PJ-H30A3017B
I-5
PV-5110
SERIES 304 — Profile Projectors
FEATURES • Angled screen allows projected images

• Large 500mm screen to be easily traced or compared with a
• Floor model uses a downward illumination template.
system. • The oblique surface illumination system
• Digital readout protractor screen (including provides clear and bright images,
zero-setting, ABS/INC coordinate switching allowing easy inspection of non-reflective
functions) for easy and error-free angle workpieces such as plastic parts or printed
measurement. materials.
Projection Capacity
Working
Max. distance
workpiece H D Max. workpiece
height diameter whose edge
W line can be focused on
the screen center
PV-5110
Unit: mm
Magnification
5X 10X 20X 50X 100X
View field ø101.6 ø50.8 ø25.4 ø10.16 ø5.08
H 125 181 206 87 87
W 60 (27) 60 60 32.4 22.5
D 120 120 120 64.8 45
PV-5110
I-6
172-402: 10X projection lens set (standard accessory) SPECIFICATIONS
172-409: 10X projection lens Model No. PV-5110
172-403: 20X projection lens set Order No. 304-919A*
172-404: 50X projection lens set Projected image Invert image
172-413: 50X projection lens Protractor screen Effective diameter 20” / 508mm
172-405: 100X projection lens set Screen material Fine ground glass
172-422: Surface illumination unit (standard accessory) Reference line Cross hair line
172-116: Standard scale (50mm) Screen rotation ±360°, fine feed and clamp
172-117: Standard scale (2") Angle display (LED) Resolution: 1’ or 0.01°(switchable), Range: ±370°,
172-118: Standard scale (200mm) Functions: Absolute/incremental mode switching, Zero set
172-119: Standard scale (8") Projection lens Standard accessory: 10x(172-472), Optional accessories: 5X, 20X, 50X, 100X
172-161: Reading scale (300mm)
172-329: Reading scale (600mm) Magnification Contour illumination ±0.1% or less
172-162: Reading scale (12") accuracy Surface illumination ±0.15% or less
172-160-2: Green filter (standard accessory) Contour Light source Halogen bulb (24V 150W)
172-319: Canopy illumination Optical system Telecentric system
512305: Halogen bulb (24V, 150W) (standard accessory)
510189: Vinyl cover Functions 2-step brightness switch, Heat-absorbing filter, Cooling fan
Surface Light source Halogen bulb (24V 150W)
Fixture and Stage Accessories illumination Optical system Vertical illumination
172-196: Rotary table*
(Effective diameter: 4” / 100mm) Functions Adjustable condenser lens. Oblique illumination (for 5X, 10X, and 20X),
172-198: Rotary table with fine feed wheel* 2-step brightness switch, Heat-absorbing filter, Cooling fan
(Effective diameter: 4” / 100mm) XY Range 8 x 4” / 200 x 100mm
172-197: Swivel center support* Resolution .0001” / 0.001mm*
(Max. workpiece dia.: 3.1” / 80mm) Measuring unit Built-in Linear scale
176-107: Holder with clamp*
172-378: V-block with clamp* Table size 15 x 9.8” / 380 x 250mm
(Max. workpiece dia.: 1” / 25mm) Effective table area 10.5 x 6.7” / 266 x 170mm
*Stage adapter C (176-317) is required.
Max. workpiece See (H) on page I-6
height
Max. workpiece load 17.6 lbs / 8kg
Power supply 120V AC, 50/60Hz
Mass 467lbs / 210kg
Standard accessories 200x100mm (8” x 4”) stage, 10X projection lens set, Surface illumination unit.
Counter stand for KA counter, power cord, halogen bulb, fuse, grounding wire,
allen wrench
* Counter not included
KA Counter (174-183A)
DIMENSIONS
(Refer to page H-7 for more details.)
Unit: mm
300 (11.8”)
08
ø5 ”)
(20
1627 (64”)
QM-Data200
1294 (50.9”)
264-156A: Arm-mount type

960 (37.8”)
2-D data processing unit. 150

(Refer to page I-25 for more details.) (5.9”)
332-151: Optoeye 470 (18.5”) 535 (21”)

Edge detection system for QM-Data200
12AAE672: Detector Attachment (B) 620 (24.4”) 1073 (42.2”)
I-7
PH-A14
SERIES 172 — Profile Projector
FEATURES
• Benchtop model uses a horizontal optical • 14" (356mm) diameter vernier protractor Projection Capacity
system. screen with solid line cross-hairs for easy
Max. workpiece width Working distance
• Suitable for thread pitch measurements— alignment. L W
blurred or distorted images will not be • Heavy-duty workpiece table incorporates
produced when workpiece is angled. linear scales for fast, accurate
• Inverted image on the day-bright screen. measurement. D
Max. workpiece diameter whose edge

line can be focused on the screen center
PH-A14 Unit: mm
Magnification
10X 20X 50X 100X
View field 35.6 17.8 7.12 3.56
L 235 235 109 109
W 93 40 14.6 9.5
D 130 116 31.3 19.2
PH-A14
64AAB149: Counter stand
QM-Data200
264-155A: Stand mount type
264-156A: Arm mount type
PH-A14 with touch (Refer to page I-25 for more details.)
screen M2 geometric
measurement display
332-151: Optoeye
Edge detection system for QM-Data 200
12AAE671: Detector attachment (A)
I-8
Optional Accessories SPECIFICATIONS
172-011: 10X projection lens (standard accessory)
172-012: 20X projection lens Model No. PH-A14
172-013: 50X projection lens set Order No. 172-810-10A*
172-014: 100X projection lens set 64PKA087 PH-A14 with QM Data Arm Mount
172-116: Standard scale (50mm) Package No.
64PKA086A PH-A14 with KA Counter and Tray
172-117: Standard scale (2")
172-118: Reading scale (200mm) Projected image Inverted image
172-161: Reading scale (300mm) Protractor screen Effective diameter 14” /356mm
172-119: Reading scale (8") Screen material Fine ground glass
172-286: Green filter Reference line Cross hair line
512305: Halogen bulb (24V, 150W) (standard accessory) Screen rotation ±360°, fine feed and clamp
Angle display Vernier reading, Resolution: 2’
Fixture and Stage Accessories Projection lens Standard accessory: 10X (172-011), Optional accessories: 20X, 50X,
172-142: Center support 100X
172-143: Center support riser
172-144: Rotary vise Magnification accuracy Contour illumination ±0.1% or less
(Max. workpiece dia.: 2.4" / 60mm) Surface illumination ±0.15% or less
172-234: V-block with clamp Contour illumination Light source Halogen bulb (24V 150W)
(Max. workpiece dia.: 2" / 50mm)
Optical system Telecentric system
172-132: Vertical holder
64AAA129B: Machine stand 23"W x 45" D x 20"H Functions Heat-absorbing filter, Cooling fan
Surface illumination Light source Halogen bulb (24V 150W)
Optical system
18”(460) Twin fiber optic illumination
XY Stage Table travel (X-axis) 8” / 203.2mm
Table size (X, Z) 16 x 6” / 407 x 153mm
Vertical travel (Y-axis) 4” / 101.6mm
Resolution .00005” / 0.001mm*
Measuring unit Built in Linear scale
Max. workpiece width See (L) on page I-10
Max. workpiece load 100lbs / 45kg
46.06”(1170)
Mass 308lbs / 140kg
37”(935)
Standard accessories 10x projection lens set, work stage, power cord, halogen bulb,
fuse, grounding wire, allen wrench
*Counter not included
Graphics-based “Part View”constructions PH-A14 Packages with M2 Geomentric Display M2 Geometric Display Retrofit Packages
Generate popular construction types, like Distances and Order No. Description
4”(110)
Order No. Description

Tangent Lines, from within the graphical part view. M2 2D Data Processing Unit with software
PH-A14 PROFILE PROJECTOR - WITH TOUCH
64PKA156A and
64PKA154A SCREEN M2 GEOMETRIC DISPLAY hardware including a tablet PC. Also
12.6”(321)
includes installation and calibration on the
21.2”(540)
.7” PH-A14 16.7”(424)
PROFILE PROJECTOR - WITH OPTICAL EDGE customer’s existing PH-A14
64PKA155A
(18) DETECTION AND TOUCH SCREEN M2 GEOMETRIC
M2 2D Data Processing Unit with Edge
35.7”(906)
DISPLAY18.1”(460)
Detection software and hardware including
64PKA157A a tablet PC. Also includes installation and
44.8”(1138)
calibration on the customer’s existing PH-A14
DIMENSIONS
PH-A14
Unit: mm
Geometric tolerancing
Measure features, set nominals, apply tolerances and view
deviation results with only a few quick clicks.
45.6”(1158)
Reports Flexibility for report contents and formatting

allows for full customization of the data format, header
information, and header and footer graphics. 17.9”(454) 6.2”
(158)
24.1”(612) 48.8”(1240)
I-9
PH-3515F
FEATURES
• Benchtop model uses a horizontal optical • 14” (353mm) diameter protractor screen
system. with cross-hairs and staggered lines for
• Suitable for thread pitch measurements— easy alignment.
blurred or distorted images will not be • Digital angle measurement to 1' or 0.01º.
produced when workpiece is angled. • Heavy-duty workpiece table incorporates
• Erect image on the day-bright screen. linear scales for fast, accurate
• Standard twin fiber-optic illumination. measurement.
• Built-in linear scales for use with optional
display counters.
PH-3515F PROFILE PROJECTOR
OPTICAL MEASURING
Heavy-Duty, Bench-Top Model with Horizontal Optical System
Bulletin No. 2210(2)
Projection Capacity
Max. workpiece width Working distance
L W
Max. workpiece diameter whose edge

line can be focused on the screen center
PH-3515F Unit: mm
Magnification
5X 10X 20X 50X 100X
View field 70.6 35.3 17.65 7.06 3.5
PH-3515F L 175 235 235 80 109
W 160 (64) 93 (41) 40 14.6 9.5
D 152.4 152.4 116 30.4 19
I-10
172-184: 10X projection lens set (standard accessory) SPECIFICATIONS
172-011: 10X projection lens Model No. PH-3515F
172-165: 50X projection lens set Order No. 172-868A*
172-174: 50X projection lens Projected image Erect image
172-166: 100X projection lens set Protractor screen Effective diameter 14” / 353mm
172-116: Standard scale (50mm) Screen material Fine ground glass
172-117: Standard scale (2")
172-118: Reading scale (200mm) Reference line Cross hair line
172-161: Reading scale (300mm) Screen rotation ±360°, fine feed and clamp
172-119: Reading scale (8") Angle display (LED) Resolution: 1’ or 0.01° (switchable), Range: ±370°, Functions: Absolute/
172-162: Reading scale (12") incremental mode switching, Zero set
172-286: Green filter
Projection lens Standard accessory: 10X (172-184), Optional accessories: 5X, 20X, 50X,
515530: Halogen bulb (24V, 150W) (standard accessory)
100X
172-423 Twin surface illumination
12BAA637 Halogen reflector lamp (standard accessory) Magnification accuracy Contour illumination ±0.1% or less
64AAB176 Machine stand Surface illumination ±0.15% or less
383228: Vinyl cover (standard accessory) Contour illumination Light source Halogen bulb (24V 150W)
Fixture and Stage Accessories* Optical system Telecentric system
172-142: Center support Functions 2-step brightness switch, Heat-absorbing filter, Cooling fan
172-143: Center support riser Surface illumination Light source Halogen bulb (24V 150W)
172-144: Rotary vise (Max. workpiece dia.: 2.3” / 60mm) (Optional accessories) Functions
172-234: V-block with clamp Adjustable condenser lens. Heat-absorbing filter, Cooling fan
(Max. workpiece dia.: 2” / 50mm) XY Stage Table travel (X-axis) 10” / 254mm
172-132: Vertical holder Table size (X, Z) 17.7”x5.7” / 450x146mm
172-001: Tipped-saw support stand
172-002: Cutter support stand Vertical travel (Y-axis) 6” / 152mm
* See page I-13 for details Resolution 0.001mm/.00005”*
Measuring Unit Built-in Llnear scale
Max. workpiece width See (L) on page I-10
Max. workpiece load 100lbs / 45kg
Mass 333lbs / 150kg
Standard accessories 10X projection lens set, work stage,
power cord, halogen bulb, tube fuse, grounding wire, allen wrench,
Vinyl cover
* Counter not included
64AAB149: Counter stand
DIMENSIONS
Unit: mm
PH-3515F
18”(460)
QM-Data200
264-155A: Stand mount type
264-156A: Arm mount type
(Refer to page I-25 for more details.)
46.06”(1170)
37”(935)
4”(110)
16.7”(424) 12.6”(321) 21.2”(540)

332-151: Optoeye .7”
Edge detection system for QM-Data200 (18)
18.1”(460) 35.7”(906)
12AAE671: Detector attachment (A)
44.8”(1138)
I-11
Accessories for Profile Projectors
Standard Scales Reading Scales
172-161
172-116 172-118
• Used for checking magnification accuracy. • Specially designed for inspecting the
magnified image of a standard scale on
the projection screen.
SPECIFICATIONS SPECIFICATIONS
Metric Metric
Graduation Range Order No. Accuracy (20ºC)* Graduation Range Order No. Accuracy
0.1mm 50mm 172-116 (3+5L/1000)µm 0.5mm 200mm 172-118 18µm (15+15L/1000)µm
0.1mm 80mm 172-330 (3+5L/1000)µm 0.5mm 300mm 172-161 19.5µm (15+15L/1000)µm
*L = Measured length (mm) 0.5mm 600mm 172-329 24µm (15+15L/1000)µm
Inch Inch
Graduation Range Order No. Accuracy (20C) Graduation Range Order No. Accuracy
.01" 2" 172-117 .00013" .02" 8" 172-119 .00071"
.02" 12" 172-162 .00077"
Micrometer Heads
for Profile Projectors and Toolmakers’ Microscopes
Micrometer Heads for XY Stage Adjustable Micrometer Heads for XY
FEATURES Stages
• Non-rotating device is provided. FEATURES
• The thimble reading can be zero-set at any • The adjustable spindle can be fed under
spindle position. the thimble clamped at any reading,
• Black and red figures of the bi-directional allowing easy reference point setting.
graduation allow easy reading in both • The spherical measuring face is
directions. carbide-tipped.
• Clamping stem diameter: 18mm • Clamping stem diameter: 18mm 152-390
Metric Metric
Graduation Range Order No. Accuracy Remarks Graduation Range Order No. Accuracy Remarks
0.005mm 25mm 152-390 ±2µm for X-axis 0.001mm* 25mm 152-402 ±2µm for X-axis
0.005mm 25mm 152-389 ±2µm for Y-axis 0.001mm* 25mm 152-401 ±2µm for Y-axis
*Obtained using vernier.
Inch
Graduation Range Order No. Accuracy Remarks
.0001" 1" 152-391 ±.0001" for X-axis
.0001" 1" 152-392 ±.0001" for Y-axis
Digimatic Micrometer Heads SPECIFICATIONS

Inch/Metric
FEATURES
Resolution Range Order No. Accuracy
• Large LCD digits for error-free reading.
.00005"/0.001mm 2" (50mm) 164-164 ±.00015"
• The display rotates 330º for easy viewing.
• The spindle does not rotate. Optional Accessories
959149: SPC cable for series 164 (1m) 164-164
• With SPC data output. 959150: SPC cable for series 164 (2m)
I-12
Workpiece Fixtures
for Profile Projectors and Measuring Microscopes
Rotary Tables
176-106
SPECIFICATIONS 172-198
Order No. 176-106 172-198
Effective glass dia. 66mm 100mm
Angle reading 6' 2' (w/ fine adjustment)
Mass 1.7kg 2.5kg
Note: Holder with clamp (176-107) can be mounted. Swivel Center Supports
Holder with Clamp

176-105
176-107
SPECIFICATIONS
172-197
Order No. 176-107
Max. workpiece height 35mm SPECIFICATIONS
Mass 0.42kg Order No. 176-105 172-197
Center Support Max. workpiece dia. 70mm (45mm)* 80mm (65mm)*
Max. workpiece length 140mm 140mm
Swivel range ±10º ±10º
Mass 2.4kg 2.5kg
*When swiveled 10º
172-142 V-Block with Clamp
172-234
172-143
SPECIFICATIONS
Order No. 172-142
Max. workpiece height 120mm (240mm)* 172-378
Mass 3.3kg
*When using a center support riser (172-143) SPECIFICATIONS
Order No. 172-234 172-378
Rotary Vise Max. workpiece dia. 50mm 25mm
172-144 Width of block 60mm 41mm
Mass 1.24kg 0.8kg
Vertical Holder 172-132
SPECIFICATIONS
Order No. 172-144 SPECIFICATIONS
Max. workpiece height 60mm
Width of jaw 40mm Order No. 172-132
Angle reading 5º Mass 1.3kg
Mass 2.5kg
I-13
Overlay Chart Set
• Makes inspection of projected images an easy process.
• Twelve different patterns are available in the set.
• Designed for use with profile projectors whose screen diameter is 300mm or larger.
Overlay chart set (12 sheets)

Order No.: 12AAM027
12AAM587 12AAM588 12AAM589

Protractor (1º-grad. radial index) Radius (0.1cm-reading scales and 5mm- Radius (1X, 10X, 20X, 50X)
and radius (1mm-radius increment radius increment concentric circles)
concentric semicircles)
12AAM590 12AAM591 12AAM592

1mm-reading scales (20X, 50X) 10x10mm sections 0.5mm-reading scales
12AAM593 12AAM594 12AAM595

1x1mm sections Protractor (1º-grad. diametral index) 1mm-reading vertical scale
12AAM596 12AAM597 12AAM598

Protractor (1º-grad. diametral index) Metric, Unified, and Whitworth screw Metric screw thread (100X) and 20º
and radius (1mm-radius increment threads (20X) and 14.5º gear teeth (20X)
concentric circles)
I-14
Quick Guide to Precision Profile Projectors
Measuring Instruments
■ Telecentric Optical System
■ Erect Image and Inverted Image An optical system based on the principle that the primary ray is aligned
An image of an object projected onto a screen is erect if it is orientated parallel to the optical axis by placing a lens stop on the focal point on the
the same way as the object on the stage. If the image is reversed top image side. Its functional feature is that the image will not vary in size even
to bottom, left to right and by movement with respect to the object on though the image blurs as the object is shifted along the optical axis.
the stage (as shown in the figure below) it is referred to as an inverted For measuring projectors and measuring microscopes, an identical effect is
image (also known as a reversed). obtained by placing a lamp filament at the focal point of a condenser lens
instead of a lens stop so that the object is illuminated with parallel beams.
(See the figure below.)
F
F Projection screen Principal ray Focal point on the image side
Optical axis
An erect image An inverted image Light source
(lamp)
Object surface
F Top of the stage

F Condenser lens Workpiece
Telecentric contour illumination
Projection lens Projection
screen surface
■ Working distance
F Workpiece Refers to the distance from the face of the projection lens to the surface
X-axis movement of a workpiece in focus. It is represented by L in the diagram below.
Y-axis movement
■ Magnification Accuracy Projection lens

The magnification accuracy of a projector when using a certain lens is
established by projecting an image of a reference object and comparing L
the size of the image of this object, as measured on the screen, with
the expected size (calculated from the lens magnification, as marked)
to produce a percentage magnification accuracy figure, as illustrated
below. The reference object is often in the form of a small, graduated
glass scale called a `stage micrometer’ or `standard scale’, and the
projected image of this is measured with a larger glass scale known as a
Workpiece stage Workpiece
`reading scale’.
(Note that magnification accuracy is not the same as measuring accuracy.) ■ Parallax error
L− M This is the displacement of an object against a fixed background caused
ΔM(%) = ——— X 100 by a change in the observer's position and a finite separation of the
M
object and background planes.
ΔM(%): Magnification accuracy expressed as a percentage
of the nominal lens magnification
L : Length of the projected image of the reference object
measured on the screen
: Length of the reference object
M : Magnification of the projection lens
Parallax error
■ Type of Illumination
● Contour illumination: An illumination method to observe a workpiece
by transmitted light and is used mainly for measuring the magnified Projector screen
contour image of a workpiece.
● Coaxial surface illumination: An illumination method whereby a
workpiece is illuminated by light transmitted coaxially to the lens
■ Field of view diameter
for the observation/measurement of the surface. (A half-mirror or a The maximum diameter of the workpiece that can be projected using a
projection lens with a built-in half-mirror is needed.) particular lens.
Screen diameter of profile projector
● Oblique surface illumination: A method of illumination by obliquely Field of view diameter (mm) =
Magnification of projection lens used
illuminating the workpiece surface. This method provides an image
of enhanced contrast, allowing it to be observed three-dimensionally Example: If a 5X magnification lens is used for a projector with a screen
and clearly. However, note that an error is apt to occur in dimensional of ø500mm:
measurement with this method of illumination. Field of view diameter is given by 500mm = 100mm
(An oblique mirror is needed. Models in the PJ-H30 series are 5
supplied with an oblique mirror.)
I-15
TM-505B/1005B Optional Accessories
SERIES 176 — Toolmakers’ Microscopes 176-115:
176-116:
10X eyepiece (field number: 13mm)
15X projection lens set (standard accessory)
176-117: 20X eyepiece (field number: 10mm)
176-138: Objective, 2X (W.D. 67mm, N.A. 0.07) (standard accessory)
176-139: Objective, 5X (W.D.: 33mm, N.A.: 0.10)
The Mitutoyo TM Series is a toolmakers’ • Illumination intensity can be adjusted. 176-137: Objective, 10X (W.D.: 14mm, N.A.: 0.14)
microscope well suited for measuring • Included standard accessories create an 164-163: Digimatic micrometer head
(range: 50mm, reading: 0.001mm)
dimensions and angles of machined metals. overall magnification of 30X. Magnifications 164-164: Digimatic micrometer head (range: 2”/50mm, reading:
It also can be used to check the shape of can be changed from 20 - 200X by using 152-390:
.00005”/0.001mm)
Micrometer head for X-axis
screws and gears by attaching an optional optional objectives and/or eyepieces. (range: 25mm, reading: 0.005mm)
152-389: Micrometer head for Y-axis
reticle. The compact body makes it ideal for (range: 25mm, reading: 0.005mm)
use on shop floors with limited space. 152-392: Micrometer head for Y-axis
(range: 1”, reading: .0001”)
152-391: Micrometer head for X-axis
FEATURES (range: 1”, reading: .0001")
611201-531: Rectangular gauge block (1")
• Angle measurement is performed easily 611202-531: Rectangular gauge block (2")
176-204: Dial indicator attachment for Z-axis measurement
by turning the angle scale disc to align 959149: SPC cable (2m) for Digimatic micrometer head
the cross-hair reticle with the workpiece
image. 990561: Workpiece clip (2pcs./set)
176-106: Rotary table for TM-505B (effective dia.: 66mm)
172-196: Rotary table for TM-1005B (effective dia.: 100mm)
176-105: Swivel center support for TM-505B
(max. workpiece dia.: 2.7” / 70mm)
TM-A505B
SPECIFICATIONS 172-197: Swivel center support for TM-1005B
Model No. TM-505B TM-A505B TM-1005B TM-A1005B 172-378: V-block with clamp
(max. workpiece dia.: 1” / 25mm)
Order No. 176-818A 176-820A 176-819A 176-821A 176-107: Holder with clamp
Objective lens Standard accessory: 2X, Options: 5X, 10X
Microscope Maximum height of workpiece 4.53" / 115mm 4.21" / 107mm
Illumination Units
head 176-344A: Bifurcated fiber illuminator
64AAB214: LED variable ring light
Transmitted illumination Stepless brightness adjustment, White LED light source, With green filter
Illumination 176-208A: LED circular illumination
unit Surface illumination Oblique single-source type, Stepless brightness adjustment, White LED
light source Reticles
4" x 2" / 100×50mm 176-126: Broken cross-hair (90°) (standard accessory)
Measuring range 2" x 2" / 50×50mm (An optional 2"/50mm gauge block 176-111: Concentric circles
Cross-travel is required to cover full range. (up to ø4mm, 0.05mm increment)
stage A CERA block is recommended.) 176-135: Concentric circle (up to ø.2", .01" increment)
Table size 6" x 6" / 152×152mm 9.44" x 6" / 240×152mm 176-114: 60˚ angle
Usable area of the stage glass 3.8" x 3.8" / 96×96mm 6" x 3.8" / 154×96mm
Linear measurement method Micrometer heads Micrometer heads Micrometer heads Micrometer heads
optional included optional included
Resolution N/A .00005"/1µm N/A .00005"/1µm
Micrometer head travel range N/A 2"/50mm N/A 2"/50mm
Protractor eyepiece LED ring light

DIMENSIONS Technical Data 64AAB214
• Monocular with 30º
TM-505B Unit: Inch(mm)
depression angle
• 90º broken cross-hair reticle
Optical tube
Max. workpiece height
(176-126)
4.5”(115)
2.6”(67) Working distance
min.13.5”(343) max.18.2”(463)
min13.5”(343) max.18.2”(463)
• Erect image
4.21”(107)
• Diopter adjustable
• Graduation: 1º
15.4”(392)
15.4” (392)
5”(127) Eyepiece
2”(50) 5”(127)
1”(25) 1”(25) 1”(25) • Protractor
2”(50) range: 360º TM-505B
1”(25)
protractor 1”(25) 1”(25)
• Minimum reading by vernier: 6’
5.24”(13)1
Eyepiece • Magnification: 15X

5.5”(139)
.47” (176-116) • Field number: 13

.47”(12) 7.3”(186) (12) .6”(15) 12.3”(313) .6”(15) .47”(12) 7.23”(186) .47”(12) .60”(15) 12.3”(313) .60”(15)
8.3”(210) 1.1”(28) .32”(8) 13.5”(343) .79”(20) 8.3”(210)• Magnification:
3.8”(96) 2X .32”(8) 13.5”(343)
19.37”(492) Objective 17.6”(447) 19.37”(492)
15”(379) • Working distance:
2.638” (67mm)
(176-138)
• Numerical aperture: 0.07
TM-1005B Total
• 30X
magnification
TM-1005B
Toolmakers' Microscopes
• 3W LED TM Series
Transmitted
min.13.5”(343) max.18.2”(463)
Optical Measuring
4.21”(107)
• GIF (green) filter

illumination
• Stepless intensity adjustment
15.4”(392)
• 3W LED
2”(50) 2”(50)
5”(127) Reflected
1”(25) 1”(25) TM-505B
• Stepless intensity adjustment
illumination
• Adjustable position
Power supply 120 V AC, 50/60Hz
5.5”(139)
.6”(15) .47”(12) 7.23”(186) .47”(12) .60”(15) 12.3”(313) .60”(15) Power

8.3”(210) .32”(8) 13.5”(343) 4.2W
.79”(20) 3.8”(96)
19.37”(492)
consumption
17.6”(447)
TM-505B: Approx. 30.8 lbs. (14kg)
Mass
Bulletin No. 2190
TM-1005B: Approx. 33 lbs. (15kg) Refer to Bulletin No. (2190) for more details.
TM-1005B
I-16
MF
Technical Data SERIES 176 — Measuring Microscopes
• Monocular or Binocular (Must Choose)
• 25º depression angle The MF measuring microscopes can • Illumination unit (reflected/transmitted)
Optical tube • 90º broken cross-hair reticle (12AAG836)
• Erect image
be combined with Mitutoyo's vision selectable from a high-intensity LED or
• TV Mount 50/50 unit to boost its performance and data halogen bulb (selection required)
Observation image • Erect Image management on a PC, further improving • Variable aperture diaphragm (reflected/
Observation type • Bright Field measuring efficiency and productivity. transmitted) allows observation measurement
• 10x (Included w/Tube) while suppressing light diffraction
Eyepiece lens • 15x (Optional)
• 20x (Optional) FEATURES • Variety of standardized stages in sizes up to
• Magnification: 3X (Included) 400×200mm
• Observation with a crisp and high-resolution
Objective • W.D.: 3.03” (77mm); N.A.: .09
erect image and a wide field of view • Quick-release mechanism useful for moving
• Optional: 1x, 5x, 10x, 20x, 50x, 100x
the stage quickly when measuring workpieces
• Halogen or LED (Must Choose) • Measuring accuracy that is highest in its class that are large in size or quantity
Light source • Adjustable aperture diaphragms (and conforms to JIS B 7153)
• Light intensity infinitely adjustable • Coarse/fine feed handles equipped as
Transmitted • ML series, high-NA objectives that are standard on both sides allow precise focus
• Telecentric illumination
illumination specially designed for the MF series (long
Reflected illumination • Koehler illumination and observation measurement regardless of
working distance type)
Display Unit handedness
Number of axis • 2 axes (MF-A Type) or 3 axes (MF-B Type) • High-magnification eyepiece observation up
• 0.0001” / 0.00005” / 0.00001” to 2000×
Resolution
(0.001 mm / 0.0005 mm / 0.0001 mm) • Standard measuring microscope has a wide
•Data output, Axis linear compensation, variety of optional accessories including a
Functions
Metric or English Units, and more
• Precision travel (2.2+0.02L)μm accuracy
vision unit and various digital CCD cameras
• High-accuracy linear glass scales
Stage
• Quick-release floating mode
• Zero-set button
Power consumption 45W LED, 160W Halogen, 120V AC, 50/60 Hz
• 1010D - 148 lbs. / 67 kg
• 2010D - 157 lbs. / 71 kg
Mass • 2017D - 326 lbs. / 148 kg
• 3017D - 344 lbs./ 156 kg
• 4020D - 357 lbs. / 162 kg
LED and Halogen Light Options for Transmitted and Using optional slide-type nosepiece
with 2-lens mount (factory set
Reflected Illumination
option)
(Common to MF D and MF-U D)
MF-B2017D
XY stage travel range: 8 x 6.6” / 200 x 170mm
(with optional binocular tube)
Transmitted LED illumination unit Reflected LED illumination unit Reflected LED illumination unit
(Common to MF/MF-U Series) (for MF Series) (for MF-U Series) Selection of XY stage by travel range
1010D: 4 x 4” / 100 x 100mm 2010D: 8 x 4” / 200 x 100mm 2017D: 8 x 6.7” / 200 x 170mm
LED illumination Halogen illumination
High Visibility Digital Display

(Common to MF D and MF-U D)
3017D: 12 x 6.6” / 300 x 170mm 4020D: 16 x 8” / 400 x 200mm
Front of display Rear of display
I-17
MF Optional Accessories
176-392: Monocular tube with 10X eyepiece
176-393: Binocular tube with 10X eyepiece set
SERIES 176 — Measuring Microscopes 378-866: 10X eyepiece set (view field dia.: 24mm)
378-857: 15X eyepiece set (view field dia.: 16mm)
SPECIFICATIONS 378-858: 20X eyepiece set (view field dia.: 12mm)
375-043: Protractor eyepiece (10X)
Model No. (XY stage size) 1010D 2010D 2017D 3017D 4020D 176-313: Digital protractor eyepiece (10X)
375-036-2: 1X objective (W.D.: 61mm, N.A.: 0.03)
Order No. MF-A 176-861-10 176-862-10 176-863-10 176-864-10 176-865-10 375-037-1: 3X objective (W.D.: 77mm, N.A.: 0.09) (std. accessory)
MF-B 176-866-10 176-867-10 176-868-10 176-869-10 176-870-10 375-034-1: 5X objective (W.D.: 61mm, N.A.: 0.13)
XY stage travel range 4 x 4" 8 x 4" 8 x 7" 12 x 7" 16 x 8" 375-039: 10X objective (W.D.: 51mm, N.A.: 0.21)
100 x 100mm 200 x 100mm 200 x 170mm 300 x 170mm 400 x 200mm 375-051: 20X objective (W.D.: 20mm, N.A.: 0.42)
Z-axis travel range 6" / 150mm 8.7" / 220mm 375-052: 50X objective (W.D.: 13mm, N.A.: 0.55)
375-053: 100X objective (W.D.: 6mm, N.A.: 0.7)
Focusing method Manual focusing (Coarse focusing: 30mm/rev., Fine focusing: 0.2mm/rev.) 176-370-1: Slide-type nosepiece (2-mount, parfocal)
Measurement method Linear encoder (2-axis model: X / Y-axis, 3-axis model: X / Y / Z-axis) 176-370-2: Slide-type nosepiece (2-mount, mag. adjusted)
Resolution (switchable) .0001" / .00005" / .00001" (0.001mm / 0.0005mm / 0.0001mm) 12AAA643: ND2 color filter (transmitted / surface)
12AAA644: ND8 color filter (transmitted / surface)
Measuring accuracy (at 20˚C) XY-axis: (2.2+0.02L)µm, L = Measuring length (mm) when not loaded, JIS B 7153
12AAA645: GIF filter (transmitted / surface) (std. accessory)
Indication accuracy (at 20˚C) Z-axis: (5+0.04L)µm, L = Measuring length (mm), (MF-B type) 12AAA646: LB80 color filter (transmitted / surface)
Floating function X and Y axes with Quick-release mechanism 375-054: 0.5X camera adapter (with C-mount adapter)
XY stage top size 11 x 11" 14 x 11" 16.1 x 13.4" 20.07 x 13.4" 24" x 13.4" 970441: C-mount adapter
280 x 280mm 350 x 280mm 410 x 342mm 510 x 342mm 610 x 342mm 513667: Halogen bulb (12V, 50W)
12BAB345: Halogen bulb (long life type, 12V, 50W)
Effective glass size 7 x 7" 10 x 6" 10.6 x 9.4" 14.5 x 9.4" 17.3 x 9.4"
180 x 180mm 250 x 150mm 270 x 240mm 370 x 240mm 440 x 240mm 176-308: Vibration damping stand
176-309: Mounting stand
Swivel function — ±5˚ (left) ±3˚ (left) 375-056: Stage micrometer
Max. stage loading 22lbs / 10kg 44lbs / 20kg 33lbs / 15kg 12AAA165: Lens cleaning kit
Max. workpiece height 6" / 150mm 8.7" / 220mm 12AAA846: Foot switch
382951: Vinyl cover (standard accessory) 2010 or less
12BAM841: Vinyl cover 2017 or greater
MF Selection of Machine Type (must select)
6 1010 2010 2017 3017 4020 Counter Motorized Optics
stage Illumination Units
176-367-2A: LED ring illuminator
A 176-861-10 176-862-10 176-863-10 176-864-10 176-865-10 X,Y Manual BF
176-343A: Twin fiber-optics illuminator
B 176-866-10 176-867-10 176-868-10 176-869-10 176-870-10 X,Y,Z Manual BF 176-366A: Ring fiber-optics illuminator
J - - 176-891A 176-892A 176-893A X,Y,Z Z only BF 12AAG806: GIF color filter (for fiber-optics illuminator)
Example: MF-A1010D results in part number 176-861-10 12AAG807: LB80 color filter (for fiber-optics illuminator)
Illumination Unit (must select) Fixture and Stage Accessories

Applicable Illumination Unit LED Halogen 172-378: V-block with clamp
Order No. 176-445A 176-447A (max. workpiece dia.: 1” / 25mm)
172-197: Swivel center support1
Eye Tube Selection (must select) (max. workpiece dia.: 3.1” / 80mm)
176-305: Rotary stage with fine feed knob for
Monocular with 10X eyepiece 176-392 1010D/2010D models
Binocular with 10X eyepiece 176-393 176-306: Rotary stage with fine feed knob for
2017D/3017D/4020D models
DIMENSIONS 1
Fixture mount adapter (176-310) is required for 2010D models.
Fixture mount adapter (176-304) is required for
261 90.5 2017D/3017D/4020D models.
327 Unit: mm
249 78
330
QM-Data200
2-D data processing unit
79
667

12AAA807: Connecting cable set
413
200
114 360 551 120.3

234+50 300+50 726.3+50
90.5
261 Focus pilot FP-05
327 Focus assisting system
249 78
330
79
782
457.5
Vision Unit
PC-based vision measuring system
247.5
359-763
114 360 621 120.3
305 +200 452+200 903.3 +100
I-18
MF Motorized
SERIES 176 — Motorized Type Measuring Microscopes
• Motorized model of the MF Series. can be selected from a high-intensity LED or

The Z-axis is motorized, and the stage can halogen bulb (selection required).
be operated using a remote box. • Variable aperture diaphragm (reflected/
• Using the optional vision unit enables the transmitted) allows observation measurement
image AF function. while suppressing light diffraction.
• Illumination unit (reflected/transmitted) • A wide variety of optional accessories are
offered.
• ML series, high-NA objectives that are
specially designed for the MF series (long-
Measuring Microscopes working distance type).
Optical Measuring
MF/MF-U Series
• High-magnification observation up to 2000X.
MF-J2017D
* The binocular tube, eyepieces, and LED illumination unit
Catalog No. E14003(4)
Refer to No. (E14003) for more details. are optional accessories.
SPECIFICATIONS
Model No. MF-J2017D MF-J3017D MF-J4017D
Order No. 176-891A 176-892A 176-893A
Observation image BF (Bright field)/Erect image
10X (field number: 24), 15X, 20X
Eyepiece Diopter adjustment
Note: Monocular unit: a 10X eyepiece (standard accessory), Binocular tube: two 10X eyepieces (standard accessory)
Objective lens ML series 3X objective lens (standard accessory), 1X, 5X, 10X, 20X, 50X, 100X
Transmitted illumination: Telecentric system, Built-in aperture diaphragm, White LED light source, stepless light intensity control, with cooling fan
LED illumination unit Reflected illumination: Koehler illumination, Variable aperture diaphragm mechanism, White LED light source, stepless light intensity control
Illumination unit Control unit: Power ON/OFF switch (main switch), 100 - 240V AC power input connector
(One of the two options
must be selected.) Transmitted illumination: Telecentric system, Built-in aperture diaphragm, Halogen bulb (12V, 50W), stepless light intensity control, with cooling fan
Halogen illumination
Reflected illumination: Koehler illumination, Variable aperture diaphragm mechanism, Halogen bulb (12V, 50W), stepless light intensity control, with cooling fan
unit
Control unit: Power ON/OFF switch (main switch), 100 - 240V AC power input connector
Vision AF *1 Available Option
XY-axis Vision Measuring range 200×170mm 300×170mm 400×200mm
Z-axis Measuring range 220mm
(When no load is put
Measuring accuracy *2 (2.2+0.02L) μm L: Measuring length (mm)
on the X- or Y-axis)
Digital counter Resolution 1/0.5/0.1μm .0001”/.00005”/.00001” switchable
*1: Vision Unit 359-763 and an image AF cable 12AAN358 are sold separately.
*2: Measuring method complies with JIS B7153.
Bulb replacement for transmitted/reflected illumination Standard: Halogen bulb (12V, 50W) (No.513667)
Bulb life: 1,100 hours
I-19
MF-U
SERIES 176 — High-power Multi-function Measuring Microscopes Technical Data
Observation image: Erect image
Optical tube: Siedentoph type (pupil distance
adjustment: 51 - 76mm), 1X tube lens,
FEATURES Binocular tube (depression: 30˚), Reticle
• Observation with a clear and flareless erect • Integration of metallurgical and measurement projection method, with TV mount,
Optical path ratio (eyepiece/TV mount:
image and a wide field of view microscope functions provides high-resolution 50/50)
• Measuring accuracy that is highest in its class observation and high-accuracy measurement Eyepiece lens: 10X (field No.: 24mm),
(and conforms to JIS B 7153) solution Optional: 15X, 20X
Turret (optional): Manual or power
• Proven high-NA objectives from the FS optical • Illumination unit (reflected/transmitted) Objective (optional): M / BD Plan Apo objective from 1X to
system (long-working distance type) selectable from a high-intensity LED or 200X
Transmitted illumination
halogen bulb (required) • Light source: Halogen bulb (12V, 50W) or LED
• Variable aperture diaphragm (reflected/ • Optical system: Telecentric illumination with adjustable
aperture diaphragms
transmitted) allows for contrast adjustment • Functions: Light intensity adjustable, Non-stepped
• Variety of standardized stages in sizes up to brightness adjustment
400 × 200 mm Surface illumination
• Light source: Optional halogen illumination unit (fiber-
• Quick-release mechanism useful for moving optic cold light illumination) or LED
the stage quickly when measuring workpieces • Optical system: Koehler illumination with adjustable
aperture diaphragms
that are large in size or quantity • Functions: Light intensity adjustable, Non-stepped
• High-magnification eyepiece observation up brightness adjustment
to 4000X Display unit:
• No. of axis: 2 axes or 3 axes
• Resolution: .0001” / .00005” / .00001” /
0.001mm / 0.0005mm / 0.0001mm
• Functions: Zero-setting, Direction switching, Data
output (via RS-232C interface)
Power supply: 120V AC, 50/60Hz
Mass: 148lbs/67kg (1010D) / 157lbs/71kg
(2010D) / 326lbs/148kg (2017D) /
344lbs/156kg (3017D) / 357lbs/162kg
(4020D)
MF-UB3017D
XY stage travel range: 12 x 6.7” / 300 x 170mm
(with optional turret, objective and fiber illumination)
Selection of XY stage by travel range
1010D: 4 x 4” / 100 x 100mm
2010D: 8 x 4” / 200 x 100mm
Polarized light observation: Differential interference contrast (DIC) observation:

Observing only the filtered light that vibrates in one Effective in detecting fine scratches and steps on the surface
direction. Used for observing materials with special optical of metal, liquid crystal, and semiconductors.
characteristics, such as mineral and liquid crystal.
2017D: 8 x 6.7” / 200 x 170mm
Dark field (DF) observation: Bright field (BF) observation:

Observing only the scattered light by shutting down the Most common method of observation. Observing directly the
direct light to the objectives. The scratches and dust that light reflected from the surface of the workpiece. 4020D: 16” x 8” / 400 x 200mm
cannot be viewed in the bright view field can be observed by
this method in high-contrast.
I-20
MF-U
Optional Accessories SERIES 176 — High-Power Multi-Function Measuring Microscopes
(standard accessory)
378-857: 15X eyepiece set (view field dia.: 16mm) SPECIFICATIONS
Model No. (XY stage size) 1010D 2010D 2017D 3017D 4020D
Turret (Nosepiece) must select Order No. MF-UA 176-871-10 176-872-10 176-873-10 176-874-10 176-875-10
378-018: Adjustable manual BF turret (4 port) MF-UB 176-876-10 176-877-10 176-878-10 176-879-10 176-880-10
378-216A: Adjustable power BF turret (5 port) MF-UC 176-881-10 176-882-10 176-883-10 176-884-10 176-885-10
176-211: Adjustable manual BF/DF turret (4 port)
176-212A: Adjustable power BF/DF turret (4 port) MF-UD 176-886-10 176-887-10 176-888-10 176-889-10 176-890-10
XY stage travel range 4 x 4" 8 x 4" 8 x 6.7" 12 x 6.7" 16 x 8"
Objectives 100 x 100mm 200 x 100mm 200 x 170mm 300 x 170mm 400 x 200mm
See page I-28 for objective selection Z-axis travel range 6" / 150mm 8.7" / 220mm
Focusing method Manual focusing (coarse focusing: 10mm/rev., fine focusing: 0.1mm/rev.)
Manual and Power Turrets Measurement method Linear encoder (2-axis model: X / Y-axis, 3-axis model: X / Y / Z-axis)
Resolution (switchable) .0001" / .00005" / .00001" (0.001mm / 0.0005mm / 0.0001mm)
Measuring accuracy (at 20˚C) XY-axis: (2.2+0.02L)µm, L = Measuring length (mm) when not loaded, JIS B 7153
Indication accuracy (at 20˚C) Z-axis: (5+0.04L)µm, L = Measuring length (mm)
Floating function X and Y axes with Quick-release mechanism
XY stage top size 11 x 11" 14 x 11" 16 x 13.6" 20 x 13.6" 24 x 13.6"
280 x 280mm 350 x 280mm 410 x 342mm 510 x 342mm 610 x 342mm
Effective glass size 7.1 x 7.1" 10 x 6" 10.6 x 9.6" 14.6 x 9.6" 17.3 x 9.6"
180 x 180mm 250 x 150mm 270 x 240mm 370 x 240mm 440 x 240mm
Filters Swivel function — ±5˚ (left) ±3˚ (left)
378-092: Polarization unit Max. stage loading 22lbs / 10kg 44lbs / 20kg 33lbs / 15kg
378-076: DIC unit for 100X, SL80X, SL50X objective
378-078: DIC unit for 50X, SL20X objective
378-079: DIC unit for 20X objective
378-080: DIC unit for 10X, 5X objective Selection of machine type
12AAA643: ND2 color filter (for halogen illuminator, 176-448A) Machine type MF-UA MF-UB MF-UC MF-UD
12AAA645: GIF filter (standard accessory) Observation type Bright field (BF) Bright field (BF) Bright / Dark field (BF/DF) Bright / Dark field (BF/DF)
12AAA646: LB80 color filter (for halogen illuminator, (176-448A)
Measurement system X and Y-axis (2 axes) X, Y and Z-axis (3 axes) X and Y-axis (2 axes) X, Y and Z-axis (3 axes)
Camera Mounts
375-054: 0.5X camera adapter Illumination Unit (must select LED or Halogen illumination unit)
(with C-mount adapter)
970441: C-mount adapter Applicable Illumination Unit LED Halogen
Order No. 176-446A (transmitted & reflected) 176-448A (transmitted)
Bulbs 176-316A (reflected)
513667: Halogen bulb (12V, 50W)
Note: illumination unit not included. If halogen transmitted illumination is selected, then either 176-315A or 176-316A must be chosen.
12BAB345: Halogen bulb (long life type, 12V, 50W)
517181: Halogen bulb (12V, 100W)
12BAD602: High intensity halogen bulb (12V, 100W)
DIMENSIONS
261 90.5
Illumination Units 356 Unit: mm
176-315A: Halogen illumination unit (12V, 100W) 231 125
176-316A: Halogen illumination unit (12V, 150W)
176-343A: Twin fiber-optics illuminator
330
12AAG806: GIF color filter (for 176-315A and 176-343A)

171
12AAG807: LB80 color filter (for 176-315A and 176-343A)

667

562

172-378: V-block with clamp
(max. workpiece dia.: 1” / 25mm)
199.5
172-197: Swivel center support*

176-305: Rotary stage with fine feed knob for 1010D/2010D 114 360 551 120.3
models 234+50 300+50 726.3+50
90.5
176-306: Rotary stage with fine feed knob for 261
2017D/3017D/4020D models 356

*Fixture mount adapter (176-310) is required for 2010D models. 231 125
Fixture mount adapter (176-304) is required for 2017D/3017D/4020D models.
330
Misc.
171
176-308: Vibration damping stand

782
176-309: Mounting stand

375-056: Stage micrometer
604.5
937179T: Foot switch

Reticle See page I-21
247.5
114 360 621 120.3

305+200 452+200 903.3+100
I-21
MF-U Motorized
SERIES 176 — Motorized-Type Universal Measuring Microscopes
• Motorized model of the MF-U Series. The • Proven high-NA objectives from the FS optical
Z-axis is motorized, and can be operated system (long working distance type).
using a remote box. • Integration of metallurgical and measurement
• Using the optional vision unit enables the microscope functions provide high-resolution
image AF function. observation and a high-accuracy measurement
• Illumination unit (reflected/transmitted) can solution.
be selected from a high-intensity LED or • High-magnification observation up to 4000X.
halogen bulb (required).
• Variable aperture diaphragm (reflected/
transmitted) allows observation
measurement while suppressing light
diffraction.
• A wide variety of optional accessories are
offered.
MF-U Selection of Machine Type

i 2017 3017 4020 Counter Motorized stage Optics MF-UJ2017D
J 176-894A 176-895A 176-896A X,Y,Z Z only BF * The turret, objectives, and LED illumination unit are
K 176-897A 176-898A 176-899A X,Y,Z Z only BF/DF sold separately.
SPECIFICATIONS
Model No. MF-UJ2017D MF-UJ3017D MF-UJ4020D
BF (Bright field)
Order No. 176-894A 176-895A 176-896A
Model No. MF-UK2017D MF-UK3017D MF-UK4020D
BD (Bright / Dark field)
Order No. 176-897A 176-898A 176-899A
Observation image BF (Bright field), DF (Dark field) , Polarization, Differential Interference Contrast (DIC) / Erect image
Eyepiece Diopter adjustment 10X (standard accessory) (Field number: 24), 15X, 20X
BF (Bright field) M Plan Apo, M Plan Apo HR, M Plan Apo SL, G Plan Apo
Objective lens (optional) BD (Bright / Dark
BD Plan Apo, D Plan Apo HR, BD plan Apo SL
field)
Transmitted illumination: Telecentric system, Built-in aperture diaphragm, White LED light source, stepless light intensity control, with cooling fan
LED illumination unit Reflected illumination: Koehler illumination, Variable aperture diaphragm mechanism, White LED light source, Non-step light intensity control
Illumination unit Control unit: Power ON/OFF switch (main switch), 100 - 240V AC power input connector
(One of the two options Transmitted illumination: Telecentric system, Built-in aperture diaphragm, Halogen bulb (12V, 50W), stepless light intensity control, with cooling fan
must be selected.) Halogen illumination Reflected: BF/BD Kohler illumination with adjustable aperture diaphragm, 12V100W or 12V15W halogen lamp (selectable),
unit external fiber illumination, stepless brightness adjustment
Control unit: Power ON/OFF switch (main switch), 100 - 240V AC power input connector
Vision AF *1 3
XY-axis Measuring range 8×6.7" / 200×170mm 12×6.7" / 300×170mm 16×8" / 400×200mm
Z-axis Measuring range 8.7" / 220mm
(When no load is put
Measuring accuracy (2.2+0.02L) μm L: Measuring length (mm)
on the X- or Y-axis)
Digital counter Resolution 1/0.5/0.1μm .0001”/.00005”/.00001” switchable
*1: Vision unit and an image AF cable are separately required.
*2: Measuring method complies with JIS B7153.
Bulb replacement for transmitted illumination Standard: Halogen bulb (12V, 50W) (No.513667), Bulb life: 1,100 hours
For replacement for reflected illumination (from separate light source) Standard: Halogen bulb (12V, 100W) (No.517181),
High-intensity bulb (12V, 100W) (No.12BAD602)
*At the time of purchase, a standard bulb and a high-intensity bulb are provided. (Only for the reflected illumination models.)
I-22
Accessories for Measuring Microscope
Stage Micrometer Focus Pilot FP-05
FEATURES
• By installing this system on the camera • Four types of chart patterns are available.*
mount of an MF series measuring The pattern should be selected in
microscope and projecting the focusing accordance with the type of workpiece
chart onto the workpiece surface, the focal surface texture.
point can be detected with high accuracy * Factory installed option
and high repeatability.
• The brightness of the chart can be
adjusted.
• A wide view field observation on the
monitor is made possible with the use Concentric circle Slit
of a CCD camera (C-mount adapter is
included.)
SPECIFICATIONS
Order No. 375-056
Range 1mm
Graduations 0.01mm
Accuracy (at 20˚C) (1+L)µm, L = Measuring length (mm) SPECIFICATIONS
Dimensions (WxD) 3" x 1" / 76 x 26mm Order No. 375-057A 375-058A 375-067A 375-068A
Mass 16g Applicable MF D models MF-U D models
microscopes
Light source Green LED Red LED Green LED Red LED
Magnification 0.5X, Accuracy: 0.1%**
Camera
Optional Reticles adapter C-mount (provided)
12AAG838 (12AAG878): Cross-hair (7µm width)
Applicable
12AAG836 (12AAG877)*: Cross-hair (5µm width) Up to 2/3-inch
CCD camera
12AAG873 (12AAG876): Cross-hair (3µm width)
12AAG839 (12AAG879): Cross-hair and 45˚ angle Mass 4lbs / 1.8kg
12AAG840 (12AAG880): Broken cross-hair and 60˚ angle ** Within 2/3 area from the center of view field
12AAG841 (12AAG881): Zeiss type chart
12AAG842: 20mm scale (0.1mm reading)
12AAG843: Concentric circle (ø1.2 - ø18mm)
12AAG846: 10x10mm section (1mm min.)
12AAG847: Metric screw thread (P = 0.25-1.0)
12AAG848: Metric screw thread (P = 1.25-2.0) Manual and Power Turrets SPECIFICATIONS
12AAG849: Involute gear tooth (14.5˚), module = 0.1 - 1.0 Order No. 176-211 378-018 176-212A 378-016A 378-216A
12AAG850: Involute gear tooth (20˚), module = 0.1 - 1.0
Observation BD
12AAG851: Unified screw thread (80 - 28TPI) BF BD BF BF
type
12AAG852: Unified screw thread (24 - 14TPI)
12AAG853: Unified screw thread (13 - 10TPI) No. of
12AAG854: Concentric circle (ø.01" - ø.2") objective 4-mount 4-mount 4-mount 4-mount 5-mount
( ): for MF-U models, mounts
* Standard accessory Driving
method Manual Motor
Turret: 6.5 x 2.6 x 5.4"
Dimensions 164 x 65 x 137
Reticle mount — —
for MF-U models (W x D x H) Control Box: 4.1 x 3 x 7.6"
(standard accessory) 108 x 72 x 193
for MF models
Cross-hair and 90˚ angle
(standard accessory)
I-23
Accessories for Measuring Microscope
Twin fiber-optics illuminator Ring fiber-optics illuminator
A C
D
A: Vertical surface illumination (Halogen)
PCB HDD suspension
IC circuit
Order No. 176-343A Order No. 176-366A
Applicable microscopes MF, MF-U models Applicable microscopes MF models (ML 10X or lower) B: Ring fiber optics illumination
Length of fiber cable 28" / 700mm Length of fiber cable 40" x 1000mm
Light source Halogen bulb (12V, 100W) Light source Halogen bulb (12V, 100W)
(517181: halogen bulb) (517181: halogen bulb)
Dimensions (W x D x H) Light unit: 9.3 x 3 x 4.7" Dimensions (W x D x H) Light unit: 9.3 x 3 x 4.7"
235 x 76 x 120mm 235 x 76 x 120mm
Flexible PCB PCB
LED Ring Illuminator LED Ring Light (for sliding nosepiece)
Electric parts
C: LED ring illumination
HDD suspension PCB
Black resin molded parts
D: Twin fiber-optics illumination
Order No. 176-367-2A Order No. 176-371A
Applicable microscopes MF models with 1X/3X/5X/10X Applicable microscopes MF models with 1X/3X/5X/10X
objective objective IC package Garnet
Light source White LED Light source LED
Length of LED cable 59" / 1500mm
PCB
I-24
QM-Data200
SERIES 264 — 2-D Data Processing Unit
Technical Data The QM-Data200 is a geometric readout/ • The AI measurement function (automatic
Resolution: 0.0001mm analysis unit for optical instruments like identification of measuring item) eliminates
Program functions: Part program creation, execution, editing
Statisical processing: Number of data, maximum value, profile projectors. This features powerful 2-D switching between the measurement
minimum value, mean value, standard coordinate measurement capabilities with command keys.
deviation, range, histogram
Element memory: Maximum of 1000 elements unmatched simple key operation. The QM- • Equipped with the measurement procedure
Element recall: Point, line, circle, distance, ellipse, Data200 improves operator productivity, teaching function and the measuring
rectangular hole, slotted hole,
intersection and intersecting angle minimizes errors, and saves measurement position navigation in Repeat mode.
Element key-in: Point, line, circle time and production cost. • The user menu function allows user to
Display system: Monographic LCD (320 x 240 dots,
with back light) FEATURES register measurement commands or part
Measurement result programs to create his own menu.
file output: RS-232C/USB output (CSV format, • Various graphic displays on the large
MUX-10F format)
colored LCD screen for easy measurement • Tolerance zone measurement of data
Display language: Japanese/English/German/French/ processing result and various statistical
Italian/Spanish/Portuguese/Swedish/ operations.
Polish/Dutch/Hungarian
• One-key operation for combined processing for each item is available.
Data input: RS-232C/USB, X/Y/Z-axis signal, • Measurement result output to ”MS-
Footswitch measurements that are often used (circle-
Data output: RS-232C/USB
circle distance, etc.) Excel” in spreadsheet (CSV)
Power supply 120V AC, 50/60Hz format.
Mass 2.2kg (stand-mount type)
2.1kg (arm-mount type) • The measurement procedure and
measurement result can be saved, using
a USB drive.
• Two models available: a stand-alone type
with tilt system and a flexible-arm type that
can be mounted on a profile projector.
QM-Data200
Order No.: 264-155A (stand-mount type)
Order No.: 264-156A (arm-mount type)
• Intuitive panel design
The QM-Data200 employs Geometry Keys
to accelerate the measurement process.
The probing routine of standard geometric
features and combinations are designed
with Geometry Keys on the front panel.
Click the key you need and capture features
to complete the measurement quickly
and accurately. This improves operator
QM-Data 200 productivity, reduce errors, and saves
Stand-mount type
operation time and cost.
• Graphic display
Measurement information and data are
visualized on the back-lit colored LCD with
graphical interfaces. The geometric feature
selected is displayed with the probing
navigator. The measurements map and blink
indication show the probing points and
sequences. This improves operation accuracy
and reduces errors and time.
I-25
QM-Data200
SERIES 264 — 2-D Data Processing Unit Optional Accessories
12AAD034: Receipt printer (for 120V)
223663: Printer paper for receipt printer
12AAA804: Printer cable (2m)
937179T: Foot switch
SYSTEM DIAGRAM 12AAD193: Connection cable B
MUX-10F
12AAD194: Connection cable C
Main unit with SPC output
264-002A 12AAD195: Connection cable D
PJ-A3000, 12AAA807: RS-232C cable (2m)
PH-3515F (172-847),
PJ-500 12AAA808: RS-232C cable (4m)
SPC cable
DMX-2
936937 (1m) x2pcs.
12AAD538 Main unit without counter Technical Data
All profile projectors
Image detection
Main unit with RS-2322C output Connecting Connecting with the linear scale • Directivity: Non-direction
cable D cable C XY stage can be
12AAD195 12AAD194 connected directly.
• Min. diameter: ø2mm on the screen
PJ-A3000D/F, PJ-H30, MF/MF-U
• Min. width: 1mm on the screen
RS-232C cable (2m)
12AAA807
• Max. moving speed: 1000mm/s
Applicable illumination
For RS-232C output
(Connected to PC) • Type: Surface / Contour illumination
• Range: 30Lx to 1500Lx on the screen
KC Counter Bright-Dark field difference: 20Lx
Connecting cable B Repeatability: 1µm in contour illumination
12AAD193
Function: Error in detection of illumination change
Power Supporting a contour illumination
switch brightness selector switch of projector
For FDD unit
connection (USB)
For printer
connection Optional Accessories
12AAE671:
Detector attachment (A)
For stick memory PJ-A3000, PJ-H30, PH-3515, PH-A14 series
connection (USB) (Adaptation diameter of a screen:
QM-Data200: Rear panel For footswitch input 10” / ø250 to 14” / ø350mm)
OPTOEYE-200 12AAE672:
Detector attachment (B)
The OPTOEYE-200 Image Edge Sensor PJ-500, PV-5110, PV-600A series
eliminates human errors, ensuring speedy, (Adaptation diameter of a screen:
• Bright and dark buttons allow easy 20” / ø500 to 24” / ø600mm)
accurate and consistent measurements, calibration.
regardless of operator's skill. • OPTOEYE can be powered by QM-Data200
via the connecting cable. No AC adapter is
FEATURES required.
• OPTOEYE-200 adopts a thin fiber-optic • The brightness of the chart can be adjusted.
cable for detector connection for easy
set-up and smart operation without
obstructing your view.
OPTOEYE-200
Order No.: 332-151
Detector attachment
(optional)
DIMENSIONS
unit: mm
QM-DATA200 AND VISION UNIT

OPTICAL MEASURING
Extending the Capabilities of 2D Optical Measuring Instruments

91.5
44.5 94
1950
Bulletin No. 2222
I-26
Vision Unit
SPECIFICATIONS SERIES 359 — Vision System Retrofit for MF and MF-U Microscopes
Projected Image Inverted Image
Onscreen Magnification 19x-1900x (22” Monitor) FEATURES
Camera Unit • The automatic edge-detection tools and • A series of measuring operations can be
Image Sensor Size 1/2” Color CMMOS various macro icons allow measurement in performed using just one screen display.
Image Sensor Resolution 3 MP one easy step. • The auto-brightness control function
Interface USB 2.0 • The graphics and measurement navigation reproduces the type and degree of
Dimensions (WxDxH)
2.28 x 2.32 x 3.27” functions facilitate operation. illumination required. (This function is
58 x 59 x 83mm limited to the MF/MF-U series.)
Adapter Unit
• Image data input/storage function.
Measurement Software QSPak VUE (optional)
• Measurement results are output in CVS QSPAK Measurement Window
Dimensions (DXH) 1.77 x 4.84” / 45 x 123mm
format. This lets the user generate an
Magnification 0.5x
inspection table in MS-Excel®.
Optional Accessory: Foot Switch (12AAJ088)
• Allows the tolerance zone measurement of
measurement results and various types of
statistical processing for each item.
QSPAK, optional software • Combined use with the focus pilot provides
For observation/comparison of form high-accuracy height measurements.
• Template matching function (Patent pending)
• Manual pattern matching function
For simple measurement The PC system, QSPAK software and

Vision Unit
• One-click edge detection tool function No.: 359-763 (for MF D) microscope are optional.
• Smart tool function
• User macro function
For repeated measurement/

auto-measurement
• Quick navigation function
• Playback function
• Graphic function
• External data output function
• Statistical calculation function
One-click Edge Detection

By clicking the mouse near the edge of a workpiece, QSPAK
automatically scans the edge and detects it, showing its
coordinates. This function also works with the point tool, box
tool, circle tool and auto-focus tool.
: Optional accessory
Calibration glass chart
No. 02AKN020
Vision Unit
CMOS camera unit QSPAK
Fiber-optic
ring illuminator
Adapter unit
Multi I/O card
Measuring microscope
(w/ XY or XYZ counter) Foot switch
No. 12AAJ088 Connecting cable
1X objective
Graphic Window Focus Pilot
The measurement results and measured elements are plotted No. 375-057A: for MF models 22" color display
in the graphic window in real-time. By using this function, the 3X objective No. 375-067A: for MF-U models
user can check the current measuring position at a glance. (see page I-21) PC
The graphic window can be used for geometrical calculation.
5X objective
Laser printer
10X objective
*A for UL/CSA, D for CEE, E for BS, DC for China,

K for EK, C for Taiwan, No suffix is required for JIS/100V
I-27
FS-70
SERIES 378 — Microscope Unit for Semiconductor Inspection
FEATURES
• The optical system that was developed for •Bright field, differential interference
the best-selling FS 60 models was further contrast (DIC) and polarized observations
enhanced for the FS70 models. It is ideal are optional with FS70Z and FS70. The
as a microscope unit of a prober station for FS70L and FS70L4 do not support the DIC
semiconductors. (All models CE marked.) method.
• The FS70L supports three types of YAG • By employing an inward revolver, the
laser wavelength ranges (1064nm, 532nm long working distance objectives provide
and 355nm), while the FS70L4 supports excellent operability.
two types of wavelength ranges (532nm • An ergonomic design with superb
and 266nm), thus expanding a scope of operability: the FS70 employs the erect-
laser applications, allowing laser-cutting image optical system (the image in the Technical Data
of thin-films used in semiconductors field of view has the same orientation as Focus Adjustment With concentric coarse and fine
Method: focusing wheels (right and left)
and liquid crystal substrates. However, the specimen) and enlarged fine focus
50mm travel range
Mitutoyo assumes no responsibility for adjustment wheel with rubber-grip coarse Range: 0.1mm/rev. for fine adjustment,
the performance and/or safety of the laser adjustment knob. 3.8mm/rev. for coarse adjustment
system used with Mitutoyo microscopes. Trinocular tube Image: Erect image
Careful examination is recommended in Siedentopf type,
Pupil distance: adjustment range:
selecting a laser-emission unit. 2-3" / 51-76mm
Field number: 24
Tilt angle: 0º - 20º (only -TH, -THS models)
Reflective illumination for bright
Illumination system: field (Koehler illumination, with
aperture diaphram)
12V100W fiber optics,
Light source (optional): non-stepped adjustment,
light guide length 1.5m,
power consumption 150W
Objectives (optional): M Plan Apo, M Plan Apo SL,
G Plan Apo
FS70Z FS70L FS70L4
SPECIFICATIONS
Model No. FS70 FS70-TH FS70Z FS70Z-TH FS70L FS70L-TH FS70L4 FS70L4-TH Optional Accessories
Order No. 378-184-1 378-184-3 378-185-1 378-185-3 378-186-1 378-186-3 378-187-1 378-187-3
For a complete listing of accessories see
Short base model No.FS70-S FS70-THS FS70Z-S FS70Z-THS FS70L-S FS70L-THS FS70L4-S FS70L4-THS Microscope Units and Objectives brochure, E4191-378
Order No. 378-184-2 378-184-4 378-185-2 378-185-4 378-186-2 378-186-4 378-187-2 378-187-4
Focus adjustment 50mm travel range with concentric coarse (3.8mm/rev) and fine (0.1mm/rev) focusing wheels (right / left)
Image Erect image
Pupil distance Siedentopf type, adjustment range: 2 - 3” / 51 - 76mm
Field number 24
Tilt angle — 0° - 20° — 0° - 20° — 0° - 20° — 0° - 20°
Optical pass ratio 50/50 100/0 or 50/50 100/0 or 100/0 or 0/100 100/0 or 0/100
0/100 0/100
Protective filter — — Built-in laser beam filter Built-in laser beam filter
MICROSOPE UNITS AND OBJECTIVES
Tube lens 1X 1X - 2X zoom 1X 1X
Optical Measuring
(UV, NUV, VISIBLE & NIR REGION)
Applicable laser — — 1064/532/355nm 532/266nm

Camera mount C-mount (using optional adapter B) Use a laser with TV port. C-mount receptacle
(with green filter switch)
Illumination Reflective illumination for bright field (Koehler illumination, with aperture diaphragm)
system, optional 12V 100W fiber optics, non-stepped adjustment, light guide length: 1.5m, power consumption 150W
Objective, optional M Plan Apo, M Plan Apo SL, G Plan Apo
(for observation)
Objective, optional — M/LCD Plan NIR, M Plan UV
(for laser-cutting) M/LCD Plan NUV
Loading weight* 32lbs/14.5kg 30lbs/13.6kg 31lbs/14.1kg 29lbs/13.2kg 31lbs/14.2kg 30lbs/13.5kg 31lbs/13.9kg 29lbs/13.1kg Catalog No. E14020
Mass (main unit) 13lbs/6.1kg 15.5lbs/7.1kg 14.5lbs/6.6kg 16.5lbs/7.5kg 14lbs/6.4kg 15.5lbs/7.2kg 14.5lbs/6.7kg 16.5lbs/7.5kg Refer to No. (E14020) for more details.
*Loading weight on optical tube excluding weight of objective lenses and eyepieces.
I-28
VMU
SERIES 378 — Video Microscope Unit
The VMU is a compact, light-weight, and Wide VMU: Technical Data

easy-to-install microscope unit for CCD FEATURES FOV in Camera Port 30mm Diameter
camera monitoring in semiconductor
• Offers approximately 7 times larger Camera Mount F Mount (with C mount Adapter)
fabrications.
inspection area. Example Sensor Size APS-C format (2 inches)
FEATURES • Increases throughput by allowing for

batch measurements.
• The rigidity and general performance • BD models can accommodate darkfield Wide VMU Accessories
of the VMU-LB & VMU-L4B have been optics.
enhanced compared to previous models. 378-724 BF Revolver
• The optical system features ultra-long 378-725 BD Revolver
378-515 WIDE VMU-V 378-726 BF Motorized Revolver
working distance objectives and correction 378-516 WIDE VMU-H
for the wide range of radiation. 378-727 BD Motorized Revolver
378-517 WIDE VMU-BDV
• The fiber-optic reflected illumination keeps 378-518 WIDE VMU-BDH
the workpiece free from thermal expansion
caused by heat. The fiber-optic illuminator
is required for the light source.
• Also available with a laser mount or
revolving nosepiece (objective mount). ×7
VMU
SPECIFICATIONS
Magnification of tube 1X WIDE VMU
Applicable 378-505, Near-infrared and visible radiation
wavelength 378-506
378-507 Near-infrared —visible— near- Configure high-density arrangements by
378-513 ultraviolet radiation alternating between WIDE VMU-V and -H.
Image sensor (Prevents interference between image sensors)
378-508 Visible and ultraviolet radiation
378-514 Near-infrared to ultraviolet
Objective (Optional) see pg. I-28 thru I-32 Optical fiber for bright-
field illumination
Reflected illumination • Telecentric system with aperture Image sensor
stop system. Optical fiber for dark-
field illumination
• Fiber-optic illuminator (optional) is
required.
Light source Halogen bulb (21V, 150W) (optional)
Mass 378-505: 570g
378-506: 590g
378-507: 980g
378-508: 1010g WIDE VMU-V WIDE VMU-H
378-513: 1300g
378-514: 1300g
Selection Guide of System Configuration C-mount Laser mount

Order No.
(Depends on each system
VMU-V 378-505
VMU-H 378-506
VMU-L 378-507
VMU-L4 378-508
VMU-LB 378-513
VMU-L4B 378-514
configuration)
Fiber mount
Vertical CCD camera mount l l l l l

Horizontal CCD camera mount l
YAG laser mount l l l l
Fiber-optic illumination unit s s s s s s VMU-V

M Plan Apo, M Plan Apo SL, G Plan Apo s s s s s s
objectives for bright field observation
M Plan Apo NIR, LCD Plan Apo NIR, M Finescope VMU-L4B
VMU-H
Plan Apo NUV and LCD Plan Apo NUV s s s objective
objectives for laser cutting
M Plan UV objectives for laser machining s s
l: Provided, s: Available as optional accessory
I-29
Eyepieces
SERIES 378
FEATURES
• The field of view is extra wide.
• Optional reticles are available.
Reticles (optional)
516848: Cross-hair
516576: Broken cross hair (90º and 60º)
SPECIFICATIONS 516578: Concentric circle
(Diametric increment: 1.2mm)
Order No. Magnifi- Field Mass Individual 516577: 20mm scale
(2pcs. set) cation number order No. (Minimum reading: 0.1mm) with cross hair
378-866 10X 24 85g 378-856-5 516849: 10mm scale (Minimum reading: 0.1mm)
378-857 15X 16 40g 378-857-5 516850: 5mm scale (Minimum reading: 0.05mm)
378-858 20X 12 55g 378-858-5
378-866 378-857 378-858
Objectives
SERIES 378
The Mitutoyo 378 Series objectives have the • The metallurgical plan apochromatic
world's longest working distance and an (M Plan Apo) objective provides a flat,
infinity correction optical system. These ob- chromatic aberration-free image through-
jectives provide flexible observation at high out the field of view, making it suitable for
magnifications and independent correction any type of microscope.
of chromatic aberration. • Specially designed objectives also are MICROSOPE UNITS AND OBJECTIVES
Optical Measuring
available with correction for near-infrared (UV, NUV, VISIBLE & NIR REGION)
FEATURES radiation, near-ultraviolet radiation, and

• The long working distance objectives pro- ultraviolet radiation, or various thicknesses
vide excellent clearance between the lens of LCD screen glasses.
surface and the workpiece surface in focus, • The mounting screw threads of objectives
making it possible to observe workpieces are designed to conform to JIS
which are usually hard-to-focus because of B-7141-1988.
awkward projections. Catalog No. E14020
Refer to No. (E14020) for more details.
M Plan Apo and M Plan Apo SL BD Plan Apo and BD Plan Apo SL
objectives for bright field observation objectives for bright/dark field observation
Near-infrared radiation corrected M Plan Apo NIR Near-ultraviolet radiation corrected M Plan Apo NUV Ultraviolet radiation corrected M Plan UV objectives
objectives objectives
I-30
M Plan Apo for Bright Field Observation
Order No. Mag. N.A. W.D. f R D.F. View field 1 View field 2 Mass
378-800-3 1X 0.025 11.0mm 200mm 11.0µm 440µm ø24mm 4.8x6.4mm 300g
378-802-6 5X 0.14 34.0mm 40mm 2.0µm 14.0µm ø4.8mm 0.96x1.28mm 230g
378-807-3 7.5X 0.21 35.0mm 26.67mm 1.3µm 6.2µm ø3.6mm 0.64x0.85mm 240g
DIMENSIONS
Unit: mm
11 (W.D.) 1/4 wave
length filter 1.6 34 (W.D.) 2.2 33.5 (W.D.) 4.6 13 (W.D.)
ø34
ø34
ø34
ø34
ø32.2
ø32.2
ø25.2
ø32.2
ø21.5
ø25
ø25
ø22
ø24
ø38
ø41
84 61 61.5 82
5 95 378-800-3 5 95 378-802-6 5 95 378-803-3 5 95 378-805-3
(Parfocal distance) (Parfocal distance) (Parfocal distance) 378-803-3 (Parfocal distance) 378-805-3
1.6 34 (W.D.) 1.6 35 (W.D.) 4.4 20 (W.D.) 4.5 6 (W.D.)
ø34
ø34
ø34
ø34
ø25.2
ø32.2
ø27.5
ø32.2
ø24.5
ø25.2
ø32.2
ø23.8
ø17
ø32.2
ø25
ø22
61 75 89
60 378-806-6
5 95 378-801-6 5 95 378-807-3 5 95 378-804-3
378-804-3 5 95
378-806-3
(Parfocal distance) (Parfocal distance) (Parfocal distance) (Parfocal distance)
M Plan Apo SL for Bright Field Observation

Note: 378-810-3 20X 0.28 30.5mm 10mm 1.0µm 3.5µm ø1.2mm 0.24x0.32mm 240g
These objectives offer extra-long working
distance. 378-811-15 50X 0.42 20.5mm 4mm 0.7µm 1.6µm ø0.48mm 0.10x0.13mm 280g
378-812-3 80X 0.50 15.0mm 2.5mm 0.6µm 1.1µm ø0.3mm 0.06x0.08mm 280g
DIMENSIONS
1.2 30.5 (W.D.) 2.5 15 (W.D.) Unit: mm
ø34
ø34
ø23.47
ø25.2
ø32.2
ø25.2
ø32.2
ø21.6
64.5 80
5 95 378-810-3 5 95 378-812-3
(Parfocal distance) (Parfocal distance)
3.9 20.5 (W.D.) 4.6 13 (W.D.) 0.5 13 (W.D.)
ø39
ø34
ø34
ø25.2
ø32.2
ø27.3
ø25.2
ø32.2
ø24.2
ø29.4
ø37
ø22
74.5 82 82
5 95 378-811-15 5 95 378-813-3 5 95 378-816-3
(Parfocal distance) (Parfocal distance) (Parfocal distance)
M Plan Apo HR for Bright Field Observation

Note: Order No. Mag. N.A. W.D. f R D.F. View field 1 View field 2 Mass
These objectives offer extra-high resolving 378-787-4 5X 0.21 25.5mm 40mm 1.3µm 6.2µm ø4.8mm 0.96x1.28mm 285g
power. 378-788-4 10X 0.42 15mm 20mm 0.7µm 1.6µm ø2.4mm 0.48x0.64mm 460g
Mag.: Magnification DIMENSIONS

N.A.: Numerical aperture
W.D.: Working distance (W.D) (W.D) Unit: mm
(W.D)
1 5.2 1.2 1.3
ø39
f: Focal distance 15
ø34
ø34
ø10.4
R: Resolving power
ø32.2
ø32.2
D.F.: Focal depth

ø19
ø26
ø37
View field 1:
Field of view when using ø24mm eyepiece 80 89.8 93.7
View field 2: 5 95 378-788-4 5 95 378-814-4 5 95 378-815-4
(Parfocal distance) (Parfocal distance) 378-815-4
(Parfocal distance)
Field of view when using 1/2” CCD camera
I-31
Glass Thickness (t = 3.5mm) Corrected
G Plan Apo for Bright Field Observation
378-847 20X 0.28 29.42mm* 10mm 1.0µm 3.5µm ø1.2mm 0.24x0.32mm 270g
378-848-3 50X 0.50 13.89mm* 4mm 0.6µm 1.1µm ø0.48mm 0.10x0.13mm 320g
*In air
DIMENSIONS
1.58 30.6 (W.D.) Glass 1.6 15.08 (W.D.) Glass Unit: mm
ø34
ø34
ø32.2
ø32.2
Note:
ø25
ø25
ø24
ø23
The G Plan Apo Series are designed for observing a
65.59 80 workpiece through BK-7 glass (thickness = 3.5mm).
5 96.19 378-847 5 96.19 378-848-3
BD Plan Apo for Bright/Dark Field Observation

378-830-7 7.5X 0.21 34.0mm 26.67mm 1.3µm 6.2µm ø3.6mm 0.64x0.85mm 350g
DIMENSIONS
4 34(W.D) 4 34(W.D) 8.5 6(W.D) Unit: mm
ø44
ø44
ø44
ø31.5
ø40
ø42
ø40
ø42
ø37
ø40
ø42
ø37
61 61 89
5 95 378-831-7 5 95 378-833-7 5 95 378-836-7
4 34(W.D) 7 20(W.D)
ø44
ø44
ø40
ø42
ø37
ø40
ø42
ø32
61 75
5 95 378-832-7 5 95 378-834-7
4 34(W.D) 7 13(W.D)
ø44
ø44
ø40
ø42
ø37
ø40
ø42
ø32
61 82
5 95 378-830-7 5 95 378-835-7
BD Plan Apo SL for Bright/Dark Field Observation

DIMENSIONS
7.5 30.5(W.D.) 8.5 13(W.D.) Unit: mm
ø44
ø44
Note:
ø40
ø42
ø32
ø40
ø42
ø31
These objectives offer extra-long working distance.

64.5 82
5 95 378-840-7 5 95 378-842-7
8 20(W.D.) 8.5 13(W.D.) Mag.: Magnification
ø44
ø44

W.D.: Working distance
f: Focal distance
ø40
ø42
ø40
ø42
ø32
ø32
R: Resolving power
75 82 D.F.: Focal depth
5 95 378-841-7 5 95 378-843-7 View field 1: Field of view when using ø24mm eyepiece
(Parfocal distance) (Parfocal distance) View field 2: Field of view when using 1/2” CCD camera
I-32
DIMENSIONS Unit: mm
BD Plan Apo HR for Bright/Dark Field Observation
4.8 5.2(W.D.)
4.8 5.2(W.D.) 4.7 1.3(W.D.)
4.7 1.3(W.D.)
ø44
ø44
ø44
ø44
ø40
ø42
ø32
ø40
ø42
ø32
ø40
ø42
ø32
ø40
ø42
ø32
89.9 89.9 93.7 93.7
5 5 95 95378-845-7 378-845-7 5 5 95 95378-846-7 378-846-7 Note: These objectives offer extra-high resolving power.
(Parfocal distance)
(Parfocal distance)
DIMENSIONS Unit: mm M Plan Apo NIR B

378-867-5 378-868-5 f (mm) R (μm) Mass
Order No. Mag. N.A. W.D. (mm) ±DOF (μm) View field 1 View field 2
25.5 (Working 25.5 (Working 25.5 (Working 25.5 (Working (λ=550nm) (λ=550nm) (g)
ø37
ø37
ø37
distance) distance) distance) distance)
378-867-5 20X 0.40 25.5 10 0.7 1.7 1.2 0.24×0.32 350
ø37
ø37
ø37
ø37
378-868-5 50X 0.42 25.5 4 0.7 1.6 0.48 0.10×0.13 375
>A high-transmission laser type objective suited to the fundamental and second harmonic of the YAG laser. Corrected over the visible (420nm) to near-infrared (1064nm) spectrum.
9.5 69.5 69.5 69.5
95 (Parfocal distance) > This series of objective has greatly improved in operability thanks to the achievement of an ultra-long working distance of 25.5mm while maintaining the NA of the NIR series 20X/50X.
arfocal distance) 5 5 95 (Parfocal distance) 5 95 (Parfocal distance)
Near-infrared Radiation Corrected

M Plan Apo NIR for Bright Field Observation
378-863-5* 50X 0.65 10mm 4mm 0.4µm 0.7µm ø0.48mm 0.10x0.13mm 450g
378-864-5* 100X 0.70 10mm 2mm 0.4µm 0.6µm ø0.24mm 0.05x0.06mm 450g
* High Resolution (HR objectives)
Note: DIMENSIONS Unit: mm
These objectives are designed so that a workpiece's image 0.4 37.5 (W.D.) 0.6 20 (W.D.) 12 (W.D.)
ø34
ø34
ø34
can be focused within the focal depth even when the
wavelength is changed anywhere from the visible range (l =
ø32.2
ø24.8
ø32.2
ø32.2
ø24.6
ø24.4
ø24.6
ø25
ø25
480nm) up to near-infrared range (l = 1800nm). Therefore,
the M Plan NIR Series are suitable for laser repair. However, 57.5 75 83
when the wavelength used exceeds 1100nm, the focusing 5 95 378-822-5 5 95378-824-5 378-824-5 5 95 378-826-5
position may slightly deviate from that in the visible range (Parfocal distance) (Parfocal distance) (Parfocal distance)
due to changes in glass dispersion and refractive index.
M Plan Apo NIR HR 50×／100×
1 30.5 (W.D.) 0.4 17 (W.D.)
ø34
ø34
0.3 10
ø39
ø25.2
ø32.2
ø24.6
ø32.2
ø24.4
ø25
ø27.6
ø37
ø28
64.5 78 85
5 95 378-823-5 5 95 378-825-5 5 95 378-863-5
378-863-5
(Parfocal distance) (Parfocal distance) 378-864-5
378-864-5
Near-ultraviolet Radiation Corrected

M Plan Apo NUV for Bright Field Observation
378-809-5 10X 0.28 30.5mm 20mm 1µm 3.5µm ø2.4mm 0.48x0.64mm 255g
378-888-6* 50X 0.65 10.00mm 4mm 0.42µm 0.65µm ø0.48mm 0.10x0.13mm 500g
*High resolution (HR objective)
DIMENSIONS
Note: 0.5 30.5(W.D.) 2.6 15(W.D.) Unit: mm
ø34
ø34
These objectives are designed so that a workpiece's image

ø32.2
ø24.4
ø32.2
can be focused within the focal depth even when the

ø25.2
ø25
wavelength is changed anywhere from the visible range (l =

620nm) to the near-ultraviolet range (l = 355nm). Therefore 64.5 80
The M Plan NUV Series are suitable for laser repair using a 5 95 378-809-5 5 95 378-818-4
(Parfocal distance) (Parfocal distance)378-818-8
high frequency laser beam.
Mag.: Magnification 1.6 17(W.D.) 1.7 11(W.D.)
ø34
ø34

378-888-6
ø32.2
ø24.4
ø32.2
ø23.4

ø25
ø24
f: Focal distance
R: Resolving power 78 378-817-8 84
D.F.: Focal depth
5 95 378-817-4 5 95 378-819-4
View field 1: Field of view when using ø24mm eyepiece
View field 2: Field of view when using 1/2” CCD camera
I-33
Near-Infrared Radiation and LCD Glass Thickness (t = 1.1mm or 0.7mm) Corrected
LCD Plan Apo NIR for Bright Field Observation
378-821-5 20X (t0.7) 0.40 19.98mm* 10mm 0.7µm 1.7µm ø1.2mm 0.24x0.32mm 305g
378-828-5 50X (t1.1) 0.42 17.13mm* 3.9mm 0.7µm 1.6µm ø0.48mm 0.10x0.13mm 320g
378-829-5 50X (t0.7) 0.42 17.26mm* 3.9mm 0.7µm 1.6µm ø0.48mm 0.10x0.13mm 320g
378-754-15 100X (t0.7) 0.50 12.06mm* 2mm 0.6µm 1.1µm ø0.24mm 0.05x0.06mm 335g Note:
*In air These near-infrared (l = 1800nm) corrected objectives are
designed for observing a workpiece through LCD glass
(thickness = 1.1mm (378-827-5, 378-828-5, 378-752-5) or
DIMENSIONS 0.7mm (378-829-5, 378-754-5) and for laser repair.
Unit: mm
0.6/1 12.5 /12 0.6 20.35 (W.D.) 0.5 17.5 (W.D.) 0.5 17.5 (W.D.)
ø34
ø34
ø34
ø34
ø32.2
ø32.2
ø32.2
ø24.4
ø24.4
ø24.6
ø32.2
ø24.4
ø25
ø25
ø25
ø25
82.87/83.24 378-752-5 74.94378-827-5 77.87 77.74

5 95.37/95.24
378-754-5 5 95.37 378-827-5 5 95.37 378-828-5 5 95.24 378-829-5
Near-ultraviolet Radiation and LCD Glass Thickness (t = 0.7mm) Corrected

LCD Plan Apo NUV for Bright Field Observation
378-891-6** 50X (t0.7) 0.65 9.76mm* 4mm 0.42µm 0.65µm ø0.48mm 0.10x0.13mm 500g
378-753-8 50X (t1.1) 0.42 14.53mm 4mm 0.7µm 1.6µm ø0.48mm 0.10x0.13mm 310g
378-751-4 100X(t1.1) 0.50 11.03mm 2mm 0.6µm 1.1µm ø0.24mm 0.05x0.06mm 380g
* In air
** High-Resolution (HR Objectives)
DIMENSIONS
Unit: mm
Note:
2.6 15 (W.D.) 1.5 11.4(W.D.)
ø34
ø34
These near ultraviolet corrected objectives are designed for

observing a workpiece through LCD glass (thickness = 1.1mm
ø32.2
ø24.4
ø32.2
ø24.4
ø23.4
ø25
(378-753-6, 378-751-4) or 0.7mm

(378-820-6) and for laser repair.
80.24 83.97
378-753-5 5 95.24 378-820-4
378-820-4 5 95.37 378-751-4
Ultraviolet Radiation Corrected

M Plan UV for Bright Field Observation
378-844-15 10X 0.25 20mm 20mm 1.1µm 4.4µm ø2.4mm 0.48x0.64mm 310g
DIMENSIONS
20 (W.D.) 15 (W.D.)
Note:
ø34
ø34
Unit: mm
These ultraviolet corrected objectives are designed so that
ø32.2
ø32.2
a workpiece's image can be focused within the focal depth

even when the wavelength is changed anywhere from the
75 80
378-844-15 378-837-5 visible range (l = 550nm) to the ultraviolet range
5 95 5 95
(Parfocal distance) (Parfocal distance) 378-837-7 (l = 266nm). Therefore the M Plan UV Series are suitable for
laser repair using a high-frequency laser beam.
Mag.: Magnification
12 (W.D.) 10 (W.D.)
ø34
ø34

ø32.2
ø32.2
f: Focal distance
R: Resolving power
83 85
378-838-5 378-839-5 D.F.: Focal depth
5 378-838-8
95 5 95
View field 1: Field of view when using ø24mm eyepiece
View field 2: Field of view when using 1/2” CCD camera
I-34
MSM-400
SERIES 377 — Stereo Microscopes
FEATURES
Digital Imaging with Software • Continuous 1X - 4X magnification
• Binocular tube inclination: 45°
• Image always in focus throughout zoom • Focusing range: 1.46” (37mm)
64AAB429 MOTICAM 2, 2.0 MEGAPIXEL-1/3” CMOS, USB
range
64AAB529 MOTICAM 3+, 3.0 MEGAPIXEL-1/2” CMOS, USB • Interpupillary adjustable range:
64AAB431 MOTICAM 5, 5.0 MEGAPIXEL-1/2.5” CMOS, USB • Crisp, erect images with high resolution 2.12” - 2.99” (54mm - 76mm)
64AAB526 MOTICAM 1080, 2.0 MEGAPIXEL-1/2.8” CMOS, USB/HDMI and excellent stereoscopic effect
• Optional zoom ranges from
• Stereo-tube can be rotated a full 360°, 2.5X - 10X to 30X - 120X
for viewing at any angle
The MSM-414L is a traditional binocular
• Bilateral zoom control knob adds stereo microscope for industrial, medical and
convenience and increases operator classroom applications. It is ideal for electrical
efficiency small part inspection, assembly, and medical/
• Diopter adjustment for both eyepieces biological dissection.
Illuminated Stand
377-412 Pole-Type Stand (top: 12V/10W flat filament
Optional Accessories tungsten, bottom: 5W fluorescent
377-413* Pole-Type Stand (top: 12V/10W flat filament
Order No. Description tungsten, bottom: 12V/10W halogen with
64AAB214 LED Variable Ring Light intensity control)
377-414 Fixed-Arm Stand (top: 12V/10W flat filament

tungsten, bottom: 5W fluorescent)
377-415 Fixed-Arm Stand (top: 12V/10W flat filament

tungsten, bottom: 12V/10W halogen with
intensity control)
377-416 Fixed-Arm Stand (top: 5W fluorescent,

bottom: 5W fluorescent)
*Standard Accessory
377-972A
SPECIFICATIONS
Model. MSM-414L MSM-414TL
Order No. 377-972A 377-974A
Optical tube Binocular Trinocular
Total magnification 10X - 40X
Eyepiece 10X (377-016)
Objective 1X - 4X
Working distance 80mm
Field of view 20mm - 5mm
Dimensions H=13.2"x W=6.7"x D=9.3"
Mass 13.2 lbs (6kg)
I-35
Stereo Microscopes
SERIES 377
I-36
MSM-400
SERIES 377 — Stereo Microscopes
FEATURES
• Superior quality optics provide high-resolution changer allowing 6X, 12X, 25X, and 50X
• Crystal sharp, high-color contrast image with magnifications with a standard 1X objective
excellent depth of field and 10X eyepieces, the MSM-465L has
Video System
limitless capabilities for electrical small part
Order No. Description • Always in sharp focus at all magnifications
inspection.
377-488 Video System* for 377-990A • The Parfocal Optical System allows relaxed
377-489 Video System* for 377-991A The MSM-464L, Order No. 377-991A, with
strain-free viewing
* Converts Binocular to Trinocular its vertical five-step magnification changer
• Long working distance is ideal for small part assembly. This stereo
• Extreme large field of view (23mm diameter) microscope with standard 6.4X, 10X, 16X,
Accessories The MSM-465L, Order No. 377-990A, is 25X, and 40X magnifications, has flexibility
Order No. Description a high-accuracy four-step magnification from 3.2X to 160X magnifications.
64AAB214 LED variable ring light stereo microscope. With a horizontal
MSM-465L
377-990A
MSM-464L
377-991A
Digital Imaging with Software

64AAB429 MOTICAM 2, 2.0 MEGAPIXEL-1/3” CMOS, USB
64AAB529 MOTICAM 3+, 3.0 MEGAPIXEL-1/2” CMOS, USB
64AAB431 MOTICAM 5, 5.0 MEGAPIXEL-1/2.5” CMOS, USB
64AAB526 MOTICAM 1080, 2.0 MEGAPIXEL-1/2.8” CMOS, USB/HDMI
SPECIFICATIONS
Model. MSM-465L MSM-464TL
Order No. 377-990A 377-991A
Optical tube Binocular* Binocular*
Total magnification 6X - 50X 6.4X - 40X
Eyepiece 10X (377-456) 10X (377-456)
Objective .6X, 1.2X, 2.5X, 5X .6X, 1X, 1.6X, 2.5X, 4X
Working distance 89mm 89mm
Field of view 23mm (w/377-456) 23mm (w/377-456)
Dimensions H=14.6"x W=13"x D=11" H=14.3"x W=13"x D=11"
Mass 15.5 lbs (7kg) 15.5 lbs (7kg)
Stand Transmitted Light Stand (377-428) Transmitted Light Stand (377-428)
* For Video System, see upper left table (optional accessories)
I-37
Stereo Microscopes
SERIES 377
377-990A/377-991A SYSTEM DIAGRAM
377-488:for 377-990A Eyecup (ø32.5)

377-489:for 377-991A Eyecup (ø35)
377-450 377-451
Video system
377-452 377-453 377-454 377-455 377-457 377-458 377-459 377-460 377-456*
6.25X/23 15X/17.6 20X/13.4 32X/12 20X/14 10X/23 10X/23 10X/23 10X/23

Super wide
C-mount Wide field eyepiece Measuring eyepiece field eyepiece
video adapter
*45 degree binocular head
Video-phototube
377-990A = MSM465L
377-991A = MSM464L
Vertical
illuminator 377-443
Ring
Illuminator
64AAB214 377-442
*
Transmitted
light stand
Auxiliary objective 377-428
**1X plan objective
***0.3X 0.5X 0.625X 1.5X 2X

377-471 377-472 377-473 377-474 377-475 377-470
Optional Stand
Universal stand
377-423
Articulating arm boom stand

(Base stand version)
Articulating arm boom stand Streamlined
377-424 stand
(table clamp version)
377-429
377-426 Ball bearing boom stand Ball bearing boom stand
(Base stand version) (table clamp version)
377-425 377-427
* Standard Accessories
** 1X plan objective can replace 1X standard built-in objective
*** 350mm long stand post is required. (377-431)
I-38
Pocket Magnifiers
SERIES 183
FEATURES
• Suitable for inspecting metal surfaces.
183-201
SPECIFICATIONS
Magnification Order No. Remarks
25X 183-201 Pen type 183-202
183-202 With stand
Optional Reticles for Pocket Comparators
50X 183-203 With stand
183-203
Pocket Comparators
SERIES 183
183-102 183-103 183-104
FEATURES
• By replacing optional reticles, dimensional,
angle and other types of measurements 183-101
can be performed.
183-105 183-106 183-107 • Illuminator (950757) is available.
SPECIFICATIONS
8X 183-101 Optional reticles available Optional
10X 183-131 Optional reticles available illuminator
183-108 183-109 183-110 (950757)
Zoom Loupe
SERIES 183
183-111 183-112 183-113
FEATURES
• Allows the user 8X - 16X zoom
observation.
• Magnification indicator is provided for 8X,
183-114 183-115 10X, 12X, 14X and 16X observation.
• Metric and inch scales are provided for 183-304 Reticle provided
measuring.
• Comes with a carrying case. SPECIFICATIONS
Pocket Comparator 8X with Reticles Set
Set No. 8X - 16X 183-304 With reticle (Scale
graduation: 0.1mm, .005"
Clear Loupe
183-901 183-101, 183-106
183-902 183-101, 183-102, 183-106, 183-107,
183-112, 183-113, 183-114
SERIES 183
183-903 183-101, 183-102, 183-106, 183-107,
183-109, 183-113, 183-115
183-904 183-101, 183-102 SPECIFICATIONS
7X 183-301 Drawtube removable
183-301 183-302 183-303
I-39
Quick Guide to Precision Microscopes
Measuring Instruments
■ Numerical Aperture (NA) ■ Finite Optical System
The NA figure is important because it indicates the resolving power An optical system that uses an objective to form the intermediate
of an objective lens. The larger the NA value the finer the detail that image at a finite position. Light from the workpiece passing through the
can be seen. A lens with a larger NA also collects more light and will objective is directed toward the intermediate image plane (located at the
normally provide a brighter image with a narrower depth of focus than front focal plane of the eyepiece) and converges in that plane.
one with a smaller NA value.
A point-source on Objective lens Light from point source is focused
NA = n·Sinθ the workpiece at the intermediate image plane
The formula above shows that NA depends on n, the refractive index

of the medium that exists between the front of an objective and the L1 L2 Magnification of the objective = L2/L1
specimen (for air, n=1.0), and angle θ, which is the half-angle of the
maximum cone of light that can enter the lens.
■ Focal Length (f) unit: mm
■ Resolving Power (R) The distance from the principal point to the focal point of a lens: if f1
represents the focal length of an objective and f2 represents the focal
The minimum detectable distance between two image points, length of an image forming (tube) lens then magnification is determined
representing the limit of resolution. Resolving power (R) is determined by the ratio between the two. (In the case of the infinity-correction
by numerical aperture (NA) and wavelength (λ) of the illumination. optical system.)
l Focal length of the image-forming (tube) lens
R = (µm) Objective magnification =
2·NA Focal length of the objective
l = 0.55μm is often used as the reference wavelength
Example: 1X = 200 Example : 10X = 200
200 20
■ Working Distance (W.D.)
The distance between the front end of a microscope objective and the ■ Focal Point
surface of the workpiece at which the sharpest focusing is obtained.
Light rays traveling parallel to the optical axis of a converging lens
system and passing through that system will converge (or focus) to a
■ Parfocal Distance point on the axis known as the rear focal point, or image focal point.
The distance between the mounting position of a microscope objective
and the surface of the workpiece at which the sharpest focusing is ■ Depth of Focus (DOF) unit: mm
obtained. Objective lenses mounted together in the same turret should
have the same parfocal distance so that when another objective is Also known as depth of field, this is the distance (measured in the
brought into use the amount of refocusing needed is minimal. direction of the optical axis) between the two planes which define the
limits of acceptable image sharpness when the microscope is focused on
an object. As the numerical aperture (NA) increases, the depth of focus
becomes shallower, as shown by the expression below:
Working distance
DOF = l 2 l = 0.55μm is often used as the reference wavelength
2· (NA)
Example: For an M Plan Apo 100X lens (NA = 0.7)
Parfocal distance The depth of focus of this objective is
0.55μm = 0.6μm
2 x 0.72
■ Infinity Optical System
An optical system where the objective forms its image at infinity and a ■ Bright-field Illumination and Dark-field
tube lens is placed within the body tube between the objective and the
eyepiece to produce the intermediate image. After passing through the
Illumination
objective the light effectively travels parallel to the optical axis to the In brightfield illumination a full cone of light is focused by the objective
tube lens through what is termed the infinity space within which auxil- on the specimen surface. This is the normal mode of viewing with an
optical microscope. With darkfield illumination, the inner area of the
iary components can be placed, such as differential interference contrast
light cone is blocked so that the surface is only illuminated by light from
(DIC) prisms, polarizers, etc., with minimal effect on focus and aberration an oblique angle. Darkfield illumination is good for detecting surface
corrections. scratches and contamination.
Objective lens
Image forming (tube) lens
A point-source on
the specimen Light from point source is focused ■ Apochromat and Achromat Objectives
at the intermediate image plane
An apochromat objective is a lens corrected for chromatic aberration
(color blur) in three colors (red, blue, yellow).
f1 f2 Magnification of the objective = f2/f1 An achromat objective is a lens corrected for chromatic aberration in
two colors (red, blue).
Infinity space
I-40
■ Magnification ■ Field number (FN), real field of view, and
The ratio of the size of a magnified object image created by an monitor display magnification unit: mm
optical system to that of the object. Magnification commonly refers to The observation range of the sample surface is determined by the
lateral magnification although it can mean lateral, vertical, or angular
diameter of the eyepiece’s field stop. The value of this diameter in mil-
magnification.
limeters is called the field number (FN). In contrast, the real field of view
is the range on the workpiece surface when actually magnified and
■ Principal Ray observed with the objective lens.
A ray considered to be emitted from an object point off the optical The real field of view can be calculated with the following formula:
axis and passing through the center of an aperture diaphragm in a lens
system. (1) The range of the workpiece that can be observed with the
microscope (diameter)
FN of eyepiece
Real field of view =
■ Aperture Diaphragm Objective lens magnification
An adjustable circular aperture which controls the amount of light Example: The real field of view of a 1X lens is 24 = 24
passing through a lens system. It is also referred to as an aperture stop 1
and its size affects image brightness and depth of focus. The real field of view of a 10X lens is 2.4 = 24
10
(2) Monitor observation range
■ Field Stop Monitor observation range = The size of the camera image sensor (diagonal length)
A stop which controls the field of view in an optical instrument. Objective lens magnification
• Size of image sensor
Format Diagonal length Length Height
■ Telecentric System 1/ 3” 6.0
8.0
4.8
6.4
3.6
4.8
1/ 2”
An optical system where the light rays are parallel to the optical 2/3” 11.0 8.8 6.6
axis in object and/or image space. This means that magnification is
nearly constant over a range of working distances, therefore, almost (3) Monitor display magnification
eliminating perspective error.
Monitor display magnification =
Display diagonal length on the monitor
Objective lens magnification x
■ Erect Image Diagonal length of camera image sensor
An image in which the orientations of left, right, top, bottom and
moving directions are the same as those of a workpiece on the
workstage.
I-41
MITUTOYO CALIBRATION SERVICES
Mitutoyo America has expanded three-dimensional calibration and

inspection services at our new precision measurement facility located in
our corporate headquarters in Aurora, IL. Equipped with multiple Mitutoyo
Legex CMMs, along with high-accuracy vision and form measuring
instruments, our laboratory offers accredited dimensional measurement
services with uncertainty as low as 0.25 μm (10 μinches). And for form
measurement, our uncertainty goes as low as 5 nanometers (0.2 μinches).
Our experienced staff is ready for your challenges – we specialize in
specialty gage calibration, complex prototype or master parts, specialty
and custom-built 3D gages, and long length standards such as ball bars,
step gages and gage blocks. We can also assist you in the validation of
your measurement processes by providing accredited reference values on
your parts.
Mitutoyo America calibration and inspection services are accredited to
ISO/IEC 17025 by A2LA (Certificate 0750.01). We welcome customer
tours of our laboratory.
If you have any questions or would like more information regarding Mitutoyo
Calibration Services, contact: mim@mitutoyo.com

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I

Profile Projectors INDEX

PJ-A3000 PROFILE PROJECTOR

Bulletin No. 2021(2)

Refer to Bulletin No. (2021) for more details.

D1: Max. workpiece diameter

264-156A: Arm-mount type

By separating axial motion, and stabilizing FEATURES

Switchable surface illumination:

*Attachment stand (12AAG982)

374 (14.7”) 270 (10.6”) 365 (14.4”) 16 (.6”)

(Focal point) (9.1-12.4”)

374 (14.7”) 270 (10.6”) 365 (14.4”) 16 (.6”)

Edge detection system for QM-Data200 (5.9”) (10”) (15.8”) (5.9”)

12AAE671: Detector Attachment PJ-H30A3017B

FEATURES • Angled screen allows projected images

264-156A: Arm-mount type

2-D data processing unit. 150

332-151: Optoeye 470 (18.5”) 535 (21”)

Max. workpiece diameter whose edge

Order No. Description

Reports Flexibility for report contents and formatting

Bulletin No. 2210(2)

Refer to Bulletin No. (2210) for more details.

Max. workpiece diameter whose edge

16.7”(424) 12.6”(321) 21.2”(540)

Standard Scales Reading Scales

Digimatic Micrometer Heads SPECIFICATIONS

Holder with Clamp

172-142 V-Block with Clamp

Vertical Holder 172-132

Overlay chart set (12 sheets)

12AAM587 12AAM588 12AAM589

12AAM590 12AAM591 12AAM592

12AAM593 12AAM594 12AAM595

12AAM596 12AAM597 12AAM598

F Top of the stage

■ Magnification Accuracy Projection lens

Protractor eyepiece LED ring light

2.6”(67) Working distance

Eyepiece • Magnification: 15X

.47” (176-116) • Field number: 13

• GIF (green) ﬁlter

.6”(15) .47”(12) 7.23”(186) .47”(12) .60”(15) 12.3”(313) .60”(15) Power

LED illumination Halogen illumination

High Visibility Digital Display

3017D: 12 x 6.6” / 300 x 170mm 4020D: 16 x 8” / 400 x 200mm

Front of display Rear of display

Illumination Unit (must select) Fixture and Stage Accessories

264-155A: Stand-mount type

114 360 551 120.3

• Motorized model of the MF Series. can be selected from a high-intensity LED or

Refer to No. (E14003) for more details. are optional accessories.

1010D: 4 x 4” / 100 x 100mm

2010D: 8 x 4” / 200 x 100mm

Polarized light observation: Differential interference contrast (DIC) observation:

2017D: 8 x 6.7” / 200 x 170mm

Applicable laser — — 1064/532/355nm 532/266nm