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    Scanning Electron Microscope

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    Andy
    The document is a brochure for the CX-200 Scanning Electron Microscope from COXEM. It summarizes that the CX-200 SEM provides nano-scale resolution imaging with magnification from 10x to 300,000x. It has automatic controls and optional detectors like EDS and BSE that allow for versatile analysis of various sample types from silicon wafers to biological materials. COXEM is a provider of electron microscopes with expertise in nano-metrology.

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    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd

    Scanning Electron Microscope

    Uploaded by

    Andy
    44 views6 pages
    The document is a brochure for the CX-200 Scanning Electron Microscope from COXEM. It summarizes that the CX-200 SEM provides nano-scale resolution imaging with magnification from 10x to 300,000x. It has automatic controls and optional detectors like EDS and BSE that allow for versatile analysis of various sample types from silicon wafers to biological materials. COXEM is a provider of electron microscopes with expertise in nano-metrology.

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    SEM_CX200

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    The document is a brochure for the CX-200 Scanning Electron Microscope from COXEM. It summarizes that the CX-200 SEM provides nano-scale resolution imaging with magnification from 10x to 300,000x. It has automatic controls and optional detectors like EDS and BSE that allow for versatile analysis of various sample types from silicon wafers to biological materials. COXEM is a provider of electron microscopes with expertise in nano-metrology.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    44 views6 pages

    Scanning Electron Microscope

    Uploaded by

    Andy
    The document is a brochure for the CX-200 Scanning Electron Microscope from COXEM. It summarizes that the CX-200 SEM provides nano-scale resolution imaging with magnification from 10x to 300,000x. It has automatic controls and optional detectors like EDS and BSE that allow for versatile analysis of various sample types from silicon wafers to biological materials. COXEM is a provider of electron microscopes with expertise in nano-metrology.

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    You are on page 1of 6

    www.coxem.

    com

    Scanning Electron Microscope


    Whatever your application,
    whatever your sample,
    CX-200 offers the solution

    Scanning Electron Microscope


    Versatile Tool to Access the Nano-World
    The optical microscope is the most commonly used tool in surface metrology generally and it is
    widely used in educational programs, R&D and quality control. However, the optical microscope
    can not fulfill the growing demand for higher magnification due to its physical limitations.
    The CX-200 SEM is a powerful tool for surface characterization which produces high quality
    images with nano-scale resolution. Its software is using the graphical user interface and
    based-on and Microsoft Windows 7 or XP

    Global Solution Provider, COXEM


    COXEM is a provider of superb solution in electron microscope with an extensive know-how in
    nano-metrology. COXEM Co., Ltd is a spin-off company from KRISS(Korea Research Institute
    of Standards and Science

    N��iga�� t� N�n�-W��l� �i�� C�X�M


    �X-2�0 S�M Features & Benefits
    - High resolution(3.0nm)
    - Powerful magnification(X10~X300,000)
    - 5 axis Automatic system
    - Fast Vacuum, rapid analysis(within 5min)
    - Navigation system
    - Automatic Control
    - Dynamic focus
    - SE,BSE image merge
    - Chamber Camera(Optional)
    CX-200
    Scanning Electron Microscope

    More powerful of software, CX-200 NanostationTM


    High Quality Imaging
    From TV mode to photo mode, you can get a more higher-quality images (Max 5120 x 3840 pixels)

    Various Detectors & Display Modes


    Display SE, BSE, SE & BSE merged image with adjustable composition ratio by only one click

    Automatic Control
    Filament saturation, Brightness/Contrast, Focus/Stigmation and Gun Alignment are automatically
    performed by one click

    5-axis Motorized Stage


    Auto stepper motor type, microstep drive, 19nm resolution. You can check the point & position of
    a specimen, even in the manual stage. (X, Y, Z, T, R-axis is optional)

    ‘Point & Go’ Stage Manipulation


    Click any point of image and then move to that point in the motorized stage.

    Histogram
    Display image histogram for better image recognition

    Actual Vacuum Level Display


    Display actual vacuum level upto 5.0 x 10-4 torr on
    both operation SW and LCD panel of main frame
    without full range gauge.

    Dynamic Focus & Tilt Compensation


    Focus a tilted specimen evenly & Convert trapezoidal
    shape caused by tilting into rectangular shape

    User Hot Key & Report Generation


    Map hot keys to the frequently used functions &
    Generate a RTF-based MS Office document
    by one click

    Dual mode image


    Display both a low magnification and a high magnification
    image in a single window.

    CX-200
    Scanning Electron Microscope
    Application Fields
    The CX-200 can meet your imaging needs with high resolution and quick pump speeds.
    The CX-200 will make the most of whatever you work with.
    CX-200 can provide the optimal results for the various samples such as:

    ▷ Silicon wafers

    ▷ Rubbers or Paintings

    ▷ Hygienics
    Wire Bonding LCD Panel Solar cell
    ▷ Metal materials

    ▷ Polymer materials

    ▷ Life science, etc.

    Solar cell defect Micro Drill Ceramic


    ▷ Non-metal materials

    ▷ Medical science

    ▷ Ceramics

    ▷ Nano particles /
    Tin Ball Bond Powder Fe-Ag Powder
    structures

    Wool Cabbage Mosquito


    CX-200 Versatile Multipurpose SEM
    Optional Detectors

    EDS X-ray Detector, Thermo UltraDry


    We offer ESD detectors for X-ray microanalysis and high-throughput applications.
    Because no single component of this analysis is as critical to performance and accuracy
    as the X-ray detector, we recommend the liquid nitrogen free EVEX QDD Violin.

    ■ Excellent energy resolution : 128eV FWHM


    ■ Light element detection down to Beryllium on selected models
    ■ High count rate > 750,000 cps (100k cps - SEM)
    ■ No Liquid Nitrogen, Peltier cooling

    < EDS & EDS 3D image >


    BSE Detector, Robinson Series 8
    The Series 8 Robinson detectors are wide-angle backscattered electron(BSE)
    detectors that rely upon the energy of the BSEs to generate the signal from a high
    performance phosphor material. They use a new format of phosphor surface to
    generate and capture a very high photon signal from low energy electrons.
    This high performance extends from a voltage less than 1 kV and increases with
    accelerating voltage. The phosphor is easy to clean and exhibits long life.
    It works equally well in high pressure and high vacuum.

    ■ Type: Wide-angle scintillator photomultiplier backscattered electron detector.


    ■ Thickness: 2.5 mm at beam entry point
    ■ Minimum Accelerating Voltage: Less than 1 KV
    ■ Minimum Working Distance: 4 mm < W alloy sample imagine compare SE with BSE >

    Ion Sputter Coater (Model: KIC-1A)


    COXEM supplies a ion sputter coater, Model KIC-1A with stable ion current, with a simple manipulation
    and setting methods. It can produce uniform particle sizes and coating thickness.

    Specification
    ◉ Rapid pumping, less than two minute
    ◉ Fast operation with preset values
    ◉ Easy job setup
    ◉ Automatic vacuum control
    ◉ Automatic ventilation after coating
    ◉ Easy adjustment of sample height
    ◉ Target size: 50 mm (Gold / Platinum)
    ◉ Power: 220V/60Hz, 500W
    ◉ Ionization current: 1 ~ 7 mA
    ◉ Dimension: 380(W) x 250(D) x 330(H) mm
    ◉ Chamber size: 100 mm (Dia.)
    ◉ Rotary pump: 100 liter/min.
    Specification: CX-200
    Resolution 3.0 nm (at 30 kV, SE Image)
    10 nm (at 3kV, SE Image)
    Magnification X10 to X300,000
    Accelerating voltage 0.5 ~ 30 kV
    Electron gun W (Tungsten), Pre-centered cartridge filament
    Objective IRIS Variable apertures with 4 different diameters
    Image Shift ± 50um (WD=10mm)
    Stage Manual Stage (standard)
    5-axis automatic stage (optional)
    X: 65 mm, Y: 40 mm, Z: 5~70 mm, T: -20°~+90°, R: 360°
    Max. Chamber Size 210mm dia
    Max. Sample Size 130mm dia
    Max. Sample Height 71mm
    Automation Function Auto Brightness & Contrast Control
    Auto Focus & Stigmator Control
    Auto Gun Alignment & Filament Satulation Control
    Dynamic Focus
    Display Mode Reduced window: 320 x 240 pixels
    TV Mode: 640 x 480 pixels
    Slow Mode: 800 x 600 pixels (3 steps)
    Split Mode: 1200 x 600 pixels
    Photo Mode 1: 1280 x 960 pixels
    Photo Mode 2: 2560 x 1920 pixels
    Photo Mode 3: 5120 x 3840 pixels
    Vacuum system Fully automated turbo molecular pump, 260 liters/sec or
    Diffusion pump, 310 liters/sec
    Rotary pump, 100 liters/min
    System Monitoring Actual Vacuum Level Display
    Chamber Camera (optional)
    BMP, TIFF, JPG, PNG
    Image format MS Window 7/XP, Mouse & Keyboard
    Operation System Main system: 77(W) x 88(D) x 150(H) cm, 350 kg
    Dimension & Weight Operation Table: 100(W) x 80(D) x 70(H) cm, 10 kg

    COXEM Co., Ltd


    #201, Migun Technoworld, 533, Yongsan-Dong, Yuseong-Gu, Daejeon, 305-500, Korea
    Tel. +82-42-861-1685~8 Fax. +82-42-861-1689 Website. www.coxem.com
    E-mail. infor@coxem.com

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