Nebb CPT Draft 2007

PROCEDURAL STANDARDS FOR
2007 THIRD EDITION
NATIONAL ENVIRONMENTAL BALANCING BUREAU
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CERTIFIED TESTING OF CLEANROOMS
PROCEDURAL STANDARDS FOR CERTIFIED TESTING OF CLEANROOMS
2007 THIRD EDITION
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National Environmental Balancing Bureau 8575 Grovemont Circle Gaithersburg, Maryland 20877-4121 301-977-3698 301-977-9589 FAX www.nebb.org
PROCEDURAL STANDARDS FOR CERTIFIED TESTING OF CLEANROOMS
FIRST EDITION OCTOBER 1988 SECOND EDITION APRIL 1996 THIRD EDITION AUGUST 2007
This book may not be reproduced in any form without written permission of the copyright owner.
These Procedural Standards were developed using reliable engineering principles and research plus consultation with, and information obtained from, manufacturers, users, testing laboratories and others having specialized experience. They are subject to revision as further experience and investigation may show is necessary or desirable. Cleanroom Performance Testing, which complies with these Procedural Standards, will not necessarily be acceptable, if when examined and tested, it is found to have other features that impair the result intended by these standards. The National Environmental Balancing Bureau assumes no responsibility and has no liability for the application of the principles or techniques contained in these Procedural Standards. Authorities considering adoption of these Procedural Standards should review all Federal, State, local and contract regulations applicable to the specific installation.
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Copyright NEBB, 2007
FOREWORD
The purpose of the NEBB Procedural Standards for Certified Testing of Cleanrooms is to establish a uniform and systematic set of criteria for the performance of the cleanroom testing and certification. Todays buildings provide highly controlled indoor environments. This is especially true when dealing with clean environmental conditions required by todays micro-electronics, bio-medical, and other highly technical industries. These conditions could not exist without sophisticated mechanical systems created by a team of skilled professionals. A key member of this team is the NEBB Certified Cleanroom (CPT) Firm. This Third Edition represents a departure from past editions and is divided into two distinct Parts: Standards and Procedures. These CPT procedural standards have been developed using language defined by Shall, Should, and May as it relates to the standards and procedures described in this manual. It is important to note these particular words throughout this manual and how they pertain to the NEBB standards and procedures.
Part 2 PROCEDURES Part 2, PROCEDURES, covers measurement procedures of the various testing requirements for cleanroom testing and certification.
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Andrew P. Nolfo, P.E. NEBB Technical Director
APPENDICES The Appendices include a suggested CPT Specification, References, and Engineering Formulas. This Third Edition of the CPT Procedural Standards, when used by NEBB Certified CPT Firms, will assure the building owner or operator that facility systems have been properly tested within design and installation limitations.
Part 1 STANDARDS Part 1, STANDARDS, covers the requirements for Quality Control and Compliance, Instrumentation Requirements, and CPT Reports. Revised requirements for CPT instruments and reports are identified. The new report requirements allow the NEBB Certified Firm more flexibility in designing their reports by prescribing sets of information that "Shall, Should and/or May" be required to complete a CR Report.
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These standards and procedures are intended as the minimum NEBB requirements that a NEBB Certified CPT Firm shall follow when performing Cleanroom Testing and Certification procedures. Contract documents may supercede the NEBB requirements. These CPT Procedural Standards have been carefully compiled and reviewed by the NEBB Technical Committees.
CLEANROOM COMMITTEE MEMBERS AND OTHER CONTRIBUTORS FOR CURRENT AND PREVIOUS EDITIONS
Additional Contributors to the Third Edition: Mike Dolim Gaithersburg, Maryland
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* DECEASED IV
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Current Cleanroom Committee Michael A. Wieder, Chairman Bethlehem, Pennsylvania William C. Neudorfer, PE Past Chairman, Seattle, Washington Donald E. Hill Independence, Missouri Randall J. Silva San Jose, California W. David Bevirt, P.E Tucson, Arizona Andrew P. Nolfo, P.E Phoenix, Arizona
Past Contributors: Robert Cherrington West Valley City, Utah Ken Goldstein Phoenix, Arizona Jerry Greiner Portland, Oregon Patrick C. Law Altamonte Springs, Florida Al Lieberman* Fremont, California Wendell Lough Hampstead, New Hampshire
Kevin McCann Ajax, Ontario, Canada Dan Milholland Raleigh, North Carolina Lonnie Mosley Spring Valley, California Buff Ohnhaus Albuquerque, New Mexico Keith Reals Baltimore. Maryland Gary Rolf Phoenix, Arizona Robert Solana Hauppauge, New York
TABLE OF CONTENTS
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Foreword NEBB Cleanroom Committee Table of Contents
III IV V
PART 1 STANDARDS
SECTION 1 Definitions SECTION 2 NEBB Program, Quality Control and Compliance
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2.2
2.3 2.4
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3.1 3.2 4.1 4.2
SECTION 3 Responsibilities
Introduction Owner/Buyer and Design and Construction Team Responsibilities 3.2.1 Owner/Buyer and Design Professional Responsibilities 3.2.2 Owner/Buyer and/or Construction Team Responsibilities 3.2.3 NEBB Certified CPT Firm Responsibilities 11 11 11 12 12
SECTION 4 Standards for Instrumentation and Calibration

Minimum Instrumentation Range and Accuracy Use Table 4-1 Instrumentation Requirements (Minimum) Table 4-2 Instrumentation Requirements (Optional) 15 15 16 18
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2.1
NEBB Programs 2.1.1 NEBB Disciplines 2.1.2 Firm Certification 2.1.3 Supervisor Qualification 2.1.4 Technician Qualification 2.1.5 Recertification Requirements Quality Assurance Program Conformance Certification 2.2.1 Program Advantages 2.2.2 NEBB Quality Assurance Program Certificate Quality Control and Compliance 2.3.1 Cleanroom Work Compliance CR Supervisor Responsibilities 2.4.1 Execution of CPT Procedures 2.4.2 Technician Training 2.4.3 Coordination / Supervision 2.4.4 Project Communication 2.4.5 Field Work Completion 2.4.6 Compilation and Submission of Final Cleanroom Reports 2.4.7 Project Completion
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NEBB CPT PROCEDURAL STANDARDS
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SECTION 5 Standards for Reports and Forms
5.1 5.2 Reports Required Forms 5.2.1 Report Title 5.2.2 Report Certification 5.2.3 Table of Contents 5.2.4 Standard Operating Procedures 5.2.5 Report Summary / Remarks 5.2.6 Instrument Calibration 5.2.7 Abbreviations Airflow Velocity and Uniformity Test Filter Face Velocity - Unidirectional Airflow Velocity and Uniformity Test Filter Face Airflow Velocity - Non-Unidirectional (Volume Method) Airflow Velocity and Uniformity Test Filter Face Airflow Velocity - Non-Unidirectional (Velocity Method) Airflow Velocity and Uniformity Test Average Room Airflow Velocity Airflow Volume and Uniformity Test Flowhood Method Airflow Volume and Uniformity Test Traverse Method Airflow Volume and Uniformity Test Filter Face Airflow Velocity Method HEPA Filter Installation Leak Tests Aerosol Photometer Test Method HEPA Filter Installation Leak Tests Discrete Particle Counter Test Method HEPA Filter Installation Leak Tests Ambient Particulate Test Method HEPA Filter Installation Leak Tests Total Aerosol Penetration Test Method Airborne Particle Counting Tests ISO Standard (Non-Unidirectional and Unidirectional) Airborne Particle Counting Tests Federal Standard 209E (Non-Unidirectional) Airborne Particle Counting Tests Federal Standard 209E (Unidirectional) Airborne Particle Counting Tests Sequential Sampling Room Pressurization Tests Airflow Parallelism Tests Enclosure Integrity Tests Recovery Tests Lighting Level and Uniformity Tests Sound Level Tests Vibration Level Tests General Temperature and Humidity Uniformity Tests Comprehensive Temperature and Humidity Uniformity Tests Electrostatic Tests Conductivity Tests Electromagnetic Interference (EMI) Tests 23 24 24 24 24 24 25 25 25 25 26 26 27 27 28 28 28 29 30 30 30 31 31 32 32 33 33 34 34 34 35 35 36 36 36 37
5.3 5.4 5.5 5.6 5.7 5.8 5.9 5.10 5.11 5.12 5.13 5.14
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5.16 5.17 5.18 5.19 5.20 5.21 5.22 5.23 5.24 5.25 5.26 5.27 5.28 5.29
5.15
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PART 2 - PROCEDURES
SECTION 6 Cleanroom Safety
6.1 Introduction 6.2 Designing a Health and Safety Program 6.2.1 Designing a Program Policy 6.2.2 Designing a Training Program 6.2.3 Essentials of the Health and Safety Program 6.3 Responsibilities 6.3.1 Individual Health and Safety Responsibilities 6.4 Elements of the Program 6.4.1 Project Specific Items 6.4.2 Health and Safety Program Implementation 39 39 39 40 40 40 40 41 42 42
SECTION 7 Cleanroom Protocol
SECTION 8 Cleanroom Standard Operating Procedures

8.1 Introduction 8.2 Standard Operating Procedures 8.2.1 Description 8.2.2 Format 8.2.3 Language and Detail 8.2.4 Review and Approval 8.2.5 Distribution and Control 8.2.6 Modifications 8.2.7 Data Collection Forms / Reports 45 45 45 45 47 47 47 47 47
SECTION 9 Cleanroom Tests

9.1 Introduction 9.2 Certification Tests 9.2.1 Cleanroom Airflow 9.3 Occupancy States 9.3.1 As-Built Facility 9.3.2 At-Rest Facility 9.3.3 Operational Facility 9.3.4 Exceptions 9.4 Cleanliness Levels 9.5 Primary Tests 9.6 Secondary Tests 9.7 Testing Intervals Table 9-1 Recommended Test by Cleanroom Type Table 9-2 Recommended Testing Interval 49 49 49 49 50 50 50 50 50 50 51 51 52 53
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7.1 Introduction 7.2 Cleanroom Procedures 7.2.1 Gowning Procedures 7.2.2 Equipment Entrance Procedures 7.2.3 Cleanroom Conduct
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SECTION 10 Primary Tests
10.1 Introduction 10.2 Cleanroom / Filter Airflow Velocity and Uniformity Tests 10.3 Airflow Velocity and Uniformity Test Filter Face Velocity - Unidirectional 10.3.1 Instrumentation and Equipment 10.3.2 Test Procedures 10.3.3 Acceptance 10.3.4 Reporting 10.4 Airflow Velocity and Uniformity Test Filter Face Airflow Velocity - Non-Unidirectional (Volume Method) 10.4.1 Instrumentation and Equipment 10.4.2 Test Procedures 10.4.3 Acceptance 10.4.4 Reporting 10.5 Airflow Velocity and Uniformity Test Filter Face Airflow Velocity - Non-Unidirectional (Velocity Method) 10.5.1 Instrumentation and Equipment 10.5.2 Test Procedures 10.5.3 Acceptance 10.5.4 Reporting 10.6 Airflow Velocity and Uniformity Test Average Room Airflow Velocity 10.6.1 Instrumentation and Equipment 10.6.2 Test Procedures 10.6.3 Acceptance 10.6.4 Reporting 10.7 Airflow Volume and Uniformity Test 10.8 Airflow Volume and Uniformity Test Flowhood Method 10.8.1 Instrumentation and Equipment 10.8.2 Test Procedures 10.8.3 Acceptance 10.8.4 Reporting 10.9 Airflow Volume and Uniformity Test Traverse Method 10.9.1 Instrumentation and Equipment 10.9.2 Test Procedures 10.9.3 Acceptance 10.9.4 Reporting 10.10 Airflow Volume and Uniformity Test Filter Face Airflow Velocity Method 10.11 HEPA Filter Installation Leak Tests 10.11.1 Leak Test Methods 10.12 HEPA Filter Installation Leak Tests Aerosol Photometer Test Method 10.12.1 Instrumentation and Equipment 10.12.2 Test Procedures 10.12.3 Acceptance 10.12.4 Reporting 10.12.5 Repairs 55 55 56 56 56 56 56 57 57 57 57 57 57 57 58 58 58 58 58 59 59 59 59 59 59 60 60 60 60 60 60 60 61 61 61 61 61 62 62 63 63 63
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10.13 HEPA Filter Installation Leak Tests Discrete Particle Counter Test Method 10.13.1 Instrumentation and Equipment 10.13.2 Test Procedures 10.13.3 Acceptance 10.13.4 Reporting 10.13.5 Repairs 10.14 HEPA Filter Installation Leak Tests Ambient Particulate Test Method 10.15 HEPA Filter Installation Leak Tests Total Aerosol Penetration Test Method 10.15.1 Instrumentation and Equipment 10.15.2 Test Procedures 10.15.3 Acceptance 10.15.4 Reporting 10.15.5 Repairs 10.16 Airborne Particle Count Cleanliness classification Tests 10.17 Airborne Particle Counting Tests ISO Standard (Non-Unidirectional and Unidirectional) 10.17.1 Instrumentation and Equipment 10.17.2 Test Procedures 10.17.3 Acceptance 10.17.4 Reporting 10.18 Airborne Particle Counting Tests Federal Standard 209E (Non-Unidirectional) 10.18.1 Instrumentation and Equipment 10.18.2 Test Procedures 10.18.3 Acceptance 10.18.4 Reporting 10.19 Airborne Particle Counting Tests Federal Standard 209E (Unidirectional) 10.19.1 Instrumentation and Equipment 10.19.2 Test Procedures 10.19.3 Acceptance 10.19.4 Reporting 10.20 Airborne Particle Counting Tests Sequential Sampling 10.21 Room Pressurization Tests 10.21.1 Instrumentation and Equipment 10.21.2 Test Procedures 10.21.3 Acceptance 10.21.4 Reporting 64 64 64 65 65 65 65 66 66 66 66 67 67 67 67 67 67 69 69 69 69 69 70 71 71 71 71 73 73 73 74 74 74 74 74
SECTION 11 Secondary Tests

11.1 Introduction 11.2 Airflow Parallelism Tests 11.2.1 Instrumentation and Equipment 11.2.2 Test Procedures 11.2.3 Acceptance 11.2.4 Reporting 75 75 75 75 76 76
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11.3 Enclosure Integrity Tests 11.3.1 Instrumentation and Equipment 11.3.2 Test Procedures 11.3.3 Acceptance 11.3.4 Reporting 11.4 Recovery Tests Standard Method 11.4.1 Instrumentation and Equipment 11.4.2 Test Procedures 11.4.3 Acceptance 11.4.4 Reporting 11.5 Lighting Level and Uniformity Tests 11.5.1 Instrumentation and Equipment 11.5.2 Test Procedures General (Applies to All Tests) 11.5.3 Test Procedures Determine of Average Luminance from General Lighting 11.5.4 Test Procedures Symmetrically Spaced Luminaries in Two or More Rows 11.5.5 Test Procedures Symmetrically Located Single Luminare 11.5.6 Test Procedures Individual Luminaires in Single Row 11.5.7 Test Procedures Two or More Continuous Rows of Luminares 11.5.8 Test Procedures Continuous Luminaires in a Single Row 11.5.9 Test Procedures Luminous or Louver-All Ceiling 11.5.10 Test Procedures Point of Work Measurements 11.5.11 Acceptance 11.5.12 Reporting 11.6 Sound Level Tests 11.6.1 Instrumentation and Equipment 11.6.2 Preliminary Test Procedures 11.6.3 Test Procedures 11.6.4 Acceptance 11.6.5 Reporting 11.7 Vibration Level Tests 11.7.1 Instrumentation and Equipment 11.7.2 Preliminary Test Procedures 11.7.3 Test Procedures 11.7.4 Acceptance 11.7.5 Reporting 11.8 Temperature and Humidity Uniformity Tests 11.9 General Temperature and Humidity Uniformity Tests 11.9.1 Instrumentation and Equipment 11.9.2 Test Procedures Temperature 11.9.3 Test Procedures Humidity 11.9.4 Acceptance 11.9.5 Reporting 11.10 Comprehensive Temperature and Humidity Uniformity Tests 11.10.1 Instrumentation and Equipment 11.10.2 Test Procedures Temperature and Humidity 11.10.3 Acceptance 11.10.4 Reporting 76 76 76 76 76 76 77 77 77 77 77 78 78 78 79 79 79 80 80 81 81 81 81 83 83 83 84 85 85 85 85 85 86 88 88 88 88 88 88 89 89 89 89 89 89 90 90
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11.11 Electrostatic Tests 11.11.1 Instrumentation and Equipment 11.11.2 Test Procedures Measurement of Surface Voltage Level 11.11.3 Test Procedures Static Dissipative Test 11.11.4 Test Procedures Ion Generator Test 11.11.5 Test Procedures Measurement of Offset Voltage 11.11.6 Acceptance 11.11.7 Reporting 11.12 Conductivity Tests 11.12.1 Instrumentation and Equipment 11.12.2 Test Procedures Floor Point to Point 11.12.3 Test Procedures Floor to Ground 11.11.4 Acceptance 11.12.5 Reporting 11.13 Electromagnetic Interference (EMI) Tests 11.13.1 Instrumentation and Equipment 11.13.2 Test Procedures for Electromagnetic Interference Test 11.13.3 Acceptance 11.13.4 Reporting 90 90 90 91 91 91 92 92 92 92 92 93 93 93 93 93 94 94 94
APPENDICES
APPENDIX A Sample CPT Specification
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APPENDIX B References and Referenced Publications APPENDIX C
INDEX
Engineering Formulas, Equivalents, & Examples XIII

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PART 1 - STANDARDS
SECTION 1 DEFINITIONS
These procedural standards have been developed using language defined by Shall, Should, and May" as it relates to the standards and procedures described in this publication. It is important to note these particular words throughout this publication and how they pertain to NEBB standards and procedures.
Calibration: The act of comparing an instrument of unknown accuracy with a standard of known accuracy to detect, correlate, report, or eliminate by adjustment any variation in the accuracy of the tested instrument. Certificate of Compliance (Conformance): A written statement, signed by a qualified party, attesting that the items or services are in accordance with specified requirements, and accompanied by additional information to substantiate the statement. Certification: The process of validation required to obtain a certificate of compliance. Classification: A level or the process of specifying or determining the level of airborne particulate cleanliness applicable to a cleanroom or clean zone, expressed in terms of a cleanliness class, which defines a maximum allowable concentration in particles per cubic meter of air for a considered sizes of particles. Cleanroom: A specially constructed room in which the air supply, air distribution, filtration of air supply, materials of construction, and operating procedures are regulated to control airborne particle concentrations to meet appropriate cleanliness levels and other relevant parameters (e.g. Temperature, humidity, pressure, ) as defined by ISO 14644, Federal Standard 209E or any other regulatory entity..
Absolute Filter: Obsolete term (See HEPA filter) Acceptance Criteria: The measured value(s) which determine if the results of the test pass or fail. Accuracy: The accuracy of an instrument is the capability of that instrument to indicate the true value of a measured quantity. Aerosol (Cleanroom Use): Minute liquid droplets suspended in air by shearing an oil such as dioctyl phthalate (DOP) or poly-alpha olefin (PAO) with compressed air; or by forcing an inert gas through the same vaporizing hot liquids. Aerosol Challenge: Challenging of a filter or an installed filter system by test aerosol. Airborne particle: Solid or liquid object, viable or non-viable, suspended in air. Air Change Rate: The number of times the total air volume of a defined space is replaced in a given unit of time. Ordinarily computed by dividing the total volume of the subject space (in cubic meters or cubic feet) into the total volume of air exhausted from the space per unit of time. As-Built Facility: A cleanroom which is complete and operating, with all services connected and functioning, but has no production equipment or operating personnel within the facility. As-Found Data: Data found and documented during initial testing prior to modifications of a system. At-Rest Facility: A cleanroom which is complete and has the production equipment installed, but has no personnel within the facility.
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Clean Zone: A defined or dedicated space in which the concentration of airborne particles is controlled to specified limits or cleanliness levels and other relevant parameters (e.g. Temperature, humidity, pressure,) as defined by ISO 14644, Federal Standard 209E or any other regulatory entity. Contamination: The presence of any unwanted substance, material or energy which adversely affects a product or procedure in a cleanroom. Controlled Environment: An air conditioned work space or room in which the particle concentration is lower than normal air conditioned spaces. A controlled environment is not to be classified as a cleanroom, but some special filtration is required. Counting Efficiency: The ratio of the reported concentration of particles in a given size range to the actual concentration of such particles. CPT: Cleanroom Performance Testing. Designated Leak: A leak from a HEPA filter or filter bank that should be detectable during scanning of the filter installation with a discrete particle counter or aerosol photometer. The designated leak is characterized by a designated number of counts, chosen to establish statistical probabilities related to its detection. Differential Pressure (P): The difference between two pressures measured with respect to the same reference pressure. Deficiency: Is considered any circumstance that adversely affects the specified balance of a device or system. Dioctyl Phthalate (DOP): A liquid plasticizer which is can be used in an aerosolized form to challenge HEPA filters. Dilution System: System wherein aerosol is mixed with particle-free dilution air in a known volumetric ratio to reduce concentration. Effective Filter Face Area: The total area of active filter media through which air passes. Filter Face Velocity: The airflow velocity obtained by dividing the airflow volume by the effective filter face area. Frequency: The number of vibrations or waves or cycles of any periodic phenomenon per second. In noise control of duct systems, our interest lies in the audible frequency range of 20 to 20,000 cycles per second. Gas, Inert: A gas that neither experiences nor causes chemical reaction nor undergoes a change of state in a system or process; e.g. nitrogen or helium mixed with a volatile refrigerant.
HEPA Filter (High Efficiency Particulate Air Filter): An extended media, dry-type filter in a rigid frame having a minimum particle-collection efficiency of 99.97 percent for 0.3 micron particulate at a rated airflow. HEPA filters may be specified by type and grade according to the current edition of IESTRP-CC001 HEPA and ULPA Filters. When the term HEPA filter is used in this publication, the term generally will apply to both HEPA and ULPA filters, unless the efficiency is stated and an ULPA filter specifically is required. Installation: Cleanroom or one or more clean zones, together with all associated structures, airtreatment systems, services, and utilities. Isokinetic sampling: Any technique for collecting airborne particulate matter in which the collection is so designed that the airstream entering the probe is at an airflow velocity that is equal to that of the air passing around and outside the probe.
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Laminar Airflow: See unidirectional airflow. Laskin Nozzle: A nozzle used for the generation of a heterogeneous DOP or PAO aerosol by compressed gas which is typically compressed air. Leak: Penetration of contaminates that exceed an expected value of downstream concentration through lack of integrity or defects. May: The word may is used to indicate a course of action that is permissible as determined by the NEBB Certified CPT Firm. Media: A sieve that traps solid particles with the aid of filter material which retains the solid particles as they pass. Solid particles are collected intact. Micron: A unit of measurement equal to one-millionth of a meter or approximately 0.00003937 inch. (25 microns are approximately 0.001 inch). Microspheres (Polystyrene Latex Spheres PSL): Suspended particles, usually 0.26 m in size, used to generate an aerosol challenge medium where electronic and semi-conductor products are manufactured. Mixed Airflow Cleanroom: A hybrid cleanroom consisting of a combination of unidirectional airflow and non-unidirectional airflow within the same room. NEBB Certified CPT Firm: A NEBB Certified Cleanroom (CPT) Firm is a firm that has met and maintains all the requirements of the National Environmental Balancing Bureau for firm certification in Cleanroom Performance Testing and is currently certified by NEBB. A NEBB Certified CPT Firm shall employ at least one NEBB Qualified CPT Supervisor in a full time management position. NEBB Certified CPT Report: The data presented in a NEBB Certified CPT Report accurately represents system measurements obtained in accordance with the current edition of the NEBB Procedural Standards for Certified Testing of Cleanrooms. Any variances from design, specified or agreed tolerances, are noted in the CPT report project summary. NEBB Qualified CPT Supervisor: A NEBB Qualified CPT Supervisor is a full time employee of the firm in a management position who has successfully passed the supervisor level written and practical qualification examinations and maintains the Supervisor re-qualification requirements of NEBB. NEBB Qualified CPT Technician: A NEBB Qualified CPT Technician is a full time employee of the firm who has met the technician level experience requirements of NEBB and has successfully passed the technician level written and practical qualification examinations. A NEBB Qualified CPT Technician shall be supervised by a NEBB Qualified CPT Supervisor. (Supervision is not intended to infer constant oversight. A NEBB Qualified CPT Technician is capable of performing assigned tasks with periodic supervision.) Non-Unidirectional Airflow: Previously known as non-laminar flow, air distribution where the supply air entering the clean zone mixes with the internal air by means of induction. Occupancy State(s): Three conditions of various stages of testing of a cleanroom; As-Built, At-Rest, and Operational.
Parallel Airflow: Unidirectional airflow which exhibits a measured dispersion of not more than 14 from straight line flow. Particle: A solid or liquid object which, for purposes of classification of air cleanliness, falls within a cumulative distribution that is based upon a threshold (lower limit) size in the range from 0.1 m to 5 m. Particle Concentration: Number of individual particles per unit volume of air. Particle Count: Concentration expressed in terms of the number of particles per unit volume of air or other gas. Particle Counter (Discrete): A light scattering instrument with display or recording means to count and size discrete particles in air.
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Particle Size: An expression for the size of solid or liquid particles expressed as the apparent maximum linear dimension or diameter of the particle. Particle Size Distribution: Cumulative distribution of particle concentration as a function of particle size. Poly-Alpha Olefin (PAO): A synthetic, non-corrosive, non-mutagenic liquid compound which can be used to generate an aerosol to challenge HEPA filters. Precision: Precision is the ability of an instrument to produce repeatable readings of the same quantity under the same conditions. The precision of an instrument refers to its ability to produce a tightly grouped set of values around the mean value of the measured quantity. Procedure: A Procedure is defined as the approach to and execution of a sequence of work operations to yield a repeatable and defined result. Range: Range is the upper and lower limits of an instruments ability to measure the value of a quantity for which the instrument is calibrated. Resolution: Resolution is the smallest change in a measured variable that an instrument can detect. Room Velocity: The residual air velocity level in the occupied zone of the conditioned space, e.g., 0.33, 0.25, 0.17 m/s (65, 50, 35 fpm). Scanning: A method for disclosing leaks in HEPA or ULPA filter units in which the probe inlet of an aerosol photometer or particle counter is held approximately 25 mm (1 inch) from the filter face and moved in overlapping strokes across the test area at a rate based on the leak penetration to be detected and the upstream challenge concentration. Shall: The word shall is used to indicate mandatory requirements to be followed strictly in order to conform to the standards and procedures and from which no deviation is permitted. Note: In the event unique circumstances prevent a required action from being fulfilled, a notation shall be included in the CPT report explaining the exception. For example, such notation could be one of the following: Not Available, Not Applicable, or Not Accessible. The simple notation N/A without definition is not allowed. Should: The word should is used to indicate that a certain course of action is preferred but not necessarily required. Standard: A Standard is defined as a required qualification, action, or result for CPT work. Testing, Adjusting, and Balancing (TAB): TAB is a systematic process or service applied to heating, ventilating and air-conditioning (HVAC) systems and other environmental systems to achieve and document air and hydronic flow rates. The standards and procedures for providing these services shall be as defined in the NEBB Procedural Standards for Testing, Adjusting and Balancing of Environmental Systems. See Appendix B. Testing Intervals: 6 Months: Testing that occurs at an average interval not exceeding 183 days throughout periods of operation use, subject to no interval exceeding 190 days. 12 Months: Testing that occurs at an average interval not exceeding 366 days throughout periods of operation use, subject to no interval exceeding 400 days. 24 Months: Testing that occurs at an average interval not exceeding 731 days throughout periods of operation use, subject to no interval exceeding 800 days. Threshold Size: A selected minimum particle size determined from the relationship between air velocity and the particle velocity at the point of measurement.
ULPA (Ultra-Low Penetration Air) filters: An extended-medium dry-type filter in a rigid frame having a minimum particle collection efficiency of 99.999% for particles 0.12 m and larger. ULPA filters may be specified by type and grade according to IEST-RP-CC001 HEPA and ULPA Filters. Ultra-fine particles: A particle with an equivalent diameter less than 0.1m
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Unidirectional Airflow Cleanroom: Previously known as: Laminar airflow. Controlled airflow through the entire cross-section of a clean zone with a steady velocity and approximately parallel air stream. Unidirectional Flow: Fluid flow in which each fluid particle moves in a smooth path substantially parallel to the paths followed by all other particles. Uniform Airflow: Unidirectional airflow pattern in which the point-to-point readings are within 20 percent of the average airflow velocity for the total area of the laminar flow work zone. Validation: Establishing documented evidence that a process or system, when operated within established parameters can perform effectively and reproducibly to produce a product meeting its predetermined specifications and quality attributes. Work Station: An open or enclosed work surface with direct HEPA filtered air supply. Work Zone: A area within the cleanroom which is designated for clean work and for which CPT is required. The work zone shall be identified by an entrance and exit plane normal to the airflow (where there is laminar or unidirectional airflow).
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SECTION 2 NEBB PROGRAM, QUALITY CONTROL AND COMPLIANCE

2.1 NEBB PROGRAMS
The National Environmental Balancing Bureau (NEBB) is a not-for-profit organization founded in 1971 to: a) develop standards, procedures and programs for the performance of testing, balancing and commissioning of building systems, b) promote advancement of the industry through technical training and development, c) operate programs to certify firms and qualify individuals who meet and maintain NEBB standards with integrity. Additional information on NEBB Programs is available at www.nebb.org.
2.1.1 NEBB DISCIPLINES NEBB establishes and maintains standards, procedures, and specifications for work in its various disciplines, which include: a) b) c) d) e) f) Cleanroom Performance Testing (CPT) Testing-Adjusting-Balancing (TAB) -- Air and Hydronic Systems Sound and Vibration (S&V) Measurement Building Systems Commissioning (BSC) Retro-Commissioning (Retro-Cx) Fume Hood Testing (FHT)
Each discipline is anchored by a NEBB Procedural Standards manual that provides guidelines for work to be performed. NEBB also has created technical manuals, training materials and programs, and seminars to enhance and support each discipline. 2.1.2 FIRM CERTIFICATION NEBB certifies firms that meet certain criteria, ensuring strict conformance to its high standards and procedures. Among other requirements, NEBB Certified Firms must document a record of responsible performance, own a complete set of instruments required for the sophisticated techniques and procedures necessary to perform cleanroom certification tests and have a NEBB Qualified Supervisor as a full-time employee. 2.1.3 SUPERVISOR QUALIFICATION NEBB also establishes professional qualifications for the supervision and performance of work in its various disciplines. NEBB Qualified Supervisors must have extensive experience, and they must pass appropriate, college-level written examinations and demonstrate certain practical working knowledge and proficiency in the use of instruments required for the various disciplines.
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2.1.4 TECHNICIAN QUALIFICATION NEBB also qualifies technicians who must possess certain background and experience as well as pass rigorous written and practical examinations. For example, NEBB Qualified CPT Technician status is maintained by continued employment with a NEBB Certified CPT Firm, and the Technician must perform a minimum number of hours of CPT work each year. 2.1.5 RECERTIFICATION REQUIREMENTS Through the recertification procedures, the firm must verify that its NEBB Qualified Supervisor is still on staff and that it continues to own a complete set of instruments that are in current calibration. In addition, the firm's NEBB Qualified Supervisor renews his or her qualification. Among other requirements, Supervisors must keep abreast of developments in their discipline by attending and successfully completing continuing education seminars annually.
2.2.1 PROGRAM ADVANTAGES The NEBB Quality Assurance Program affords building owners, architects, engineers and other agents a reliable basis for specifying work within the various disciplines of NEBB. The program promotes proper execution of projects by ensuring compliance with NEBB standards and procedures.
2.3 QUALITY CONTROL AND COMPLIANCE
Building owners are entitled to a professional service by every NEBB Certified Firm on every project, whether the job is NEBB-specified or not. It is the responsibility of the NEBB Certified Firm and its NEBB Qualified Supervisor to establish and maintain procedures and practices that will assure a consistent pattern of high quality work on all projects. This point cannot be overemphasized. 2.3.1 CPT WORK COMPLIANCE The scope of work shall be performed as specified in the contract documents, or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. Each relevant or applicable item as identified in the contract documents by description, or by reference, shall be performed and recorded in the report. Data presented in a report shall provide an accurate quantitative record of system measurements and information. References to desired procedures may include statements such as "the work will be performed in accordance to NEBB Standards." When specifications indicate that the work shall be performed in
2.2.2 NEBB QUALITY ASSURANCE PROGRAM CERTIFICATE The NEBB Quality Assurance Program Conformance Certification is available for any project. If specified in the contract documents, the NEBB Certified CPT Firm shall make application to the NEBB Office for a Certificate of Conformance Certification
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The CPT credibility of NEBB is built by maintaining integrity through high standards, quality programs, and demonstrated capabilities of its certified firms. As further assurance, NEBB offers a Quality Assurance Program to guarantee that the work will be accomplished in accordance with its standards. The NEBB Certificate of Conformance Certification is an integral element of the program. It assures that the NEBB Certified Firm will perform specified services in conformity with the current applicable NEBB Procedural Standards.
2.2 QUALITY ASSURANCE PROGRAM - CONFORMANCE CERTIFICATION
accordance with NEBB standards, the procedures will conform to the current edition of the NEBB Procedural Standards for Certified Testing of Cleanrooms.
2.4 CPT SUPERVISOR RESPONSIBILITIES

It is the responsibility of the NEBB Qualified CPT Supervisor to control the quality of the work. This means that the NEBB CPT Certified Firm, through its NEBB Qualified CPT Supervisor, shall satisfy the project testing requirements exclusive of acceptance criteria or guaranteeing performance. 2.4.1 EXECUTION OF CPT PROCEDURES The NEBB Qualified CPT Supervisor shall have project responsibility, which includes authority to represent the NEBB Certified CPT Firm. Examples of project responsibility may include labor decisions, negotiating change orders, committing to contract interpretations and implementing changes in job schedules. The NEBB Qualified CPT Supervisor has the responsibility to assure that the cleanroom performance tests have been completed and reported in accordance with these Procedural Standards and the contract documents to assure the accuracy of all data that is included in the final report. Factors such as technician training, instrument use, coordination / supervision, work instructions, and project communication play a critical role in achieving this requirement. 2.4.2 TECHNICIAN TRAINING The NEBB Qualified CPT Supervisor has a responsibility to assure that technicians performing the work are properly trained and possess sufficient skills. Areas that should be stressed are CPT procedures, instrument use and maintenance, coordination, supervision, and project communication. 2.4.2.1 CLEANROOM PROCEDURES TRAINING NEBB Qualified CPT Technicians must be prepared to completely measure and record data in the manner specified. It is mandatory that NEBB Qualified CPT Technicians possess the ability to perform the specific tasks and procedures required for each project. An understanding of items such as HVAC system operation, operating characteristics, cleanroom protocol, etc are important, and technicians should possess rudimentary knowledge of all related systems and procedural considerations. This may require periodic training to promote knowledge and skill development as well as to facilitate the transfer of knowledge and basic skills in the use of new technology. 2.4.2.2 INSTRUMENT USE and MAINTENANCE NEBB Qualified CPT Technicians shall possess knowledge and skill in the proper use and care of instruments required to perform the work. This shall include a thorough understanding of the operating principles and use of equipment and instruments. Considerations for the delicate nature of many of the instruments typically used, as well as the adverse effects of dirt, shock, jarring movements and exceeding rated capacities, shall be addressed along with the proper methods for storing and transporting the instruments. 2.4.3 COORDINATION / SUPERVISION The NEBB Qualified CPT Supervisor shall be responsible for directing technicians in performing the work. Instructions may delineate items such as the scope of work, location and quantity of measurements, location and quantity of sample location, leak testing procedures, design, specified or agreed criteria, etc. so that field personnel may know exactly what to do and what is required of them.
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2.4.4 PROJECT COMMUNICATION The NEBB Qualified CPT Supervisor shall report on progress made toward work completion, when required, as well as report and address problems if encountered. When a problem exists, the NEBB Qualified CPT Supervisor should notify the appropriate project personnel. The NEBB Qualified CPT Supervisor may provide input as to the cause of the problem and recommend possible solutions. 2.4.5 FIELD WORK COMPLETION The NEBB Qualified CPT Supervisor shall determine when the cleanroom testing work has been completed, and when to submit the final report. The field work is complete when the field testing scope of work as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified Firm is achieved. 2.4.6 COMPILATION AND SUBMISSION OF FINAL CLEANROOM REPORTS Reports shall include information and data to provide an accurate quantitative record of system measurements and information. Reports also shall include notes and comments, as appropriate, to provide the reviewer with additional details related to the test procedure, system operation and results. Reports shall meet the criteria listed in Section 5.
2.4.7 PROJECT COMPLETION The project completion shall be defined by all field testing and project document deliverables completed and submitted to the Owner/Buyer.
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The certification page shall bear the stamp of the NEBB Qualified CPT Supervisor. The stamp on the certification page shall be signed as evidence that the NEBB Qualified CPT Supervisor has personally reviewed and accepted the report. Signature stamps are specifically prohibited.
SECTION 3 RESPONSIBILITIES
3.1 INTRODUCTION
Many approaches can be taken to deliver a successful cleanroom project. In order to maximize value and benefits derived from cleanroom testing, it is important to understand that the owner/buyer, design professionals and other construction team members have responsibilities that will affect the outcome of the testing process. The following outline represents NEBBs recommended practices that may take place on a conventional design/bid/buy/construct delivery project or on a direct procurement project between the Owner/Buyer and the NEBB Certified CPT Firm. While other delivery approaches will exist, the overall concept of the delineation of responsibilities remains. The Owner/Buyer shall be the responsible party that dictates the recommended following procedures.
3.2.1 OWNER / BUYER AND DESIGN PROFESSIONALS RESPONSIBILITIES It is recommended that the Owner/Buyer and/or contract documents shall: a) Specify the tests to be performed, the parameters to be measured and the acceptable tolerances. NEBB standards and procedures define industry best practices to perform the testing.
c) Define the applicable standards, cleanliness classification(s), acceptance criteria, etc. prior to submission of project fees; i.e. ISO Class 4 at 0.3 m.
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d) Clearly identify on the architectural, mechanical and electrical plans and in the specifications, the system components required for cleanroom testing; i.e. pressure relationships, cleanroom reflected ceiling plans, cleanroom floor plans, etc.
e) Specify that the building and/or HVAC control system firm commission and document their work before the cleanroom testing work begins. Specify that the NEBB TAB firm commission and document their work before the cleanroom testing work begins.
g) Specify that the building control system firm provides access to hardware and software, or onsite technical support required to assist the cleanroom testing effort. The hardware and software or the onsite technical support shall be provided at no cost to the NEBB Certified CPT Firm.
b) Define who retains the services of the NEBB Certified CPT Firm and require that the NEBB Certified CPT Firm be retained early in the construction process.
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3.2 OWNER / BUYER AND DESIGN AND CONSTRUCTION TEAM RESPONSIBILITIES
NEBB CPT PROCEDURAL STANDARD
h) Provide adequate access to all equipment and components required by the cleanroom testing process. i) Completely define validation/commissioning support responsibilities for the NEBB Certified CPT Firm.
3.2.2 OWNER / BUYER AND / OR CONSTRUCTION TEAM RESPONSIBILITIES It is recommended that the Owner/Buyer and/or construction team shall:
. a) Provide the NEBB Certified CPT Firm with a conformed set of contract documents (drawings,
specifications, and approved submittals), including all current approved change orders and contract modifications. b) Develop a project schedule with the input of the NEBB Certified CPT Firm that coordinates the work of other disciplines and provides adequate time in the construction process to allow successful completion of the cleanroom testing work. c) Notify the NEBB Certified CPT Firm of all schedule changes. d) Ensure that the cleanroom envelope is complete.
e) Ensure that all necessary mechanical, electrical and HVAC work is complete and is safe to operate. Permanent electrical power shall be complete and all electrical systems shall be properly installed in accordance with all applicable codes to ensure the safety of all construction personnel. f) Complete the installation, programming (including design parameters and graphics), calibration and startup of all building control systems that affect the cleanroom operation. Verify that the building control system provider has commissioned and documented their work.
g) Require that the building control system firm provide access to hardware and software, or onsite technical support required to assist the cleanroom testing effort. The hardware and software or the onsite technical support shall be provided at no cost to the NEBB Certified CPT Firm.
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h) Define the cleanroom entry protocol; i.e. gowning, wipe-down procedures, etc. Complete the TAB work prior to the NEBB Certified CPT Firm performing the necessary cleanroom tests.
Provide the NEBB Certified CPT Firm with a HEPA filter layout and where required serial number and location of each filter within all cleanrooms.
3.2.3 NEBB CERTIFIED CPT FIRM RESPONSIBILITIES The NEBB Certified CPT Firm shall: a) Perform the scope of work as specified in the contract documents, or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. b) Follow the current NEBB standards and procedures when performing the cleanroom tests.
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c) Communicate on a regular basis, through proper channels, items relating to design, installation, or function that prevent the NEBB Certified CPT Firm from achieving completion of the cleanroom tests in accordance with the current edition of the NEBB Procedural Standards for Certified Testing of Cleanrooms. d) Perform the specified validation/commissioning support requirements. e) Publish a NEBB Certified CPT Report of final conditions that accurately reflect the measurements and conditions of the cleanroom tests performed as specified in the contract documents, or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
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SECTION 4 STANDARDS FOR EQUIPMENT, INSTRUMENTATION AND CALIBRATION

4.1 MINIMUM INSTRUMENTATION
A NEBB Certified CPT Firm will use a variety of instrumentation to perform the specified cleanroom tests on a project. It is the responsibility of the NEBB Certified CPT Firm to provide appropriate instrumentation that meets the minimum requirements of TABLE 4-1 and TABLE 4-2 for use on a project. Instrumentation used on a NEBB project shall be in proper operating condition and shall be applied in accordance with the manufacturers recommendations. TABLE 4-1 lists the minimum instrumentation that a NEBB Certified CPT Firm shall own and maintain to perform the primary cleanroom tests. TABLE 4-2 lists the minimum instrumentation that a NEBB Certified CPT Firm should own and maintain to perform the optional secondary cleanroom tests.
4.2 RANGE AND ACCURACY USE
The accuracy and range as reported by the instrument manufacturer shall be verified by a testing laboratory traceable to the National Institute of Standards and Technology or equivalent institute in countries other than the United States. Calibration requirements for each function are specified in Table 4-1 and 4-2 and shall be met. Firms with multiple sets of instrumentation shall comply by calibrating all instrumentation used by the firm on cleanroom projects in accordance with Table 4-1and 4-2. Supervisors must understand the importance of using accurate instrumentation in the field, and shall be prepared to have witnesses verify their work with the Firms calibrated instruments. Results of the data verification shall validate the accuracy of the instrumentation used to perform the work. Instruments shall be used in accordance with manufacturers recommendations. The most suitable instrument, or combination of instruments, should be employed for a particular measurement or reading.
A NEBB Certified CPT Firm shall possess instruments for each function and range listed in Table 4-1. Each instrument shall have been specifically designed to meet the description criteria of the function. This criterion may include such features as range, accuracy, resolution, capacity, etc. Instrumentation with multiple capabilities shall be accepted for more than one function when submitting documentation for a firms certification, providing that each separate function meets NEBB requirements. Information and data regarding description of all submitted instrumentation for the stated functions shall be available from the manufacturer.
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TABLE 4-1 NEBB MINIMUM INSTRUMENTATION REQUIREMENTS

Test Airflow Velocity and Uniformity Test (Direct Air Velocity Measurement) (Sections 10.3, 10.5, 10.6 & 10.10) Equipment/ Instrumentation Anemometer Description An analog or digital anemometer capable of meeting the following requirements: Range: 0.25 12.0 m/s (50 - 2500 fpm) Accuracy: 5% of reading Resolution: 0.1 m/s (20 fpm) A digital manometer capable of meeting the following requirements: Range: 0.25 12.0 m/s (50 - 2500 fpm) Accuracy: 5% of reading Resolution: 0.1 m/s (20 fpm) Range 25 to 2500 fpm Accuracy 3% of reading 7 fpm from 50 to 8000 fpm Range 25 to 5000 fpm Accuracy 3% of reading 7 fpm from 50 to 5000 fpm A flow capture hood with an integral analog or digital manometer capable of meeting the following requirements: Range: 50 1000 L/s (100 - 2000 cfm) Accuracy: 5% of reading, 2.55 L/s ( 5% of reading, 5 cfm) Resolution (Digital): 0.5 L/s (1.0 cfm) (Analog): Not Applicable A digital manometer capable of meeting the following requirements: Range: 0.25 12.0 m/s (50 - 2500 fpm) Accuracy: 5% of reading Resolution: 0.1 m/s (20 fpm) Range 25 to 5000 fpm Accuracy 3% of reading 7 fpm from 50 to 5000 fpm The instrument shall have a threshold -3 sensitivity of 10 micrograms per liter of challenge aerosol particles and be capable of measuring concentrations over a range of 105 times the threshold sensitivity. Sample flow rate shall be 28.3 l/m (1 cfm) with a probe inlet sized to provide isokinetic sampling. Readout shall be either linear or logarithmic with an accuracy of 1% of full scale of the selected range. A device that can aerosolize either a polydispersed or a monodispersed artificial particle medium for filter integrity testing, including Laskin nozzle type, thermal generator, atomizer, etc. Isokinetic (square or rectangular) scanning probe fitted with a sampling tube no longer than 3.0 m (10 ft.) Calibration Interval 12 Months
Airflow Velocity and Uniformity Test (Indirect Air Velocity Measurement) (Sections 10.3, 10.5, 10.6 & 10.10)
Manometer
12 Months
Tube Array Pitot Tube Probe Direct Reading Hood
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Not Required Not Required 12 Months
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Manometer Pitot Tube or Single-Point Probe Aerosol photometer Aerosol Generator Scanning Probes
Airflow Volume and Uniformity Test (Section 10.4 & 10.8)
Airflow Volume and Uniformity Test (Section 10.9)
12 Months
Not Required 12 Months
Leak Testing (w/Photometer) (Section 10.12 & 10.15)
Not Required
Not Required

Description A light scattering instrument with display or recording means to count and size discrete particles in air, as defined by ASTM F50-69. Instruments of this type shall provide for a sampling flow rate of 28.3 l/m (1.0 scfm) and a threshold size discrimination of a minimum of 0.2 micrometer in size. The unit shall be provided with an isokinetic sampling probe to maintain the probe inlet velocity at the test airflow rate. A light scattering instrument with display or recording means to count and size discrete particles in air, as defined by ASTM F50-69. Instruments of this type shall provide for a sampling flow rate of 0.283 l/m (0.01 scfm) and a threshold size discrimination of a minimum of 0.2 micrometer in size. The unit shall be provided with an isokinetic sampling probe to maintain the probe inlet velocity at the test airflow rate. Isokinetic (square or rectangular) scanning probe fitted with a sampling tube no longer than 3.0 m (10 ft.) 10:1, 100:1, or as required to achieve a minimum of 80% counting efficiency with the scanning particle counter 10% of upstream challenge Calibration Interval 12 Months
Test Leak Testing (w/Particle Counter) (Section 10.13)
Equipment/ Instrumentation Particle Counter (Scanning)
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Scanning Probes Diluter
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Particle Counter (Upstream Verification)
12 Months
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Manometer (Change Resolution to equal )-0.25 magnehelic)
Airborne Particle Count Cleanliness Classification Test (Sections 10.17 10.20)
Particle Counter
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Sampling Probes Room Pressurization Test (Section 10.21)
A light scattering instrument with display or recording means to count and size discrete particles in air, as defined by ASTM F50-69. Instruments of this type shall provide for a sampling flow rate of 28.3 l/m (1 scfm) and a threshold size discrimination of a minimum of 0.2 micrometer in size. The unit shall be provided with an isokinetic sampling probe to maintain the probe inlet velocity at the test airflow rate. Isokinetic sampling probe fitted with a sampling tube no longer than 3.0 m (10 ft.) An analog or digital manometer capable of meeting the following requirements: Range: 0 - 125 Pa (0 0.50 in.w.g.) Accuracy: 2% of reading Resolution: 2.5 Pa 250 Pa (0.01 in.w.g. <1in.w.g.) 25 Pa > 250Pa (0.1in.w.g. >1in.w.g.)
12 Months
TABLE 4-2 NEBB MINIMUM (SHOULD) INSTRUMENTATION REQUIREMENTS Test Airflow Parallelism Test (Section 11.2) Equipment/ Instrumentation Test Medium Description A non-contaminating smoke vapor source, streamers, thread or string A device for positioning the test medium at the specified location and height that is aerodynamically designed to yield the least impact to room airflow. A small mass of heavy material suspended by a line and used to ascertain a vertical line. Calibration Interval Not Required Not Required
Support Stand & Support Stand with Pointer
Plumb Bob or Spirit Level Tape Measure
Not Required Not Required 12 Months
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Particle Counter Aerosol Generator Particle Counter
Enclosure Integrity Test (Section 11.3)
Aerosol Generator
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A device that can aerosolize either a polydispersed or a monodispersed artificial particle medium for filter integrity testing, including Laskin nozzle type, thermal generator , ultrasonic humidifier, atomizer, etc. A device that can aerosolize either a polydispersed or a monodispersed artificial particle medium for filter integrity testing, including Laskin nozzle type, thermal generator , ultrasonic humidifier, atomizer, etc.
Calibrated linear measurement device with a minimum resolution of 1.0 mm or 1/16
A light scattering instrument with display or recording means to count and size discrete particles in air, as defined by ASTM F50-69. Instruments of this type shall provide for a sampling flow rate of 28.3 l/m (1 scfm) and a threshold size discrimination of a minimum of 0.2 micrometer in size. The unit shall be provided with an isokinetic sampling probe to maintain the probe inlet velocity at the test airflow rate.
12 Months
Recovery Test (Section 11.4)
12 Months
A light scattering instrument with display or recording means to count and size discrete particles in air, as defined by ASTM F50-69. Instruments of this type shall provide for a sampling flow rate of 28.3 l/m ( 1 scfm) and a threshold size discrimination of a minimum of 0.2 micrometer in size. The unit shall be provided with an isokinetic sampling probe to maintain the probe inlet velocity at the test airflow rate.
12 Months
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Description A portable photo-electric illumination meter approved for field measurement in accordance with the Illumination Engineering Society Lighting Handbook (IES). Sound level meter (SLM) for sound pressure measurements shall meet the Type 1 or Type 2 requirements specified in the most current version of ANSI S1.4 American National Standard Specification for Sound Level Meters Filters for sound pressure measurements shall meet the requirements specified in the most current version of ANSI S1.11 American National Standard Specification for Octave-Band and Fractional-OctaveBand Analog and Digital Filters Calibrators for sound pressure calibration shall meet the requirements specified in the most current version of ANSI S1.401984 (R2001) American National Standard Specification for Acoustical Calibrators Calibration Interval 12 Months
Test Lighting Level and Uniformity Test (Section 11.5)
Equipment/ Instrumentation Light Meter
Sound Level Test (performed w/SLM) (Section 11.6)
Sound level meter (SLM)
12 Months
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Full and Third Octave Filters
12 Months
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Acoustic Calibrators Real Time Analyzer Full and Third Octave Filters Acoustic Calibrators
12 Months
Sound Level Test (performed w/Real Time Analyzers) (Section 11.6)
Real Time Analyzer for sound pressure measurements shall meet the minimum requirements as specified in ANSI S1.4 and S1.11 and, Lines of resolution 400 Frequency range capability = 0 20.0 kHz True dynamic range 70 dB Sum and exponential averaging Peak hold function Memory for storage of measurements
12 Months
Full and Third Octave Filters for sound pressure measurements shall meet the requirements specified in the most current version of ANSI S1.11 American National Standard Specification for Octave-Band and Fractional-OctaveBand Analog and Digital Filters Acoustic Calibrators for sound pressure calibration shall meet the requirements specified in the most current version of ANSI S1.401984 (R2001) American National Standard Specification for Acoustical Calibrators
12 Months
12 Months

Description Sound level meter (SLM) for sound pressure measurements shall meet the Type 1 or Type 2 requirements specified in the most current version of ANSI S1.4 American National Standard Specification for Sound Level Meters Accelerometers / Transducers for vibration measurements shall have the following minimum specifications: Sensitivity ( 10 %) 100 mV/G Measurement Range = 50 G peak Frequency Range = 1 to 1000 Hz at 5 % Mounted Natural Frequency 30,000 Hz Vibration Integrators for SLM for vibration measurements shall meet the minimum requirements as specified below: Displacement 0.1 to 100 mils, Velocity 0.005 to 100 in/sec Acceleration 0.01 to 100 Gs Frequency Range 1 to 10,000 Hz Frequency Resolution 1/3-Octave 12.5 to 20,000 Hz Vibration Calibrators for vibration calibration of SLM shall have the following minimum specifications: Operating Frequency = 159.2 Hz Acceleration Output = 1.00 G rms 3% Distortion (with 0 to 100 gram load) 3% Vibration Meter for vibration measurements shall meet the minimum requirements as specified below: Displacement 0.1 to 100 mils, Velocity 0.005 to 100 in/sec Acceleration 0.01 to 100 Gs Frequency Range 1 to 200 Hz (0 to 12,000 CPM) Frequency Resolution Narrowband 1 Hz Accelerometers / Transducers for vibration measurements shall have the following minimum specifications: Sensitivity ( 10 %) 100 mV/G Measurement Range = 50 G peak Frequency Range = 1 to 1000 Hz at 5 % Mounted Natural Frequency 30,000 Hz Vibration Integrators for SLM for vibration measurements shall meet the minimum requirements as specified below: Displacement 0.1 to 100 mils, Velocity 0.005 to 100 in/sec Acceleration 0.01 to 100 Gs Frequency Range 1 to 10,000 Hz Frequency Resolution 1/3-Octave 12.5 to 20,000 Hz Vibration Calibrators for vibration calibration of SLM shall have the following minimum specifications Operating Frequency = 159.2 Hz Acceleration Output = 1.00 G rms 3% Distortion (with 0 to 100 gram load) 3% Calibration Interval 12 Months
Test Vibration Level Tests (performed w/SLM) (Section 11.7)
Equipment/ Instrumentation Sound level meter (SLM)
Accelerometers / Transducers
12 Months
Vibration Integrators
12 Months
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Vibration Calibrators Vibration Meter Accelerometers / Transducers Vibration Integrators Vibration Calibrators
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Vibration Level Tests (performed w/ Vibration Meter) (Section 11.7)
12 Months
12 Months
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12 Months
12 Months
12 Months
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Description An analog or digital thermometer capable of meeting the following requirements: Range: 4.5C - 38C (40F to 100F), Accuracy: 1% of reading, Resolution: 0.1C (0.2F) An analog or digital hygrometer capable of meeting the following requirements: Range: 10% - 90% RH, Accuracy: 2% RH, Resolution: 1% RH Electronic thermometers and temperature sensors with readout devices capable of meeting the following requirements: Range: 40F - 100F (4.5C - 38C), Accuracy: 0.1F (0.05C), Resolution: 0.1F (0.05C) Instruments shall be capable of recording temperature and humidity or dew point at specified time intervals and time periods. Calibration Interval 12 Months
Test General Temperature and Moisture Uniformity Test (Section 11.9)
Equipment/ Instrumentation Air Temperature Measurement Instrument
Humidity Measurement Instrument
12 Months
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Data Recorder Humidity
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Humidity measuring instruments and sensors used with readout devices capable meeting the following requirements: Range: 10% - 90%, Accuracy: 0.1%, Resolution: 0.1% Instruments shall be capable of recording temperature and humidity or dew point at specified time intervals and time periods. 12 Months
Comprehensive Temperature and Moisture Uniformity Test (Section 11.10)
Data Recorder Temperature
12 Months
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Description Voltmeter or field meter shall have a range of +/- 8.163 kv/cm with an accuracy of +/5% and a response time of less than 2 seconds for 0 kv to +/- 5 kv Ohmmeter shall have an open circuit voltage of 500 volts (DC) and a nominal internal resistance of not less than 100,000 ohms Electrodes shall weigh 2.27 kg (5 pounds) and have a flat, circular contact area 2.5 inches (64 mm) in diameter, which shall comprise of a surface of aluminum or tin foil 0.005 inch to 0.001 inch (0.0127 to 0.0254 mm) thick, backed by a layer of rubber 1/4 inch (6.4 mm) thick and measuring 40 and 60 durometer hardness as determined with a Shore Type A durometer (ASTM D224068). Device shall have a measuring range of -5 kv to + 5 kv with an error of +/- 5% of full scale and a response time of 0.1 seconds short circuit current shall be between 2.5 mA and 5 mA. At any value of connected resistance, Rx, the terminal voltage (V) shall be: Calibration Interval 12 months
Test Electrostatic Tests (Section 11.11)
Equipment/ Instrumentation Electrostatic Voltmeter Electrostatic Field meter Ohmmeter
12 months
Electrodes
12 months
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Ohmmeter Electrodes Magnetic Field Meter Magnetic Field Sensor
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Conductivity Tests (Section 11.12)
Charged Plate Monitor
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A magnetic field meter with a dynamic range of 0.1 to 4000 milligauss A magnetic field sensor with an external, multi-turn loop.
12 months
Rx x 500 V R x + internal resistance

12 months
Ohmmeter shall have an open circuit voltage of 500 volts (DC) and a nominal internal resistance of not less than 100,000 ohms. Electrodes shall weigh 2.27 kg (5 pounds) and have a flat, circular contact area 2.5 inches (64 mm) in diameter, which shall comprise of a surface of aluminum or tin foil 0.005 inch to 0.001 inch (0.0127 to 0.0254 mm) thick, backed by a layer of rubber 1/4 inch (6.4 mm) thick and measuring 40 and 60 durometer hardness as determined with a Shore Type A durometer (ASTM D224068).
12 months
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Electromagnetic Interference (EMI) Test (Section 11.13)
12 months 12 months
Instrumentation with multiple capabilities shall be accepted for more than one function when submitting documentation for a firms certification, providing that each separate function meets NEBB requirements. Calibrations of all instrumentation requiring calibration shall be traceable to current NIST Standards for US firms, or equivalent organizations in other countries.
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SECTION 5 STANDARDS FOR REPORTS AND FORMS

5.1 REPORTS
The NEBB Procedural Standards for Certified Testing of Cleanrooms establishes minimum requirements of a NEBB Certified CPT Report. The standards have been developed and written using Shall, Should, and May language. It is important to note these particular words throughout this document and how they pertain to NEBB Procedural Standards. NEBB does not require the use of NEBB produced forms. Customized forms are acceptable based on the data acquisition requirements of this section. Where contract document data reporting requirements exceed the minimum requirements of NEBB, the NEBB Certified CPT Firm is responsible to meet the requirements of the contract documents. Where no contract documents exist, the scope of services and reporting shall be as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. There may be projects where the reporting requirements may be defined by the owner or a regulatory agency. These reporting requirements may or may not conform to the NEBB reporting requirements. The NEBB CPT Firm shall be allowed to utilize client-specific reporting forms and methods in lieu of the NEBB reporting requirements and sign and stamp the report if allowed or required by the Owner/Buyer. NEBB requires that all pages in the report shall be identified by a unique page/section number.
A. B.
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C.
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REPORT TITLE REPORT CERTIFICATION TABLE OF CONTENTS ABBREVIATIONS
NEBB Cleanroom Reports shall include the following information:
STANDARD OPERATING PROCEDURES (SOPs) REFERENCES
REPORT SUMMARY / REMARKS
INSTRUMENT CALIBRATION CERTIFICATES
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5.2 REQUIRED FORMS

Listed below are the requirements for each NEBB Certified CPT Report in Shall, Should, and May language. 5.2.1 REPORT TITLE Shall Data: The heading: Certified Cleanroom Test Report; Project Name / Address; Owner Name/address, NEBB Certified CPT Firm Name / Address / Certification Number. May Data: Architect Name; Architect Address / Contact Numbers; Engineer Name; Engineer Address / Contact Numbers; HVAC Contractor Name/ HVAC Contractor Address / Contact Numbers, etc. 5.2.2 REPORT CERTIFICATION The certification page SHALL bear the stamp of the NEBB Qualified CPT Supervisor. The stamp on the certification page SHALL be signed as evidence that the NEBB Supervisor has reviewed and accepted the report. Signature stamps are specifically prohibited.
"THE DATA PRESENTED IN THIS REPORT IS A RECORD OF CLEANROOM AND SYSTEM PERFORMANCE AND WAS OBTAINED IN ACCORDANCE WITH THE CURRENT EDITION OF THE NEBB PROCEDURAL STANDARDS FOR CERTIFIED TESTING OF CLEANROOMS, AND [edit wording to include the appropriate standards that the cleanrooms were tested such as ISO, FS 209, IEST RP etc]. ANY VARIANCES FROM DESIGN, SPECIFIED, OR AGREED TO CRITERIA ARE NOTED IN THE CLEANROOM REPORT PROJECT SUMMARY." Should Data: Disclaimer statement with the following suggested wording: The results shown and information given in this report are certified to be accurate and complete to the extent possible by equipment and procedures used on this date.
___(Insert Company Name)_____________________________________ warrants that the equipment or system listed above and/or identified in this report is operating at the specified levels as shown, at and only at this time, and makes no other warranties, stated or implied, concerning the continued performance, operation or safety in use of this equipment past this time. Note: The Certification Statement and the Disclaimer Statement may be included on the report title page or on a separate certification page. 5.2.3 TABLE OF CONTENTS The table of contents shall serve as a guide to the organization of the cleanroom report. Shall Data: Page / Section numbers of tests performed in the report. 5.2.4 STANDARD OPERATING PROCEDURES (SOPs) REFERENCES This section shall include a reference to all SOPs used during the execution of the work.
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Shall Data: Project Name; Test Occupancy State(s), Certifying NEBB Qualified CPT Supervisors Name; Firm Name; Certification Number; Expiration Date; Certifying NEBB Qualified CPT Supervisors NEBB Stamp (signed & dated); and the following exact verbiage:
5.2.5 REPORT SUMMARY / REMARKS A NEBB Certified CPT Report shall include a narrative synopsis of each performance test conducted. The Summary section shall also include a description of the test occupancy state and narrative explanation of any exceptions to the test occupancy state. This section also includes a listing of all deficiencies and items that exceed Contract Document tolerances, or as agreed to criteria between the Owner/Buyer and the NEBB Certified Firm, or any other items that require discussion / explanation in the summary. 5.2.6 INSTRUMENT CALIBRATION CERTIFICATES This section shall include copies of all calibration certificates of all instrumentation that have been used to verify the reported data.
5.3 AIRFLOW VELOCITY AND UNIFORMITY TEST FILTER FACE VELOCITY UNIDIRECTIONAL (Section 10.3)
Shall Data: Technician Name Test Date(s) Instrument Identification Sample Location Documentation As Left Data: Minimum airflow velocity Maximum airflow velocity Average airflow velocity Test Results Data Report all airflow measurements with corresponding grid locations. SD Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
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May Data: Filter Size Owner defined requirements As Found Data
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5.2.7 ABBREVIATIONS This section shall include a listing of all abbreviations and their definitions used in the report. As an alternative, all abbreviations used in the report shall be defined in the body of the report.
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Instrument serial number Instrument calibration date
Shall Data: Instrument type Instrument manufacturer and model number
Test Occupancy State Client Name Room Identification Name / Number
5.4 AIRFLOW VELOCITY AND UNIFORMITY TEST FILTER FACE AIRFLOW VELOCITY NON-UNIDIRECTIONAL (Volume Method) (Section 10.4)
Shall Data: Technician Name Test Date(s) Instrument Identification Standard Operating Procedure As Left Data: Average airflow velocity Test Results Data Report all airflow measurements with corresponding grid locations. Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
5.5 AIRFLOW VELOCITY AND UNIFORMITY TEST FILTER FACE AIRFLOW VELOCITY NON-UNIDIRECTIONAL (Velocity Method) (Section 10.5)
Shall Data: Technician Name Test Date(s) Instrument Identification Sample Location Documentation As Left Data: Minimum airflow velocity Maximum airflow velocity Average airflow velocity Test Results Data Report all airflow measurements with corresponding grid locations. SD Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
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5.6 AIRFLOW VELOCITY AND UNIFORMITY TEST AVERAGE ROOM AIRFLOW VELOCITY (Section 10.6)
Shall Data: Technician Name Test Date(s) Instrument Identification Standard Operating Procedure As Left Data: Minimum airflow velocity Maximum airflow velocity Average airflow velocity Test Results Data Report all airflow measurements with corresponding grid locations. SD Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
5.7 AIRFLOW VOLUME AND UNIFORMITY TESTS FLOWHOOD METHOD (Section 10.8)
Shall Data: Technician Name Test Date(s) Instrument Identification Sample Location Documentation As Left Data: Minimum airflow volume Maximum airflow volume Average airflow volume Test Results Data Report all airflow measurements with corresponding grid locations. SD Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. May Data: Filter Size Owner defined requirements As Found Data
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5.8 AIRFLOW VOLUME AND UNIFORMITY TESTS TRAVERSE METHOD (Section 10.9)
Shall Data: Technician Name Test Date(s) Instrument Identification Sample Location Documentation Duct Size and Individual Velocities As Left Data: Total Airflow Volume Test Results Data Report all airflow measurements with corresponding grid locations. SD Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
5.9 AIRFLOW VOLUME AND UNIFORMITY TEST FILTER FACE AIRFLOW VELOCITY METHOD (Section 10.10)
This test is not recommended by NEBB.
5.10 HEPA FILTER INSTALLATION LEAK PHOTOMETER TEST METHOD (Section 10.12)
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TESTS
AEROSOL
Shall Data: Technician Name Test Date(s) Instrument Identification Challenge Medium Upstream Challenge Concentration Leak: Location Percent of Penetration Type (Media, Grid, Gel, Etc.) Test Results Data Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
Should Data: Repairs (Existing): Number Size Location Total Area May Data: Owner defined requirements As Found Data Filter Size Scan Rate
Repairs (New): Number Size Location Total Area
Repairs (Total): Total Percent of Repair Area
Filter Pressure Drop Test Occupancy State Client Name Room Identification Name / Number
5.11 HEPA FILTER INSTALLATION LEAK TESTS DISCRETE PARTICLE COUNTER TEST METHOD (Section 10.13)
Shall Data: Technician Name Test Date(s) Instrument Identification Challenge Medium Upstream Challenge Concentration / Particle Size Leak: Location Percent of Penetration Type (Media, Grid, Gel, Etc.) Test Results Data Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. Should Data: Scan Rate Repairs (Existing): Number Size Location Total Area
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Repairs (New): Number Size Location Total Area
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Repairs (Total): Total Percent of Repair Area
5.12 HEPA FILTER INSTALLATION LEAK PARTICLUATE TEST METHOD (Section 10.14)
This test is not recommended by NEBB.
TESTS
AMBIENT
5.13 HEPA FILTER INSTALLATION LEAK TESTS TOTAL AEROSOL PENETRATION TEST METHOD (Section 10.15)
Shall Data: Technician Name Test Date(s) Instrument Identification Challenge Medium Upstream Challenge Concentration Percent of Overall Leak Penetration Test Results Data Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. May Data: Owner defined requirements As Found Data Filter Size Filter Pressure Drop
5.14 AIRBORNE PARTICLE COUNTING TEST ISO STANDARD (NONUNIDIRECTIONAL AND UNIDIRECTIONAL) (Section 10.17)
Shall Data: Technician Name Test Date(s) Instrument Identification Test Occupancy State Test Results Data Particle Size(s) of Interest Actual Room Classification Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
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May Data: Owner defined requirements Test Occupancy State
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Client Name Room Identification Name / Number
5.15 AIRBORNE PARTICLE COUNTING TEST 209E (NON-UNIDIRECTIONAL) (Section 10.18)
FEDERAL STANDARD
Shall Data: Technician Name Test Date(s) Instrument Identification Test Results Data Particle Size(s) of Interest Actual Room Classification Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. May Data: Owner defined requirements Test Occupancy State
5.16 AIRBORNE PARTICLE COUNTING TESTS FEDERAL STANDARD 209E (UNIDIRECTIONAL) (Section 10.19)
Shall Data: Technician Name Test Date(s) Instrument Identification Test Occupancy State Test Results Data Particle Size(s) of Interest Actual Room Classification Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
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5.17 AIRBORNE PARTICLE COUNTING TESTS SEQUENTIAL SAMPLING (Section 10.20)

Shall Data: Technician Name Test Date(s) Instrument Identification Standard Operating Procedure Test Occupancy State Test Results Data Particle Size(s) of Interest Actual Room Classification Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
5.18 ROOM PRESSURIZATION TESTS (SECTION 10.21)

Shall Data: Technician Name Test Date(s) Instrument Identification Test Results Data Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
May Data: Owner defined requirements As Found Data Test Occupancy State Client Name Room Identification Name / Number Schematic diagram depicting direction of airflow and differential pressure magnitude
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5.19 AIRFLOW PARALLELISM TESTS (Section 11.2)

Shall Data: Technician Name Test Date(s) Instrument Identification Test Results Data Test Location Diagram Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
5.20 ENCLOSURE INTEGRITY TESTS (Section 11.3)
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May Data: Owner defined requirements As Found Data Room Pressure Relationships
Shall Data: Technician Name Test Date(s) Instrument Identification Challenge Medium Challenge Concentration Test Results Data Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
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May Data: Owner defined requirements As Found Data Test Occupancy State
5.21 RECOVERY TESTS (Section 11.4)

Shall Data: Technician Name Test Date(s) Instrument Identification Initial Particle Counts at Particle Size(s) of Interest Challenge Medium Challenge Concentration Test Results Data: Recovery Time Ending Particle Count at Particle Size(s) of Interest Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
5.22 LIGHTING LEVEL AND UNIFORMITY TESTS (Section 11.5)

Shall Data: Technician Name Test Date(s) Instrument Identification Test Location Diagram Test Results Data Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
May Data: Owner defined requirements Lighting Type(s) Detail natural/artificial influences
5.23 SOUND LEVEL TESTS (Section 11.6)

Shall Data: Technician Name Test Date(s) Instrument Identification Test Location Diagram Test Results Data: Operating Sound Pressure Levels: NC Curve, RC Curve or A-Weighted Value Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
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May Data: Owner defined requirements As Found Data Test Occupancy State
5.24 VIBRATION LEVEL TESTS (Section 11.7)

Shall Data: Technician Name Test Date(s) Instrument Identification Test Location Diagram Test Results Data: (data stated in appropriate units (SI or IP) and reported in terms of displacement, velocity, acceleration and / or frequency based on scope requirements) Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
5.25 GENERAL TEMPERATURE AND HUMIDITY UNIFORMITY TESTS (Section 11.9)

Shall Data: Technician Name Test Date(s) Instrument Identification Test Location Diagram Test Results Data Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
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May Data: Owner defined requirements Test Occupancy State Client Name
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Room Identification Name / Number Work Height Level
5.26 COMPREHENSIVE TEMPERATURE AND HUMIDITY UNIFORMITY TESTS (Section 11.10)

Shall Data: Technician Name Test Date(s) Instrument Identification Test Location Diagram Work Height Level Test Results Data Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. May Data: Owner defined requirements Test Occupancy State
5.27 ELECTROSTATIC TESTS (Section 11.11)
Shall Data: Technician Name Test Date(s) Instrument Identification Test Location Diagram Test Parameters Test Results Data Identify all performance data that exceeds the acceptance criteria as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
5.28 CONDUCTIVITY TESTS (Section 11.12)

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5.29 ELECTROMAGNETIC INTERFERENCE (EMI) TEST (Section 11.13)

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PART 2 - PROCEDURES
SECTION 6 CLEANROOM SAFETY
6.1 INTRODUCTION
A health and safety program is a definite plan of action designed to prevent accidents and occupational diseases. A health and safety program should include the elements required by the health and safety legislation as a minimum. This document summarizes the general elements of a health and safety program. This should help NEBB organizations to develop programs to deal with their specific needs. Because many small and medium-sized enterprises lack the resources of larger organizations, it is even more vital that small and medium-sized enterprises involve all employees in health and safety activities. The more comprehensive the program is, the more employee involvement can be expected. The health and safety program discussed in this section is a guideline. The project specific safety program shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. Most often the NEBB Certified CPT firm will be required to follow the client project specific safety program, however in the absence of this project specific safety program, the firms SOP for cleanroom health and safety program shall be followed.
6.2 DESIGNING A HEALTH AND SAFETY PROGRAM

6.2.1 DESIGNING A PROGRAM POLICY A NEBB organization's health and safety policy is a statement of principles and general rules that serve as guides for action. 6.2.1.1 The policy should mention: a. Management's commitment to protect the safety and health of employees b. The objectives of the program c. The organization's basic health and safety philosophy d. Who is accountable for health and safety programs e. The general responsibilities of all employees f. That health and safety shall not be sacrificed for expediency g. That unacceptable performance of health and safety conduct will not be tolerated 6.2.1.2 The policy should be: a. Stated in clear, unambiguous, and unequivocal terms b. Signed by the incumbent chief executive officer c. Kept up-to-date d. Communicated to each employee e. Adhered to in all work activities
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6.2.2 DESIGNING A TRAINING PROGRAM The objective of training is to ease the implementation of health and safety policies into specific job practices and to raise awareness and skill levels of a technician to an acceptable standard. 6.2.2.1 Occasions when employee training should be required are: a. Commencement of employment b. Reassignment or transfer to a new job c. Introduction of new equipment, processes, or procedures d. Inadequate performance e. Customer and job site related chemical or biological hazards, equipment, processes, or procedures. 6.2.2.2 The NEBB Certified CPT Firm should have the following topics included in the safety training: a. Safety and the supervisor b. Know your accident problems c. Human relations d. Maintaining interest in safety e. Instructing for safety f. Industrial hygiene g. Personal protective equipment h. Industrial housekeeping i. Material handling and storage j. Guarding machines and mechanisms k. Hand and portable power tools l. Fire protection 6.2.3 ESSENTIALS OF THE HEALTH AND SAFETY PROGRAM While different NEBB Certified CPT Firms will have different needs and scope for specific elements required in their health and safety program, the following basic items may be considered in each case: a. Individual responsibility b. Occupational health and / or safety representative c. Health and safety rules d. Correct work procedures e. Employee orientation f. Training g. Workplace inspections h. Reporting and investigating accidents i. Emergency procedures j. Medical and first aid k. Health and safety incentives l. Workplace specific items
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6.3 RESPONSIBILITIES
6.3.1 INDIVIDUAL HEALTH &SAFETY RESPONSIBILITIES Health and safety is the joint responsibility of management and workers. All health and safety activities are based on specific individual responsibilities. Responsibility may be defined as an individual's obligation to carry out assigned duties. Authority implies the right to make decisions and the power to direct others.
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a. b. c. d. e. f. g. h.
6.3.1.2 Field Technician Responsibilities To fulfill their responsibilities, the field technicians should: a. Use personal protection and safety equipment as required by the Employer b. Follow safe work procedures c. Know and comply with all regulations d. Report any injury or illness immediately e. Report unsafe acts and unsafe conditions f. Participate in joint health and safety committees g. Know what these responsibilities are (communication required) h. Have sufficient authority to carry them out (organizational issue) i. Have the required ability and competence (training or certification required)
6.4 ELEMENTS OF THE PROGRAM

The NEBB Certified CPT Supervisor should address the following elements of the firms health and safety program: Establish work procedures Analyze project hazards Establish guideline rules Conduct employee safety orientation Establish emergency procedures Establish medical and first aid action plan Perform routine project site safety audits Complete project accident / injury reports
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6.3.1.1 NEBB Supervisor Responsibilities To fulfill their responsibilities, the NEBB Qualified CPT supervisor should: a. Instruct workers to follow safe work practices b. Enforce health and safety regulations c. Correct unsafe acts and unsafe conditions d. Ensure that only authorized, adequately trained workers operate equipment e. Report and investigating all accidents/incidents f. Inspect own area and taking remedial action to minimize or eliminate hazards g. Ensure equipment is properly maintained h. Promote safety awareness in workers i. Provide a safe and healthful workplace j. Establish and maintaining a health and safety program k. Ensure workers are trained or certified, as required l. Report accidents and cases of occupational disease to the appropriate authority m. Provide medical and first aid facilities n. Ensure personal protective equipment is available o. Provide workers with health and safety information p. Evaluate health and safety performance of Cleanroom technicians q. Advise all employees on health and safety matters r. Coordinate interdepartmental health and safety activities s. Provide health and safety training t. Conduct research on special problems u. Attend health and safety committee meetings as a resource person
NEBB CPT PROCEDURAL STANDARDS i. Investigate project accidents/ injuries j. Establish and enforce return-to-work policy k. Promote employee involvement in health and safety programs
6.4.1 PROJECT SPECIFIC ITEMS Examples of project specific items that should be included in health and safety programs are: a. Material Safety Data Sheets (MSDS) b. Lock out procedures c. Chemical handling rules d. Biological material handling rules e. Personal hygiene f. Vehicle safety rules g. Working alone guidelines h. Personal protective equipment requirements 6.4.2 HEALTH AND SAFETY PROGRAM IMPLEMENTATION A good health and safety program provides a clear set of guidelines for activities that, if followed, will reduce accidents and cases of occupational disease. A NEBB Qualified CPT Supervisor should demonstrate commitment and support the program by: a. Providing resources such as time, money, and personnel b. Ensuring that employees receive training or certification as required c. Making all applicable health and safety information available to all employees entitled to receive it d. Including health and safety performance as part of employee e. Performances appraisals at all levels f. Attending health and safety meetings g. The program must be communicated to all employees. h. Special emphasis should be given to new workers, newly appointed NEBB Supervisors. i. Revisions to policies and procedures should be publicized. j. The program should be available in a single written document. (However, if separate manuals have been developed for various elements, such as accident investigation procedures, their use should be referred to in the main document).
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SECTION 7 CLEANROOM PROTOCOL

7.1 INTRODUCTION
The purpose of this Section is to provide an overview of the cleanroom protocol procedures that should be observed in performing the various cleanroom tests. In general, there are protocols and procedures for cleanroom entry, garment control, tool and equipment entry and gowning procedures. In addition to entry protocols there are also protocols and behavior requirements while in the cleanroom. The protocols suggested in this section are guidelines and the final procedures shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. The NEBB Certified CPT Firm shall be responsible for creating their own cleanroom protocol and develop it into a Standard Operating Procedure (SOP) for their firm. Most often the NEBB Certified CPT firm will be required to follow the client project specific protocol, however in the absence of this project specific protocol, the firms SOP for cleanroom protocol shall be followed. At a minimum, the NEBB Certified CPT Firms SOP for Cleanroom Protocol should cover: gowning procedures, equipment entrance procedures, and guidelines for employee conduct.
7.2 CLEANROOM PROCEDURES
In many cleanroom gowning facilities there are two distinct zones in the gowning area. In some facilities, the two distinct zones may exist in the same room / space defined by some imaginary boundary. The initial area will have gloves, hair bonnets and shoe covers. Since the outside surface of the cleanroom garments should be kept as clean as possible care should be used to avoid touching the outside of the garment with bare hands, hair and street shoes. This is accomplished by donning gloves, bouffant head covers and shoe covers before entering the second phase of the gowning area. It is important to note that cleanrooms in the electronics industry may be quite different from cleanrooms in the pharmaceutical and bio-technology industries. While gowning remains important, a high emphasis is placed on sterility. Cleaning / washing procedures can be much more rigorous. In some instances, usually associated with bio-containment spaces (i.e. BSL3 and BSL4 labs), street clothes will not be allowed into the room and a complete change of clothing is required. Upon entering the second area it is important to note that different gowning garments will be used in different facilities. Since gowning materials differ there is no hard and fast method that can be outlined for actual gowning, but typically gowning should be done from the head down. Therefore the hood will be donned first, then the garment, then the foot covers. Once the garment is obtained care should be taken to avoid contaminating the exterior surface with the interior of the garment. Proper garment sizing
7.2.1 GOWNING PROCEDURES The processes and operations that occur in a cleanroom are unique to that particular owner and facility. Therefore the gowning procedures may vary to some degree between each cleanroom and each owner. It is imperative that the facility / owners SOP be reviewed for the specific gowning procedure. When it exists, this SOP always takes precedence and must be followed.
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SECTION 7 CLEANROOM PROTOCOL
is also required. Once obtained, the garment user should never allow the garment to touch or drag on the floor. 7.2.2 EQUIPMENT ENTRANCE PROCEDURES Tools, instrumentation and equipment also require special preparation before they can be brought into a cleanroom. As with gowning, each facility will have their own methods and requirements for introducing these items into a cleanroom. It is imperative that the facility / owners SOP be reviewed for material ingress to their cleanroom. When it exists, this SOP always takes precedence and must be followed. Typically there will be a wipe down station for anything entering the cleanroom. There will also be a wipe down procedure. Often the procedure will involve wipe down with non-contaminating wipes moistened with de-ionized water and isopropyl alcohol (IPA) or other sterile solvents. The ingress for equipment may be a separate entrance form the gowning entrance. 7.2.3 CLEANROOM CONDUCT Examples of personnel rules used by cleanroom operators may be: a. b. c. d. e. f. g. h. i. j. k. Clean hands and face before entering clean areas. Use lotions and soap containing lanolin to reduce skin flaking. Avoid skin contacts with solvents. Wearing cosmetics and skin medications may not be permitted. Jewelry may not be permitted Smoking, eating and drinking is not permitted. Required gowning, masks, gloves and shoe covers to be worn at all times. Equipment, instruments and materials should be cleaned before entry. Non-shedding paper and pens should be used. Pencils and erasers are not permitted. Work parts are to be handled only with gloved hands, tweezers, or other methods to avoid transfer of skin particles and oils. Use containers to transfer and/or store materials.
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SECTION 8 CLEANROOM STANDARD OPERATING PROCEDURES

8.1 INTRODUCTION
The purpose of this Section is to provide an overview of Standard Operating Procedures (SOPs) for the NEBB CPT Certified Firm. The NEBB Qualified CPT Supervisor shall develop these SOPs and shall be responsible for implementing them within the NEBB Certified CPT Firm. The NEBB Certified CPT Firm shall have SOPs for the following areas: a. b. c. d. e. f. Safety Instrument Calibration Technician Training Cleanroom Test Procedures Cleanroom Reports Cleanroom Protocol
The NEBB Cleanroom program does not dictate the requirements of each SOP. That is up to each NEBB Certified CPT Firm/NEBB Qualified CPT Supervisor. This section will address the elements that are included in writing and executing SOPs.
8.2.1 DESCRIPTION SOPs are documents that describe internal procedures and how to perform various routine operations. They contain step-by-step instructions that technicians consult in order to maintain consistency in their test procedures, repeatability in their results and their reports. SOPs are, in essence, written commitments that describe the performance of routine tasks. 8.2.2 FORMAT There are many ways to format an SOP. When developing a format, it is important to consider the various categories: Title, Purpose, Scope, Responsibility, References/Applicable Documents, Safety Considerations, Procedural Principles, Preliminary Operations, Procedures, Tools, Calculations and Documentation Requirements. The Title of an SOP should be direct and brief, describing each procedure in a way that identifies its purpose. The Title should also include any key words useful for locating the procedure in a list of SOPs. Titles should be used to group SOPs by purpose, test method, etc. The Purpose of an SOP often restates a well-written SOP title, but can also be used to expand upon the purpose of the procedure.
8.2 STANDARD OPERATING PROCEDURES
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SECTION 8 CLEANROOM SOPs
The Scope describes what the SOP applies to. To define the Scope of an SOP, the NEBB Qualified CPT Supervisor should consider to what and to whom the procedure applies, and when it is to be applied. Responsibility in an SOP defines who is responsible for performing the operations cited. For example, it might cite a department or mandate specific training requirements for individuals within a department. SOPs support routine regulated operations. SOPs should be written by the NEBB Qualified CPT Supervisor in conjunction with the individuals who perform the operations. Although particular individuals in each department may write the majority of the procedures, it is important that everyone in NEBB Certified CPT Firm be trained to draft and review SOPs. The References and Applicable Documents sections of an SOP are optional. These sections can be used to reference allied SOPs, standards, protocols, or additional information sources, such as vendor manuals and instruction booklets.
Procedural Principles are provided to help technicians and reviewers understand the fundamental principles of the SOP. This section should also be used to explain why the procedure is required in the context of the facility operations. Preliminary Operations are another optional section of an SOP. It may include any operations that should be completed before the actual procedure is initiated. For example, there may be a need to calibrate equipment before the procedure begins. In addition, some facilities require a material checklist section to ensure that all materials required to complete the work are available before the work begins. Procedures should be simple, direct, step-by-step narratives that explain how to perform the tasks in a manner that supports the execution. Any sampling or testing that might occur to support the task should also be cited. The Procedure should include diagrams and drawings in this section when they facilitate understanding of the instructions.
The SOP should contain a listing of all required tools and instrumentation required to perform the required task(s). Calculations of a final result must also appear in appropriate SOPs. The calculations should include all formulas, conversion factors, constants, etc. The SOP Procedure shall detail how to calculate the final results, however, generally it should not dictate acceptance criteria for that result. Documentation Requirements for an SOP should cite any standard forms to be completed during the procedure. This section should address distribution of results, if applicable. Procedural deviation documentation requirements should also be outlined or referenced in this section. Each page of an SOP document should contain its abbreviated title, SOP number; edition number and pagination. The company name and some declaration of confidentiality can also appear on each page. As long as each page contains the SOP number and its edition number, only one page usually the firstneeds to contain the document approval signatures and the date of approval.
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Safety considerations appear in all appropriate SOPs. These include physical safety issues (such as hard hats and appropriate eye protection), biological contamination issues (such as masks, gloves and biological safety cabinets) and chemical hazards. It should also include any environmental issues and the appropriate response that should occur during the execution of a procedure.
8.2.3 LANGUAGE AND DETAIL The NEBB CPT Supervisor should write SOPs for the technicians who will use them on a daily basis. Use clear and direct language. Use active verbs for procedural directives. SOPs must be specific enough to be clear and accurate, yet flexible enough to be useful. When citing the use of an item in a procedure, name the item and its model number. Company slang terms for equipment, departments, or procedures may be used, as long as they are explained somewhere in the text to ensure clarity for an outside reviewer. It is good policy for draft SOPs to be reviewed by the technicians who will use them. 8.2.4 REVIEW AND APPROVAL The review and approval process shall be executed by two distinct individuals: the author and the reviewer. Both individuals shall sign the document. The author should sign first and the reviewer should then second. The reviewer shall be a person who can knowledgeably review and approve the procedure. 8.2.5 DISTRIBUTION AND CONTROL The distribution of approved SOPs must be controlled. Each department shall maintain a master set of procedures with all distribution(s) documented. There are several ways to document these events such as with log books or forms. Whatever the system, the NEBB Qualified CPT Supervisor/NEBB Certified CPT Firm shall be able to track the history of creation, change, distribution and use of each document. 8.2.6 MODIFICATIONS When revised procedures are issued, it shall be documented that the previous versions of the procedure are retrieved and destroyed. The NEBB Qualified CPT Supervisor/Firm shall be able to track the history, change, distribution and use of each document.
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8.2.7 DATA COLLECTION FORMS / REPORTS Data collection shall be in accordance with the requirements of Section 5 for all primary and secondary cleanroom performance tests identified in Sections 10 and 11. If unique, or non-standard, procedures are required for a project, data should be collected and documented in a manner similar to the requirements of this Procedural Standard.
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SECTION 9 CLEANROOM TESTS

9.1 INTRODUCTION
This section provides an overview of all cleanroom tests. The procedures required to perform these tests are described in Sections 10 and 11.
9.2 CERTIFICATION TESTS

Certification tests and procedures may vary considerably from project to project. The choice of certification tests may be based on the cleanliness class level, type of cleanroom airflow, occupancy states and the product produced. The scope of the cleanroom testing services may vary based on the contract document requirements, or based on the agreed scope of services between the Owner/Buyer and the NEBB Certified CPT Firm. Table 9-1, extrapolated from the current version of IEST-RP-CC006, lists recommended tests for initial cleanroom certification.
9.2.1.2 Non-unidirectional Airflow In a non-unidirectional airflow system, air is supplied to the cleanroom conventionally through HEPA filters in a random airflow pattern. 9.2.1.3 Mixed Airflow A mixed airflow system may be used in a large cleanrooms with two (or more) areas requiring different classifications. Non-unidirectional airflow and unidirectional airflow will exist in the same space and may be classified independently.
9.3 OCCUPANCY STATES

Cleanroom certification tests are performed after a new cleanroom is built and then periodically as determined by the cleanroom operator or owner. The three occupancy states are: As-Built, At-Rest and Operational. These three occupancy states affect some of the test procedures and are useful in specifying testing and acceptance criteria for cleanrooms. For new cleanroom construction projects, testing is normally done in the As-Built occupancy state. Testing of existing cleanrooms is usually performed with the facility in the At-Rest or Operational
9.2.1.1 Unidirectional Airflow In a unidirectional airflow system, air is introduced evenly from one entire surface of the room, such as the ceiling or a wall. For unidirectional airflow the filter coverage must be at least 80% coverage. The air flows perpendicularly from this surface at a constant velocity and is removed at the opposite surface (wall or floor). Unidirectional flow provides a direct, predictable path that a sub-micrometer size particle will follow through the cleanroom, with the minimum opportunity for contaminating room components. It also captures the particles constantly generated within the room and introduced into the air stream, thereby reducing the potential for cross-contamination.
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9.2.1 CLEANROOM AIRFLOW Table 9-1 lists cleanroom certification tests by cleanroom design airflow: unidirectional airflow, nonunidirectional airflow and mixed airflow.
occupancy states. The occupancy state shall be as specified in the contract documents or as mutually agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 9.3.1 AS-BUILT FACILITY An As-Built facility is a cleanroom which is complete and operating, with all services connected and functioning, but has no production equipment or operating personnel within the facility. 9.3.2 AT-REST FACILITY An At-Rest facility is a cleanroom which is complete and has the production equipment installed and operating, but has no personnel within the facility. 9.3.3 OPERATIONAL FACILITY An Operational facility is a cleanroom in normal operation, including production equipment and personnel. 9.3.4 EXCEPTIONS In many instances, there will be deviations from these definitions. (Examples: a partial installation of process equipment may have been installed and may or may not be operating; process equipment exhausts may or may not be operating.) These situations should be recognized and accounted for in contract documents or in the agreement between the Owner/Buyer and the NEBB Certified CPT Firm on any affected test requirements.
9.4 CLEANLINESS LEVELS
For this reason, the NEBB Certified CPT Firm SHALL possess current copies of the above referenced standards in addition to the NEBB Procedural Standards.
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9.5 PRIMARY TESTS
a. b. c. d. e.
The primary tests are related to airborne particulate cleanliness classes as required by ISO 14644 and Federal Standard 209E. By performing these tests, the cleanroom will be correctly classified to the appropriate class level. These tests include: Airflow Velocity and Uniformity Tests Airflow Volume and Uniformity Tests HEPA Filter Installation Leak Tests Airborne Particle Count Cleanliness Classification Tests Room Pressurization Tests
In general, the primary tests should be performed in the following order: a. Room Pressurization Tests
The Institute of Environmental Science and Technology (IEST) is the organization that is in charge of keeping Federal Standard 209E. In January 2002, IEST and the United States Federal Government decided to retire Federal Standard 209E. Federal Standard 209E was replaced by the ISO Standard 14644. It will be several years before Federal Standard 209E is completely eliminated from the current industry specifications, and no longer referenced in current Good Manufacturing Processes (cGMP) documents. Therefore the NEBB Qualified CPT Supervisor shall have a thorough knowledge of both the ISO Standards and Federal Standard 209E.
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NEBB CPT PROCEDURAL STANDARDS b. Airflow Velocity and Volume Tests c. HEPA Filter Installation Leak Tests d. Airborne Particle Count Cleanliness Classification Tests
9.6 SECONDARY TESTS

The secondary tests are user optional and relate to particle, air movement and ancillary systems within the cleanroom. These tests include: a. b. c. d. e. f. g. h. i. j. k. Airflow Parallelism Tests Enclosure Integrity Tests Recovery Tests Particle Fallout Counts. Lighting Level and Uniformity Tests Sound Level Tests Vibration Level Tests Temperature and Humidity Uniformity Tests. Electrostatic Discharge Tests Conductivity Tests Electromagnetic Interference (EMI) Tests
9.7 TESTING INTERVALS
Table 9.2 contains recommended testing intervals for each of the various primary and secondary cleanroom performance tests.
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NEBB CPT PROCEDURAL STANDARDS TABLE 9-1 Recommended Tests by Cleanroom Type*
IEST Section Test Unidirectional Airflow NonUnidirectional Airflow
Mixed Airflow
NEBB Procedural Standards Section 10 10 10 10 10 11 11 11 11 11 11 11 11 11 11 11
6.1
Airflow volume & uniformity Airflow velocity & uniformity Filter leak Particle count Pressurization Parallelism Integrity Recovery
1,2,3 1,2,3 1,2 1,2,3 1,2,3 1,2 1,2 1,2
1,2,3 1,2,3 1,2 1,2,3 1,2,3
1,2,3 1,2,3 1,2 1,2,3 1,2,3
6.2 6.3 6.4 6.5 6.6 6.7 6.8 6.9 6.10 6.11-6.13
Particle fallout Lighting level Sound level Temperature and Humidity uniformity
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1,2,3 1,2,3 1,2,3 1,2,3 1,2,3 1,2,3 1,2,3 1,2,3 1,2,3 1,2,3 1,2,3 1,2,3 1,2,3 1,2,3 1,2,3 1,2,3
6.14 4 4 4
R
Vibration level Electrostatic Conductivity Electromagnetic Interference (EMI)
The order in which tests are performed is optional, but some sequences are optimal. 1: Test is suited to As-Built occupancy state 2: Test is suited to At-Rest occupancy state 3: Test is suited to Operational occupancy state 4: These tests are not defined in IEST-RP-CC006
*Most material extrapolated from IEST-RP-CC006
T
Not Applicable 1,2 1,2,3 1,2,3 1,2 1,2 1,2,3 1,2,3 1,2,3 1,2,3 1,2,3 1,2,3 1,2,3 1,2,3
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NEBB CPT PROCEDURAL STANDARDS TABLE 9-2 Recommended Testing Intervals

IEST Section 6.1 6.2
ISO Reference ISO 14644-3: B.4 ISO 14644-3: B.6 Annex B, ISO 14644-1
Test Airflow volume & uniformity Airflow velocity & uniformity Filter leak Particle count ISO Class 5 Particle count > ISO Class 5 Pressurization Parallelism Integrity Recovery
NEBB Recommended Test Interval (Months) 12 12 6 12
NEBB Procedural Standards Section 10 10 10 10 10 11 11 11 11 11 11 11 11 11 11 11
6.3
Annex B, ISO 14644-1 ISO 14644-3: B.5 ISO 14644-3: B.7 ISO 14644-3: B.14 ISO 14644-3: B.13 ISO 14644-3: B.12 N/A N/A
6.5 6.6 6.7 6.8 6.9 6.10 6.11-6.13 6.14 N/A N/A N/A
ISO 14644-3: B.9 ISO 14644-3:10 N/A
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ISO 14644-3: B.11 Electrostatic N/A Conductivity N/A Electromagnetic
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N/A: Not Applicable
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Particle fallout Lighting level 24 24 Sound level 24 Temperature and Humidity uniformity Vibration level 12 24 24 24 24 Interference (EMI)
T
12 24 24
6.4
12
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SECTION 10 PRIMARY TESTS

10.1 INTRODUCTION
The successful completion and final certification of any cleanroom project depends upon an understanding and a commitment by everyone involved that the project requires special construction procedures and discipline far beyond that of ordinary construction. Quality assurance and quality control procedures established and followed throughout the construction phase of the project are as important to the final result as the components selected for use in the cleanroom and cannot be overstated.
Whenever the term filter is used in this section, it is to be implied that the meaning pertains to both HEPA and ULPA filters.
10.2 CLEANROOM / FILTER AIRFLOW VELOCITY AND UNIFORMITY TESTS

These tests are performed to determine the average filter face velocity and uniformity, and / or the average room airflow velocity and uniformity within a cleanroom. Airflow velocity (meters per second or feet per minute) is a measurement of the speed of the airflow. An average velocity is calculated by dividing the cleanroom / filter area into equal grids and taking the airflow velocity in the center of each of these grids. The average airflow velocity is calculated by dividing the total of the airflow grid velocities by the number of readings taken. The location of the airflow reading in the work zone shall either be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. For filter face airflow velocity, the tests normally are performed at a specified distance from the filter face: 75 mm, 150 mm, or 300 mm (3, 6, or 12). For room airflow velocity, the tests are normally performed at the specified work surface elevation. Typically this is 0.91 m (36) above the floor. In order to eliminate confusion of the testing procedures, the tests shall be titled: Filter Face Airflow Velocity Tests or Room Airflow Velocity Tests. Although the actual test procedures are basically the same for each test, it is necessary to differentiate between each procedure.
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10.1.1 Airflow Velocity and Uniformity Tests 10.1.2 Airflow Volume and Uniformity Tests 10.1.3 Filter Installation Leak Tests 10.1.4 Airborne Particle Count Cleanliness Classification Tests 10.1.5 Room Pressurization Tests
The primary tests are related to airborne particulate cleanliness classes as required by ISO 14644 and Federal Standard 209E. A thorough operation performance evaluation employing these tests will assist in identifying the current cleanliness classification. These tests include:
10.3 AIRFLOW VELOCITY AND UNIFORMITY TEST FILTER FACE AIRFLOW VELOCITY UNIDIRECTIONAL
The purpose of the filter face airflow velocity test is to document the average airflow velocity and uniformity of the filter face unidirectional airflow. 10.3.1 INSTRUMENTATION AND EQUIPMENT Use an airflow velocity instrument that conforms to the requirements of Table 4-1. 10.3.2 TEST PROCEDURES 10.3.2.1 Measurement readings shall be taken at a distance from the face of the filter system, as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.3.2.2 The measurement area shall be a cross-sectional area of the filter face normal to the airflow. This area shall consist of the net effective filter media area, which is exclusive of the filter frame or patch area of the filter. For example, a 600 mm x 1200 mm (24 inch x 48 inch) filter does not have a net effective area of 0.72 square meters (8.0 square feet), but is closer to approximately 0.63 square meters (7.1 square feet) with the frame, media glue joints, etc., deducted.
10.3.2.4 Measure and record the airflow velocity at the specified distance of each grid point. Special care is necessary to keep the sampled area unobstructed during the airflow measurement. The use of a support stand is recommended with single point type measuring instruments. 10.3.2.5 Take the measurement for a minimum of 5 seconds or the instrument manufacturers minimum specified time, using the average during that period as the measurement. 10.3.2.6 Calculate the Standard Deviation (SD). See Appendix C for the requirements necessary to calculate the (SD).
10.3.3 ACCEPTANCE 10.3.4.1 The average airflow velocity for the filter should be within 10% of that specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.3.4.2 The standard deviation should not exceed 15% unless otherwise specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.3.4 REPORTING See Section 5.3 for reporting requirements.
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10.3.2.3 When using a single point measurement instrument, such as a hot wire anemometer, divide the net filter face into grids of equal area of not greater than 0.09 square meters (1.0 square foot). When using a multi-point instrument, such as tube array, divide the net filter face into grids of equal area of not greater than 0.37 square meters (4.0 square feet). The grid area shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
10.4 AIRFLOW VELOCITY AND UNIFORMITY TEST FILTER FACE AIRFLOW VELOCITY NON-UNIDIRECTIONAL (Volume Method)
For non-unidirectional airflow cleanrooms, the airflow volume measurements are preferable and are more accurate for calculating airflow velocities when readings are taken at a distance greater than 150 mm (6) from the filter face. If filter face airflow velocity measurement readings are performed utilizing a direct reading flowhood, use the testing requirements identified for flowhood volume testing in Section 10.8 and as identified below. 10.4.1 INSTRUMENTS AND EQUIPMENT Utilize a direct reading flowhood that conforms to the requirements of Table 4-1. 10.4.2 TEST PROCEDURES 10.4.2.1 Flow measuring hoods are preferred for taking airflow volume measurements from each filter. The flow hood with an appropriate flow meter is required. 10.4.2.2 Seat the flow measuring hood firmly to the filter frame to prevent air leakage.
10.4.2.3 The flowhood shall be adequately sized to capture all the air exiting the filter being tested. 10.4.2.4 Measure and record the airflow volumes of each filter in liters per second (cubic feet per minute). 10.4.3 ACCEPTANCE 10.4.3.1 Measure the total airflow for each filter. Determine the average filter face airflow velocity by dividing the measured airflow by the net effective filter area. 10.4.3.2 The average airflow velocity of each filter for the cleanroom should be within 10% of that specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.4.3.3 The standard deviation should not exceed 15% unless otherwise specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
10.4.4 REPORTING See Section 5.4 for reporting requirements.
10.5 AIRFLOW VELOCITY AND UNIFORMITY TEST FILTER FACE AIRFLOW VELOCITY NON-UNIDIRECTIONAL (Velocity Method)
The purpose of the filter face airflow velocity test is to document the average airflow velocity and uniformity of the filter face non-unidirectional airflow. NEBB advises that a volumetric method be used to calculate the filter face velocity in a non-unidirectional cleanroom, however when project specifications require a direct velocity measurement, the following procedure should be used. 10.5.1 INSTRUMENTATION AND EQUIPMENT Use an airflow velocity instrument that conforms to the requirements of Table 4-1.
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10.5.2 TEST PROCEDURES 10.5.2.1 Measurement readings shall be taken at a distance from the face of the filter system, as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.5.2.2 The measurement area shall be a cross-sectional area of the filter face normal to the airflow. This area shall consist of the net effective filter media area, which is exclusive of the filter frame or patch area of the filter. For example, a 600 mm x 1200 mm (24 inch x 48 inch) filter does not have a net effective area of 0.72 square meters (8.0 square feet), but is closer to approximately 0.63 square meters (7.1 square feet) with the frame, media glue joints, etc., deducted. 10.5.2.3 When using a single point measurement instrument, such as a hot wire anemometer, divide the net filter face into grids of equal area of not greater than 0.09 square meters (1.0 square foot). When using a multi-point instrument, such as tube array, divide the net filter face into grids of equal area of not greater than 0.37 square meters (4.0 square feet). The grid area shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.5.2.4 Measure and record the airflow velocity at the specified distance of each grid point. Special care is necessary to keep the sampled area unobstructed during the airflow measurement. The use of a support stand is recommended with single point (hot wire) type measuring instruments. 10.5.2.5 Take the measurement for a minimum of 5 seconds or the instrument manufacturers minimum specified time, using the average during that period as the measurement. 10.5.2.6 Calculate the Standard Deviation (SD). See Appendix C for the requirements necessary to calculate the (SD). 10.5.3 ACCEPTANCE 10.5.3.1 The average airflow velocity for the cleanroom should be within 10% of that specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.5.3.2 The standard deviation should not exceed 15% unless otherwise specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
10.6 AIRFLOW VELOCITY AND UNIFORMITY TEST AVERAGE ROOM AIRFLOW VELOCITY
The purpose of this test is to determine the average room airflow velocity and uniformity of that airflow velocity at the specified work surface elevation. 10.6.1 INSTRUMENTS AND EQUIPMENT Use an airflow velocity instrument that conforms to the requirements of Table 4-1.
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10.6.2 TEST PROCEDURES 10.6.2.1 Measurement readings shall be taken at specified planes and locations in the room as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.6.2.2 The measurement area shall be a cross-sectional area of the room or work area normal to the airflow. This area shall consist of the total work zone or room. 10.6.2.3 Divide the area plane at the measurement point into grids of equal area of not greater than 1.48 square meters (16 square feet), or as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.6.2.4 Measure and record the airflow velocity of each grid point. Special care is necessary to keep the sampled area unobstructed during the airflow measurement. The use of a support stand may be necessary with single point measuring (hot wire) instruments. 10.6.2.4 Take the measurement for a minimum of 5 seconds or the minimum specified time for the meter, using the average during that period as the measurement.
10.6.3 ACCEPTANCE 10.6.3.1 The average airflow velocity for the cleanroom should be within 10% of that specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.6.3.2 The average or total airflow volume for the cleanroom should be within 10% of that specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
10.7 AIRFLOW VOLUME AND UNIFORMITY TESTS

The airflow volume (liters per second or cubic feet per minute) is a measurement of the airflow quantity. Airflow volumes may be measured by one of three methods; 1) using a direct reading flowhood, or 2) performing a total air traverse of each, or 3) measuring the airflow velocity of each filter and then calculating the air volume of the filter. For accuracy and repeatability, the preferred method of measuring airflow volume is with a direct reading flow hood. The traverse method is the most accurate for normal HVAC TAB work, but this is not necessarily true for cleanrooms due to the duct inlet conditions. Great care must be taken if the air volume is obtained by using the filter airflow velocity because of the exit planes inaccuracies.
10.8 AIRFLOW VOLUME AND UNIFORMITY TESTS FLOWHOOD METHOD

10.8.1 INSTRUMENTS AND EQUIPMENT Utilize a direct reading flowhood that conforms to the requirements of Table 4-1.
10.6.3.3 The standard deviation should not exceed 15% unless otherwise specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
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10.6.2.5 Calculate the Standard Deviation (SD). See Appendix C for the requirements necessary to calculate the (SD).
10.8.2 TEST PROCEDURES 10.8.2.1 Flow measuring hoods are preferred for taking airflow volume measurements from each filter or supply air diffuser. The flowhood with an appropriate flow meter is required. 10.8.2.2 Seat the flow measuring hood firmly to the filter frame to prevent air leakage. 10.8.2.3 The flowhood shall be adequately sized to capture all the air exiting the filter being tested. 10.8.2.4 Measure and record the airflow volumes of each filter in liters per second (cubic feet per minute). 10.8.2.5 Calculate the Standard Deviation (SD). See Appendix C for the requirements necessary to calculate the (SD).
10.8.3.2 The average or total airflow volume for the cleanroom should be within 10% of that specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.8.3.3 The standard deviation should not exceed 15% unless otherwise specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.8.4 REPORTING See Section 5.7 for reporting requirements.
When the airflow volume cannot be measured using a flow hood then a total air traverse should be employed. A suitable length of straight, hard duct is required for an accurate airflow velocity measurement.
10.9.1 INSTRUMENTS AND EQUIPMENT Utilize airflow velocity instruments that conform to the requirements of Table 4-1. 10.9.2 TEST PROCEDURES 10.9.2.1 Divide the traverse plane into grids of equal area. Record airflow velocity measurements in accordance with the sample traverse layout. See Appendix C for sample traverse layout and calculation. 10.9.2.2 Calculate the Standard Deviation (SD). See Appendix C for the requirements necessary to calculate the (SD). 10.9.3 ACCEPTANCE 10.9.3.1 The average airflow volume of each filter for the cleanroom should be within 10% of that specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
10.9 AIRFLOW VOLUME AND UNIFORMITY TESTS TRAVERSE METHOD
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10.8.3 ACCEPTANCE 10.8.3.1 The average airflow volume of each filter for the cleanroom should be within 10% of that specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
10.9.3.2 The average or total airflow volume for the cleanroom should be within 10% of that specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.9.3.3 The standard deviation should not exceed 15% unless otherwise specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.9.4 REPORTING See Section 5.8 for reporting requirements.
10.10 AIRFLOW VOLUME AND UNIFORMITY TEST FILTER FACE AIRFLOW VELOCITY METHOD
10.11 FILTER INSTALLATION LEAK TESTS
The purpose of the filter installation integrity test is to insure and confirm that the filter system is properly installed by verifying the absence of bypass leakage in the installation, and that the filters are free of defects and pinhole leaks. The test is made by introducing an aerosol challenge upstream of the filters and scanning immediately downstream of the filters and support frame. This procedure detects small pinholes or other damage in the filter medium and frame seal, bypass leaks in the filter frame and gasket seal, and leaks in the filter bank framework. For plenum ceilings, it may be necessary to also scan ceiling penetrations (i.e. sprinkler heads, conduits, pipes, etc) and ceiling joints. Two different leak detection techniques are presented, along with recommendations for two different aerosol challenge methods and two different detection instruments; 1) aerosol photometer test method and 2) particle counter test method. 10.11.1 LEAK TEST METHODS For the above reasons, four methods of aerosol particle challenge tests are specified and used by NEBB Certified CPT Firms: a. Filter Installation Leak Tests Aerosol Photometer Test Method (Section 10.12), b. Filter Installation Leak Tests Discrete Particle Counter Test Method (Section 10.13), c. Filter Installation Leak Tests Ambient Particulate Test Method (Section 10.14), d. Filter Installation Leak Tests Total Aerosol Penetration Test Method (Section 10.15).
10.12 FILTER INSTALLATION LEAK TESTS AEROSOL PHOTOMETER TEST METHOD

The photometer test method employs either logarithmic or linear mass concentration detection and does not provide discrete quantitative analysis. This test is performed by introducing DOP, PAO or another
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For non-unidirectional airflow cleanrooms, the airflow volume measurements are preferable and are more accurate for calculating airflow velocities when readings are taken at a distance greater than 150 mm (6) from the filter face. As previously stated in Section 10.7, determining volume from filter face velocities should only be done with a great deal of care due to the inaccuracies in calculating the exit plane area. NEBB does NOT recommend this test. Airflow Volume and Uniformity Test should be performed utilizing the Flowhood Method described in Section 10.8.
specified substitute upstream of filters and verifying the installations integrity by scanning the downstream side of the filters with the photometer probe. 10.12.1 INSTRUMENTATION AND EQUIPMENT 10.12.1.1 Furnish a source of air or thermal generated aerosol that conforms to the requirements of Table 4-1. 10.12.1.2 Photometers shall conform to the requirements of Table 4-1. 10.12.1.3 The scanning probe shall meet the requirements of Table 4-1. 10.12.2 TEST PROCEDURES 10.12.2.1 Verify that the design airflow velocity has been balanced by the NEBB Certified TAB Firm prior to performing the filter installation leak test.
10.12.2.4 Where several, or all, filters must be exposed simultaneously to the aerosol, it is recommended that the aerosol be introduced at the blower inlet(s) or another location which will produce a uniform mixture over all filters. Measure the upstream concentration at a point immediately ahead of the filters. 10.12.2.5 When using an aerosol generator set the air supply pressure at a minimum of 138 Pa (20 psi). Determine the amount of airflow volume being challenged. Using Equation 10-1, calculate the quantity of Laskin nozzles required to achieve an upstream concentration level of 10 g/L or greater, or as specified or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. Place the generator distribution tube in the location as determined in Section 10.12.2.2. Equation 10-1 (SI): Required Number of Laskin Nozzles
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Where: N C Q Z = = = =
Equation 10-1 (IP): Required Number of Laskin Nozzles
Where: N C Q Z
= = = =
R
N= C Q Z N= C Q Z
Number of Laskin nozzles required Required upstream challenge concentration (greater than 10 g/L) Airflow volume being challenged (L/m) Constant = 3823 x 100 = 382,300
Number of Laskin nozzles required Required upstream challenge concentration (greater than 10 g/L) Airflow volume being challenged (cfm) Constant = 135 x 100 = 13,500
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10.12.2.3 Introduce the aerosol and measure the upstream concentration immediately upstream of the filter in question. Care must be exercised to assure that a uniform distribution of the challenge aerosol exists.
10.12.2.2 Introduce the aerosol into the air supplied to the filters in a manner which will produce a uniform challenge concentration at each of the filters being exposed at the same time.
The constant Z is based on one Laskin nozzle producing 100 g/L of challenge aerosol in 3823 L/m (135 cfm) of airflow. 10.12.2.6 When using a thermal generator operate per the manufactures recommended operating procedures. 10.12.2.7 Measure the upstream aerosol challenge concentration, using either a linear or logarithmic photometer scale. 10.12.2.8 For linear readout photometers (graduated 0-100), the upstream concentration should be established using one or more Laskin nozzles adjusted to produce an upstream concentration of 10 to 20 micrograms of aerosol per liter of air. The photometer should be adjusted to read 100 %. 10.12.2.9 For logarithmic readout photometers, the upstream concentration should be adjusted, using the instrument calibration curve, to give a concentration of 1.0 x 104 above that concentration required to give a reading of one scale division. 10.12.2.10 The filter face and the perimeter of the filter assembly shall be scanned by passing the probe in slightly overlapping strokes so that the entire area of the filter is sampled. The probe shall be held approximately 25 mm (1 inch) from the area to be tested during scanning. Separate passes shall be made around the entire periphery of the filter, along the bond between the filter pack and the frame, and around the seal between the filter and the device, at a scan rate of not more than 0.05 m/s or 5.0 cm/s (10 fpm or 2 inches per second). This assumes an airflow filter face velocity of 0.46 0.56 m/s (90 -110 fpm). If airflow filter face velocities are significantly different, the scan rate shall be calculated using the information found in the current edition of IEST-RP-CC034, HEPA and ULPA Filter Leak Tests. 10.12.3 ACCEPTANCE 10.12.3.1 An unacceptable leak is defined as a sustained reading greater than 0.01% of the measured upstream challenge concentration, or as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.12.4 REPORTING See Section 5.10 for the reporting requirements.
10.12.5 REPAIRS 10.12.5.1 Filters may be repaired providing: 10.12.5.2 The size of the repair(s) is not greater than 3% of each filter face area, AND 10.12.5.3 One dimension of any repair is limited to 38 mm (1.5 inches) maximum, or as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.12.5.4 Repairs to filter installation leaks may be made by procedures specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
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10.13 FILTER INSTALLATION LEAK TESTS DISCRETE PARTICLE COUNTER TEST METHOD
The particle counter test method employs discrete particle sizing and quantitative analysis. This test is performed by introducing an artificial aerosol challenge upstream of the filters and verifying the installations integrity by scanning the downstream side of the filters with the particle counter. The challenge aerosol particle concentration must be greater than 3.53 x 107 (35,300,000) particles per cubic meter, (1 x 106 [1,000,000] particles per cubic foot of air). This concentration will allow a reasonable scan rate that can be manually performed. Greater quantities are desirable and will increase the allowable scan rate and the accuracy with which leaks are detected. 10.13.1 INSTRUMENTATION AND EQUIPMENT 10.13.1.1 Use a particle counter that conforms to the requirements of Table 4-1. 10.13.1.2 Use a hand held isokinetic sampling probe configured to provide adequate residence time while scanning. Probe shall conform to the requirements of Table 4-1. 10.13.1.3 Use an aerosol particle generator as described in Table 4-1.
10.13.1.4 Use a diluter or a reduced flow rate particle counter that conforms to the requirements of Table 4-1. 10.13.2 TEST PROCEDURES 10.13.2.1 Verify that the design airflow velocity has been balanced by the NEBB Certified TAB Firm prior to performing the filter installation leak test. 10.13.2.2 Introduce the aerosol into the air supplied to the filters in a manner which will produce a uniform challenge concentration at each of the filters being exposed at the same time. 10.13.2.3 Measure the upstream particle concentration as the challenge is introduced. Verify that the upstream particle challenge shall be greater than 3.53 x 107 (35,300,000) particles per cubic meter, (1 x 106 [1,00,000] particles per cubic foot of air). This concentration will allow a reasonable scan rate.
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Equation 10-2 Where: = Sr Cc = Ls = Fs = Dp = Np = 60 =
10.13.2.4 The resulting upstream challenge concentration, along with other information specified below is used in Equation 10-2 to calculate the Acceptable Scan Rate when utilizing a Discrete Particle Counter Test.
R
Sr =
Acceptable Scan Ratecm/s (in/s) Upstream challenge concentrationparticles/L (particles/ft3) Significant leakpercentage of upstream concentration (typically 0.01%) Sample flow rate of instrument usedL/m (cfm) Probe dimension parallel to scan directioncm (inches) Number of particle counts that indicate the leak (1 through 10) conversion60 sec/min
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Cc Ls Fs D p 60 N p
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10.13.2.5 Using the resulting scan rate (Sr), scan the filter face and the perimeter of the filter assembly by passing the probe in slightly overlapping strokes so that the entire area of the filter and installation is tested. The probe should be held approximately 25 mm (1 inch) from the area to be tested during scanning. Separate passes should be made around the entire periphery of the filter, along the bond between the filter pack and the frame, and around the seal between the filter and the device. 10.13.2.6 When scanning a filter and installation a particle count detection exceeding Np will indicate a significant leak. If a leak is encountered that exceeds Np a minimum sample time of 30 seconds is required volume of 14.2 L (0.5 cfm) to verify that a significant leak exists. If a lower value of Np is used (1) the allowable scan rate will be increased but the probability of finding a leak will be decreased. If a larger Np is used (10) the allowable scan rate is decreased but the probability of detecting a leak is increased. 10.13.3 ACCEPTANCE An unacceptable leak is defined as a sustained reading greater than 0.01% of the measured upstream concentration for the particle size of interest, or as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.13.4 REPORTING See section 5.11 for the reporting requirements. 10.13.5 REPAIRS 10.13.5.1 Filters may be repaired providing:
10.13.5.2 The size of the repair(s) is not greater than 3% of each filter face area, AND 10.13.5.3 One dimension of any repair is limited to 38 mm (1.5 inches) maximum, or as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
10.14 FILTER INSTALLATION LEAK TESTS AMBIENT TEST METHOD
10.13.5.4 Repairs to filter installation leaks may be made by procedures specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
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This test is not recommended by NEBB. It is not to be considered an alternate equal to the either of the methods described Section 10.12 or Section 10.13. The reason that this test is not recommended by NEBB is due to the low upstream particle concentrations normally found in re-circulated air from cleanrooms. Typical users of this test are unable to locate significant leaks. Scan rates as calculated in Section 10.13 would be excessive. See the following example. Example 10-1: Based on the airflow velocity of 0.51 m/s (100 fpm): Cc = 1,767 particles/L (50,000 particles/ft3) Ls = 0.01% (0.0001) Fs = 28.3 L/m (1.0 cfm) = 1.27 cm (0.50 in) Dp Np = Number of particle counts that indicate the leak (1 through 10) 60 = conversion60 sec/min
PARTICLUATE
NEBB CPT PROCEDURAL STANDARDS Equation 10-3 (SI) 1767 x 0.0001 x 28.3 x 1.27 Sr = -----------------------------------60 x 1
SECTION 10 PRIMARY TESTS = 0.1058 cm/s
Equation 10-3 (IP)
50,000 x 0.0001 x 1.0 x 0.50 Sr = -----------------------------------60 x 1
= 0.0417 in/s
Thus it would take 172.8 minutes to completely scan a 2 x 4 filter. If a lower value of Np is used, such as 1, the allowable scan rate will be increased but the probability of finding a leak will be decreased. If a larger Np is used, such as 10, the allowable scan rate is decreased but the probability of detecting a leak is increased.
This test is performed by introducing challenge aerosol upstream of filters installed in ducts remote to the cleanroom. The filtered air entering the room from the duct is then measured and compared to the upstream concentration to determine the overall penetration of the filter installation. 10.15.1 INSTRUMENTATION AND EQUIPMENT 10.15.1.1 Furnish a source of air or thermal generated aerosol that conforms to the requirements of Table 4-1. 10.15.1.2 Photometers shall conform to the requirements of Table 4-1. 10.15.1.3 The scanning probe shall meet the requirements of Table 4-1.
10.15.2 TEST PROCEDURES 10.15.2.1 Verify that the design airflow velocity has been balanced by the NEBB Certified TAB Firm prior to performing the filter installation leak test.
10.15.2.2 Introduce a minimum of 10 g/l of the aerosol challenge upstream of the filters in a manner that will produce a uniform challenge to the filter bank. Measure the aerosol concentration, in the duct(s) upstream of the filter in a manner to achieve a repeatable aerosol concentration measurement.
10.15.2.3 Measure the aerosol concentration penetration, in the duct(s) downstream from the filter in a location to achieve a repeatable aerosol concentration penetration measurement. 10.15.3 ACCEPTANCE 10.15.3.1 The downstream measured aerosol concentration should not exceed 0.005 % of the upstream concentration or as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
AF
66
The purpose of the total aerosol penetration test method is to verify filter and installation integrity when downstream access to the filter and installation is not accessible. This method is less accurate than the test methods identified in Section 10.12 and 10.13.
10.15 FILTER INSTALLATION PENETRATION TEST METHOD
LEAK
TESTS
TOTAL
AEROSOL
NEBB CPT PROCEDURAL STANDARDS 10.15.4 REPORTING See section 5.13 for the report requirements.
10.15.5 REPAIRS 10.15.5.1 Repairs are not normally made to filters evaluated by the methodology due to inaccessibility. Most common repair/solution is to replace the filter(s).
10.16 AIRBORNE TESTS
PARTICLE
COUNT
CLEANLINESS
CLASSIFICATION
10.17 AIRBORNE PARTICLE COUNTING TEST ISO STANDARD (NONUNIDIRECTIONAL AND UNIDRECTIONAL)
10.17.1 INSTRUMENTATION AND EQUIPMENT Provide a particle counter that meets the requirements of Table 4-1.
10.17.2 TEST PROCEDURES 10.17.2.1 Verification Verify that all aspects of the cleanroom system which contribute to its operational integrity (air handling, filtration systems, walls, ceilings, floors, etc.) are complete and functioning. The following primary tests shall be completed prior to performing the cleanliness classification tests:
D
Equation 10-4
10.17.2.2 Field calibrate the particle counter that will be used for the airborne particle count testing. 10.17.2.3 Sample Locations The minimum number of sample locations is one. If only one sample location is employed then a minimum of three single sample volumes shall be taken at that single location. Sampling at more locations than the required minimum will result in greater precision. The minimum number of locations shall be calculated by taking the square root of the room area. This is shown in Equation 10-4.
Where: SL = Minimum Number of Sample Locations 10.17.2.4 Sample Location Grid Establish a test point grid pattern at the work surface elevation uniformly distributed throughout the cleanroom, except as limited by equipment.
a. b. c. d.
Room pressurization tests Airflow tests Filter leak tests Enclosure integrity tests
AF
SL = ROOM AREA
67
The airborne particle count cleanliness classification test is performed to determine the actual particle count level within the facility at the time of the test (As-Built, At-Rest, or Operational). Particle size(s) of interest, the room occupancy state and the room classification shall be known prior to the beginning of the tests and shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
10.17.2.5 Number of Samples The minimum number of samples shall be 3. The minimum number of samples at any location is one. More than one sample may be taken at each location. 10.17.2.6 Minimum Volumes per Sample The minimum volume sample size for an ISO classified room shall be per Equation 10-5 ISO 14644 Minimum Volumes Per Sample. Equation 10-5 Where: Vs = Sample Volume (L) Cm= Cleanliness Classification Cn= Particle Size (m)
Vs =
20 1000 Cm C n
TABLE 10-1: Airborne Particulate Cleanliness Classes In Accordance With ISO Standard 14644 Class limits are given for each class name. The limits designate specific concentrations (particles per unit volume) of airborne particles with sizes equal to and larger than the particle sizes shown. Cleanliness Class Limits* Class 0.1 m
R
0.2 m 10 100 1,000 10,000 100,000 1,000,000 N/A N/A N/A 2 24 237 2,370 23,700 237,000 N/A N/A N/A
Particle Size per m3
AF
0.3 m N/A 10 102 1,020 10,200 102,000 N/A N/A N/A 0.5 m N/A 4 35 352 3,520 35,200 352,000 3,520,000 35,000,000 Particles/m3 = 10 Cm (0.1 m /Cn)2.08 68
10.17.2.7 Particle Size The size of particles for room class certification shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. Particle counts and size for an ISO classified room shall be per Table 10-1 Airborne Particulate Cleanliness Classes ISO 14644.
T
1.0 m N/A N/A 8 83 832 8,320 83,200 832,000 8,320,000
1 2 3 4 5 6 7 8 9
5.0 m N/A N/A N/A NA 29 293 2,930 29,300 293,000
D
Equation 10-6:
Where: Cn = Particle size in microns Cm= Cleanliness Classification N/A = Not Applicable *Concentration limits for other Cleanliness Classes can be calculated from Equation 10-6.
10.17.3 ACCEPTANCE The air in a cleanroom or controlled environment shall have met the acceptance criteria for an airborne particulate cleanliness class (see Table 10-1). The cleanroom cleanliness classification is acceptable when the averages of the particle concentrations measured at each of the locations fall at or below the class limit. Additionally, if the total number of locations sampled is greater than one and less than ten, the mean of these averages must fall at or below the class limit with a 95% UCL. If the results are non-compliant based on the 95% UCL calculation due to a single outlier value, it does not need to be included in a recalculation of the 95% UCL analysis provided that the outlier is due to procedural error or equipment malfunction. Additionally, the calculation is repeated with all remaining sample locations and at least three samples remain in the calculation. Additionally the cause of the outlier is documented. Deletion of the outlier in the 95% UCL calculation shall be as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
10.18 AIRBORNE PARTICLE COUNTING TESTS FEDERAL STANDARD 209E (NON-UNIDIRECTIONAL)

Federal Standard 209E makes a determination between non-unidirectional and unidirectional. There is a significant difference in the formula for calculating the number of locations. 10.18.1 INSTRUMENTATION AND EQUIPMENT Provide an optical particle counter that meets the requirements of Table 4-1.
D
Equation 10-7:
10.18.2 TEST PROCEDURES 10.18.2.1 Verification Verify that all aspects of the cleanroom system which contribute to its operational integrity (air handling, filtration systems, walls, ceilings, floors, etc.) are complete and functioning. The following primary tests shall be completed prior to performing the cleanliness classification tests: a. Room Pressurization Tests b. Airflow Volume Tests.
10.18.2.2 Sampling Locations (SL) Determination of the minimum number, location, and grid size of sampling points shall be based on the specified cleanliness level and number of locations. Maximum area in square feet for a sample point in a non-unidirectional airflow cleanroom shall not be greater than the area divided by square root of the cleanliness classification. This is shown in Equation 10-7.
Where: SL = Minimum Number of Sample Locations
R
SL =
AF
Room Area Room Class
69
Clean work zones within the cleanroom may also be allowed. These clean work zones shall be classified based on the maximum allowable particle count within that clean work zone.
10.18.2.3 Minimum Sampling Locations The minimum number of sample locations required is two. 10.18.2.4 Sampling Location Elevation The sample location elevation shall be immediately above the work surface elevation. 10.18.2.5 Sample Location Grid Establish a test point grid pattern at the work surface elevation that satisfies user requirements and is compatible with the type of cleanroom and the operational mode being tested. 10.18.2.6 Number of Samples The minimum number of samples is five. The minimum number of samples at any location is one. More than one sample may be taken at each location. Sampling at more locations than the required minimum will result in greater precision. 10.18.2.7 Minimum Volumes per Sample The minimum volume sample size for a Federal Standard 209E classified room shall be per Equation 10-8 The volume of sampled air shall not be less than 0.00283 m3 or 0.1 ft3. NEBB recommends that the sample volume be at least 28.3 liters or 1.0 ft3 Equation 10-8:
Where: Vs = Sample Volume Cm= Cleanliness Classification
10.18.2.8 Particle Size The size of particles for room class certification shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. Particle counts and size for a Federal Standard classified room shall be per Table 10-2 Airborne Particulate Cleanliness Classes Federal Standard 209E.
10.18.3 ACCEPTANCE The air in a cleanroom or controlled environment shall have met the acceptance criteria for an airborne particulate cleanliness class (see Table 10-2). The cleanroom cleanliness classification is acceptable when the averages of the particle concentrations measured at each of the locations fall at or below the class limit. Additionally, if the total number of locations sampled is less than ten, the mean of these averages must fall at or below the class limit with a 95% UCL. Clean work zones within the cleanroom may also be allowed. These clean work zones shall be classified based on the maximum allowable particle count within that clean work zone.
AF
Vs = 20 Cm
70
TABLE 10-2 Airborne Particulate Cleanliness Classes In Accordance With Federal Standard 209E Cleanliness Class 1 10 100 1,000 10,000 100,000 Class Limits* Particles Per Ft3 0.1 m 35 350 N/A N/A N/A N/A 0.2 m 7.5 75 750 N/A N/A N/A 0.3 m 3 30 300 N/A N/A N/A 5.0 m 1 N/A 10 N/A 100 N/A 1,000 7 10,000 70 100,000 700 0.5 m
Where: Cm = Cleanliness Classification Cn = Particle size in microns N/A = Not Applicable
*Concentration limits for other Cleanliness Classes can be calculated from Equation 10-9. Equation 10-9: Particles/ft3 = Cm (0.5/ Cn)2.2
10.19 AIRBORNE PARTICLE COUNTING TESTS FEDERAL STANDARD 209E (UNIDIRECTIONAL)
10.19.1 INSTRUMENTATION AND EQUIPMENT Provide an optical particle counter that meets the requirements of Table 4-1. 10.19.2 TEST PROCEDURES 10.19.2.1 Verify that all aspects of the cleanroom system which contribute to its operational integrity (air handling, filtration systems, walls, ceilings, floors, etc.) are complete and functioning. The following primary tests shall be completed prior to performing the cleanliness classification tests: a. Room Pressurization Tests, b. Airflow Volume Tests. 10.19.2.2 Sampling Locations (SL) The minimum number of sample locations required for verification of a clean zone shall be the lesser of the following, however, in no case shall the minimum number of sample locations be less than 2:
AF
71
NEBB CPT PROCEDURAL STANDARDS 10.19.2.2.1 The area of the entrance plane in square feet divided by 25,
Equation 10-10
SL =
Room Area 25
OR:
10.19.2.2.2 The area of the entrance plane in square feet divided by the square root of the airborne particulate cleanliness class designation. Equation 10-11
SL =
Room Area Room Class
10.19.2.3 Minimum Sampling Locations The minimum number of sample locations required is two. 10.19.2.4 Sampling Location Elevation The sample location elevation shall be immediately above the work surface elevation.
10.19.2.6 Number of Samples The minimum number of samples is five. The minimum number of samples at any location is one. More than one sample may be taken at each location. Sampling at more locations than the required minimum will result in greater precision. 10.19.2.7 Minimum Volumes per Sample The minimum volume sample size for a Federal Standard classified room shall be per Equation 10-11 The volume of sampled air shall not be less than 0.00283 m3 (0.1 ft3). NEBB recommends that the sample volume be at least 28.3 liters (1.0 ft3).
D
Where: Vs = Sample Volume Cm= Cleanliness Classification
Equation 10-12:
10.19.2.8 Particle Size The size of particles for room class certification shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. Particle counts and size for a Federal Standard classified room shall be per Table 10-3 Airborne Particulate Cleanliness Classes Federal Standard 209E.
R
Vs =
AF
20 Cm
72
10.19.2.5 Sample Location Grid Establish a test point grid pattern at the work surface elevation that satisfies user requirements and is compatible with the type of cleanroom and the operational mode being tested.
NEBB CPT PROCEDURAL STANDARDS TABLE 10-3 Airborne Particulate Cleanliness Classes In Accordance With Federal Standard 209E Cleanliness Class 1 10 100 1,000 10,000 100,000 Class Limits Particles Per Ft3 0.1 m 35 350 N/A N/A N/A N/A 0.2 m 7.5 75 750 N/A N/A N/A 0.3 m 3 30 300 N/A N/A N/A 0.5 m 1 10 100 1,000 10,000 100,000 5.0 m N/A N/A N/A 7 70 700
Intermediate Cleanliness Class Limits: Concentration limits for other Cleanliness Classes can be calculated from Equation 10-13. Equation 10-13: Particles/ft3 = Cm (0.5/ Cn)2.2
Clean work zones within the cleanroom may also be allowed. These clean work zones shall be classified based on the maximum allowable particle count within that clean work zone. 10.19.4 REPORTING See Section 5.16 for reporting requirements.
10.20 AIRBORNE PARTICLE COUNTING TESTS SEQUENCIAL SAMPLING

Sequential Sampling Plan For ISO 14644-1 and Federal Standard 209E As an alternative method for verifying the compliance of air to the limits of airborne particulate cleanliness ISO Class 4 (Class 10) and cleaner, the sequential sampling plan described in Appendix F of ISO 14644-1 and Appendix F of Federal Standard 209E may be used (Sequential Sampling is a Optional Method for Verifying the Compliance of Air to the Limits of Airborne Particulate Cleanliness Classes M 2.5 and Cleaner). The advantage of sequential sampling is the potential to reduce significantly the sample volume at each location and, consequently, to reduce sampling times.
10.19.3 ACCEPTANCE The air in a cleanroom or controlled environment shall have met the acceptance criteria for an airborne particulate cleanliness class (see Table 10-3). The cleanroom cleanliness classification is acceptable when the averages of the particle concentrations measured at each of the locations fall at or below the class limit. Additionally, if the total number of locations sampled is less than ten, the mean of these averages must fall at or below the class limit with a 95% UCL.
AF
73
Where: Cm = Cleanliness Classification Cn = Particle size in microns N/A = Not Applicable
10.21 ROOM PRESSURIZATION TESTS

The current ISO 14644 Standards and Federal Standard 209E do not address cleanroom pressurization, although a pressure differential of 6 to 25 Pa (0.02 to 0.10 in.w.g.) is generally used, with 12.5 Pa (0.05 in. w.g.) being common increments between rooms, unless otherwise specified. 10.21.1 INSTRUMENTATION AND EQUIPMENT Use an airflow pressure instrument that conforms to the requirements of Table 4-1. 10.21.2 TEST PROCEDURES 10.21.2.1 Measure and record the pressure differentials (Pa or in. w.g.) between the inner most cleanroom and adjacent spaces, rooms, or the exterior environment. 10.21.2.2 Measure and record the pressure differential (Pa or in. w.g.) between the next adjacent spaces and other spaces or the exterior environment until all pressure differentials have been obtained and recorded. 10.21.3 ACCEPTANCE Pressurization levels as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 10.21.4 REPORTING See section 5.18 for the reporting requirements.
D
74
AF
SECTION 11 SECONDARY TESTS

11.1 INTRODUCTION
The secondary tests are user optional and relate to particle and air movement and other ancillary cleanroom systems: a. b. c. d. e. f. g. h. i. j. Airflow Parallelism Tests Enclosure Integrity Tests Recovery Tests Lighting Level and Uniformity Tests Sound Level Tests Vibration Level Tests Temperature and Humidity Uniformity Tests. Electrostatic Tests Conductivity Tests Electromagnetic Interference (EMI) Test
11.2 AIRFLOW PARALLELISM TESTS
The purpose of the airflow parallelism test is to show the actual airflow pattern throughout the unidirectional cleanroom. It can also be used to demonstrate the effects on airflow caused by equipment. This test should be performed after all airflow velocity and uniformity tests and room pressurization tests have been performed. Determining the airflow patterns within a room is performed using various mediums which include the following non contaminating items; smoke, vapor source or streamers of thread or string.
11.2.1.2 Support stand which will least affect the airflow in the test location aerodynamically, and will allow the positioning of the test medium at the specified location and height.
D
11.2.1.4 Measuring tape 11.2.1.5 Pointer and stand
11.2.1.3 Plumb bob or spirit level
11.2.2 TEST PROCEDURES 11.2.2.1 Divide the cleanroom into grids of equal area having dimensions of 3m x 3m (10 feet x 10 feet), or as otherwise specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.2.2.2 Secure plumb line, spirit level, or straight edge as required. 11.2.2.3 Mark the plumb line at 305 mm (12 inch) intervals. 11.2.2.4 The distance from the plumb line to the streamer or vapor is determined at a distance of 915 mm and 1520 mm (36 and 60 inches) above the floor. 75
11.2.1 INSTRUMENTATION AND EQUIPMENT 11.2.1.1 Test Medium (non-contaminating items; smoke, vapor source or streamers of thread or string).
AF
11.2.2. 5 Introduce the test medium using the support stand at the specified test grid location and height. 11.2.2.6 The angle of deflection is then calculated based on the measured horizontal offset from true vertical. 11.2.3 ACCEPTANCE 11.2.3.1 The angle of deflection should not be greater than 14 from center when measured higher than 915 mm (36 inches) above the floor or as otherwise specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.2.4 REPORTING See Section 5.19 for reporting requirements.
The purpose of the enclosure integrity test or induction leak test is a procedure that is intended to test the integrity of the cleanroom construction seams and joints. 11.3.1 INSTRUMENTATION AND EQUIPMENT Use an aerosol generator that conforms to the requirements of Table 4-2. Use a discrete particle counter that conforms to the requirements of Table 4-2. 11.3.2 TEST PROCEDURES 11.3.2.1 The number and location of required measurements shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.3.2.2 Measure the particle concentration outside of the cleanroom envelope immediately adjacent to the construction seam or joint to be evaluated. 11.3.2.3 The concentration should be at least 3.5 x 106/m3 (1 x 105 particles per cubic foot ). 11.3.2.4 If the concentration is less, generate an aerosol to increase the concentration.
11.3.2.5 Scan at a distance of 50 to 100 mm (2 to 4 inches) from the construction seam or joint at a rate of approximately 0.05 m/s (10 feet per minute). 11.3.3 ACCEPTANCE 11.3.3.1 Acceptance of a facility, where induction leaks are present, is subject to approval of satisfactory repairs as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.3.4 REPORTING See Section 5.20 for reporting requirements.
11.4 RECOVERY TESTS STANDARD METHOD

The recovery test is performed to determine the amount of time that is necessary for non-unidirectional cleanrooms or clean spaces and its systems to reach a specified steady state cleanliness level after a system shutdown or power failure following startup. It is not recommended for unidirectional airflow clean 76
AF
11.3 ENCLOSURE INTEGRITY TESTS
spaces. This test must be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.4.1 INSTRUMENTATION AND EQUIPMENT 11.4.1.1 Use an aerosol generator that conforms to the requirements of Table 4-2. 11.4.1.2 Use a discrete particle counter that conforms to the requirements of Table 4-2. 11.4.2 TEST PROCEDURES 11.4.2.1 The number of points and the location of the points is to be determined as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.4.2.2 Ensure that the cleanroom HVAC systems are in operation.
11.4.2.4 The discreet particle counter probe should not be setup directly under the HEPA filter or air outlet. 11.4.2.5 Measure the particle count at the cleanroom or clean space outlets and establish the target cleanliness level. 11.4.2.5 Generate a particulate challenge at the supply air inlet to the cleanroom or clean space to raise the particle count to the following levels: ISO Class 5 and cleaner ISO Class 6 and above 100 times the established target cleanliness level 10 times the established target cleanliness level
11.4.2.6 Shutoff the aerosol challenge, record the start time, and begin particle concentration measurements. Record the particle count for a six second sample period for each minute until the particle count is returned to the target cleanliness level measured prior to the introduction of the challenge particles and record the end time. 11.4.2.7 Record the recovery time. 11.4.3 ACCEPTANCE Acceptable recovery times shall then be determined as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.4.4 REPORTING See Section 5.21 for reporting requirements.
11.5 LIGHTING LEVEL AND UNIFORMITY TESTS

The purpose of the lighting level and uniformity tests is to verify that installed lighting levels and lighting uniformity meet the specified requirements. The measurement procedures are adopted from the Illuminating Engineering Society of North America (IESNA) Lighting HandbookReference Volume. 77
or as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
AF
11.4.2.3 Set up the particle counter in accordance with the manufactures instructions.
While the test procedure to be followed will be varied based on the exact layout of the luminaries, there are some common elements that pertain to all of the tests such as: lamp conditioning, measurement conditions, instrumentation and equipment, creating a representative grid pattern for testing locations, etc. 11.5.1 INSTRUMENTATION AND EQUIPMENT 11.5.1.1 Use a portable photoelectric illumination meter shall meet the requirements of Table 4-2. 11.5.1.2 Other equipment needed for the test are: a. A reflected ceiling plan or a floor plan and if possible a furniture or equipment layout plan. b. A long tape measure. c. Brightly colored dots or another means of marking the test locations of the grid. d. A portable test stand that is the height of the work surface, usually 30 (760 mm) tall, and will allow the instrument and the light sensitive cell to be placed horizontally. 11.5.2 TEST PROCEDURES GENERAL (APPLIES TO ALL TESTS) 11.5.2.1 Lamp Conditioning 11.5.2.1.1 For high intensity, or fluorescent systems, in relatively new lamp installations, at least 100 hours of operation of a gaseous source should elapse before measurements are taken. 11.5.2.1.2 With incandescent lamps, seasoning is accomplished in 20 hours or less for common sizes. 11.5.2.1.3. A high intensity discharge or fluorescent system must be illuminated for at least two hours before measurements are taken to be sure that normal operating output and temperature has been attained. 11.5.2.2 Measurement Conditions 11.5.2.2.1 Luminance measurements should be made under actual working conditions. All lighting in the area including general lighting, task lighting and supplementary lighting should be in normal use. 11.5.2.2.2 Measurements shall be made at work surface elevation and from a specified work point location with the combinations of daylight and electric lighting facilities available.
11.5.2.2.3 Verify that the thermal conditions of the space are stable. 11.5.2.2.4 Care and consideration should be given to identify the influence of natural lighting sources.
11.5.3 TEST PROCEDURE DETERMINATION OF AVERAGE LUMINANCE FROM GENERAL LIGHTING 11.5.3.1 A measurement grid shall be determined and should be positioned to cover a representative area of the working plane. Any obstructions above the working plane, away from columns, tall pieces of equipment, filing cabinets, etc shall be noted in the report. 11.5.3.2 The use of this method in the types of areas described should result in values of average illuminance within 10 percent of the values that would be obtained by dividing the area into 0.6 m (2 foot) squares, taking a reading in each square and averaging. 11.5.3.3 The measuring instrument should be positioned so that when readings are taken, the surface of the light sensitive cell is in a horizontal plane and 760 mm (30 inches) above the floor.
AF
78
11.5.4 TEST PROCEDURES SYMMETRICALLY SPACED LUMINARIES IN TWO OR MORE ROWS Use Figure 11-1(a) for this test. 11.5.4.1 Take readings at stations r-1, r-2, r-3 and r-4 for a typical inner bay. Repeat at stations r-5, r-6, r-7 and r-8 for a typical centrally located bay. Average the 8 readings (R). 11.5.4.2 Take readings at stations q-1, q-2, q-3 and q-4 in two typical half bays on each side of room. Average the 4 readings (Q). 11.5.4.3 Take readings at stations t-1, t-2, t-3 and t-4 in two typical half bays at each end of room. Average the 4 readings (T). 11.5.4.4 Take readings at p-1 and p-2 in two typical corner quarter bays. Average the 2 readings (P). 11.5.4.5 Calculate the average level of illuminance using equation 11-1. Equation 11-1
Average Illuminance =
Where: R Q T P N M
11.5.5 TEST PROCEDURES SYMMETRICALLY LOCATED SINGLE LUMINAIRE Use Figure 11-1(b) for this test. 11.5.5.1 Take readings at stations p-1, p-2, p-3 and p-4 in all 4 quarter bays.
11.5.5.2 Average the 4 readings (P). This average (P) is the average illuminance for the area. 11.5.6 TEST PROCEDURES INDIVIDUAL LUMINARIES IN SINGLE ROW Use Figure 11-1(c) for this test. 11.5.6.1 Take readings at stations q-1 through q-8 in 4 typical half bays located two on each side of the area. Average the 8 readings (Q). 11.5.6.2 Take readings at stations p-1 and p-2 for two typical corner quarter bays. Average the 2 readings (P). 11.5.6.3 Calculate the average level of illuminance using equation 11-2.
= = = = = =
AF
"r" average "q" average "t" average "p" average Number of luminaries per row Number of rows 79
R(N 1) + (M 1) + Q(N 1) + T(M 1) + P NM
Equation 11-2
Q(N 1) + P N
Where: N = Number of luminaries 11.5.7 TEST PROCEDURES TWO OR MORE CONTINUOUS ROWS OF LUMINAIRES Use Figure 11-1(d) for this test. 11.5.7.1 Take readings at stations r-1 through r-4 located near the center of the area. Average the 4 readings (R). 11.5.7.2 Take readings at stations q-1 and q-2 located at each midside of the room and midway of the room and midway between the outside row of luminaires and the wall. Average the 2 readings (Q).
11.5.7.4 Take readings at stations p-1 and p-2 in two typical corners. Average the 2 readings (P). 11.5.7.5 Calculate the average level of illuminance using equation 11-3. Equation 11-3
Where: R Q T P N M = = = = = =
D
Equation 11-4
11.5.8 TEST PROCEDURES - CONTINUOUS LUMINAIRES IN SINGLE ROW Use Figure 11-1(e) for this test. 11.5.8.1 Take readings at stations q-1 through q-6. Average the 6 readings (Q). 11.5.8.2 Take readings at stations p-1 and p-2 in typical corners. Average the 2 readings (P). 11.5.8.3 Calculate the average level of illuminance using equation 11-4.
R
Average Illuminance = QN + P N +1
AF
RN(M 1) + QN + T(M 1) + P M(N + 1)
"r" average "q" average "t" average "p" average Number of luminaires per row Number of rows 80
11.5.7.3 Take readings at stations t-1 through t-4 at each end of the room. Average the 4 readings (T).
Where: Q = P = N = "q" average "p" average Number of luminaires
11.5.9 TEST PROCEDURES LUMINOUS OR LOUVER-ALL CEILING Use Figure 11-1(f) for this test. 11.5.9.1 Take readings at stations r-1 through r-4 located at random in the central portion of the area. Average the 4 readings (R). 11.5.9.2 Take readings at stations q-1 and q-2 located 2 feet (0.6 meter) from the long walls at random lengthwise of the room. Average the 2 readings (Q).
11.5.9.4 Take readings at stations p-1 and p-2 located at diagonally opposite corners 2 feet (0.6 meter) from each wall. Average the 2 readings (P). 11.5.9.5 Calculate the average level of illuminance using equation 11-5. Equation 11-5
Where: R Q T P W L = = = = = = "r" average "q" average "t" average "p" average Width of room Length of room
11.5.10 TEST PROCEDURES POINT OF WORK MEASUREMENTS 11.5.10.1 With task, general and supplementary lighting in use, the illuminance at the point of work should be measured with the worker in a normal working position. 11.5.10.2 The measuring instrument should be located so that when readings are taken, the surface of the light sensitive cell is in the plane of the work or of that portion of the work on which the critical visual task is performedhorizontal, vertical or inclined. 11.5.10.3 Readings may be recorded in a table. 11.5.11 ACCEPTANCE Acceptable illumination levels shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.5.12 REPORTING See Section 5.22 for reporting requirements. 81
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R(L 8) (W 8) + 8 Q(L 8) + 8 T(W 8) + 64 P WL
11.5.9.3 Take readings at stations t-1 and t-2 located 2 feet (0.6 meter) from the short walls at random crosswise of the room. Average the 2 readings (T).
Report any obstructions above the working plane, away from columns, tall pieces of equipment, filing cabinets, etc shall be noted in the report.
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NEBB CR PROCEDURAL STANDARDS
11.6 SOUND LEVEL TESTS

The purpose of performing sound pressure measurements will vary based on the occupancy state of the cleanroom. While the purpose may vary, the procedures are identical. The scope of services for sound level testing shall as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. The measurement procedures and reporting requirements are based on the requirements from the current NEBB Procedural Standards for Measurement of Sound and Vibration. 11.6.1 INSTRUMENTS AND EQUIPMENT 11.6.1.1 A Type 1 Sound Level Meter (SLM) meeting the requirements of Table 4-2 shall be utilized to perform all sound level testing.
The sound criteria established for a project shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. This information may be found in the Project Specifications, the Contract Drawings or some other part of the Contract Documents. The Contract Documents shall be examined for the following items: a. NC, RC, dB(A), and any other sound criteria. b. List of any rooms or spaces noted in the specifications that require low noise levels. c. Schedule of equipment to be isolated.
11.6.2.2 Test Readiness Conditions 11.6.2.2.1 All construction activities must be completed prior to sound level testing. The cleanroom shall be in an occupancy state that is as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm prior to performing sound level testing. The sound level testing can be performed in any of the 3 occupancy states (As-Built, At-Rest, or Operating). 11.6.2.2.2 From a construction standpoint, verify that the building cleanroom envelope is complete. 11.6.2.2.3 When the sound testing is performed for an As-Built occupancy state, the NEBB CPT Qualified Supervisor shall verify that all building mechanical/electrical systems have been started, are operational and completely under functional control. All testing, adjusting and balancing activities shall be performed prior to sound level testing. The NEBB CPT Qualified Supervisor shall also verify that all primary cleanroom tests have been completed. 11.6.2.2.4 When the sound testing is performed for an At-Rest occupancy state, the NEBB CPT Qualified Supervisor shall verify that all of the requirement of Section 11.6.2.2.3 are met. Additionally, the 83
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11.6.2 PRELIMINARY TEST PROCEDURES 11.6.2.1 Contract Document Review and Examination For sound measurements to be meaningful and the data to be reported accurately, advance preparations must be completed. The NEBB Qualified CPT Supervisor shall examine the contract documents, which consist of the contract drawings, the specifications, and the approved submittals, to become familiar with the project requirements and conditions that may preclude proper sound level testing of systems and equipment. The contract documents shall be examined for any information deemed necessary to perform the sound measurements.
11.6.1.2 Provide required filters, mufflers, calibrators, etc. that meet the requirement of Table 4-2.
NEBB CPT Qualified Supervisor shall also verify that the appropriate process equipment within the cleanroom is operational and completely under functional control and is operating in a manner that is consistent with the normal intended use of the cleanroom. The process equipment that should be operating during the sound pressure testing shall be as specified in the contract documents or as mutually agreed to between the Owner / Buyer and the NEBB Certified CPT Firm. 11.6.2.2.5 When the sound testing is performed for an Operational occupancy state, the NEBB CPT Qualified Supervisor shall verify that all of the requirement of Section 11.6.2.2.4 are met. Additionally, the NEBB CPT Qualified Supervisor shall also verify that all personnel are stationed at their normal working environment and that process equipment within the cleanroom is functioning in a manner that is consistent with the everyday active use of the cleanroom. The process equipment that should be operating during the sound pressure testing shall be as specified in the contract documents or as mutually agreed to between the Owner / Buyer and the NEBB Certified CPT Firm. 11.6.2.2.6 Test Readiness Report Prepare a report identifying all issues that would preclude proper sound level testing of the cleanroom. 11.6.3 TEST PROCEDURES 11.6.3.1 As stated above, the usual purpose of performing sound measurements is to determine the actual sound level pressures of the cleanroom. In order to accurately determine the sound pressure levels of the cleanroom, it will be necessary to perform sound measurements when other building systems/conditions and exterior sound sources are at a minimum level and will not influence measurements of equipment being tested. 11.6.3.2 Prior to making any sound level measurements a field calibration shall be performed in accordance with the manufacturers recommendations both before and after sound making level measurements. 11.6.3.3 Based on the occupancy state, take sound measurements when the appropriate systems, equipment, personnel, etc. are in place. 11.6.3.4 Instrument Placement Position sound level instrument to achieve a direct line-of-sight between the sound source and the sound-level meter. Unless specified or agreed to between the Owner/Buyer and the NEBB Certified CPT Firm, take sound measurements at a height approximately 1200 mm (48 inches) above the floor and at least 900 mm (36 inches) from a wall, column, or any other large surface capable of altering the measurements. 11.6.3.5 Data measurements Sound levels measurements are typically reported in terms of dB(Flat or Linear), dB(A), Noise Criteria (NC) or Room Criteria (RC). Sound level measurements of the cleanroom shall be reported in either Noise Criteria (NC) or Room Criteria (RC). Sound level measurements shall be recorded and reported in one or both of the following two methods: 1) overall sound levels or 2) in octave bands as follows: a. Overall dB(Flat or Linear) b. The sound level meter shall be set to the Slow time constant c. In each 1/1(Full) octave band, from 31.5 to 8,000 Hz. 11.6 3.6 Locations The actual scope of work detailing measurement locations shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 84
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11.6.4 ACCEPTANCE Acceptable sound level criteria shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.6.5 REPORTING See Section 5.23 for reporting requirements.
11.7 VIBRATION LEVEL TESTS

The purpose of vibration level testing is to measure the actual vibration levels of the cleanroom and to report those measurements. The scope of services for vibration measurements shall as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. The measurement procedures and reporting requirements are based on the requirements from the current NEBB Procedural Standards for Measurement of Sound and Vibration. 11.7.1 INSTRUMENTS AND EQUIPMENT 11.7.1.1 A vibration meter (real time analyzer) shall that meets the requirements of Table 4-2 shall be utilized in performing all vibration level testing, or 11.7.1.2 A sound level meter (SLM) that meets the requirements of Table 4-2 shall be utilized in performing all vibration level testing. 11.7.1.3 Provide associated required accelerometers, calibrators, etc. that conform to the requirements of Table 4-2. 11.7.2 PRELIMINARY TEST PROCEDURES 11.7.2.1 Contract Document Review and Examination For vibration measurements to be meaningful and the data to be reported accurately, advance preparations must be completed. The NEBB Qualified CPT Supervisor shall examine the contract documents, which consist of the contract drawings, the specifications, and the approved submittals, to become familiar with the project requirements and conditions that may preclude proper vibration measurement testing of systems and equipment. The contract documents shall be examined for any information deemed necessary to perform the vibration measurements.
The vibration criteria established for a project shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. This information may be found in the Project Specifications, the Contract Drawings or some other part of the Contract Documents. The Contract Documents shall be examined for the following items: a. Vibration reporting requirements in terms of displacement, velocity and / or acceleration. b. List of any equipment, rooms or spaces noted in the specifications that require low vibration levels. c. Schedule of equipment and/ or areas to be vibration isolated. d. Examine submittals for vibration isolators, machinery bases and all other vibration control equipment to verify whether the equipment furnished to the job is in accordance with the manufacturer's submittals.
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11.7.2.2 Test Readiness Conditions 11.7.2.2.1 All construction activities must be completed prior to vibration level testing. The cleanroom shall be in an occupancy state that is as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm prior to performing vibration measurements. The vibration measurements can be performed in any of the 3 occupancy states (As-Built, At-Rest, or Operating). 11.7.2.2.2 From a construction standpoint, verify that the building cleanroom envelope is complete. 11.7.2.2.3 When the vibration measurements are performed for an As-Built occupancy state, the NEBB CPT Qualified Supervisor shall verify that all building mechanical/electrical systems have been started, are operational and completely under functional control. All testing, adjusting and balancing activities shall be performed prior to vibration measurements testing. The NEBB CPT Qualified Supervisor shall also verify that all primary cleanroom tests shall be completed. 11.7.2.2.4 When the vibration measurements are performed for an At-Rest occupancy state, the NEBB CPT Qualified Supervisor shall verify that all of the requirement of Section 11.7.2.2.3 are met. Additionally, the NEBB CPT Qualified Supervisor shall also verify that the appropriate process equipment within the cleanroom is operational and completely under functional control and is operating in a manner that is consistent with the normal intended use of the cleanroom. The process equipment that should be operating during the vibration level testing shall be as specified in the contract documents or as mutually agreed to between the Owner / Buyer and the NEBB Certified CPT Firm. 11.72.2.5 When the vibration measurements are performed for an Operational occupancy state, the NEBB CPT Qualified Supervisor shall verify that all of the requirement of Section 11.7.2.2.4 are met. Additionally, the NEBB CPT Qualified Supervisor shall also verify that all personnel are stationed at their normal working environment and that process equipment within the cleanroom is functioning in a manner that is consistent with the everyday active use of the cleanroom. The process equipment that should be operating during the vibration level testing shall be as specified in the contract documents or as mutually agreed to between the Owner / Buyer and the NEBB Certified CPT Firm. 11.7.2.2.6 Test Readiness Report Prepare a report identifying all issues that would preclude proper vibration measurements of the cleanroom. 11.7.3 TEST PROCEDURES 11.7.3.1 As stated above, perform vibration measurements when other building systems/conditions and exterior vibration sources are at a minimum level and will not influence measurements of equipment being tested. In order to minimize other vibration sources, the following should be implemented: a. Turn off equipment in the building that might interfere with testing. b. Restrict people from occupying areas where human activity may affect accuracy of vibration measurements unless required by testing procedures. c. Vibration measurements should be made when exterior vibration sources; i.e. trains, roadway traffic, adjacent construction activities, etc can be minimized. 11.7.3.2 Based on the occupancy state, take vibration measurements when the appropriate systems, equipment, personnel, etc. are in place.
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11.7.3.4 In certain situations, it may be impossible to shut down cleanroom systems in order to obtain vibration measurements. In all situations, the NEBB Qualified CPT Supervisor shall contact the appropriate personnel before shutting down any cleanroom systems or operating equipment. 11.7.3.5 Location and attachment of accelerometer (transducer) 11.7.3.5.1 The method of attaching an accelerometer can seriously affect its performance. Accelerometers should be attached to vibrating surfaces according to the accelerometer manufacturer's instructions. The accelerometer shall be mounted to surfaces that are flat and clean. If vibration measurements must be made on vibrating machinery which appears to have exceptionally large vibration amplitudes, it may be necessary to attach the accelerometer to the machine by means of threaded metal studs. 11.7.3.5.2 Heavy accelerometers may affect the accuracy of vibration levels obtained from small or lightweight systems or equipment. Accelerometer weight shall be no more than 10% of the equipment to be tested. 11.7.3.5.3 It is recommended that the same mounting method be used for all measurements made on any individual piece of equipment and similar pieces of equipment.
11.7.3.6 Measurement Locations Measure and record vibration levels at all required equipment bases, equipment and on building structure adjacent to the equipment. The vibration measurements should be taken in the vertical, horizontal and axial planes when the measurements can be performed safely. Measure and record acceleration, velocity, and/or displacement readings. Vibration measurement location shall be based on the following:
Equipment Bases Support pedestals and structural components
Floor tiles Vibration sensitive equipment
Equipment and Building Structure Vibration sensitive equipment
11.7.3.7 Data Measurements Vibration measurements shall be recorded and reported in one of two methods: frequencies or in 1/3 octave bands as follows: a. Discrete vibration levels: from 1 to 200 Hz in 1 Hz increments, or b. In each 1/3 octave band: from 12.5 Hz to 100 Hz. Most cleanroom measurements are made in the 0 Hz to 100 Hz range. 87
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11.7.3.5.4 The hierarchy of mounting an accelerometer, based on accuracy of repeatable results is: stud mount, adhesive mount, magnetic base, bees wax, and hand-held probe. The magnetic base is the most common method of attachment.
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Floor Location Within 6 of equipment
Location Within 6 of the top of the support pedestal The center of the tile Within 6 of each isolator or within 6 of the equipment
at discrete
11.7.3.8 Locations Although the actual scope of work shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.7.4 ACCEPTANCE Acceptable vibration level criteria shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.7.5 REPORTING See Section 5.24 for reporting requirements.
11.8 TEMPERATURE AND HUMIDITY UNIFORMITY TESTS

Two levels of temperature and humidity tests are used. The first, general temperature and humidity uniformity tests, is suited for normal environmental requirements and will be presented in section 11.9 the second, comprehensive temperature and humidity uniformity tests, will be presented in Section 11.10 and is for areas requiring stricter control. The general level test is used to demonstrate that the cleanroom HVAC systems will maintain the specified levels of temperature and humidity required primarily for occupant comfort. The comprehensive level test is used to demonstrate that the cleanroom HVAC systems will maintain the specified levels of temperature and humidity required for both occupant comfort and process temperature control. The scope of services for temperature and moisture uniformity testing shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
11.9 GENERAL TEMPERATURE AND HUMIDITY UNIFORMITY TESTS
11.9.1.2 Temperature sensing devices such as thermocouples, thermistors, or other temperature sensors used with readout devices shall conform to the requirements of Table 4-2. 11.9.1.3 Humidity measuring devices including sling psychrometers, electronic thermo-hygrometers and dewpoint or humidity sensors shall conform to the requirements of Table 4-2. 11.9.1.4 Provide a multiple channel electronic recorder and data logger with printed output that conforms to the requirements of Table 4-2. 11.9.2 TEST PROCEDURES TEMPERATURE 11.9.2.1 Verify completion of HVAC system testing, adjusting and balancing (TAB) work prior to performing these tests. 11.9.2.2 Allow the HVAC system to operate under automatic control for 24 hours prior to tests.
11.9.1. INSTRUMENTATION AND EQUIPMENT 11.9.1.1 Temperature measuring devices such as standard thermometers and electronic thermometers shall conform to the requirements of Table 4-2.
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11.9.2.3 Measure the temperature at a minimum of one location for each temperature control zone. Place each thermometer or each sensor at the designated location at work level height. Allow time for the sensor to stabilize sufficiently for accurate readings. 11.9.2.4 Record the time and temperature reading at each location for each temperature control work zone. 11.9.3 TEST PROCEDURESHUMIDITY 11.9.3.1 Verify completion of HVAC system testing, adjusting and balancing (TAB) work prior to performing these tests. 11.9.3.2 Allow the HVAC system to operate under automatic control for 24 hours prior to tests. 11.9.3.3 The relative humidity is to be measured at a minimum of one location for each humidity (temperature) control zone. Place the humidity device or sensor at the designated location and height, allowing the sensor to stabilize. 11.9.3.4 Measure and record the humidity readings simultaneously with temperature readings.
11.10 COMPREHENSIVE TEMPERATURE AND HUMIDITY UNIFORMITY TESTS

11.10.1 INSTRUMENTATION AND EQUIPMENT 11.10.1.1 Electronic thermometers and temperature sensors that conform to the requirements of Table 4-2. 11.10.1.2 Humidity measuring instruments and sensors that conform to the requirements of Table 4-2.
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11.10.2.5 11.10.2.6
11.10.2 PROCEDURES TEMPERATURE AND HUMIDITY 11.10.2.1 Designate a minimum of one temperature and relative humidity measurement location in each temperature control zone. 11.10.2.2 Multiple locations in each zone may be located as specified. 11.10.2.3 The presence of heat sources should be noted in relation to the test sample location. 11.10.2.4 Verify completion of HVAC system testing, adjusting and balancing (TAB) work prior to performing these tests. Verify that the airflow uniformity tests have been completed and accepted. Allow the HVAC system to operate under automatic control for 24 hours prior to tests.
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11.9.4 ACCEPTANCE Acceptable criteria for temperature and humidity levels and requirements shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
11.10.2.7 Place each temperature and humidity sensor at each designated work level sampling location and allow stabilization. 11.10.2.8 Measure and record each temperature and humidity measurement simultaneously at each location every 6 minutes for a minimum period of 2 hours. 11.10.3 ACCEPTANCE Acceptable criteria for temperature and humidity levels and requirements shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.10.4 REPORTING See Section 5.26 for reporting requirements.
11.11 ELECTROSTATIC TESTS

Static electricity problems are prevalent in all types of cleanroom applications. The handling of small components becomes an issue if they acquire a static charge. This charge can induce an opposite charge in other objects, making the component stick to tools and surfaces. There is also a safety aspect as a discharge across an air gap creates a spark that could ignite flammable vapors. Static charges on surfaces also will attract and hold contamination. This test consists of four parts: Measurement of Static Voltage Level, Static-Dissipative Test, Ion Generator Test and Measurement of Offset Voltage. The first two tests are electrostatic tests and the purpose is to benchmark the level of electrostatic charge voltage on a work surface and / or a product surface. By measuring the surface resistance and the leakage resistance on the surfaces, the static-dissipative property can be evaluated.
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11.11.1 11.11.1.1 11.11.1.2 11.11.1.3
The scope of services for these electrical safety tests shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. INSTRUMENTATION AND EQUIPMENT An electrostatic voltmeter which meets the requirements of Table 4-2 shall be utilized. A charged plate monitor which meets the requirements of Table 4-2 shall be utilized. An ohm-meter and electrodes which meet the requirements of Table 4-2 shall be utilized.
11.11.2 TEST PROCEDURES MEASUREMENT OF SURFACE VOLTAGE LEVEL 11.11.2.1 The measuring point(s) or the object to be measured should be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.11.2.2 Hold the probe to a grounded metal plate and adjust the output of the electrostatic voltmeter to zero. 90
The second two tests relate to the performance of ion generation and these tests are typically evaluated by the ion generator test. These tests are performed by measuring the discharge time of initially charged monitors, and by determining the offset voltage of monitoring plates that are isolated. The results of each measurement indicate the efficiency of neutralizing static discharges and the imbalance between the amount of generated positive and negative ions.
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11.11.2.3 Hold the probe parallel to the plate and at a distance that is in accordance with the manufacturers recommendations. 11.11.2.4 The metal plate should have a surface area large enough for the required probe aperture and be large enough for the probe to surface spacing ratio. 11.11.2.5 Hold the probe in the same position as for zero adjustment. Then place the probe near the object surface which has the charge and measure the surface voltage. 11.11.3 TEST PROCEDURES STATIC-DISSIPATIVE TEST 11.11.3.1 The electrodes should be set at the correct distance from the surface in accordance with the manufacturers recommendations. 11.11.3.2 Specific test conditions should be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.11.4 TEST PROCEDURES ION GENERATOR TEST An Ion generator performance is evaluated by taking the discharge time and measurements of the offset voltages. The imbalance of positive and negative ions that are in the ionized airflow can result are determined by the offset voltage measurements. The efficiency of eliminating static charges that are caused by using ion generators is determined by measuring the discharge time. 11.11.4.1 The measuring point(s) or the object to be measured should be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.11.4.2 11.11.4.3 voltage. Using isolated conductive plates of a known capacitance.
From a power source, the isolated conductive plates are charged to a known positive
11.11.4.4 Expose the isolated conductive plates to the airflow that is being ionized by the bipolar ion generator. 11.11.4.5 Measure the change in static charge of the plates.
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11.11.4.7 11.11.5.2 11.11.5.3 11.11.5.4 11.11.5.5
11.11.4.6 Measure the time in which it takes the static voltage on the plate to be reduced to 10% of the initial voltage condition which is the discharge time. Repeat this procedure with the plates charged to a known negative voltage.
11.11.5 TEST PROCEDURES MEASUREMENT OF OFFSET VOLTAGE 11.11.5.1 The measuring point(s) or the object to be measured should be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. Using isolated conductive plates of a known capacitance. Ground the isolated conductive plates. Confirm that the voltage is zero. Connect an electrostatic voltmeter to the plate. 91
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11.11.5.6 Expose the isolated conductive plates to the airflow that is being ionized by the bipolar ion generator until the voltage becomes stable. 11.11.6 ACCEPTANCE Acceptance criteria shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. Note: The owners criteria will depend on the electrostatic sensitivity of devices that are located in the work area. 11.11.7 REPORTING See Section 5.27 for reporting requirements.
11.12 CONDUCTIVITY TESTS

Due to the sensitive nature of many products manufactured in cleanrooms, the conductivity of floor and wall systems has become a concern. It is important that high voltage potential of static electricity be dissipated to a ground versus an arc or charge affecting a product or sensitive equipment. Some flooring materials may actually contribute to generating high voltage when walking on them. In areas where the discharge of static electricity to a product or equipment is critical, it is necessary to assure that the floor conductivity is correct. Conductivity by definition is the relative ease with which an electric current can be passed through or around a material or compound of materials. In a direct current circuit, conductivity is the reciprocal of resistance. The higher the resistance in ohms, the lower the conductivity becomes and the lower the resistance, the higher the conductivity. The ohm is the unit of measurement for the resistance to flow of electric current. The purpose of the test is to measure resistance between specified points on the floor covering, and from the floor covering to the building ground at strategic locations within the building. The tests are similar to the requirements of the current edition of NFPA 99, except as modified in the test procedures. The scope of services for these conductivity tests shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
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11.12.1.2
11.12.1 INSTRUMENTATION AND EQUIPMENT 11.12.1.1 An ohm-meter which meet the requirements of Table 4-2 shall be utilized. Provide two (2) electrodes which meet the requirements of Table 4-2 shall be utilized.
11.12.2 TEST PROCEDURES FLOOR POINT TO POINT Perform conductivity tests between points on the floor covering as follows: 11.12.2.1 Floor shall be tested with temperature and relative humidity maintained as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.12.2.2 Measurements, on continuous flooring, shall be made between five pairs of test locations in each cleanroom or clean space and the results averaged. Measurements shall be made with the electrodes 0.9 m (3 feet) apart.
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11.12.2.3 Measurements on raised floor tiles shall be made between pairs of points and may include some, or all, of the following: 11.12.2.3.1 Center of test tile to center of adjacent tile. 11.12.2.3.2 Corner of test tile to corner of any tile two positions away. 11.12.2.3.3 Center of test tile to any supporting pedestal. 11.12.2.3.4 Center of test tile to conductive paint finish covering main structural concrete floor. 11.12.3 TEST PROCEDURES FLOOR TO GROUND Perform conductivity tests from the floor covering to the building ground (raised floors only): 11.12.3.1 Floor shall be tested with temperature and relative humidity maintained as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.12.3.2 Measurements shall be made at 20 tests locations as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. Measurements may be made between up to five pairs of test locations at each of the 20 test locations in each room and the results averaged. 11.12.3.3.1 Measurements shall be made with the one electrode on the floor connected to the ohmmeter. The other terminal of the ohmmeter shall be connected to the nearest building column or exposed grounding conductor. 11.12.4 ACCEPTANCE 11.12.4.1 Acceptance criteria shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. Note: Typically, the floor panel-to-panel tests achieve average values less than 1 million ohms and the floor-to-building ground tests achieve average values less than 1 million ohms. 11.12.5 REPORTING See Section 5.28 for reporting requirements.
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11.13.1.2 A magnetic
11.13 ELECTROMAGNETIC INTERFERENCE (EMI) TEST

The purpose of the Electromagnetic Interference (EMI) Test is to determine the amount of electromagnetic radiation that is being emitted by electrical circuits carrying rapidly changing signals. This is a byproduct of their normal operation, which causes unwanted signals (interference) to be introduced in other circuits. 11.13.1 INSTRUMENTATION AND EQUIPMENT 11.13.1.1 A magnetic field meter that meets the requirements of Table 4-2 shall be utilized. field sensor that meets the requirements of Table 4-2
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11.13.2 TEST PROCEDURES FOR ELECTROMAGNETIC INTERFERENCE TEST 11.13.2.1 Divide the cleanroom into grids of equal area having dimensions of 1.22 m x 1.22 m (4 feet x 4 feet), or as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. Record readings at the center of each grid section on 3 axes at an elevation of 1.52 m (60 inches) above the floor or as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm. 11.13.2.3 The source of any readings exceeding 1.0 milligauss shall be determined. 11.13.3 ACCEPTANCE 11.13.3.1 Acceptance criteria shall be as specified in the contract documents or as agreed to between the Owner/Buyer and the NEBB Certified CPT Firm.
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11.13.4 REPORTING See section 5.29 for reporting requirements.

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PROCEDURAL STANDARDS FOR

2007 THIRD EDITION

NATIONAL ENVIRONMENTAL BALANCING BUREAU

CERTIFIED TESTING OF CLEANROOMS

PROCEDURAL STANDARDS FOR CERTIFIED TESTING OF CLEANROOMS

2007 THIRD EDITION

PROCEDURAL STANDARDS FOR CERTIFIED TESTING OF CLEANROOMS

Copyright NEBB, 2007

Additional Contributors to the Third Edition: Mike Dolim Gaithersburg, Maryland

SECTION 4 Standards for Instrumentation and Calibration

NEBB CPT PROCEDURAL STANDARDS

NEBB CPT PROCEDURAL STANDARDS

SECTION 7 Cleanroom Protocol

SECTION 8 Cleanroom Standard Operating Procedures

SECTION 9 Cleanroom Tests

NEBB CPT PROCEDURAL STANDARDS

NEBB CPT PROCEDURAL STANDARDS

SECTION 11 Secondary Tests

NEBB CPT PROCEDURAL STANDARDS

NEBB CPT PROCEDURAL STANDARDS

APPENDIX A Sample CPT Specification

APPENDIX B References and Referenced Publications APPENDIX C

Engineering Formulas, Equivalents, & Examples XIII

NEBB CPT PROCEDURAL STANDARDS

NEBB CPT PROCEDURAL STANDARDS

NEBB CPT PROCEDURAL STANDARDS

NEBB CPT PROCEDURAL STANDARDS

NEBB CPT PROCEDURAL STANDARDS

NEBB CPT PROCEDURAL STANDARDS

SECTION 2 NEBB PROGRAM, QUALITY CONTROL AND COMPLIANCE

NEBB CPT PROCEDURAL STANDARDS

SECTION 2 NEBB PROGRAM, QUALITY CONTROL AND COMPLIANCE

2.3 QUALITY CONTROL AND COMPLIANCE

2.2 QUALITY ASSURANCE PROGRAM - CONFORMANCE CERTIFICATION

NEBB CPT PROCEDURAL STANDARDS

SECTION 2 NEBB PROGRAM, QUALITY CONTROL AND COMPLIANCE

2.4 CPT SUPERVISOR RESPONSIBILITIES

NEBB CPT PROCEDURAL STANDARDS

SECTION 2 NEBB PROGRAM, QUALITY CONTROL AND COMPLIANCE

3.2 OWNER / BUYER AND DESIGN AND CONSTRUCTION TEAM RESPONSIBILITIES

NEBB CPT PROCEDURAL STANDARD

NEBB CPT PROCEDURAL STANDARD

NEBB CPT PROCEDURAL STANDARD

SECTION 4 STANDARDS FOR EQUIPMENT, INSTRUMENTATION AND CALIBRATION

4.2 RANGE AND ACCURACY USE

NEBB CPT PROCEDURAL STANDARDS

SECTION 4 STANDARDS FOR EQUIPMENT, INSTRUMENTATION AND CALIBRATION

TABLE 4-1 NEBB MINIMUM INSTRUMENTATION REQUIREMENTS

Tube Array Pitot Tube Probe Direct Reading Hood

Not Required Not Required 12 Months

Airflow Volume and Uniformity Test (Section 10.4 & 10.8)

Airflow Volume and Uniformity Test (Section 10.9)

Not Required 12 Months

Leak Testing (w/Photometer) (Section 10.12 & 10.15)

NEBB CPT PROCEDURAL STANDARDS

SECTION 4 STANDARDS FOR EQUIPMENT, INSTRUMENTATION AND CALIBRATION

Test Leak Testing (w/Particle Counter) (Section 10.13)

Equipment/ Instrumentation Particle Counter (Scanning)

Particle Counter (Upstream Verification)