CNNP Cleanroom Protocols

Cleanroom’s
Safety & Protocols
By
Srinivasa Reddy
Manager-CNNP
Purpose of Safety and protocol
 Promote Successful Cleanroom Operations

 Ensure Safety in the Clean Environment
 Provide Operational Conditions that Meet
Process & User Needs
Perspective
The protocol provides
basic awareness and general guidelines
for cleanroom users.
Successful cleanroom operation relies on

each user’s understanding, participation
and self discipline.
The success of each user relies on

trust, understanding and shared responsibility
among all users.
What is a Cleanroom?
A clean environment designed to reduce

the contamination of processes and
materials. This is accomplished by
removing or reducing contamination
sources.
Types of Contamination
 Particulate
Dust, skin, hair, makeup…
 Chemical
Oil, grease, metal ions, perfume…
 Biological
Bacteria, fungi, rodents???
 Radiation
Ultraviolet light…
Particle Characteristics
 50 micron particles are visible
 Average human hair is about 100 microns
 Time to fall 1 meter in still air
 33 seconds for 10 micron particle
 48 minutes for 1 micron particle
 Humans generate >1x105 particles per minute
when motionless
 Humans can generate >1x106 particles when
walking in the cleanroom
Contamination Sources
 People ~75%
 Ventilation ~15%
 Room Structure ~5%
 Equipment ~5%
 Contamination from personal
Action Ordinary clothes Clean room clothes
Sitting 500,000 15,000
Standing up 2,500,000 80,000
Walking slowly 5,000,000 150,000
Running 10,000,000 300,000
# particles of >0,.5um dia. generated/minute from the human body
Contamination control -
Gowning
 Proper gowning order
 Shoe covers
 Face mask
 Hair cover
 Hood ( Special case)
 Coverall ( Bunny Suit)
 Knee-high Booties
 Gloves
 Safety Glasses
Materials and Supplies
 Do Not carry non-cleanroom items into the

cleanroom
 Do not carry cleanroom items out of the
cleanroom
 Do not use pencils or erasers
 Paper should be kept in a plastic sleeve
 Do Not cut the cleanroom wipers
 Clean everything you carry into the cleanroom
Chemicals & Acids
 Always read MSDS for every chemical you use
 New chemicals into the cleanroom requires permission
 Large quantities of chemicals must be stored outside the

cleanroom
 Proper labeling with their contents and Hazard Classification
 Unattended chemicals and experiments should be labeled with

the owners name, immediate contact number, list of all
chemicals involved, and estimated time of return or
completion.
 Always Add Acid to Water (AAA)

Chemicals …..
Acids : HF, BHF, H2SO4HNO3 and HCl
Bases : H4OH, KOH, NaOH, TMAH & Developers
Oxidizers: H2O2, Na2S2O3, (NH4)2S2O8 and HNO3
Solvents: Cleaning Solvents,

Photo & e-beam resists
Resist Removers
Developers
Resist thinners
Working with Hydrofluoric Acid
 Never work alone or after hours with HF
 Familiarize with MSDS & SOP
 Never heat HF
 Personal Protective Equipment
 Eye Protection
 Safety Goggles and a Face Shield
 Gloves
 Neoprene
 Nitrile
 Body Protection
 Lab Coat/Cover all, Acid Resistant Apron and
closed toe shoes
Hydrofluoric Acid
Chemical Properties & Hazards
 Reactive: Glass ( SiO2), concrete, enamels, glazes, rubber
and many organic compounds
 Reactions with metals: Generates hydrogen gas which could
pose an explosion hazard
 Poison! Extremely corrosive liquid and vapor that can cause

severe injury via skin and eye contact, inhalation or ingestion.
 Mechanisms
 Corrosive Burns- from free H+ ions
 Chemical Burns- from penetration of fluoride ions

Hydrofluoric Acid- First Aid
 Skin Contact
 Move to nearest wash station, rinse/flush with water and
remove contaminated clothing
 Apply calcium gluconate gel to the affected area using
clean gloves
 Eye Contact
 Immediately flush eyes with water Irrigate eyes with
calcium gluconate solution (DO NOT PUT CALCIUM
GLUCONATE GELS IN EYES)
Hydrofluoric Acid- First Aid
 Ingestion
 Immediately drink large amounts of water
 If available, milk, antacid tablets can also be administered
 Inhalation
 Move the affected person to fresh air and keep affected
person warm and comfortable
 If breathing stops, begin CPR or use an inhalator
 Call emergency number and medical assistance

 Carry the MSDS to the Health center
Chemical Handling
 In case of small spill

 Inform all users in the cleanroom
 Clearly mark the affected area
 Use appropriate absorbent material to clean up the spill
 In case of large spill
 Inform all users in the cleanroom
 Clearly mark the affected area and evacuate
 Contact cleanroom staff immediately
Compressed Gases & Cylinders
 All Cylinders Must

be Stored and
Secured in a
Approved Gas
Cylinder Rack
 Double Chained
 Top and Bottom
Regulators
 Make Sure That the
Regulator has the Proper
CGA Connection for the
Valve Outlet
 The Regulator CGA #
Must Match the Gas
Cylinder CGA #
 Do Not Over Tighten the
Regulator When Attaching it
to the Gas Cylinder Outlet
Fire Safety
Fire extinguisher classes:

A, B, C, D
You Should Know compatibility

(Fire type to Extingusher Class )
Attend Tomarrow Fire Drill

Facility use
 All users must be trained before using any
equipment
 All equipment use should be scheduled
 If you are unable to use scheduled time please
communicate at least one day in advance
 It is every users responsibility to report
damaged or malfunctioning of UNIT
 It is every users responsibility to properly
operate and clean each piece of equipment &
work bench that they use
 A single user can have huge Impact on
overall process of the device
In Case of Emergency
 Always follow the rules

 If an emergency requires evacuation,
leave the cleanroom immediately, do not
stop to un-gown
 Inform other users before leaving
 Call the emergency Numbers displayed at
Process UNITS & WET BENCH
Violations of Rules
 First time
 Warning
 Report to Advisor
 Second time
 Suspension of access
 Retraining may be required
 Third Offense
 Suspension of access
 Access will not be renewed until an acceptable resolution is reached
between Advisor and Facility Head
 Cleanroom Protocol re-training will be required
Conclusions
 Contamination control is a continuous battle
 User behavior has a critical impact on contamination
 Proper procedures must be followed at ALL TIMES
 Think about your actions! Be an active participant
 Make sure others follow procedures as well;
nothing wrong with pointing out mistakes
 Make sure wet-bench exhaust is TURNED ON
 SAFETY OF YOU & YOUR CO-WORKER
is most Important
THANK YOU
 Hydrogen peroxide, H2O2
 Sodium persulfate, Na2S2O3
 Ammonium peroxidesulfate, (NH4)2S2O8
 Nitric acid, HNO3
Cleaning solvents: Methanol, ethanol,

IPA, acetone.
Resists for optical and e-beam lithography.
Resist removers: Shipley Microposit
Remover 1165 (NMP), MEK, DEK, and
acetone.
Developers: Toluene, xylene, MIBK, and
XP SU-8.
Resist thinners: Anisole, EC-solvent,
cyclopentanone, and chlorobenzene

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Cleanroom’s

Safety & Protocols

 Promote Successful Cleanroom Operations

Successful cleanroom operation relies on

The success of each user relies on

A clean environment designed to reduce

 Do Not carry non-cleanroom items into the

 New chemicals into the cleanroom requires permission

 Large quantities of chemicals must be stored outside the

 Proper labeling with their contents and Hazard Classification

 Unattended chemicals and experiments should be labeled with

 Always Add Acid to Water (AAA)

Bases : H4OH, KOH, NaOH, TMAH & Developers

Oxidizers: H2O2, Na2S2O3, (NH4)2S2O8 and HNO3

Solvents: Cleaning Solvents,

 Poison! Extremely corrosive liquid and vapor that can cause

 Chemical Burns- from penetration of fluoride ions

 Call emergency number and medical assistance

 In case of small spill

 All Cylinders Must

Fire extinguisher classes:

You Should Know compatibility

Attend Tomarrow Fire Drill

 Always follow the rules

Cleaning solvents: Methanol, ethanol,

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