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    MEMS Sensors

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    M.Aimal Khiam
    MEMS sensors are microelectromechanical systems that can detect mechanical, thermal, magnetic, chemical, or electromagnetic information. They convert a measured mechanical signal into an electrical signal. MEMS sensors are used in applications like smartphones to measure proximity, acceleration, orientation, ambient light, and more. The automotive industry was one of the first to adopt MEMS, and they have since found uses in wireless communication, biomedical devices, aerospace, and consumer products. MEMS have the advantages of being miniature, lightweight, low-cost, and compatible with mass production techniques.

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    MEMS Sensors

    Uploaded by

    M.Aimal Khiam
    35 views12 pages
    MEMS sensors are microelectromechanical systems that can detect mechanical, thermal, magnetic, chemical, or electromagnetic information. They convert a measured mechanical signal into an electrical signal. MEMS sensors are used in applications like smartphones to measure proximity, acceleration, orientation, ambient light, and more. The automotive industry was one of the first to adopt MEMS, and they have since found uses in wireless communication, biomedical devices, aerospace, and consumer products. MEMS have the advantages of being miniature, lightweight, low-cost, and compatible with mass production techniques.

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    MEMS sensors are microelectromechanical systems that can detect mechanical, thermal, magnetic, chemical, or electromagnetic information. They convert a measured mechanical signal into an electrical signal. MEMS sensors are used in applications like smartphones to measure proximity, acceleration, orientation, ambient light, and more. The automotive industry was one of the first to adopt MEMS, and they have since found uses in wireless communication, biomedical devices, aerospace, and consumer products. MEMS have the advantages of being miniature, lightweight, low-cost, and compatible with mass production techniques.

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    © All Rights Reserved
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    Download as pptx, pdf, or txt
    35 views12 pages

    MEMS Sensors

    Uploaded by

    M.Aimal Khiam
    MEMS sensors are microelectromechanical systems that can detect mechanical, thermal, magnetic, chemical, or electromagnetic information. They convert a measured mechanical signal into an electrical signal. MEMS sensors are used in applications like smartphones to measure proximity, acceleration, orientation, ambient light, and more. The automotive industry was one of the first to adopt MEMS, and they have since found uses in wireless communication, biomedical devices, aerospace, and consumer products. MEMS have the advantages of being miniature, lightweight, low-cost, and compatible with mass production techniques.

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    MEMS Sensors

    23rd October 2022

    Engineeri BY: AIMAL KHIAM


    ng SUPERVISOR:
    Faculty,
    Dr. MOHIBULLAH WALI
    Kabul
    Universit
    y
    Agenda points
    1. What are MEMS?
    2. MEMS Sensors
    3. WHAT MEMS Sensors do?
    4. Advantages
    5. MEMS Working Principles
    6. MEMS Application
    7. Summary
    8. Reference
    What are MEMS?

    • Micro-electro-mechanical systems
    • In United States, the technology is known as
    microelectromechanical systems (MEMS)
    • In Europe, it is called microsystems technology (MST)
    • Miniaturized mechanical and-
    electro-mechanical elements Bamyan
    • Milli, micro and nanosize components
    • Having some sort of mechanical functionality
    • Convert a measured mechanical signal-
    into an electrical signal
    • interdisciplinary devices for their diverse use;
    • automotive, medical, electronic, communication, and
    Paktya
    defense applications

    3
    MEMS Sensors
    • MEMS sensors are at the very core of a MEMS device or system.
    • Measure the mechanical, thermal, magnetic, chemical, or electromagnetic information;
    • A microsensor detects changes in the system’s environment;
    • An ‘intelligent’ part processes the information detected by
    the sensor and makes a decision in the form of a signal;
    • A microactuator acts on this signal to create some form of
    changes in the environment.
    • Multisensing applications in conjunction with other sensors. Bamyan
    For instance, measuring the flow rate of a liquid sample and,
    in the meantime, identify any pollutants within the sample.

    And good MEMS Sensors


     Precision: same output for same input
     Resolution: detect small changes Paktya
     Accuracy: precision + resolution + calibration.

    4
    What MEMS do?

    Bamyan

    Engineeri Paktya
    ng
    Faculty,

    Kabul
    University 5
    Advantages
    • Interdisciplinary nature in terms of technology
    • Micromachining techniques
    • Diversity of application
    • Outstanding advent of new devices, especially in biology and microelectronics.
    • Minuscule size, volume, light weight, and suitable cost. Bamyan

    • Suitable and friendly method of production than integrated circuits.


    • Have an IP67 seal, withstand some intense temperatures ranging from 40º to +85ºC

    Paktya

    6
    Working Principles
    • MEMS is a chip-based technology where sensors are composed of a suspended mass between a pair of
    capacitive plates. 

    • When the sensor is tilted, a difference in electrical potential is created by this suspended mass.

    • The created difference is then measured as a change in capacitance.


    Bamyan

    Paktya

    7
    MEMS Sensors Application

    Bamyan

    Paktya

    8
    Smartphones and MEMS
    MEMS Sensors are used in several applications to illustrate the range, diversity, and utility.

    Smartphones can do much of what they do


    because of the various MEMS sensors built into
    them.
    • Proximity( when objects closes)
    • Accelerometer(Rotation & Game)
    • Gyroscope (3-axis directions & twisting) Bamyan
    • Orientation (measure the surface level)
    • Ambient Light (measure the flux of env. & controls the
    brightness & darkness)
    • Magnetic sensor(measure the magnetic field)
    • Campus (north, south & helps GPS)
    Paktya
    • Humidity (measure moisture & turns off)
    • Sound( measure the sound while talking)

    9
    Summary
    The automotive industry was one of the first industries to embrace the use of MEMS.
    Since then, MEMS have found applications in wireless communications, biomedical,
    aerospace, and consumer products (to name a few).
    The potential uses for MEMS are endless.

    Bamyan

    Engineeri
    ng Paktya
    Faculty,

    Kabul
    Universit
    10
    y
    Refrerences
    [1] De Silva, Clarence W. Sensors and actuators: control system instrumentation. CRC Press, 2007.
    [2] De Silva, Clarence W. Sensors and actuators: Engineering system instrumentation. CRC press, 2015.
    [3] Mishra, Manish Kumar, et al. "MEMS technology: A review." J. Eng. Res. Rep 4.1 (2019): 1-24.
    [4] Antonsson, Erik K. "Structured design methods for MEMS final report." A Workshop sponsored by the
    National Science Foundation. 1995.
    [5] Gad-el-Hak, Mohamed, ed. The MEMS handbook. CRC press, 2001.
    Bamyan

    Paktya

    11
    Ideas, thoughts for the way forward

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