Mems

MICRO-ELECTRO-
MECHANICAL SYSTEMS
-THE FUTURE TECHNOLOGY, BUT TODAY’S
CHOICE
SUBMITTED BY:
Mukti
TABLE OF CONTENTS
1. INTRODUCTION
2. APPLICATIONS
3. ADVANTAGES AND DISADVANTAGES
4. CAD TOOLS USED FOR DESIGNING OF MEMS
5. FABRICATION PROCESS
6. MANUFACTURING PROCESS
7. CHALLENGES
8. CONCLUSION
9. REFERENCES
1.INTRODUCTION
MEMS or Micro-Electro Mechanical System is a technique of
combining Electrical and Mechanical components together on a
chip, to produce a system of miniature dimensions.
 Integration of a number of micro-components on a single chip

which allows the micro system to both sense and control the
environment.
 Made up of components between 1 to 100 micrometers in
size
 Devices generally range in size from 20 micrometers to a

millimeter.
Micro
actuators
Micro Micro
structures MEMS sensors
Micro
electronics
COMPARISON: IC’S VS. MEMS
MEMS IC
 3D complex structures  2D structures
 Doesn’t have any basic building  Transistor is basic building block

block
 No moving parts
 May have moving parts
 Totally isolated with media
 May have interface with external
media
 Only Electrical
 Functions include
Biological,Chemical,Optical
 Packaging Techniques are well

 Packaging is very complex developed
WHAT IS A SENSOR?
 A device used to measure a physical
N
quantity(such as temperature) and
convert it into an electronic signal of
W E
2 Axis
some kind(e.g. a voltage), without
S
Magnetic
modifying the environment. Sensor
2 Axis
 What can be sensed? Accelerometer
Almost Everything!!!
Light Intensity
Commonly sensed parameters are: Sensor
 Pressure
 Temperature Humidity
Sensor
 Flow rate
 Radiation Pressure
 Chemicals Sensor
 Pathogens Temperature
Sensor
BUT WHY MEMS FOR SENSORS?
 smaller in size
 have lower power consumption
 more sensitive to input variations
 cheaper due to mass production
 less invasive than larger devices
2. APPLICATIONS
• In medicine
• A MEMS is a device that can be
implanted in the human body.
• MEMS surgical tools provide the
flexibility and accuracy to perform
surgery. • Biomems
Bio-mems are used to refer to the science
and technology of operating at the micro
scale for biological and biomedical
applications.
• In automotives :
Heavy use of mems is found in air

bag systems, vehicle security
system, inertial brake lights,
rollover detection, automatic door
locks etc.
• As gyroscope:
Inexpensive vibrating structure
gyroscopes manufactured with
mems technology have become
widely available. These are
packaged similarly to other integrated
circuits and may provide either analog
or digital outputs.
• In microphones:
The mems microphone also called
as microphone Chip is widely used
in the present day communication
world.
• In military :
Micro-electro mechanical system (MEMS)

technology help projectiles to reach their
targets accurately.
3. ADVANTAGES AND
DISADVANTAGES
 Minimize energy and  Farm establishment
materials. requires huge
Improved investments.
reproducibility.  Micro-components are
 Improved accuracy costly compared to
and reliability. macro components.
 Increased selectivity  Design includes very
and sensitivity. much complex
procedures
4 DESIGN TOOLS :CAD
In MEMS technology, CAD is defined as a
tightly organized set of cooperating computer
programs that enable the simulation of
manufacturing processes, device operation and
packaged Microsystems behavior in a
continuous sequence, by a Microsystems
engineer.
COMMERCIALLY AVAILABLE
SOFTWARE
 Coventorware from Coventor
http://www.memcad.com
 IntelliSuite from Intellisense Inc. (Corning)
http://www.intellisense.com
 MEMS ProCAETool from Tanner Inc.
http://www.tanner.com
 MEMScap from MEMScap Inc.
http://www.memscap.com
 SOLIDIS from ISE Inc.
http://www.ise.com
EXAMPLE: INTELLISUITE
ADVANTAGES
• Design for manufacturability
– Fabrication database
– Thin-film materials engineering
– Virtual prototyping
• Ease of use
– Consistent user interface
– Communication with existing tools
• Accuracy
– MEMS-specific meshing and analysis engines
– In-house code development
– Validated by in-house MEMS designers
5. FABRICATION PROCESS
Deposition Patterning Etching
Physical Chemical Lithography Wet Dry
Photolithography
Electron beam lithography
Ion beam lithography
Ion track technology
X-ray lithography.
DEPOSITION
MEMS deposition technology can be classified in two
groups:
1. Depositions that happen because of a chemical reaction:

 Chemical Vapour Deposition (CVD)
 Electro deposition
 Epitaxy
 Thermal oxidation
2. Depositions that happen because of a physical reaction:
 Physical Vapour Deposition (PVD)
 Casting
PATTERNING
 Patterning of MEMS is the transfer of a pattern into a
material.
 Lithography is a widely used process
 Examples of lithography are– Photolithography, Electron
beam lithography, Ion beam lithography, Ion track
technology, X-ray lithography.
L
i
t
h
o
g
r
a
p
h
y
ETCHING
 Etching is the process of using strong acid to cut the
unprotected parts of a metal surface to create a design in.
 There are two classes of etching processes:
 Wet Etching
 Dry Etching.
6. MANUFACTURING
TECHNOLOGIES
Bulk Micromachining
Surface Micromachining
High Aspect Ratio (HAR) Silicon

Micromachining
BULK MICROMACHINING
This technique involves the

selective removal of the
substrate material in order to
realize miniaturized mechanical
components.
A widely used bulk

micromachining technique in
MEMS is chemical wet
etching, which involves the
Etched grooves using
immersion of a substrate into a
(a) Anisotropic etchants,
solution of reactive chemical
(b) Isotropic etchants,
that will etch exposed regions
of the substrate at very high (c) Reactive Ion Etching
rates.
SURFACE MICROMACHINING
LIGA PROCESS
 LIGA is a German acronym standing for lithography,
galvanoformung (plating) and abformung (molding).
Polymethyl methacrylate (PMMA) is applied as photoresist to the
substrate by a glue-down process.
7. CHALLENGES
Design and
Testing
Packaging
Sensing Latching
Controllability Reliability
8. CONCLUSION
 MEMS promises to be an effective technique of producing
sensors of high quality, at lower costs.
 Thus we can conclude that the MEMS can create a proactive

computing world, connected computing nodes automatically,
acquire and act on real-time data about a physical environment,
helping to improve lives, promoting a better understanding of
the world and enabling people to become more productive.
9. REFERENCES
Christian A. Zorman, Mehran Mehregany, MEMS Design and
Fabrication, 2nd Ed. 2,16.
Ms. Santoshi Gupta, MEMS and Nanotechnology IJSER, Vol 3,
Issue 5,2012
R. Ghodssi, P. Lin (2011). MEMS Materials and Processes
Handbook. Berlin: Springer.
Chang, Floy I. (1995).Gas-phase silicon micromachining with
xenon difluoride. 2641. pp. 117.
. Micromechanics and MEMS: Classic and Seminal Paper to
1990, Trimmer, W.S., IEEE Press, New York, NY, 1997.
Journal of Microelectromechanical Systems
(http://www.ieee.org/pub_preview/mems_toc.html)
University of Stanford,
http://www.stanford.edu/group/SML/ee321/ho/MEMS-01-
intro.pdf
Trimmer, W.S., Micromechanics and MEMS: Classic and

Seminal Papers to 1990, IEEE Press, New York, NY, 1997.
Tjerkstra, R. W., de Boer, M., Berenschot, E., Gardeniers,

J.G.E., van der Berg, A., and Elwenspoek, M., Etching
Technology for Microchannels, Proceedings of the 10th Annual
Workshop of Micro Electro Mechanical Systems (MEMS ’97),
Nagoya, Japan, Jan. 26-30, 1997, pp. 396-398.
THANK YOU

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MICRO-ELECTRO-

 Integration of a number of micro-components on a single chip

 Devices generally range in size from 20 micrometers to a

 Doesn’t have any basic building  Transistor is basic building block

 Packaging Techniques are well

Heavy use of mems is found in air

Micro-electro mechanical system (MEMS)

Deposition Patterning Etching

Physical Chemical Lithography Wet Dry

1. Depositions that happen because of a chemical reaction:

High Aspect Ratio (HAR) Silicon

This technique involves the

A widely used bulk

 Thus we can conclude that the MEMS can create a proactive

Trimmer, W.S., Micromechanics and MEMS: Classic and

Tjerkstra, R. W., de Boer, M., Berenschot, E., Gardeniers,

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