3.

3 Chambers and components / Valves / Gas regulating valves / All-metal gas regulating valve, manual/thermomechanic, DN 40 CF

Gas regulating valve EVR 116, motorized, DN 16 ISO-KF

„ High gas throughput

„ Very broad regulating range
„ With integrated motor control electronics

Characteristic

Gasflow [mbar l/s] Down-stream control Up-stream control

EVR 116
Vacuum control Vacuum
1000
gauge valve gauge
100 Vacuu m Vacuu m
system system
10 Gas
Gas M
1

10-1 IF 200
IF 200
10-2 EVR 116
control M
10-3
valve Vacuum pump
10-4
Valves

10-5
PC
10-6 Vacuum pump PC
0 1 2 3 4 5 6 7 8 9 10
USTG [V]

EVR 116, Gas regulating valve IF 200, Interface for EVR 116 IF 200, Interface for EVR 116

Dimensions

EVR 116, Gas regulating valve IF 200, Interface for EVR 116

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 3.3 Chambers and components / Valves / Gas regulating valves / All-metal gas regulating valve, manual/thermomechanic, DN 40 CF

Technical data EVR 116 IF 200, Interface

for EVR 116
Connection Terminals
Flange (out) DN 16 ISO-KF
Flange (in) DN 16 ISO-KF
Control RVC 300 or IF 200
Control 60 °C
Bakeout temperature: actuator 80 °C
Bakeout temperature: housing Mounting rail
Fixation 2500 hPa (abs.)
Operating pressure max. 1 · 10-8 hPa
Operating pressure min. 1 · 10-10 Pa m3/s
Tightness FKM
Seal Fluorplastomer
Dosing sleeve 1250 hPa l/s
Gas flow max. controllable 5 · 10-6 hPa l/s
Gas flow min. controllable Stainless steel
Housing/needle/filter 0.75 kg 40 g
Weight 0-10 V DC
Control voltage <3/4s
Closing/opening time RS-232-C
Interface 5-40 °C
Ambient temperature 0.5 A
Supply 24 V DC 24 V DC

Valves
Supply: Voltage 12 W

Order number
Gas regulating valves PF I39 931 PF I00 091

Accessories
RVC-EVR, connection cable, 3 m PT 583 115-T PT 583 115-T
RVC-EVR, connection cable, 5 m PT 583 116-T PT 583 116-T
RVC-EVR, connection cable, 10 m PT 583 117-T PT 583 117-T
RVC-EVR, connection cable, 15 m PT 583 118-T PT 583 118-T
RVC-EVR, connection cable, 20 m PT 583 119-T PT 583 119-T

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 3.3 Chambers and components / Valves / Gas regulating valves / All-metal gas regulating valve, manual/thermomechanic, DN 40 CF

Gas regulating valves, solenoid actuated, RME 005 A, DN 5

„ Two connections required as accessories

„ Including connector
„ Drive: Solenoid
„ Regulating range from 0.85 to 85 hPa l/s
„ Normally closed (n.c.)

Characteristic

Gas flow [sccm] Gas flow [sccm]

6000 1200
Control valve open Control valve open
5000 1000

4000 800

3000 600
Valves

2000 400

1000 200

Control valve closed Control valve closed

0 0
0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80

Current (solenoid coil) [mA] Current (solenoid coil) [mA]

RME 005 A, Gas regulating valve RME 005 A, Gas regulating valve

Dimensions

49
23.5

2.8◊0.5
35
M14◊1
49
17

6.5 AF 17
8 (17) 8
33

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 3.3 Chambers and components / Valves / Gas regulating valves / All-metal gas regulating valve, manual/thermomechanic, DN 40 CF

Technical data RME 005 A

Flange (in) DN 5 mm M14x1
Flange (out) DN 5 mm M14x1
Response time < 30 ms
Control RVC 300
Bakeout temperature: actuator, powerless 80 °C
Operating pressure max. 2000 hPa (abs.)
Operating pressure min. 1 · 10-8 hPa
Tightness 1 · 10-10 Pa m3/s
Seal FKM
Mounting orientation Any, preferably
perpendicular
Duty cycle (ED) 100 %
Housing Stainless steel
Weight 96 g
Control voltage 0-24 V DC
Ambient temperature 5-50 °C
Supply: Power consumption max. 2.5 W

RME 005 A
Gas flow max. controllable 85 hPa l/s
Gas flow min. controllable 0.85 hPa l/s
Order number PF I13 931
Gas flow max. controllable 17 hPa l/s

Valves
Gas flow min. controllable 0.17 hPa l/s
Order number PF I13 932
Gas flow max. controllable 8.5 hPa l/s
Gas flow min. controllable 0.085 hPa l/s
Order number PF I13 933
Gas flow max. controllable 1.7 hPa l/s
Gas flow min. controllable 0.017 hPa l/s
Order number PF I13 934
Gas flow max. controllable 0.8 hPa l/s
Gas flow min. controllable 0.008 hPa l/s
Order number PF I13 935
Gas flow max. controllable 0.17 hPa l/s
Gas flow min. controllable 0.0017 hPa l/s
Order number PF I13 936

Accessories
Connection, for ¼" tube O.D. PT 420 913-T
Connection, for 6 mm tube O.D. PT 420 914-T
Connection, DN 10 ISO-KF PT 420 912-T
RVC 300 - RME 005, connection cable, 3 m PT 250 003-T
RVC 300 - RME 005, connection cable, 5 m PT 250 005-T
RVC 300 - RME 005, connection cable, 10 m PT 250 010-T
RVC 300 - RME 005, connection cable, 15 m PT 250 015-T
RVC 300 - RME 005, connection cable, 20 m PT 250 020-T
RVC 300 - RME 005, connection cable, 25 m PT 250 025-T

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 3.3 Chambers and components / Valves / Gas regulating valves / All-metal gas regulating valve, manual/thermomechanic, DN 40 CF

Control unit RVG 050 C for UDV 140 and UDV 146

„ For creating a control section in conjunction with UHV gas dosing valves
UDV 140 or UDV 146

Characteristic
Valves

Dimensions

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 3.3 Chambers and components / Valves / Gas regulating valves / All-metal gas regulating valve, manual/thermomechanic, DN 40 CF

Technical data RVG 050 C

Output for valve heater: Voltage 20 V DC
Output for valve heater: Current 0.5 A
Weight 2.3 kg
Actual value input: Analog voltage 10 V DC
Actual value input: Impedance 100 kΩ
Power consumption 20 VA
Mains requirement: voltage (selectable) 115/230 V AC
Control range for 1 bar N2, inlet side 1 · 10-9 - 100 hPa l/s
Control characteristic (proportional-integral) PI
Set point input: External 10 V DC
Set point input: Impedance 100 kΩ
Set point input: Internal (scale division) 0-1000
Ambient temperature 5-50 °C
Time constant, adjustable 2-30 s

Order number
Gas regulating valves PF I00 795

Accessories
UDV 146, All-metal gas regulating valve, PF I52 034
DN 16 CF-F
RVG-UDV, extension cable, 2 m, 200 °C PT 519 953 -T

Valves
RVG-UDV, connection cable, 3 m, 80 °C PT 519 178 -T
RVG-UDV, connection cable, 12 m, 80 °C PT 519 343 -T

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 3.3 Chambers and components / Valves / Gas regulating valves / All-metal gas regulating valve, manual/thermomechanic, DN 40 CF

Control unit RVC 300 for EVR 116 and RME 005 A

„ For creating a control section in conjunction with EVR 116 or RME 005 A regulating valves
„ Simple operation
„ Self-explanatory LCD display and function keys
„ Analog/digital inputs/outputs and interfaces
„ Settable PID regulating algorithm
„ For system manufacturers, as a supplement to their own control unit

Characteristic

Up-stream control Down-stream control

EVR 116
Vacuum Vacuum
control
gauge gauge
valve
Vacuum Vacuum
system system
Gas
M

EVR 116
control M
valve RVC 300
Vacuum pump controller

RVC 300
controller acuum pump

RVC 300, Control unit gas regulating valves RVC 300, Control unit gas regulating valves
Valves

Dimensions

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 3.3 Chambers and components / Valves / Gas regulating valves / All-metal gas regulating valve, manual/thermomechanic, DN 40 CF

Technical data RVC 300

Output: Analog 4 channels: Pressure sensor signal/ valve signal
(0-10 V DC)/ valve position EVR 116/ + 10 V DC
reference voltage (10 mA)
Output: Digital 8 channels: Valve closed/ valve open/ valve in position/
valve error/ sensor error/ ready/ emission ON/
sensor status
Input: Analog 2 channels: Pressure setpoint (nominal value)/
flow setpoint (nominal value)
Input: Digital 8 channels: Flow decrease/ flow increase/ external
CLOSE/ external OPEN/ flow mode/ pressure mode/
emission ON/ Degas ON
Weight 1.65 kg
Mains requirement: frequency (range) 50/60 Hz
Mains requirement: power consumption 50 VA
Mains requirement: voltage (range) 90-250 V
Control range APR 250/260: 1 - 1100 hPa
Control range CMR 361/371: 1 - 1100 hPa
Control range TPR 280/281: 5 · 10-4 - 1000 hPa
Control range PCR 280: 5 · 10-4 - 1500 hPa
Control range CMR 362/372: 0.1 - 110 hPa
Control range CMR 363/373: 1 · 10-2 - 11 hPa
Control range CMR 364/374: 1 · 10-3 - 1.1 hPa
Control range CMR 365/375: 1 · 10-4 - 0.11 hPa
Control range IKR 251/261: 2 · 10-9 - 1 · 10-2 hPa

Valves
Control range IMR 265: 2 · 10-6 - 1000 hPa
Control range PBR 260: 5 · 10-10 - 1000 hPa
Control range PKR 251/261: 5 · 10-9 - 1000 hPa
Interface: Baud rates 9600 Bd
Interface: Type RS-232, RS-485
Temperature: Operating 5 to 50 °C
Temperature: Storage -40 to 60 °C

Order number
Gas regulating valves PF I00 792

Accessories
RVC 300 - RME 005, connection cable, 3 m PT 250 003-T
RVC 300 - RME 005, connection cable, 5 m PT 250 005-T
RVC 300 - RME 005, connection cable, 10 m PT 250 010-T
RVC 300 - RME 005, connection cable, 15 m PT 250 015-T
RVC 300 - RME 005, connection cable, 20 m PT 250 020-T
RVC-EVR, connection cable, 3 m PT 583 115-T
RVC-EVR, connection cable, 5 m PT 583 116-T
RVC-EVR, connection cable, 10 m PT 583 117-T
RVC-EVR, connection cable, 15 m PT 583 118-T
RVC-EVR, connection cable, 20 m PT 583 119-T
RME 005 A, Gas regulating valve, PF I13 936
regulating range from 0.0017 to 0.17 hPa l/s
RME 005 A, Gas regulating valve, PF I13 935
regulating range from 0.008 to 0.8 hPa l/s
RME 005 A, Gas regulating valve, PF I13 934
regulating range from 0.017 to 1.7 hPa l/s
RME 005 A, Gas regulating valve, PF I13 933
regulating range from 0.085 to 8.5 hPa l/s
RME 005 A, Gas regulating valve, PF I13 932
regulating range from 0.17 to 17 hPa l/s
RME 005 A, Gas regulating valve, PF I13 931
regulating range from 0.85 to 85 hPa l/s
EVR 116, Gas regulating valve PF I39 931

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