Integrated Process Solutions

Series 76
ISO-Universal fittings
Sizes NW 63 to NW 630
www . mksinst . com

(2½'' to 25'')
Series 76 ISO-Universal components are a vacuum Applications
flanging system for 63 mm to 1000 mm fittings. The
dimension criteria are based on requirements established The Series 76 ISO-Universal component system is used
by the International Standards Organization (ISO). There in a variety of industries from process manufacturing to
are two flange styles in the ISO-Universal system: Multi- semiconductor fabrication to thin film deposition. Some
Fastener (MF) and Bolted. The flange family is also uses in vacuum systems are:
called: ISO-MF, ISO-PF or ISO-K. Figure 1 illustrates the 1. Roughing and foreline plumbing for large vacuum
components of this flange system. systems
This catalog features a large variety of components such 2. High vacuum, high conductance, interconnections
as elbows, tees, crosses, reducers and adapters having 3. Modular systems which will be modified frequently
ISO-MF flanges. Currently there is no ISO standard for 4. Experimental systems in research laboratories
the flange face to centerline distance in this system. There
is however, an industry standard followed by several ISO-Universal flange components using elastomer seals
manufacturers. MKS Instruments follows these standards are primarily designed for use at subatmospheric pressure.
in designing the Series 76 ISO-Universal components. When elastomer seals are used without baking, typical
limiting pressures may be around 10-6 Torr. Baked systems
There are several advantages in the use of ISO using Viton can be used to 10-8 Torr.
components. One advantage is that the flange is
“sexless.” The seal is on a symmetrical centering ring Standard components can be used to a slight over
that interfaces with two identical flanges. In addition, ISO- pressure. MF flanges may be used at a maximum pressure
Universal flanges are more compact than ASA flanges, of 30 psig if the metal spacer ring is used and the flange
which were designed for pressure and are unnecessarily clamps are firmly retained.
massive for vacuum use. Since these flanges are an ISO
standard, they can be used with components from other
manufacturers.

Figure 1 —
Component Nomenclature for the ISO Universal Flange System
Ordering Information

Description Installation
Series 76 ISO-Universal flanges and components in this The Series 76 ISO-Universal flange components can be
catalog are made of type 304 stainless steel. Centering connected in various ways. The figures below illustrate
ring and seal assemblies are offered with an aluminum some possibilities. Figure 2a shows a pair of MF flanges
centering ring and spacer ring, or with a stainless retained by double claw clamps. This is usually the most
centering ring and an aluminum spacer ring. Rotatable bolt economical arrangement. In Figure 2b an MF flange with
rings and clamps are made of aluminum alloy. Retaining a rotatable bolt ring is joined to a bolted flange using nuts
rings are made of steel. and bolts. In Figure 2c an MF flange is joined to a tapped
bolt flange using single claw clamps. Tapped flanges are
Flange seal surfaces are carefully machined and inspected
found on some valve bodies. Alternatively, a rotatable bolt
for defects. They are cleaned and packaged to remain
ring could have been used with an MF flange to obtain the
clean and protected in shipping. The user should observe
same result shown in Figure 2c. Last, Figure 2d shows a
precaution as required to prevent seal surface harm. This
pair of bolted flanges joined in the usual way by nuts and
is especially important for used components returned to
bolts.
storage.
In attaching a rotatable bolt ring to an MF flange as in
Figure 2b, the ring is first passed over the flange with the
larger bore of the ring facing outward from the open port.
The split retaining ring is then snapped into the groove on
the periphery of the MF flange. Then the bolt ring is pulled
forward into position. Pairs of bolted flanges may also be
used.

Figure 2a Figure 2b

Figure 2c Figure 2d
Figure 3 shows the dimensions of ISO Universal flange metal. Tacking is advisable. A weld rotator aides in making
components for sizes from 63 to 630 mm, which are attractive welds with minimum warping. Excessive current
standard in this catalog. The maximum size for an MF or non uniform rotation can cause warping of the flange
flange is NW 500, while the bolted flange can run up to face. When there is a concern about warping, use a flange
NW 1000. The recommended number of clamps to be with a stub. Buttwelding to stubs in sizes up to 10 inch
used with MF flanges are also listed. diameter with a wall thickness of 1/8 inch can also be by
fusion. Internal purge gas will prevent excessive oxidation.
Flanges and seals are designed to be tightened to metal
to metal contact. It is important that the clamps or bolts not Remove any oxidation by wire brushing. This should be
be over tightened or warping of the flanges could result. done while the part is still slightly warm, since the oxides
are nearly impossible to remove later. Use only a stainless
The torque rating for clamps and bolts is 7 to 10 pounds
steel wire brush or wheel, since ordinary steel brushes
per foot.
leave iron residue which will then rust.
There are a variety of choices available when selecting
Since the centering ring grooves on the NW 100 and NW
centering ring assemblies. Two types of elastomers
160 flange happen to be almost exactly the diameters of
are available, Buna-N and Viton. Use Viton where
the tubing to be used with these sizes, the flange can be
temperatures, chemical resistance or long installed life
inadvertently welded on backwards. When working with
make it beneficial. Use Buna-N where temperatures are
the MF flange, note that the clamp retaining groove goes
moderate, and installed useful life is consistent with this
to the rear (tube) side. Working with the bolted flange
material. The centering ring is available in two types of
requires more care. Close inspection of the weld prep
metal: stainless steel and aluminum. Use stainless steel
detail will show the recess from the tube side to have a
where chemical resistance is needed.
negligible radius, while there is a small radius visible on
MKS Instruments presently supplies Series 76 ISO- the seal side.
Universal flanges drilled for inch dimension tubing and
The technical staff of MKS Instruments is available to help
pipe. Weld assembly should be by an experienced TIG
you with system design and any special needs you may
or MIG welder. Bored flanges have been designed for
encounter. Call 800-345-1967 for a quotation.
assembly by internal fusion welding without the use of filler

Figure 3
Series 76

H ISO Multi-Fastener ISO Bolted Flange

Nominal* Suggested Flange (ISO-MF) (ISO-BF)
Flange Table/Pipe
Size Dims: ** A B # C D E F N
(mm) O.D. x Wall Wrench
(O.D.) (Thickness) Clamps (O.D.) (Thickness) (Bolt (Bolt (# Holes)
(inches) (mm)
Required Circle) Holes)
3.74 .47 5.12 .47 4.33 .35
NW 63 2.5 x .065 3-4 4 13
(95) (12) (130) (12) (110) (9)
4.33 .47 5.71 .47 4.92 .35
NW 80 3.0 x .065 4-8 8 13
(110) (12) (145) (12) (125) (9)
5.12 .47 6.50 .47 5.71 .35
NW 100 4.0 x .065 4-8 8 13
(130) (12) (165) (12) (145) (9)
7.09 .47 8.86 .63 7.87 .43
NW 160 6.0 x .083 4-8 8 17
(180) (12) (225) (16) (200) (11)
9.45 .47 11.22 .63 10.24 .43
NW 200 8.0 x .120 6-12 12 17
(240) (12) (285) (16) (260) (11)
11.42 .47 13.19 .63 12.20 .43
NW 250 10.0 x .125 6-12 12 17
(290) (12) (335) (16) (310) (11)
14.57 .67 16.73 .79 15.55 .55
NW 320 12.75 x .165 8-12 12 19
(370) (17) (425) (20) (395) (14)
17.72 .67 20.08 .79 18.90 .55
NW 400 16.0 x .188 8-16 16 19
(450) (17) (510) (20) (480) (14)
21.65 .67 24.02 .79 22.83 .55
NW 500 20.0 x .188 12-16 16 19
(550) (17) (610) (20) (580) (14)
29.53 .94 28.35 .55
NW 630 25.0 x .250 --- --- --- 20 19
(750) (24) (720) (14)

* NW is retained here by convention. It does not specify the flange type but is from the German “Nennweite,” meaning nominal diameter.
** Schedule 5 pipe is for sizes 320 and above.

Elastomer Comparison Specifications

®
Buna-N Viton Maximum Pressure 30 psig
(with spacer ring)
Compound N674-70 V747-75
Minimum Pressure 10-8 Torr
Color Black Black
Leak Check >10-9 std-cc/s
Bakeout 80°C 150°C
Torque Rating 7-10 lbs/foot
Benefits Seals easier, High temperature,
lower cost lasts longer (clamps and bolts)
Materials

Fittings 304 stainless steel

Retaining Rings Steel

Clamps Aluminum alloy

Rotatable Bolt Rings Aluminum alloy

Seal Assembly Aluminum spacer ring,

choice of aluminum or
stainless steel centering ring,
choice of Viton or Buna-N
elastomer seal
Flange, Bored in./(mm)
Flange Size Nominal
C A B C Part Number
(ISO) Bore
NW 63 2½'' 2.37 (60) 2.50 (64) 0.22 (6) 100760206
NW 80 3'' 2.87 (73) 3.00 (76) 0.22 (6) 100760208
B A* NW 100 4'' 3.87 (98) 4.00 (102) 0.22 (6) 100760210
NW 160 6'' 5.83 (148) 6.00 (152) 0.22 (6) 100760216
NW 200 8'' 7.76 (197) 8.00 (203) 0.22 (6) 100760220
NW 250 10'' 9.75 (248) 10.00 (254) 0.22 (6) 100760225
Seal
Si d e NW 320 123/4'' 12.42 (315) 12.75 (324) 0.30 (8) 100760232
* Given as ID of NW 400 16'' 15.62 (397) 16.00 (406) 0.30 (8) 100760240
suggested tubing
NW 500 20'' 19.62 (498) 20.00 (508) 0.30 (8) 100760250
• Stainless steel type 304
• For internal weld
• Infinitely rotatable
• Made for inch tube and pipe diameters
• Use with clamps or rotatable bolt ring

Flange, Long Weld Stub in./(mm)

Flange Size Nominal
A B C Part Number
(ISO) Bore
NW 63 2½'' 2.37 (60) 2.50 (64) 3.94 (100) 100760406
NW 80 3'' 2.87 (73) 3.00 (76) 3.94 (100) 100760408
B A NW 100 4'' 3.87 (98) 4.00 (102) 3.94 (100) 100760410
(.065” wall)
NW 100 4'' 3.87 (98) 4.00 (102) 3.94 (100) 100760411
(.083” wall)
C
NW 160 6'' 5.83 (148) 6.00 (152) 3.94 (100) 100760416
NW 200 8'' 7.76 (197) 8.00 (203) 3.94 (100) 100760420
NW 250 10'' 9.75 (248) 10.00 (254) 3.94 (100) 100760425
NW 320 123/4'' 12.42 (315) 12.75 (324) 3.94 (100) 100760432
• Stainless steel type 304
• For buttweld NW 400 16'' 15.62 (397) 16.00 (406) 3.94 (100) 100760440
• Standard inch diameters NW 500 20'' 19.62 (498) 20.00 (508) 3.94 (100) 100760450
• Use with clamps or rotatable bolt ring

Flange, Blank-Off in./(mm)

Flange Size
Part Number
(ISO)
NW 63 100760106
NW 80 100760108
NW 100 100760110
NW 160 100760116
NW 200 100760120
NW 250 100760125
Seal Side NW 320 100760132
NW 400 100760140
NW 500 100760150
• Stainless steel type 304
• Infinitely rotatable
• To close off unused ports
• Use with clamps or rotatable bolt ring
Ordering Information

Flange, Bolted, Bored in./(mm)

Flange Size Nominal
A B C Part Number
(ISO) Bore
NW 63 2½'' 2.37 (60) 2.50 (64) 0.22 (6) 100762406
NW 80 3'' 2.87 (73) 3.00 (76) 0.22 (6) 100762408
C
A* B NW 100 4'' 3.87 (98) 4.00 (102) 0.22 (6) 100762410
NW 160 6'' 5.83 (148) 6.00 (152) 0.37 (10) 100762416
NW 200 8'' 7.76 (197) 8.00 (203) 0.37 (10) 100762420
Seal NW 250 10'' 9.75 (248) 10.00 (254) 0.41 (11) 100762425
Side NW 320 123/4'' 12.42 (315) 12.75 (324) 0.41 (11) 100762432
* Given as ID of NW 400 16'' 15.62 (397) 16.00 (406) 0.41 (11) 100762440
suggested tubing
NW 500 20'' 19.62 (498) 20.00 (508) 0.41 (11) 100762450
• Stainless steel type 304 NW 630 24'' 23.50 (597) 24.00 (610) 0.57 (15) 100762463
• For use with bolts only
• For internal weld
• Made for inch tube and pipe diameters
• Tapped bolt holes on special order

Flange, Bolted, Weld Stub in./(mm)

Flange Size Nominal
A B C Part Number
(ISO) Bore
NW 63 2½'' 2.37 (60) 2.50 (64) 3.94 (100) 100762706
NW 80 3'' 2.87 (73) 3.00 (76) 3.94 (100) 100762708
NW 100 4'' 3.87 (98) 4.00 (102) 3.94 (100) 100762710
B A (.065'' wall)
NW 160 6'' 5.83 (148) 6.00 (152) 3.94 (100) 100762716
NW 200 8'' 7.76 (197) 8.00 (203) 3.94 (100) 100762720
NW 250 10'' 9.75 (248) 10.00 (254) 3.94 (100) 100762725
NW 320 123/4'' 12.42 (315) 12.75 (324) 3.94 (100) 100762732
C
NW 400 16'' 15.62 (397) 16.00 (406) 3.94 (100) 100762740
• Stainless steel type 304 NW 500 20'' 19.62 (498) 20.00 (508) 3.94 (100) 100762750
• For buttweld NW 630 24'' 23.50 (597) 24.00 (610) 3.94 (100) 100762763
• For use with bolts only
• Made for inch tube and pipe diameters

Flange, Bolted, Blank in./(mm)

Flange Size
Part Number
(ISO)
NW 63 100760306
NW 80 100760308
NW 100 100760310
NW 160 100760316
NW 200 100760320
NW 250 100760325
NW 320 100760332
Seal NW 400 100760340
Side NW 500 100760350
• Stainless steel type 304 NW 630 100760363
• To close off unused ports or for special boring
• For use with bolts only
• Tapped bolt holes on special order
Seal, Centering Ring Assembly, Stainless Steel/Viton® in./(mm)
Flange Size
B A B Part Number
(ISO)
NW 63 2.63 (67) 0.15 (4) 100760506
NW 80 3.14 (80) 0.15 (4) 100760508
NW 100 3.89 (99) 0.15 (4) 100760510
A NW 160 5.90 (150) 0.15 (4) 100760516
NW 200 8.26 (210) 0.15 (4) 100760520
NW 250 10.14 (258) 0.15 (4) 100760525
NW 320 12.30 (312) 0.22 (6) 100760532
NW 400 15.53 (395) 0.22 (6) 100760540
NW 500 19.51 (496) 0.22 (6) 100760550
• Stainless steel centering ring NW 630 25.41 (645) 0.22 (6) 100760563
• Replaceable Viton O-Ring
• Aluminum spacer ring
• Rated to 150°C max

Seal, Centering Ring Assembly, Aluminum/Buna-N in./(mm)

Flange Size
B A B Part Number
(ISO)
NW 63 2.63 (67) 0.15 (4) 100760706
NW 80 3.14 (80) 0.15 (4) 100760708
NW 100 3.89 (99) 0.15 (4) 100760710
A
NW 160 5.90 (150) 0.15 (4) 100760716
NW 200 8.26 (210) 0.15 (4) 100760720
NW 250 10.14 (258) 0.15 (4) 100760725
NW 320 12.30 (312) 0.22 (6) 100760732
NW 400 15.53 (395) 0.22 (6) 100760740
NW 500 19.51 (496) 0.22 (6) 100760750
• Aluminum centering ring NW 630 25.41 (645) 0.22 (6) 100760763
• Replaceable Buna-N O-Ring
• Aluminum spacer ring
• Rated to 80°C max.

Seal, Centering Ring Assembly, Aluminum/Viton® in./(mm)

Flange Size
B A B Part Number
(ISO)
NW 63 2.63 (67) 0.15 (4) 100760606
NW 80 3.14 (80) 0.15 (4) 100760608
NW 100 3.89 (99) 0.15 (4) 100760610
A NW 160 5.90 (150) 0.15 (4) 100760616
NW 200 8.26 (210) 0.15 (4) 100760620
NW 250 10.14 (258) 0.15 (4) 100760625
NW 320 12.30 (312) 0.22 (6) 100760632
NW 400 15.53 (395) 0.22 (6) 100760640
NW 500 19.51 (496) 0.22 (6) 100760650
NW 630 25.41 (645) 0.22 (6) 100760663
• Aluminum centering ring
• Replaceable Viton O-Ring
• Aluminum spacer ring
• Rated to 150°C max
Ordering Information

Seal, Overpressure Assembly in./(mm)

Flange Size
B A B Part Number
(ISO)
NW 80 3.14 (80) 0.15 (4) 100938657
NW 100 3.89 (99) 0.15 (4) 100938658
NW 160 5.90 (150) 0.15 (4) 100937685
A

• Stainless steel centering ring

• Replaceable Viton O-Ring
• Includes aluminum overpressure ring

Seal, Replacement O-Ring, Viton® in./(mm)

Flange Size Standard
A B Part Number
B (ISO) Number
NW 63 2-336 2.85 (72) 0.21 (5) 100762006
NW 80 2-340 3.35 (85) 0.21 (5) 100762008
NW 100 2-346 4.10 (104) 0.21 (5) 100762010
NW 160 2-361 5.98 (152) 0.21 (5) 100762016
A NW 200 2-371 8.48 (215) 0.21 (5) 100762020
NW 250 2-378 10.48 (266) 0.21 (5) 100762025
NW 320 2-454 12.48 (317) 0.28 (7) 100762032
NW 400 2-460 15.48 (393) 0.28 (7) 100762040
NW 500 2-468 19.46 (494) 0.28 (7) 100762050
• Viton NW 630 2-474 24.94 (634) 0.28 (7) 100762063
• Standard US O-Ring sizes
• Bakeable to 150°C
• Replaceable seal for centering ring assembly

Seal, Replacement O-Ring, Buna-N in./(mm)

Flange Size Standard
A B Part Number
B (ISO) Number
NW 63 2-336 2.85 (72) 0.21 (5) 100761906
NW 80 2-340 3.35 (85) 0.21 (5) 100761908
NW 100 2-346 4.10 (104) 0.21 (5) 100761910
NW 160 2-361 5.98 (152) 0.21 (5) 100761916
A NW 200 2-371 8.48 (215) 0.21 (5) 100761920
NW 250 2-378 10.48 (266) 0.21 (5) 100761925
NW 320 2-454 12.48 (317) 0.28 (7) 100761932
NW 400 2-460 15.48 (393) 0.28 (7) 100761940
NW 500 2-468 19.46 (494) 0.28 (7) 100761950
• Buna-N NW 630 2-474 24.94 (634) 0.28 (7) 100761963
• Standard US O-Ring sizes
• Bakeable to 80°C
• Replaceable seal for centering ring assembly
Clamp, Single Claw n./(mm)
Flange Size
Bolt Size A B C Part Number
(ISO)
NW 63 M8 1.20 (30) 0.39 (10) 0.62 (16) 100761006
A
C
NW 80 M8 1.20 (30) 0.39 (10) 0.62 (16) 100761006
NW 100 M8 1.20 (30) 0.39 (10) 0.62 (16) 100761006
NW 160 M 10 1.25 (32) 0.39 (10) 0.80 (20) 100761016
NW 200 M 10 1.25 (32) 0.39 (10) 0.80 (20) 100761016
NW 250 M 10 1.25 (32) 0.39 (10) 0.80 (20) 100761016

B NW 320
NW 400
M 12
M 12
1.57
1.57
(40)
(40)
0.72
0.72
(18)
(18)
1.04
1.04
(26)
(26)
100761032
100761040
NW 500 M 12 1.57 (40) 0.72 (18) 1.04 (26) 100761040
• Aluminum clamp
• Stainless steel bolt
• Stainless steel washer
• To join an MF flange to a tapped bolted flange

Clamp, Double Claw in./(mm)

Flange Size
A B C Part Number
(ISO)
A
NW 63 0.95 (24) 1.98 (50) 0.63 (16) 100761106
NW 80 0.95 (24) 1.98 (50) 0.63 (16) 100761106
NW 100 0.95 (24) 1.98 (50) 0.63 (16) 100761106
NW 160 1.10 (28) 2.05 (52) 0.80 (20) 100761116
C
NW 200 1.10 (28) 2.05 (52) 0.80 (20) 100761116
B
NW 250 1.10 (28) 2.05 (52) 0.80 (20) 100761116
NW 320 1.34 (34) 2.56 (65) 1.04 (26) 100761132
NW 400 1.34 (34) 2.56 (65) 1.04 (26) 100761140
NW 500 1.34 (34) 2.56 (65) 1.04 (26) 100761140
• Aluminum clamp
• Stainless steel bolt
• Stainless steel washer
• To join a pair of MF flanges

Bolt and Nut Set in./(mm)

Flange Size
Bolt Size No. in Set Pitch (mm) Part Number
(ISO)
NW 63 M 8 x 40 4 1.25 100761206
NW 80 M 8 x 40 8 1.25 100761208
NW 100 M 8 x 40 8 1.25 100761208
NW 160 M 10 x 50 8 1.50 100761216
NW 200 M 10 x 50 12 1.50 100761220
NW 250 M 10 x 50 12 1.50 100761220
NW 320 M 12 x 60 12 1.75 100761232
NW 400 M 12 x 60 16 1.75 100761240
NW 500 M 12 x 60 16 1.75 100761240
• Stainless steel NW 630 M 12 x 65 20 1.75 100761263
• To join two bolted flanges
• Nuts and washers included
Ordering Information

Bolt Set in./(mm)

Flange Size
Bolt Size No. in Set Pitch (mm) Part Number
(ISO)
NW 63 M 8 x 30 4 1.25 100761306
NW 80 M 8 x 30 8 1.25 100761308
NW 100 M 8 x 30 8 1.25 100761308
NW 160 M 10 x 35 8 1.50 100761316
NW 200 M 10 x 35 12 1.50 100761320
NW 250 M 10 x 35 12 1.50 100761320
NW 320 M 12 x 45 12 1.75 100761332
NW 400 M 12 x 45 16 1.75 100761340
NW 500 M 12 x 45 16 1.75 100761340
• Stainless steel NW 630 M 12 x 55 20 1.75 100761363
• Bolted flange to tapped flange
• Includes washer

Ring, Rotatable Bolt in./(mm)

Flange Size
Part Number
(ISO)
NW 63 100762806
NW 80 100762808
NW 100 100762810
NW 160 100762816
NW 200 100762820
NW 250 100762825
NW 320 100762832
NW 400 100762840
NW 500 100762850
• Aluminum
• Use with MF flange
• Steel retaining ring included
• O.D. and bolt pattern same as bolted flange

Ring, Retaining in./(mm)

Flange Size
Part Number
(ISO)
NW 63 100762906
NW 80 100762908
NW 100 100762910
NW 160 100762916
NW 200 100762920
NW 250 100762925
NW 320 100762932
NW 400 100762940
NW 500 100762950
• Stainless steel
• Retains bolt ring
Conic Reducer in./(mm)
Flange Size
A B C Part Number
(ISO)
A
NW 63 to NW 80 4.14 (105) 2.87 (73) 2.37 (60) 100764906
NW 63 to NW 100 4.14 (105) 3.83 (97) 2.37 (60) 100764917
NW 80 to NW 100 4.14 (105) 3.83 (97) 2.87 (73) 100764908
B C NW 80 to NW 160 9.52 (242) 5.78 (147) 2.87 (73) 100764927
NW 100 to NW 160 9.52 (242) 5.78 (147) 3.83 (97) 100764910

• Stainless steel type 304

• Other combinations available on request
• High conductance adapter

Step Reducer in./(mm)

Flange Size
A B Part Number
(ISO)
NW 63 to NW 80 2.95 (75) 2.31 (59) 100762506
NW 63 to NW 100 2.95 (75) 2.31 (59) 100762517
NW 63 to NW 160 2.95 (75) 2.31 (59) 100762527
B
NW 80 to NW 100 2.95 (75) 2.87 (73) 100762508
NW 100 to NW 160 2.95 (75) 3.87 (98) 100762510

• Stainless steel type 304

• Short overall length
Ordering Information

Conic Adapter, ISO-MF Flange to ISO-KF Flange in./(mm)

Flange Size
A B C Part Number
(ISO)
A NW 63 to NW 40 3.39 (86) 2.37 (60) 1.37 (35) 100765006
NW 63 to NW 50 3.39 (86) 2.37 (60) 1.87 (47) 100765017
NW 80 to NW 40 4.64 (118) 2.87 (73) 1.37 (35) 100765016
B C NW 80 to NW 50 4.64 (118) 2.87 (73) 1.87 (47) 100765008
NW 100 to NW 50 4.64 (118) 3.83 (97) 1.87 (47) 100765018

• Stainless steel type 304

• Special adapters available upon request
• High conductance adapter

Step Adapter, ISO-MF Flange to ISO-KF Flange in./(mm)

Flange Size
A B Part Number
(ISO)
NW 63 to NW 40 1.77 (45) 1.37 (35) 100762606
NW 63 to NW 50 1.77 (45) 1.87 (47) 100762617
B NW 80 to NW 40 1.77 (45) 1.37 (35) 100762616
NW 80 to NW 50 1.77 (45) 1.87 (47) 100762608
NW 100 to NW 40 1.77 (45) 1.37 (35) 100762620
NW 100 to NW 50 1.77 (45) 1.87 (47) 100762618

• Stainless steel type 304

• With O-ring groove
• Special adapters available upon request
• Short overall length
90° Elbow, Smooth Radius in./(mm)
Flange Size
A Part Number
(ISO)
NW 63 4.00 (102) 100764606
NW 80 4.74 (120) 100764608
NW 100 6.24 (158) 100764610
NW 160 9.24 (235) 100764616
A

• Stainless steel type 304

• ISO-MF flanges, same size both ports

45° Elbow, Smooth Radius in./(mm)

Flange Size
A Part Number
(ISO)

A NW 63 3.25 (83) 100764406

NW 80 3.93 (100) 100764408
NW 100 5.03 (128) 100764410
NW 160 5.49 (139) 100764416

• Stainless steel type 304

• ISO-MF flanges, same size both ports
Ordering Information

Tee in./(mm)
Flange Size
A B Part Number
(ISO)

B NW 63 3.46 (88) 6.92 (176) 100761406

NW 80 3.86 (98) 7.72 (196) 100761408
NW 100 4.25 (108) 8.50 (216) 100761410
NW 160 5.43 (138) 10.86 (276) 100761416
A NW 200 6.61 (168) 13.22 (336) 100761420
NW 250 8.19 (208) 16.38 (416) 100761425
A NW 320 12.60 (320) 25.20 (640) 100761432

• Stainless steel type 304

• ISO-MF flanges, same size all ports
• Standard flange face to centerline dimensions
• Larger sizes available on request

Cross in./(mm)
Flange Size
A B Part Number
(ISO)
NW 63 3.46 (88) 6.92 (176) 100761506
NW 80 3.86 (98) 7.72 (196) 100761508
NW 100 4.25 (108) 8.50 (216) 100761510
NW 160 5.43 (138) 10.86 (276) 100761516
NW 200 6.61 (168) 13.22 (336) 100761520
A
NW 250 8.19 (208) 16.38 (416) 100761525
NW 320 12.60 (320) 25.20 (640) 100761532
B

• Stainless steel type 304

• ISO-MF flanges, same size all ports
• Standard flange face to centerline dimensions
• Larger sizes available on request
Tubing in./(mm)
Flange Size
A B Part Number
(ISO)
NW 63 2½'' .065'' 100764506
NW 80 3'' .065'' 100764508
NW 100 4'' .065'' 100764510
NW 100 4'' .083'' 100764511
NW 160 6'' .083'' 100764516
NW 200 8'' .120'' 100764520
NW 250 10'' .125'' 100764525

• Stainless steel type 304

• Tube ends deburred, cleaned and capped
• Price per 10 foot length of tube

Straight Section in./(mm)

Flange Size
A Part Number
(ISO)
NW 63 6.92 (176) 100761706
NW 63 4.18 (106) 100761707
NW 80 7.72 (196) 100761708
NW 80 4.18 (106) 100761709
A NW 100 8.50 (216) 100761710
NW 100 4.18 (106) 100761711
NW 160 10.86 (276) 100761716
NW 160 4.18 (106) 100761717
NW 200 13.22 (336) 100761720
NW 200 4.18 (106) 100761721
• Stainless steel type 304 NW 250 16.38 (416) 100761725
• Special lengths to order NW 250 4.18 (106) 100761726
• MF type flanges
Ordering Information

Braided Metal Hose in./(mm)

Flange Size
A Static Bend Radius Part Number
(ISO)
NW 63 10.74 (273) 7.50 (191) 100766006
NW 63 20.74 (527) 7.50 (191) 100766106
NW 63 40.74 (1035) 7.50 (191) 100766206
NW 80 10.74 (273) 8.75 (222) 100766008
NW 80 20.74 (527) 8.75 (222) 100766108
NW 80 40.74 (1035) 8.75 (222) 100766208
NW 100 10.74 (273) 10.00 (254) 100766010
NW 100 20.74 (527) 10.00 (254) 100766110
A
NW 100 40.74 (1035) 10.00 (254) 100766210
• Ideal for rough pumping line
• Stainless steel
• Flexible, yet resistant to contraction

Bellows, Section in./(mm)

Flange Size
A B Part Number
Free Length
(ISO)
A NW 63 5.90 (150) 4.50 (115) 100763506G
NW 80 5.90 (150) 4.50 (115) 100763508G
NW 100 5.90 (150) 4.50 (115) 100763510G
NW 160 7.90 (200) 5.70 (145) 100763516G
NW 200 9.80 (250) 6.90 (175) 100763520G
NW 250 11.80 (300) 8.10 (205) 100763525G
B
Maximum Compression

• CAUTION:
Flanges must be supported to prevent
collapsing when subjected to vacuum
• Stainless steel
• Formed bellows
• Bellows buttwelded
• Thin wall
• Flexible
Metal Hose, Thick Wall in./(mm)
Flange Size
Static Bend Radius A Part Number
A (ISO)
NW 63 6½'' 19.69 (500) 100763606
NW 63 6½'' 39.40 (1000) 100763706
NW 80 7'' 19.69 (500) 100763608
NW 80 7'' 39.40 (1000) 100763708
NW 100 11'' 19.69 (500) 100763610
NW 100 11'' 39.40 (1000) 100763710
NW 160 17'' 19.69 (500) 100763616
NW 160 17'' 39.40 (1000) 100763716
NW 200 18'' 19.69 (500) 100763620
CAUTION: NW 200 18'' 39.40 (1000) 100763720
Flanges must be supported to prevent
NW 250 24'' 19.69 (500) 100763625
collapsing when subjected to vacuum NW 250 24'' 39.40 (1000) 100763725
• Unsheathed
• Stainless steel
• Formed metal
• Special lengths on request
• Hose buttwelded

Metal Hose, Thin Wall in./(mm)

Flange Size
A Part Number
(ISO)
A
NW 63 9.84 (250) 100763806
NW 63 19.69 (500) 100763906
NW 63 39.40 (1000) 100764006
NW 80 9.84 (250) 100763808
NW 80 19.69 (500) 100763908
NW 80 39.40 (1000) 100764008
NW 100 9.84 (250) 100763810
NW 100 19.69 (500) 100763910

• CAUTION:
Flanges must be supported to prevent collapsing when
subjected to vacuum
• Unsheathed
• Stainless steel
• Formed metal
• Flexible
• Hose buttwelded

Flange Protector Cap in./(mm)

• Protects flange faces Flange Size

Part Number
(ISO)
• Plastic
NW 63 100760006
NW 80 100760008
NW 100 100760010
NW 160 100005788
Numerical Listing

100005788 Flange Protector Cap, NW 160 100760732 Seal, Centering Ring Assy, NW 320, Aluminum/Buna-N
100760006 Flange Protector Cap, NW 63 100760740 Seal, Centering Ring Assy, NW 400, Aluminum/Buna-N
100760008 Flange Protector Cap, NW 80 100760750 Seal, Centering Ring Assy, NW 500, Aluminum/Buna-N
100760010 Flange Protector Cap, NW 100 100760763 Seal, Centering Ring Assy, NW 630, Aluminum/Buna-N

100760106 Flange, Blank-Off, NW 63 100761006 Single Claw Clamp, NW 63, Aluminum
100760108 Flange, Blank-Off, NW 80 100761006 Single Claw Clamp, NW 80, Aluminum
100760110 Flange, Blank-Off, NW 100 100761006 Single Claw Clamp, NW 100, Aluminum
100760116 Flange, Blank-Off, NW 160 100761016 Single Claw Clamp, NW 160, Aluminum
100760120 Flange, Blank-Off, NW 200 100761016 Single Claw Clamp, NW 200, Aluminum
100760125 Flange, Blank-Off, NW 250 100761016 Single Claw Clamp, NW 250, Aluminum
100760132 Flange, Blank-Off, NW 320 100761032 Single Claw Clamp, NW 320, Aluminum
100760140 Flange, Blank-Off, NW 400 100761040 Single Claw Clamp, NW 400, Aluminum
100760150 Flange, Blank-Off, NW 500 100761040 Single Claw Clamp, NW 500, Aluminum

100760206 Flange, Bored, NW 63 100761106 Double Claw Clamp, NW 63, Aluminum
100760208 Flange, Bored, NW 80 100761106 Double Claw Clamp, NW 80, Aluminum
100760210 Flange, Bored, NW 100 100761106 Double Claw Clamp, NW 100, Aluminum
100760216 Flange, Bored, NW 160 100761116 Double Claw Clamp, NW 160, Aluminum
100760220 Flange, Bored, NW 200 100761116 Double Claw Clamp, NW 200, Aluminum
100760225 Flange, Bored, NW 250 100761116 Double Claw Clamp, NW 250, Aluminum
100760232 Flange, Bored, NW 320 100761132 Double Claw Clamp, NW 320, Aluminum
100760240 Flange, Bored, NW 400 100761140 Double Claw Clamp, NW 400, Aluminum
100760250 Flange, Bored, NW 500 100761140 Double Claw Clamp, NW 500, Aluminum

100760306 Flange, Bolted, Blank, NW 63 100761206 Bolt and Nut Set, NW 63, Stainless Steel
100760308 Flange, Bolted, Blank, NW 80 100761208 Bolt and Nut Set, NW 80, Stainless Steel
100760310 Flange, Bolted, Blank, NW 100 100761208 Bolt and Nut Set, NW 100, Stainless Steel
100760316 Flange, Bolted, Blank, NW 160 100761216 Bolt and Nut Set, NW 160, Stainless Steel
100760320 Flange, Bolted, Blank, NW 200 100761220 Bolt and Nut Set, NW 200, Stainless Steel
100760325 Flange, Bolted, Blank, NW 250 100761220 Bolt and Nut Set, NW 250, Stainless Steel
100760332 Flange, Bolted, Blank, NW 320 100761232 Bolt and Nut Set, NW 320, Stainless Steel
100760340 Flange, Bolted, Blank, NW 400 100761240 Bolt and Nut Set, NW 400, Stainless Steel
100760350 Flange, Bolted, Blank, NW 500 100761240 Bolt and Nut Set, NW 500, Stainless Steel
100760363 Flange, Bolted, Blank, NW 630 100761263 Bolt and Nut Set, NW 630, Stainless Steel

100760406 Flange, Long Weld Stub, NW 63 100761306 Bolt Set, for tapped bolted flanges, NW 63
100760408 Flange, Long Weld Stub, NW 80 100761308 Bolt Set, for tapped bolted flanges, NW 80
100760410 Flange, Long Weld Stub, NW 100, .065'' wall 100761308 Bolt Set, for tapped bolted flanges, NW 100
100760411 Flange, Long Weld Stub, NW 100, .083'' wall 100761316 Bolt Set, for tapped bolted flanges, NW 160
100760416 Flange, Long Weld Stub, NW 160 100761320 Bolt Set, for tapped bolted flanges, NW 200
100760420 Flange, Long Weld Stub, NW 200 100761320 Bolt Set, for tapped bolted flanges, NW 250
100760425 Flange, Long Weld Stub, NW 250 100761332 Bolt Set, for tapped bolted flanges, NW 320
100760432 Flange, Long Weld Stub, NW 320 100761340 Bolt Set, for tapped bolted flanges, NW 400
100760440 Flange, Long Weld Stub, NW 400 100761340 Bolt Set, for tapped bolted flanges, NW 500
100760450 Flange, Long Weld Stub, NW 500 100761363 Bolt Set, for tapped bolted flanges, NW 630

100760506 Seal, Centering Ring Assy, NW 63, SS/Viton 100761406 Tee, NW 63, Stainless Steel
100760508 Seal, Centering Ring Assy, NW 80, SS/Viton 100761408 Tee, NW 80, Stainless Steel
100760510 Seal, Centering Ring Assy, NW 100, SS/Viton 100761410 Tee, NW 100, Stainless Steel
100760516 Seal, Centering Ring Assy, NW 160, SS/Viton 100761416 Tee, NW 160, Stainless Steel
100760520 Seal, Centering Ring Assy, NW 200, SS/Viton 100761420 Tee, NW 200, Stainless Steel
100760525 Seal, Centering Ring Assy, NW 250, SS/Viton 100761425 Tee, NW 250, Stainless Steel
100760532 Seal, Centering Ring Assy, NW 320, SS/Viton 100761432 Tee, NW 320, Stainless Steel
100760540 Seal, Centering Ring Assy, NW 400, SS/Viton
100760550 Seal, Centering Ring Assy, NW 500, SS/Viton 100761506 Cross, NW 63, Stainless Steel
100760563 Seal, Centering Ring Assy, NW 630, SS/Viton 100761508 Cross, NW 80, Stainless Steel
100761510 Cross, NW 100, Stainless Steel
100760606 Seal, Centering Ring Assy, NW 63, Aluminum/Viton 100761516 Cross, NW 160, Stainless Steel
100760608 Seal, Centering Ring Assy, NW 80, Aluminum/Viton 100761520 Cross, NW 200, Stainless Steel
100760610 Seal, Centering Ring Assy, NW 100, Aluminum/Viton 100761525 Cross, NW 250, Stainless Steel
100760616 Seal, Centering Ring Assy, NW 160, Aluminum/Viton 100761532 Cross, NW 320, Stainless Steel
100760620 Seal, Centering Ring Assy, NW 200, Aluminum/Viton
100760625 Seal, Centering Ring Assy, NW 250, Aluminum/Viton 100761706 Straight Section, NW 63, 6.92'' length
100760632 Seal, Centering Ring Assy, NW 320, Aluminum/Viton 100761707 Straight Section, NW 63, 4.18'' length
100760640 Seal, Centering Ring Assy, NW 400, Aluminum/Viton 100761708 Straight Section, NW 80, 7.72'' length
100760650 Seal, Centering Ring Assy, NW 500, Aluminum/Viton 100761709 Straight Section, NW 80, 4.18'' length
100760663 Seal, Centering Ring Assy, NW 630, Aluminum/Viton 100761710 Straight Section, NW 100, 8.5'' length
100761711 Straight Section, NW 100, 4.18'' length
100760706 Seal, Centering Ring Assy, NW 63, Aluminum/Buna-N 100761716 Straight Section, NW 160, 10.86'' length
100760708 Seal, Centering Ring Assy, NW 80, Aluminum/Buna-N 100761717 Straight Section, NW 160, 4.18'' length
100760710 Seal, Centering Ring Assy, NW 100, Aluminum/Buna-N 100761720 Straight Section, NW 200, 13.22'' length
100760716 Seal, Centering Ring Assy, NW 160, Aluminum/Buna-N 100761721 Straight Section, NW 200, 4.18'' length
100760720 Seal, Centering Ring Assy, NW 200, Aluminum/Buna-N 100761725 Straight Section, NW 250, 16.38'' length
100760725 Seal, Centering Ring Assy, NW 250, Aluminum/Buna-N 100761726 Straight Section, NW 250, 4.18'' length
Numerical Listing

100761906 Seal, Replacement O-Ring, NW 63, Buna-N 100762940 Retaining Ring, NW 400
100761908 Seal, Replacement O-Ring, NW 80, Buna-N 100762950 Retaining Ring, NW 500
100761910 Seal, Replacement O-Ring, NW 100, Buna-N
100761916 Seal, Replacement O-Ring, NW 160, Buna-N 100763506G Bellows, NW 63, 5.9'' length
100761920 Seal, Replacement O-Ring, NW 200, Buna-N 100763508G Bellows, NW 80, 5.9'' length
100761925 Seal, Replacement O-Ring, NW 250, Buna-N 100763510G Bellows, NW 100, 5.9'' length
100761932 Seal, Replacement O-Ring, NW 320, Buna-N 100763516G Bellows, NW 160, 7.9'' length
100761940 Seal, Replacement O-Ring, NW 400, Buna-N 100763520G Bellows, NW 200, 9.8'' length
100761950 Seal, Replacement O-Ring, NW 500, Buna-N 100763525G Bellows, NW 250, 11.8'' length
100761963 Seal, Replacement O-Ring, NW 630, Buna-N
100763606 Thick Wall Metal Hose, NW 63, 19.69'' length
100762006 Seal, Replacement O-Ring, NW 63, Viton 100763608 Thick Wall Metal Hose, NW 80, 19.69'' length
100762008 Seal, Replacement O-Ring, NW 80, Viton 100763610 Thick Wall Metal Hose, NW 100, 19.69'' length
100762010 Seal, Replacement O-Ring, NW 100, Viton 100763616 Thick Wall Metal Hose, NW 160, 19.69'' length
100762016 Seal, Replacement O-Ring, NW 160, Viton 100763620 Thick Wall Metal Hose, NW 200, 19.69'' length
100762020 Seal, Replacement O-Ring, NW 200, Viton 100763625 Thick Wall Metal Hose, NW 250, 19.69'' length
100762025 Seal, Replacement O-Ring, NW 250, Viton 100763706 Thick Wall Metal Hose, NW 63, 39.40'' length
100762032 Seal, Replacement O-Ring, NW 320, Viton 100763708 Thick Wall Metal Hose, NW 80, 39.40'' length
100762040 Seal, Replacement O-Ring, NW 400, Viton 100763710 Thick Wall Metal Hose, NW 100, 39.40'' length
100762050 Seal, Replacement O-Ring, NW 500, Viton 100763716 Thick Wall Metal Hose, NW 160, 39.40'' length
100762063 Seal, Replacement O-Ring, NW 630, Viton 100763720 Thick Wall Metal Hose, NW 200, 39.40'' length
100763725 Thick Wall Metal Hose, NW 250, 39.40'' length
100762406 Flange, Bolted, Bored, NW 63
100762408 Flange, Bolted, Bored, NW 80 100763806 Thin Wall Metal Hose, NW 63, 9.84'' length
100762410 Flange, Bolted, Bored, NW 100 100763808 Thin Wall Metal Hose, NW 80, 9.84'' length
100762416 Flange, Bolted, Bored, NW 160 100763810 Thin Wall Metal Hose, NW 100, 9.84'' length
100762420 Flange, Bolted, Bored, NW 200 100763906 Thin Wall Metal Hose, NW 63, 19.69'' length
100762425 Flange, Bolted, Bored, NW 250 100763908 Thin Wall Metal Hose, NW 80, 19.69'' length
100762432 Flange, Bolted, Bored, NW 320 100763910 Thin Wall Metal Hose, NW 100, 19.69'' length
100762440 Flange, Bolted, Bored, NW 400 100764006 Thin Wall Metal Hose, NW 63, 39.40'' length
100762450 Flange, Bolted, Bored, NW 500 100764008 Thin Wall Metal Hose, NW 80, 39.40'' length
100762463 Flange, Bolted, Bored, NW 630
100764406 45° Elbow, Smooth Radius, NW 63
100762506 Step Reducer, NW 63 to NW 80 100764408 45° Elbow, Smooth Radius, NW 80
100762508 Step Reducer, NW 80 to NW 100 100764410 45° Elbow, Smooth Radius, NW 100
100762510 Step Reducer, NW 100 to NW 160 100764416 45° Elbow, Smooth Radius, NW 160
100762517 Step Reducer, NW 63 to NW 100
100762527 Step Reducer, NW 63 to NW 160 100764506 Tubing (price per 10 foot), NW 63, 0.065 wall, Stainless Steel
100764508 Tubing, (price per 10 foot) NW 80, 0.065 wall, Stainless Steel
100762606 Step Adapter, NW 63 to NW 40, w/Groove 100764510 Tubing, (price per 10 foot) NW 100, 0.065 wall, Stainless Steel
100762608 Step Adapter, NW 80 to NW 50, w/Groove 100764511 Tubing, (price per 10 foot) NW 100, 0.083 wall, Stainless Steel
100762616 Step Adapter, NW 80 to NW 40, w/Groove 100764516 Tubing, (price per 10 foot) NW 160, 0.083 wall, Stainless Steel
100762617 Step Adapter, NW 63 to NW 50, w/Groove 100764520 Tubing, (price per 10 foot) NW 200, 0.120 wall Stainless Steel
100762618 Step Adapter, NW 100 to NW 50, w/Groove 100764525 Tubing, (price per 10 foot) NW 250, 0.125 wall, Stainless Steel
100762620 Step Adapter, NW 100 to NW 40, w/Groove
100764606 90° Elbow, Smooth Radius, NW 63
100762706 Flange, Bolted, Weld Stub, NW 63 100764608 90° Elbow, Smooth Radius, NW 80
100762708 Flange, Bolted, Weld Stub, NW 80 100764610 90° Elbow, Smooth Radius, NW 100
100762710 Flange, Bolted, Weld Stub, NW 100 100764616 90° Elbow, Smooth Radius, NW 160
100762716 Flange, Bolted, Weld Stub, NW 160
100762720 Flange, Bolted, Weld Stub, NW 200 100764906 Conic Reducer, NW 63 to NW 80
100762725 Flange, Bolted, Weld Stub, NW 250 100764908 Conic Reducer, NW 80 to NW 100
100762732 Flange, Bolted, Weld Stub, NW 320 100764910 Conic Reducer, NW 100 to NW 160
100762740 Flange, Bolted, Weld Stub, NW 400 100764917 Conic Reducer, NW 63 to NW 100
100762750 Flange, Bolted, Weld Stub, NW 500 100764927 Conic Reducer, NW 80 to NW 160
100762763 Flange, Bolted, Weld Stub, NW 630
100765006 Conic Adapter, NW 63 to NW 40
100762806 Rotatable, Bolted Ring Assy, NW 63 100765008 Conic Adapter, NW 80 to NW 50
100762808 Rotatable, Bolted Ring Assy, NW 80 100765016 Conic Adapter, NW 80 to NW 40
100762810 Rotatable, Bolted Ring Assy, NW 100 100765017 Conic Adapter, NW 63 to NW 50
100762816 Rotatable, Bolted Ring Assy, NW 160 100765018 Conic Adapter, NW 100 to NW 50
100762820 Rotatable, Bolted Ring Assy, NW 200
100762825 Rotatable, Bolted Ring Assy, NW 250 100766006 Braided Metal Hose, NW 63, 10.74'' length
100762832 Rotatable, Bolted Ring Assy, NW 320 100766008 Braided Metal Hose, NW 80, 10.74'' length
100762840 Rotatable, Bolted Ring Assy, NW 400 100766010 Braided Metal Hose, NW 100, 10.74'' length
100762850 Rotatable, Bolted Ring Assy, NW 500 100766106 Braided Metal Hose, NW 63, 20.74'' length
100766108 Braided Metal Hose, NW 80, 20.74'' length
100762906 Retaining Ring, NW 63 100766110 Braided Metal Hose, NW 100, 20.74'' length
100762908 Retaining Ring, NW 80 100766206 Braided Metal Hose, NW 63, 40.74'' length
100762910 Retaining Ring, NW 100 100766208 Braided Metal Hose, NW 80, 40.74'' length
100762916 Retaining Ring, NW 160 100766210 Braided Metal Hose, NW 100, 40.74'' length
100762920 Retaining Ring, NW 200
100762925 Retaining Ring, NW 250 100937685 Seal, Overpressure Assembly, NW 160
100762932 Retaining Ring, NW 320 100938657 Seal, Overpressure Assembly, NW 80
100938658 Seal, Overpressure Assembly, NW 100

MKS Instruments, Inc. MKS Instruments, Inc.

Global Headquarters Integrated Process Solutions
2 Tech Drive, Suite 201 5330 Sterling Drive
Andover, MA 01810 Boulder, CO 80301
Tel: 978.645.5500 Tel: 303.449.9861
Tel: 800.227.8766 (in USA) Tel: 800.345.1967 (in USA)
Web: www.mksinst.com
Series 76 ISO-Universal Flanges - 7/18 MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
© 2008-2018 MKS Instruments, Inc. Specifications are subject to change without notice. mksinst™ is a trademark of MKS Instruments, Inc., Viton® is a registered
All rights reserved. trademark of E.I. DuPont de Nemours & Co., Inc.