Chenming Hu Ch4 Slides
Chenming Hu Ch4 Slides
Chenming Hu Ch4 Slides
N P
N-type
P-type I
diode
symbol
V
Reverse bias Forward bias
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-1
4.1.1 Energy Band Diagram of a PN Junction
N-region P-region
Ef is constant at
(a) Ef
equilibrium
Ec
Ec Ef
Ec and Ev are known
(b)
Ev relative to Ef
Ev
Ec
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-2
4.1.2 Built-in Potential
(a)
N-type P-type
NNd d NNa a
Ec
bi
(b)
q
Ef
Ev
V
bi
(c)
xN 0 xP x
q A kT kT N c
N-region n N d Nce A ln
q Nd
2
ni q B kT kT N c N a
P-region n Nce B ln 2
Na q ni
kT N c N a Nc
bi B A ln ln
q ni
2
Nd
kT N d N a
bi ln 2
q ni
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-4
4.1.3 Poisson’s Equation
Gauss’s Law:
a A
ar e
E (x) E (x + x)
s: permittivity (~12o for Si)
: charge density (C/cm3)
x
x
Poisson’s equation
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-5
4.2 Depletion-Layer Model
(a)
N
4.2.1 Field and Potential in the Depletion Layer
N N P
d a
(d) qN d
E ( x) ( x - xN )
x
s
xnN 0 xpP
V
bi
(e) Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-6
(a)
N Nd Na P
4.2.1 Field and Potential in the Depletion Layer
N P
–xnN 0 xpP
The electric field is continuous at x = 0.
qN
Nda |xP| = Nd|xP|
(c) xp
of the junction is depleted more? x
Which side –x
n
–qN a
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-7
qNd
(c) xp
4.2.1 Field and Potential in the Depletion Layer
x n
–qN
x
a
E On the P-side,
qN a
V ( x) ( xP x ) 2
2 s
(d)
xn 0 xp x
N P
bi
V
Arbitrarily choose the
(e) voltage at x = xP as V = 0.
x
xnN xpP
On the N-side,
Ec
qN d
bi , built-in potential V ( x) D ( x xN )2
(f)
Ef 2 s
Ev
qN d
bi ( x xN )2
2 s
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-8
(a)
N Nd Na P
4.2.2 Depletion-Layer Width
N P
–xnN 0 xpP
V is continuous at x = 0
2 sbi 1 1
xP xN Wdep
q Na Nd
qN
If Na >> Nd , as in a P+N junction,
d
(c) xp
2 sbi x
Wdep
qN d
–xxn N
–qN a
|x P||xN|N d Na 0
Solution:
kT N d N a 10 20 1017 cm 6
a) bi ln 2
0.026V ln 20 6
1V
q ni 10 cm
1/ 2
2 sbi 2 12 8.85 10 1 14
b) Wdep 19
0.12 μm
1.6 10 10
17
qN d
xN Wdep 0.12 μm
c)
xP xN N d N a 1.2 104 μm 1.2 Å 0
d)
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-10
4.3 Reverse-Biased PN Junction
V
+ –
N P
Ev
(a) V = 0 1 1 1 1
Ec
N N d N a lighter dopant density
qbi + qV Efp
• Does the depletion layer
qV Ev
Ec
Efn
widen or shrink with
increasing reverse bias?
Ev
(b) reverse-biased
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-11
4.4 Capacitance-Voltage Characteristics
N Nd Na P
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-12
4.4 Capacitance-Voltage Characteristics
Vr
– bi Increasing reverse bias
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-13
EXAMPLE: If the slope of the line in the previous slide is
2x1023 F-2 V-1, the intercept is 0.84V, and A is 1 m2, find the
lighter and heavier doping concentrations Nl and Nh .
Solution:
N l 2 /( slope q s A2 )
2 /(2 10 23 1.6 10 19 12 8.85 10 14 10 8 cm 2 )
6 1015 cm 3
q 2 0.84
kT N h N l ni kTbi 10 20 0.026
bi ln 2
N h e e 1 .8 1018
cm 3
q ni Nl 6 1015
Forward Current
V B, breakdown
voltage
V
R
Small leakage
Current
A
P N
R C
A
3.7 V
IC
Zener diode
B
D
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-15
4.5.1 Peak Electric Field
Neutral Region
increasing
reverse bias
N+ Na P
0 xp
1/ 2
(a) 2qN
E
Ep E(0) (bi | Vr |)
Ep s
increasing reverse bias
sEcrit 2
x VB bi
xp 2qN
(b)
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-16
4.5.2 Tunneling Breakdown
Ev H / εp
JGe
I
V
6
Ep Ecrit 10 V/cm
Breakdown
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-17
4.5.3 Avalanche Breakdown
• impact ionization: an
Ec
energetic electron generating
original
electron electron and hole, which can
Efp also cause impact ionization.
Ev
• Impact ionization + positive
feedbackavalanche breakdown
sEcrit 2
electron-hole VB
pair generation 2qN
Ec 1 1 1
Efn VB
N Na Nd
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-18
4.6 Forward Bias – Carrier Injection
VV=0
=0 Forward
Forward biased
biased
V
I=0 – +
Ec N P
qbi
- Ec
Ef qbi –qV
Ev
Ef n qV Efp
Ev
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-19
4.6 Forward Bias –
Quasi-equilibrium Boundary Condition
( Ec E fn ) / kT ( Ec E fp ) / kT ( E fn E fp ) / kT
n ( xP ) N c e Nce e
( E fn E fp ) / kT
nP 0 e nP 0 e qV / kT
EEcc
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-20
4.6 Carrier Injection Under Forward Bias–
Quasi-equilibrium Boundary Condition
2
ni qV
n(xP ) nP 0 e
qV kT kT
e
Na
2
ni qV
p (xP) p N 0 e
qV kT kT
e
Nd
n( xP ) n( xP ) nP 0 nP 0 (e qV kT
1)
p( x N ) p ( x N ) p N 0 p N 0 (e qV kT
1)
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-21
EXAMPLE: Carrier Injection
A PN junction has Na=1019cm-3 and Nd=1016cm-3. The applied
voltage is 0.6 V.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-22
4.7 Current Continuity Equation
J p ( x) J p ( x x) p
A A A x
q q
aA
a re
Jp (x) Jp ( x + x )
J p ( x x) J p ( x) p
q
p x
Volume = A·x
dJ pp
q
dx
x
x
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-23
4.7 Current Continuity Equation
dJ p p
q Minority drift current is
dx
negligible;
d2p p Jp= –qDpdp/dx
qD p 2 q
dx p
d p
2
p p d 2 n n
2 2
2
dx 2
D p p L p dx Ln
L p D p p Ln Dn n
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-24
4.8 Forward Biased Junction-- Excess Carriers
P + N
d 2 p p
2
2
xP dx Lp
-x N
0
x p() 0
p( x N ) p N 0 (e qV / kT 1)
x / Lp x / Lp
p ( x) Ae Be
x xN / L p
p( x) p N 0 (e qV / kT 1)e , x xN
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-25
4.8 Excess Carrier Distributions
1.0
P-side N-side
N a = 1017 cm -3 Nd = 2 1017 cm-3
0.5
nP ' ex /L n pN ' e–x /L p
x xN / L p
p ( x ) p N 0 (e qV / kT
1)e , x xN
n( x ) nP 0 (e qV / kT 1)e x xP / Ln , x xP
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-26
EXAMPLE: Carrier Distribution in Forward-biased PN Diode
N-type P-type
Nd = 5 cm-3 Na = 101 7 cm -3
Dp =12 cm 2/s Dn=36.4 cm2 /s
p = 1 s n = 2 s
p´ ( = n’ ) 2
x
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-27
EXAMPLE: Carrier Distribution in Forward-biased PN Diode
Ln Dn n 36 2 10 6 85 μm
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-28
4.9 PN Diode I-V Characteristics
Jtotal
Jtotal Jn = Jtotal – Jp
Jp = Jtotal – Jn
JnP JnP
JpN JpN
x
P-side 0 N-side P-side 0 N-side
dp( x) Dp x xN Lp
J pN qD p q p N 0 (e qV kT
1)e
dx Lp
dn( x) D
J nP qDn q n nP 0 (e qV kT
1)e x xP Ln
dx Ln
Dp Dn qV
Total current J pN ( x N ) J nP ( xP ) q p q n P 0 ( e kT
1)
L N0 Ln
p
J at all x
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-29
The PN Junction as a Temperature Sensor
I I 0 (e qV kT
1)
Dp D
I 0 Aqni
2
n
L N
p d Ln N a
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-30
4.9.1 Contributions from the Depletion Region
n p ni e qV / 2 kT
Net recombination (generation) rate :
ni qV / 2 kT
(e 1)
dep
qniWdep
I I 0 (e qV / kT
1) A (e qV / 2 kT 1)
τ dep
Space-Charge Region (SCR) current
qniWdep
I leakage I 0 A
τ dep Under forward bias, SCR current is an extra
current with a slope 120mV/decade
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-31
4.10 Charge Storage
1013 cm -3 QI
N-side P-side
n' I Q s
Q I s
p’ 2
x
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-32
4.11 Small-signal Model of the Diode
I
1 dI d d
G I 0 (e qV / kT
1) I 0 e qV / kT
R dV dV dV
V R C
q kT
I 0 (e qV / kT ) I DC /
kT q
What is G at 300K and IDC = 1 mA?
Diffusion Capacitance:
dQ dI kT
C s sG s I DC /
dV dV q
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-33
Part II: Application to Optoelectronic Devices
4.12 Solar Cells
•Solar Cells is also known
as photovoltaic cells.
•Converts sunlight to
electricity with 10-30%
conversion efficiency.
•1 m2 solar cell generate
about 150 W peak or 25 W
continuous power.
•Low cost and high
efficiency are needed for
wide deployment.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-34
4.12.1 Solar Cell Basics
I
Short Circuit
Dark IV
Eq.(4.9.4)
light
N P I
sc
0.7 V
- 0 V
Ec Solar Cell
IV
Eq.(4.12.1)
Ev –I
sc Maximum
+ power-output
(a)
I I 0 (e qV kT
1) I sc
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-35
Direct-Gap and Indirect-Gap Semiconductors
•Electrons have both particle and wave properties.
•An electron has energy E and wave vector k.
direct-gap semiconductor indirect-gap semiconductor
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-36
4.12.2 Light Absorption
Light intensity (x) e -x
α(1/cm): absorption
coefficient
1/α : light penetration
depth
hc
Photon Energy (eV)
1.24
( m)
A thinner layer of direct-gap semiconductor can absorb most
of solar radiation than indirect-gap semiconductor. But Si…
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-37
4.12.3 Short-Circuit Current and Open-Circuit Voltage
x
If the sample is uniform (no PN junction),
d2p’/dx2 = 0 p’ = GLp2/Dp= Gp
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-38
Solar Cell Short-Circuit Current, Isc
Assume very thin P+ layer and carrier generation in N region only.
Isc G
p() L pG
2
p
Dp
P+ N p(0) 0
0
x x / Lp
p( x) p G (1 e )
P'
dp( x) Dp x / Lp
pG J p qD p q p Ge
dx Lp
0 Lp x I sc AJ p (0) AqL p G
G is really not uniform. Lp needs be larger than the light
penetration depth to collect most of the generated carriers.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-39
Open-Circuit Voltage
•Total current is ISC plus the PV diode (dark) current:
ni2 D p qV / kT
I Aq (e 1) AqL p G
N d Lp
•Solve for the open-circuit voltage (Voc) by setting I=0
(assuming e qVoc / kT 1) 2
ni D p qVoc / kT
0 e LpG
N d Lp
kT 2
Voc ln( p GN d / ni )
q
Light emitting diodes (LEDs)
• LEDs are made of compound semiconductors such as InP
and GaN.
• Light is emitted when electron and hole undergo radiative
recombination.
Ec
Radiative Non-radiative
recombination recombination
through traps
Ev
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-42
Direct and Indirect Band Gap
Trap
1.24 1.24
LED wavelength ( m)
photon energy E g ( eV )
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-44
4.13.1 LED Materials and Structure
compound semiconductors
Lattice
Egg(eV)
E (eV ) Wavelength
(μm) Color constant
binary semiconductors:
(Å)
- Ex: GaAs, efficient emitter
InAs 0.36 3.44 6.05
infrared
ternary semiconductor :
InN 0.65 1.91 3.45
- Ex: GaAs1-xPx , tunable Eg (to
InP 1.36 0.92 5.87 vary the color)
GaAs 1.42 0.87 Red
red 5.66
yellow
Yellow
GaP 2.26 0.55 Green
blue
5.46 quaternary semiconductors:
violet
Blue
- Ex: AlInGaP , tunable Eg and
AlP 3.39 0.51 5.45
lattice constant (for growing high
GaN 2.45 0.37 3.19 quality epitaxial films on
AlN 6.20 0.20 UV 3.11
inexpensive substrates)
Light-emitting diode materials
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-45
Common LEDs
Spectral Material
Substrate Example Applications
range System
Infrared Indicator lamps. Remote
GaAsP GaAs
-Red control
Optical communication.
Red- GaA or
AlInGaP High-brightness traffic
Yellow GaP
signal lights
High brightness signal AlInGaP
Green- GaN or
InGaN lights. Quantun Well
Blue sapphire
Video billboards
GaN or
Blue-UV AlInGaN
sapphire Solid-state lighting
Organic
Red-
semicon- glass Displays
Blue
ductors
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-46
4.13.2 Solid-State Lighting
luminosity (lumen, lm): a measure of visible light energy
normalized to the sensitivity of the human eye at
different wavelengths
Luminous efficacy of lamps in lumen/watt
Organic Light Emitting Diodes (OLED) :
has lower efficacy than nitride or aluminide based compound semiconductor LEDs.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-47
4.14 Diode Lasers
4.14.1 Light Amplification
(a) Absorption (d) Net Light
Absorption
Stimulated emission: emitted photon has identical frequency and
directionality as the stimulating photon; light wave is amplified.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-48
4.14.1 Light Amplification in PN Diode
Population inversion
is achieved when
qV E fn E fp E g
Equilibrium, V=0
Population inversion, qV > Eg
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-49
4.14.2 Optical Feedback and Laser
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-50
4.14.2 Optical Feedback and Laser Diode
• Distributed Bragg
reflector (DBR) reflects
light with multi-layers of
semiconductors.
•Vertical-cavity surface-
emitting laser (VCSEL) is
shown on the left.
•Quantum-well laser has
smaller threshold current
because fewer carriers
are needed to achieve
population inversion in
the small volume of the
thin small-Eg well.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-51
4.14.3 Laser Applications
Red diode lasers: CD, DVD reader/writer
Blue diode lasers: Blu-ray DVD (higher storage density)
1.55 m infrared diode lasers: Fiber-optic communication
4.15 Photodiodes
Photodiodes: Reverse biased PN diode. Detects photo-
generated current (similar to Isc of solar cell) for optical
communication, DVD reader, etc.
Avalanche photodiodes: Photodiodes operating near
avalanche breakdown amplifies photocurrent by impact
ionization.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-52
Part III: Metal-Semiconductor Junction
Vacuum level, E0
Ef
Theoretically,
Ev Bn=M – Si
Depletion
Metal layer Neutral region
q Bn
Ec
Ef
N-Si • Schottky barrier height, B ,
Ev is a function of the metal
Ec
material.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-55
Schottky barrier heights for electrons and holes
Bn + Bp Eg
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-56
Fermi Level Pinning
Silicide: A silicon and metal compound. It is conductive
similar to a metal.
Silicide ErSi1.7 HfSi MoSi2 ZrSi2 TiSi2 CoSi2 WSi2 NiSi2 Pd2Si PtSi
BnBn (V) 0.28 0.45 0.55 0.55 0.61 0.65 0.67 0.67 0.75 0.87
BpBp (V) 0.55 0.49 0.45 0.45 0.43 0.43 0.35 0.23
qbi qbi q Bn ( Ec E f )
qBn
Ec
Nc
Ef q Bn kT ln
Nd
Ev 2 s (bi V )
Wdep
qN d
qBn q(bi + V) s
C A
qV Wdep
Ec
Ef
Question:
How should we plot the CV
Ev data to extract bi?
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-59
Using CV Data to Determine B
1/C2
1 2(bi V )
C 2
qN d s A2
qBn qbi
V Ec
bi Ef
Nc
qbi qBn ( Ec E f ) qBn kT ln
Nd
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-60
4.17 Thermionic Emission Theory
vthx
-
q( B V) Ec
q B
N-type Efm qV Efn
V Metal Silicon
Ev
x
3/ 2
2mn kT
n N c e q ( B V ) / kT 2 2 e q ( B V ) / kT
h
vth 3kT / mn vthx 2kT / mn
1 4qmn k 2 2 q B / kT qV / kT
J S M qnvthx 3
T e e
2 h
J 0 e qV / kT , where J o 100e q B / kT A/cm2
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-61
4.18 Schottky Diodes
Forward
biased
V = 0
V
Reverse bias Forward bias
Reverse
biased
I 0 AKT 2 e q B / kT
4qmn k 2
K 3
100 A/(cm 2
K 2
)
h
I I S M I M S I 0 e qV / kT I 0 I 0 (e qV / kT 1)
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-63
4.19 Applications of Schottly Diodes
I I Schottky
Schottky diode I I 0 (e qV / kT 1)
I 0 AKT 2 e q B / kT
BB PN junction
PN junction
diode
V
V
PN Junction Schottky
rectifier Transformer rectifier
100kHz
110V/220V Hi-voltage Hi-voltage Lo-voltage 50A
DC MOSFET AC AC 1V DC
AC inverter
utility
power
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-65
4.19 Applications of Schottky diodes
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-66
4.20 Quantum Mechanical Tunneling
Tunneling probability:
8 2 m
P exp( 2T 2
(VH E ) )
h
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-67
4.21 Ohmic Contacts
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-68
4.21 Ohmic Contacts
Silicide N+ Si
2 s Bn
Wdep Bn
Bn – V
qN d - -
- - Ec , Ef Efm V
Ec , Ef
Tunneling
probability: Ev
H Bn Nd Ev
Pe x x
T Wdep / 2 sBn / 2 qN d
4
H s mn / q
h
1 H ( Bn V ) /
kT / 2mn e
Nd
J S M qN d vthx P qN d
2
1 H Bn / N d
dJ S M 2e H Bn / Nd
Rc e Ω cm 2
dV qvthx H N d
Part I: PN Junction
2 s potential barrier
depletion width Wdep
qN
junction capacitance s
Cdep A
Wdep
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-71
4.22 Chapter Summary
p ( x N ) p N 0 e qV kT
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-72
4.22 Chapter Summary
I I 0 (e qV kT
1)
L p D p p
Dp Dn
I 0 Aqni 2
L N
p d Ln N a
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-73
4.22 Chapter Summary
Charge storage: Q I s
Diffusion capacitance: C sG
kT
Diode conductance: G I DC /
q
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-74
4.22 Chapter Summary
Part II: Optoelectronic Applications
Solar cell power I sc Voc FF
•~100um Si or <1um direct–gap semiconductor can absorb most of solar
photons with energy larger than Eg.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-75
4.22 Chapter Summary
LED and Solid-State Lighting
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-76
4.22 Chapter Summary
Laser Diodes
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-77
4.22 Chapter Summary
4
( B s mn / qN d )
Rc e h
Ω cm 2
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-78
Bn Increases with Increasing Metal Work Function
Vacuum level, E0
Si = 4.05 eV
q
M
Ideally,
Bn=M – Si
q Bn Ec
Ef
Ev
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-79