Chapter-9 금속반도체결함 및 이종결합

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Chapter 9

Metal-Semiconductor and
Semiconductor Heterojunctions

9.1 The Schottky Barrier Diode


9.2 Metal-Semiconductor Ohmic Contacts
9.3 Heterojunctions

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9.1 The Schottky Barrier Diode

Qualitative Characteristics
фm : metal work function
фs : semiconductor work function
χ : electron affinity

Before contact At equilibrium after contact


: Schottky Barrier : for electron in metal side to
flow into semiconductor for фm > фs

: Built-in potential Barrier : for electron in semiconductor side to flow into metal

Reverse-biased M-S Junction Forward-biased M-S Junction

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9.1 The Schottky Barrier Diode

← E ( x =xn ) =0

-
n ← φ ( x = xn ) = 0

eN d xn2
V= φ (= =
x 0) ⋅
bi
εs 2 : same as the one-sided
p+n junction
(reversed-biased case)

Example 9.1 A contact between Tungsten and n-type silicon doped to Nd = 1016cm-3 at T = 300K.

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9.1 The Schottky Barrier Diode

Image-force-induced barrier lowering (Schottky Effect)

: Image force

No electric field :

−eφ ( x) =

Constant electric field :

dφ e
For max. barrier : =− +E=0
dx 16πε s x 2

e eE
∆φ =−φ ( x =xm ) =− − Exm =
16πε s xm 4πε s

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9.1 The Schottky Barrier Diode

Ideal Current Equation

Δф increases with an
increase in the applied
reverse-bias voltage
 more reverse
saturation current.

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9.1 The Schottky Barrier Diode

Comparison of the Schottky Diode and the pn Junction Diode

Two important differences : ① the magnitude of reverse saturation current


② the switching characteristics

: Diffusion of minority carriers


: Thermionic emission of majority carriers over a potential barrier

“ JsT is 2 or 3 orders of magnitude larger than Js “


Comparison of forward bias characteristics

The Schottky diode is a majority carrier device.


 No diffusion capacitance when forward-biased

No stored minority carrier when forward-biased


 no storage time (fast switching is possible)

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9.2 Metal-Semiconductor Ohmic Contacts

Ohmic Contacts : Nonrectifying metal-to-semiconductor contact


Ideal Nonrectifying Barrier

N-type

Forward biased
Before contact At equilibrium after contact for фm < фs

P-type

Reverse biased
At equilibrium after contact for фm > фs
Tunneling Barrier

Contact
Resistance :

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9.3 Heterojunctions

Heterojunction
Two semiconductor materials with different bandgap but nearly matched lattice constants.

nP
Hetero
junction

nN
Hetero
junction 2-D Electron Gas

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Chapter 9 Homework

Review Questions and


Problems :
9.1
9.2
9.6

9장 수업 끝나고 일주일 후 수업시간 시작 전 제출

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